Supported Probers; Prbgen User Modules - Keithley 4200A-SCS Reference Manual

Model 4200A-SCS Parameter Analyzer Reference Manual

Supported probers

Supported probe station
Cascade Microtech Model PA200
Micromanipulator Model 8860
Manual or Fake
Cascade Summit-12000
Signatone CM500
Contact Keithley Instruments for the most up-to-date list of supported probe stations.
Use KCon
prober for details.

PRBGEN user modules

Prober-control software provided by supported prober vendors gives access to the full feature set of
each prober. You use the prober-control software to define a list of wafer locations to be probed. The
4200A-SCS relies on the prober controller and associated software to maintain this probe list. The
PRBGEN user modules communicate with the prober controller, normally through the GPIB bus or
COM1 (serial bus) port, to instruct it to step through the probe list. This technique of prober control is
referred to as learn mode because the prober-control software is taught the physical location of each
probe location. The following table summarizes the user modules included in the PRBGEN prober
control user library.
User module
PrInit
PrChuck
PrSSMovNxt
PrMovNxt
4200A-901-01 Rev. C / February 2017
(on page 7-1) to add the prober to the instrument list. See the information for the specific
Description
Initializes the prober driver and establishes the reference site or die.
Instructs the prober to move the probe station into contact or to break
contact between the wafer and the test system pins (probe needles).
Instructs the prober to move to the next subsite or test element group in
the probe list.
Instructs the prober to move to the next site or die in the probe list.
Additional information
Cascade Microtech PA200 Prober
page G-1)
Micromanipulator 8860 Prober
page H-1)
Using a Manual or Fake Prober
page I-1)
Cascade Summit-12000 Prober
page J-1)
Signatone CM500 Prober (on page K-
1)
Appendix F: Set up a probe station
(on
(on
(on
(on
F-3