Motion Control
If the mark is on the non-compensation motion axis and when E-Cam phase alignment
compensation is operating, the following mark position is unchanged. If the mark is on the
compensation motion axis and when E-Cam phase alignment compensation is operating, the
following mark position is changed, as shown in Figure 7.3.7.19.
7
(a) Mark on the non-compensation motion axis (P2.076.X Bit 2 = 0)
(b) Mark on the compensation motion axis (P2.076.X Bit 2 = 1)
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Figure 7.3.7.19 E-Cam phase alignment
ASDA-A3