Omron F250-UME Software Manual page 924

Normal Serial Interface
6-2-(74)
Pattern Inspection (Measurement Data)
Data
Measure- 0 Judgement result
ment
-2: Not measured.
data
-1: NG
0: OK
1 Region 0
2
3
4
5
6
7 Region 1
to
379 Region 63
380
381
382
383
384
Details
Judgement result
Correlation
Position X
Position Y
Reference position X
Reference position Y
Judgement result
... (Same as for region 0)
Judgement result
Correlation
Position X
Position Y
Reference position X
Reference position Y
Section 6-2