Using A Keysight 4284/4980A Lcr Meter; Introduction; C-V Measurement Basics - Keithley 4200A-SCS Reference Manual

In this appendix:

Introduction

This section contains information on using the 4200A-SCS with the Keysight Models 4284A and
4980A.
For details on Keysight Model 4284A operation, refer to the Keysight Model 4284A Operation
Manual. For details on Keysight Model 4980A operation, refer to the Keysight Model 4980A
Operation Manual.

C-V measurement basics

The Keithley Instruments 4200A-SCS can control a Keysight 4284A or 4980A LCR Meter to measure
capacitance versus voltage (C-V) of semiconductor devices. Typically, C-V measurements are
performed on capacitor-like devices, such as a metal-oxide-silicon capacitor (MOS capacitor).
The measurements of MOS capacitors study:
•
The integrity of the gate oxide and semiconductor doping profile
•
The lifetime of semiconductor material
•
The interface quality between the gate oxide and silicon
•
Other dielectric materials used in an integrated circuit
A user-configured voltage sweep allows capacitance measurements that can span the three regions
of a C-V curve: The accumulation region, depletion region, and inversion region.

Using a Keysight 4284/4980A LCR Meter

Introduction .............................................................................. C-1
Using KCon to add a Keysight LCR Meter to the system ........ C-5
Model 4284A or 4980A test example ...................................... C-6
HP4284ulib user library ........................................................... C-8
Appendix C