Cable Compensation Example - Keithley 4200A-SCS Reference Manual

Appendix B: Using a Model 590 C-V Analyzer

Cable compensation example

This example assumes that the 590 is connected directly to the DUT. The DUT could be a device
installed in a test fixture or a MOS capacitor on a wafer.
The user modules for cable compensation must share the same file for capacitance source values.
Therefore, the same file directory path must be used in all three user modules. For this example, use
the default file directory path (see line 1 of the parameter list in the following figures).
Enter and save capacitance source values (save-cap-file)
To enter and save the capacitance source values:
1. Select Configure.
2. In the project tree, select save-cap-file. The default parameters for the user module are
displayed, as shown in the following figure.
Figure 552: save-cap-file action and SaveCableCompCaps590 user module
3. Enter the capacitance source calibration value for each range and frequency. If you are using the
5909, each capacitor has a label indicating the calibration value at 100 kHz and at 1 MHz.
For example, assume the low capacitance source for the 2 pF range is 0.47773 pF (100 kHz) and
0.47786 pF (1 MHz). Enter these values using scientific notation:

Lo2p100k: Enter 0.47773e-12

Lo2p1M: Enter 0.47786e-12
4. In the project tree, select the action.
5. Click Run to execute the action.
B-6
Model 4200A-SCS Parameter Analyzer Reference Manual
4200A-901-01 Rev. C / February 2017