Capacitance Measurement Tests; Connections - Keithley 4200A-SCS Reference Manual

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Appendix B: Using a Model 590 C-V Analyzer

The following figure shows the three regions of a typical C-V curve for a MOS capacitor.

Capacitance measurement tests

The 4200A-SCS provides the following tests to perform C-V tests using the 590:

590 C-V Sweep (590-cvsweep): Makes a capacitance measurement at each step of a user-

configured linear voltage sweep.

590 C-V Pulse Sweep (590-cvpulsesweep): Makes a capacitance measurement at each step of

a user-configured pulsed voltage sweep.

590 C-t Sweep (590-ctsweep): Makes a specified number of capacitance measurements at a

specified time interval. Voltage is held constant for these capacitance measurements.

590 Capacitance Measurements (590-cmeas): Makes capacitance and conductance

measurements at a fixed bias voltage.

There are also user modules available for the 590. Refer to

For additional information about 590 connections, see the Model 590 C-V Analyzer Instruction

Signal connections

Basic signal connections for the 590 are shown in the following figure.

The center conductors of the BNC connectors are connected to the device under test (DUT). The

outer shield of one of the coaxial cables is typically connected to a Faraday shield. The Model 590

output is typically connected to the wafer backside (or well). The input is typically connected to the

gate of a MOS capacitor.

Figure 547: Typical C-V curve for a MOS capacitor

Model 4200A-SCS Parameter Analyzer Reference Manual

KI590ulib user library

4200A-901-01 Rev. C / February 2017

(on page 6-312).