Keithley 4200A-SCS Reference Manual page 1159

Appendix D: Using a Model 82 C-V System Model 4200A-SCS Parameter Analyzer Reference Manual
C-t sweep
The Model 82 uses the Model 590 to make a specified number of capacitance measurements using a
specified time interval between reading samples. The specified voltage bias is held constant for this
test. Details on simultaneous C-t measurements are provided in C-t measurements (on page D-2).
This example assumes that the Model 82 is connected directly to the DUT. The DUT can be a device
installed in a test fixture or a substrate on a wafer.
To perform a CtSweep:
1. In the project tree, select ctsweep.
2. Select Configure.
3. Modify the test parameters as needed. If you use the parameters shown in the figure below, the
Model 82 makes 100 capacitance measurements.
4. Select Run.
Figure 596: CtSweep82 user module
D-18 4200A-901-01 Rev. C / February 2017