Keithley 4200A-SCS Reference Manual page 1279

Appendix H: Using a Micromanipulator 8860 Prober
Set the units and die size
To set the units and die size:
1. Set Units to either microns or mils from the Prb8860 window (lower left corner) of pcNav.
2. Click Set X, Y die size button in the lower middle of the Prb8860 window. The Set X, Y Die Size
dialog box opens. If die size is known, enter it. If not known, calculate. See
(on page H-16) for more information.
Calculate die sizes
To calculate die sizes:
1. Place pins over pads in upper left corner of wafer (although the upper left corner die is used in
this example, any die may be selected as a base point).
2. Click Set Base Pt.
3. Move over and down a known number of dies. Enter these values into Column moved (columns)
and Row moved (rows).
4. Click the Set 2nd Pt button.
5. Check the Copy Die Size to Index button.
6. Click the Calculate Die Size button.
This determines the accurate die size.
7. To complete, click Done (the grayed-out button will turn active after the calculation is completed).
H-16
Figure 702: Unit of measure list
Figure 703: Set X, Y die size button
Figure 704: 4200-901_Set X, Y Die Size dialog box
Model 4200A-SCS Parameter Analyzer Reference Manual
4200A-901-01 Rev. C / February 2017
Calculating die sizes