Capacitance Measurement Tests - Keithley 4200A-SCS Reference Manual

Appendix D: Using a Model 82 C-V System

Capacitance measurement tests

The 4200A-SCS provides the following user modules for capacitance testing using the Model 82:
•
CtSweep82: C-t measurements: Performs a specified number of capacitance measurements at
a specified time interval. Voltage is held constant for these capacitance measurements.
•
SIMCVsweep82: Simultaneous C-V sweep test: Performs a simultaneous capacitance vs.
voltage (C-V) sweep.
•
QTsweep82: Quasistatic capacitance and leakage current test: Measures quasistatic
capacitance and leakage current as a function of delay time to determine the equilibrium
condition.
Details on all user modules for the Model 82 are provided in
C-t measurements
A C-t sweep performs a specified number of capacitance measurements at a specified time interval
with voltage held constant. An example of a C-t waveform is shown in the figure below.
When the sweep is started, the device is stressed at a default voltage for a specified period of time.
The test bias is then applied and a specified number of capacitance measurements are performed at
a specific time interval.
The time interval between each reading is the sum of the specified time between samples
(Sample_Time) and the reading rate time (as determined by Reading_Rate) for each
measurement.
See Model 82 projects
Details on all parameters for the test using the CtSweep82 user module are in the
library (on page 6-313).
D-2
(on page D-9) for details on the test to perform C-t measurements.
Model 4200A-SCS Parameter Analyzer Reference Manual
ki82ulib user library
4200A-901-01 Rev. C / February 2017
(on page 6-313).
ki82ulib user