Using A Model 590 C-V Analyzer; Introduction; C-V Measurement Basics - Keithley 4200A-SCS Reference Manual

In this appendix:

Introduction

For details on 590 operation, refer to the Model 590 C-V Analyzer Instruction Manual.

C-V measurement basics

The Keithley Instruments Model 590 C-V Analyzer measures capacitance versus voltage (C-V) and
capacitance versus time (C-t) of semiconductor devices. Typically, C-V measurements are made on
capacitor-like devices, such as a metal-oxide-silicon capacitor (MOS capacitor).
The measurements of MOS capacitors study:
•
The integrity of the gate oxide and semiconductor doping profile
•
The lifetime of semiconductor material
•
The interface quality between the gate oxide and silicon
•
Other dielectric materials used in an integrated circuit
The voltage sweeping capability of the 590 makes it easy to make a series of capacitance
measurements that span the three regions of a C-V curve: the accumulation region, depletion region,
and inversion region.
Introduction ............................................................................... B-1
Using KCon to add 590 C-V Analyzer to system ...................... B-5
Model 590 test examples .......................................................... B-5
KI590ulib user library .............................................................. B-11

Using a Model 590 C-V Analyzer

Appendix B