Keithley 4200A-SCS Reference Manual page 1275

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Appendix H: Using a Micromanipulator 8860 Prober

Load the wafer

Load the wafer:

1. Make sure that the vacuum is off.

2. Click the Load wafer button on the Tools panel of the pcNav window. The Load Wafer dialog box

appears. See the following two figures.

3. In the Load Wafer dialog box, click Load.

4. After the chuck moves to the front, place wafer on the chuck aligning the flat or notch in the

proper orientation.

5. Apply vacuum.

6. Click Center.

7. Click Done.

Model 4200A-SCS Parameter Analyzer Reference Manual

Figure 694: Load Wafer button

Figure 695: Load Wafer window

4200A-901-01 Rev. C / February 2017