Keithley 4200A-SCS Reference Manual page 1162

Model 4200A-SCS Parameter Analyzer Reference Manual
Formulas for the system82-cvsweep test (simcv project) are shown in
cvsweep test (simcv project)
Formulas for ctsweep test (lifetime project) are shown in
project) (on page D-23)
Formulas for cvsweep test (stvs project) are shown in
page D-23).
The values for constants used in the formulas are in the Constants area in the Formulator. The
constants include:
•
Area, with a value of 0.012 mm
•
eOX, with a value of 3.4e-013 F/cm
•
eS, with a value of 1.04e-012 F/cm
Refer to
formulas.
Formulas for system82-cvsweep test (simcv project)
Formula name
VGS
RS
AR
CC
HOFFSET
QGAIN
QOFFSET
CQADJ
HGAIN
CHADJ
COX
CMIN
TOXNM
INVCSQR
4200A-901-01 Rev. C / February 2017
(on page D-21).
Simultaneous C-V analysis
Description and formula
Gate voltage:
VGS = −VSub
Serial resistance calculated by high frequency CV:
RS = (AT(MAVG(G_OR_R,5)/(WF*MAVG(CHF,5)),MAXPOS(MAVG(CHF,5))))^2/
((1+(AT(MAVG(G_OR_R,5)/(WF*MAVG(CHF,5)),MAXPOS(MAVG(CHF,5))))^2)
*(AT(MAVG(G_OR_R,5),MAXPOS(MAVG(CHF,5)))))
Intermediate parameter for calculation of CC:
AR = G_OR_R-(G_OR_R^2+(WF*CHF)^2)*RS
Corrected high frequency capacitance by compensating serial resistance:
CC = ((G_OR_R^2+(WF*CHF)^2))*CHF/(AR^2+(WF*CHF)^2)
Offset for high frequency capacitance (entered by user):
HOFFSET = 0
Gain for quasistatic capacitance (entered by user):
QGAIN = 1
Offset for quasistatic capacitance (entered by user):
QOFFSET = 0
Adjusted quasistatic capacitance by using QGAIN and QOFFSET:
CQADJ = QGAIN*CQS+QOFFSET
Gain for calculated high frequency capacitance that is calculated:
HGAIN = AT(MAVG(CQS,5)/MAVG(CC,5),MAXPOS(MAVG(CC,5)))
Adjusted high frequency capacitance by using HGAIN and HOFFSET:
CHADJ = HGAIN*CC+HOFFSET
Oxide capacitance:
COX = MAX(MAVG(CHADJ,5))+1E-15
Minimum capacitance from high frequency:
CMIN = MIN(MAVG(CHADJ,5))+1E-15
Calculated thickness of oxide (in nanometers):
TOXNM = 1E7*AREA*EOX/COX
Inversed square of high frequency capacitance:
INVCSQR = 1/(MAVG(CHADJ,5))^2
Formulas for cvsweep test (stvs project)
2
(on page D-47) for details on simultaneous C-V theory and the
Appendix D: Using a Model 82 C-V System
Formulas for system82-
Formulas for ctsweep test (lifetime
(on
D-21