Tutorial: Control A Probe Station - Keithley 4200A-SCS Reference Manual

Model 4200A-SCS Parameter Analyzer Reference Manual

Tutorial: Control a probe station

This tutorial demonstrates how to control a probe station to test five identical sites (or die or reticles)
on a sample wafer.
Each wafer site has two subsites (or test element groups). At each subsite there are two devices (or
test elements) to be tested:
•
4-terminal N-channel MOSFET
•
3-terminal NPN transistor
The subsites do not need to be identical, but for simplicity they are assumed to be the same. This is
illustrated in the following figure.
4200A-901-01 Rev. C / February 2017
Figure 629: Sample wafer organization
Appendix F: Set up a probe station
F-15