Using A Micromanipulator 8860 Prober; Micromanipulator 8860 Prober Software - Keithley 4200A-SCS Reference Manual

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Table of Contents

In this appendix:

You need to have the following software programs on the Micromanipulator 8860 to configure and

operate the 8860 prober with the Keithley Instruments 4200A-SCS:

pcBridge: Used to configure the communications setup (icon on the desktop)

pcLaunch: Used to launch various wafer controls and utilities (icon on the desktop)

pcIndie: Used to probe multi-subsites per die (button in pcLaunch window)

pcWafer: Used to probe single subsites per die (button in pcLaunch window)

pcIndie and pcWafer, which are not included with standard prober software, are required. Refer to

the prober manufacturer, Micromanipulator, for availability.

Using a Micromanipulator 8860 Prober

Micromanipulator 8860 prober software .................................. H-1

Probe station configuration ...................................................... H-2

Probesites Clarius project example ....................................... H-17

Probesubsites Clarius project example ................................. H-23

Commands and error symbols .............................................. H-27