Prbgen User Library - Keithley 4200A-SCS Reference Manual

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Appendix F: Set up a probe station

PRBGEN user library

The PRBGEN user library provides test modules to initialize the prober, move to the next site or subsite

in the wafer map of the prober, make or break contact between the probes and the wafer, and get the

X position and Y position of the prober. It allows Clarius to control all supported probers in the same

manner. Clarius projects that use PRBGEN work with any prober supported by Keithley Instruments.

The user modules in the PRBGEN user library are provided as actions in Clarius.

PRBGEN user modules

(on page F-13)

Figure 628: Clarius: Example of site coordinates: Analyze Sheet

Clarius action

prober-contact

Directs the prober to have the probe pins make contact with the

wafer or separate the pins from the wafer.

Initializes the prober with die size, first coordinate (X and Y),

units (mm or mils), and mode information.

In learn mode, the PrMovNxt command causes the prober to

move to the next site after inking.

prober-ss-move

In learn mode, the PrSSMovNxt command causes the prober to

move to the next subsite after inking.

Model 4200A-SCS Parameter Analyzer Reference Manual

4200A-901-01 Rev. C / February 2017