LSM 880
CHAPTER 4
CONTENTS
1
1.1
Software ............................................................................................................................ 2
1.2
Hardware ........................................................................................................................... 4
2
3
3.1
3.1.1
3.2
3.3
3.4
4
5
6
Piezo Focusing Device ......................................................................................... 11
7
8
8.1
8.2
9
9.1
9.2
10
11
10/2014 V_01
CHAPTER 4 - ANNEX
Contents
ANNEX
000000-2071-464
ZEISS
Page
1