Keithley 4200A-SCS Reference Manual page 1278

Model 4200A-SCS Parameter Analyzer Reference Manual
11. Lower the platen to the point where you see good clean probe marks.
12. Click the Set 2nd Pt button.
13. Click the OVD button in pcNav to ensure that the overdrive will be used. Test the settings by
pressing the UP and DN buttons in pcNav.
14. Click Done.
Align the wafer
To align the wafer:
1. Click the Align Wafer button on the Tools panel of the pcNav window. The Prb8860 Alignment
window opens.
2. Select Ref Axis X in the Prb8860 Alignment dialog box.
3. Select Auto adjust other devices.
4. Move prober chuck to extreme left of the wafer. Look through the microscope and ensure the pins
are over the pads.
5. Click Set Base Pt.
6. Move to a die on the extreme right of the wafer.
7. Use the joystick (low mode) and theta adjustment to align the pins to the same pads as the first
die (both along the same row of die).
8. Click Set 2nd Pt.
9. Repeat this process until the Angle (rad) is as close to zero as possible.
10. When the alignment is complete, click Done.
4200A-901-01 Rev. C / February 2017
Figure 699: Down pushbutton
Figure 700: Align wafer button
Figure 701: Prb8860 Alignment window
Appendix H: Using a Micromanipulator 8860 Prober
H-15