Keithley 4200A-SCS Reference Manual page 1205

Appendix D: Using a Model 82 C-V System Model 4200A-SCS Parameter Analyzer Reference Manual
Effective charge concentration
Flatband capacitance
Where λ = extrinsic DeBye length =
N = N at 90% W , or N , or N when input by the user
x MAX A D
Flatband voltage shift
Interface trap capacitance and Interface trap density
Mobile ion charge concentration – TVS method
Mobile ion charge concentration – STVS method
Oxide thickness / gate area
D-64 4200A-901-01 Rev. C / February 2017