Keithley 4200A-SCS Reference Manual page 1318

Model 4200A-SCS Parameter Analyzer Reference Manual
10. Click OK.
11. Manually move the wafer to the reference die.
12. Click Yes to set the reference die to the present position. When choosing the reference die:

The wafer should be on the chuck and physically in the correct reference position.

Click the die on the wafer map UI that will be the reference die.

An R appears when a die has been selected as the home die.
13. From the Nucleus UI toolbar, click the Hard Align button to display the Hard Align dialog box.
4200A-901-01 Rev. C / February 2017
Appendix J: Using a Cascade Summit-12000 Prober
Figure 770: Align dialog
Figure 771: Hard Align button
Figure 772: Hard Align tab
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