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Detecting Binary Defects
Measurement Objects with Variable Heights Only
Draw the edge detection region so that the measurement region X coordinates
will remain the same for both the left and right edges. The left and right edges
will always have these edge points.
20,100
Left edge region
20,410
The measurement region will adjust to the upper
and lower edges only before measurement is performed.
3.
Changing Detailed Conditions as Required
Change the detailed conditions when the measurement results are unsta-
ble. Change and set the edge level, noise level, noise width, and offset
width as required. (Normally, these four conditions can be left on the de-
fault settings.) After changing the settings, perform an object measurement
to check that measurement can still be performed correctly.
a)
Select Detailed conditions.
Left edge
Upper edge region
Lower edge region
Measurement conditions
Region
Detailed conditions
Section 2-12
450,100
Right edge region
450,410
2-12-(30)
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