Keithley 4200A-SCS Reference Manual page 1363

Appendix L: Wafer-level reliability testing
exit_mode: Select:
•
0: Specifies that oxide failure is determined by a measured current that exceeds the user
specified failure current (fail_current)
•
1: Uses two criteria to determine oxide failure; the first criteria is the specified failure current
(fail_current); the second criteria is a slope of current measurement that is a factor
(exit_slope_mult) times the previous measured value; see JEDEC document JESD35-A and
Addenda (JESD35-1 and JESD35-2)
Because of noise considerations, the calculated failure current criteria is used only when the
measured current is 10 times the user-specified noise current. For measured currents below this
value, the fail_current is used as the exit criteria.
Notes on output variables
test_status:
•
2: No test errors (exit due to measured current > a factor of the previous measurement).
•
1: No test errors (exit due to measured current slope > a factor of the previous slope).
•
0: No test errors (exit due to measured current > fail_current ONLY).
•
1: Failed pre-stress test.
•
-2: Cumulative charge limit reached.
•
-3: Voltage limit reached.
•
-4: Maximum time limit reached.
•
-5: Masked Catastrophic Failure.
•
-6: Non-Catastrophic Failure.
•
-7: Invalid specified t_step, hold_time, or measure_delay.
Invalid Test Result - Result = 1e21.
L-14
Model 4200A-SCS Parameter Analyzer Reference Manual
4200A-901-01 Rev. C / February 2017