Keithley 4200A-SCS Reference Manual page 1336

Model 4200A-SCS Parameter Analyzer Reference Manual Appendix K: Using a Signatone CM500 Prober
4. Select Set Point1.
Figure 801: CM500 Prober 2 Point Alignment 3
5. The Wafer stage moves to the other side as set by the scan distance.
6. Click the Arrow buttons on the window to move wafer stage to reference point 2.
7. Select Set Point2.
8. The Prober software rotates the theta motor for the proper alignment.
9. Click Scan Check to verify that the wafer is aligned correctly.
10. Click Fine Align to make a minor alignment.
11. After the wafer is aligned, set the HOME die of the wafer and wafermap.
Set the Home die of the wafer:
1. Move the wafer stage to the actual location that needs to be set as HOME.
2. When completed moving the wafer stage, click the Set Home icon on the toolbar.
Figure 802: CM500 Prober Set Home icon
Set the Home die of the wafermap:
1. To set HOME on the wafermap, click the Edit wafermap icon on the toolbar.
Figure 803: CM500 Prober Editmap function icon
2. Select the Set Home of Map function.
Figure 804: CM500 Prober Edit Map Function window
4200A-901-01 Rev. C / February 2017 K-7