Capacitance Measurement Tests - Keithley 4200A-SCS Reference Manual

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Appendix C: Using a Keysight 4284/4980A LCR Meter
The following figure shows the three regions of a typical C-V curve for a MOS capacitor.

Capacitance measurement tests

The 4200A-SCS provides the following user modules to perform C-V tests using the Keysight Models
4284A and 4980A:
CvSweep4284. C-V sweep test: Performs a capacitance and conductance measurement at each
step of a user-configured linear voltage sweep.
Cmeas4284. C measurement: Performs a capacitance and conductance measurement at a fixed
bias voltage.
Details on the user modules for the Keysight Models 4284A and 4980A are provided in the
HP4284ulib User Library Reference
If needed, you can initially do an OPEN and SHORT correction on the 4284A or 4980A to achieve
the most accurate C-V measurements. See the Keysight 4284A or 4980A Operation Manual for
details.
C-2
Figure 570: Typical C-V curve for a MOS capacitor
(on page 6-309).
Model 4200A-SCS Parameter Analyzer Reference Manual
4200A-901-01 Rev. C / February 2017

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