Keithley 4200A-SCS Reference Manual page 1317

Appendix J: Using a Cascade Summit-12000 Prober Model 4200A-SCS Parameter Analyzer Reference Manual
4. Place a wafer on the chuck.
5. From the Nucleus UI toolbar, toggle the vacuum from OFF to ON.
Figure 765: Vacuum control
6. From the Nucleus UI toolbar, turn on the camera screen by clicking the Video button.
Figure 766: Video button
If the LIGHT is off, the video will be blank.
7. From the Nucleus UI toolbar, turn on the light by clicking the Light button.
Figure 767: Light button
8. From the Wafer Map window, click the Reference Die button. The Align dialog box opens. See
the following two figures.
Figure 768: Reference Die button
Figure 769: Move the Reference Die
9. From the Align dialog box, select Move to calculated position.
J-16 4200A-901-01 Rev. C / February 2017