Omron F250-UME Software Manual page 309

Density Defects
STEP 4: Setting Judgement Conditions
STEP 5: Changing Detection Conditions
Set the conditions for determining defects. Set a value between 0 and 255 as
the OK judgement value for the measurement conditions set in step 1. The
defect value will be higher the clearer the defect. Measure several samples
and set the judgement conditions while referring to the measurement results.
Judgement conditions
Large defect :
128[
Small defect :
128[ 30 ]
Density Max. :
250[255 ]
Density Min. :
180[
End
Measurement result for the displayed image
:
Use as a reference for setting conditions.
1. Select Judgement conditions.
The Judgement Conditions Setting Screen will be displayed.
2. Make the settings.
3. Select End.
The settings will be registered and the screen in (1.) will return.
To shorten measurement processing time, change the conditions for detecting
defects. The greater the element size and comparing pitch, the shorter the
processing time. However, the accuracy of the measurement will decrease.
Once the element size or comparing pitch setting has been changed, perform
measurements to check that they can be performed correctly.
Set the upper limit for an OK judgement.
30 ]
(The lower limit is fixed to 0.)
Example: When judgement value set to 30:
0 ]
Measurement results in the range 0 to 30
will give an OK judgement.
Region0(Defect(Line))
Measurement conditions
Inspected region
Reference registration
Judgement conditions
Detailed conditions
Clear
Large defect :
128[
Small defect :
128[ 30 ]
Density Max. :
250[255 ]
Density Min. : 180[
End
Section 2-14
30 ]
0 ]
2-14-(11)