Constants, Symbols, And Equations Used For Analysis - Keithley 4200A-SCS Reference Manual

Appendix D: Using a Model 82 C-V System

Constants, symbols, and equations used for analysis

In order to perform correct analysis, it may be necessary for you to verify or modify the analysis
constants to suit your particular device. Before making measurements, it is strongly recommended
that you verify that constants are correct to ensure that your analysis is performed correctly.
Default material constants
The following table lists default material constants, values, descriptions, and symbols.
Default material constants
Symbol
q
k
T
εOX
εS
EG
n
W
W
Data symbols
The following table summarizes data symbols in the library, including a description of each symbol.
Data symbols
Symbol
A
C
FB
C
H
C
HADJ
C
Q
C
QADJ
C '
Q
C
MIN
C
OX
D
rr
E
C
E
T
G
N
A
N
D
N
AVG
N
BULK
D-62
Description
Electron charge (coulombs)
Boltzmann's constant (J/°K)
Test temperature (°K)
Permittivity of oxide (F/cm)
Semiconductor permittivity (F/cm)
Semiconductor energy gap (eV)
Intrinsic carrier concentration (I/cm
I
Metal work function (V)
MS
Electron affinity (V)
M
Description
Device gate area.
Flatband capacitance, corresponding to no band bending.
High-frequency capacitance, as measured by the Model 590 at either 100 kHz
or 1 MHz.
The high-frequency capacitance that is adjusted according to gain and offset
values. C is the value that is actually plotted and printed.
HADJ
Quasistatic capacitance as measured by Model 590.
The quasistatic capacitance that is adjusted according to gain and offset
values. C is the value that is actually plotted and printed.
QADJ
Interpolated value of C
Minimum high-frequency capacitance in inversion.
Oxide capacitance, usually set to the maximum C
Density or concentration of interface states.
Energy of conduction band edge (valence band is E
Interface trap energy.
High-frequency conductance, as measured by the Model 590 at either 100 kHz
or 1 MHz.
Bulk doping for p-type (acceptors).
Bulk doping for n-type (donors).
Average doping concentration.
Bulk doping concentration.
Model 4200A-SCS Parameter Analyzer Reference Manual
Default value
1.60218e-019 coulombs
1.38065e-023 J/°K
297.13 °K
3.4e-013 F/cm
1.04e-012 F/cm
1.12 eV
3
) 1.45e010 cm
4.1 V
4.15 V
set to correspond to the quasistatic capacitance at V.
Q
H
-3
in accumulation.
).
V
4200A-901-01 Rev. C / February 2017
Units
2
cm
pF
pF
pF
pF
pF
pF
pF
pF
2
1/cm /eV
eV
eV
S
3
1 / cm
3
1 / cm
3
1 / cm
3
1 / cm