Signal Connections - Keithley 4200A-SCS Reference Manual

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Table of Contents

Model 4200A-SCS Parameter Analyzer Reference Manual

Appendix C: Using a Keysight 4284/4980A LCR Meter

Signal connections

Basic 4-wire signal connections for the Model 4284A or 4980A are shown in the following figure. The

center conductors of the BNC connectors are connected to the device under test (DUT). The outer

shield of one of the coaxial cables is typically connected to a Faraday shield. The Model 4284A or

4980A output is typically connected to the wafer backside (or well). The input is typically connected to

the gate of a MOS capacitor.

Figure 571: Basic Model 4284A and 4980A connections to DUT

Triaxial connections

Adapters are required to connect the Model 4284A or 4980A to equipment (for example, a probe

station, test fixture, or matrix card) that uses triaxial connectors.

Using Switch Matrices

(on page A-1) for details on using a switch matrix with the Model 4284A

or 4980A LCR Meter.

4200A-901-01 Rev. C / February 2017