J-Ramp Test: Qbd_Rmpj User Module - Keithley 4200A-SCS Reference Manual

Appendix L: Wafer-level reliability testing

J-ramp test: qbd_rmpj User Module

The J-ramp test uses the qbd_rmpj user module of the wlrlib user library.
Usage
status = qbd_rmpj(int hi_pin, int lo_pin1, int lo_pin2, int lo_pin3, char *HiSMUId,
char *LoSMUId1, char *LoSMUId2, char *LoSMUId3, double v_use, double I_init,
double I_start, double F, int t_step, double exit_volt_mult, double I_max,
double q_max, double area, double *V_stress, int V_size, double *I_stress, int
I_size, double *T_stress, int T_size, double *q_stress, int q_size, double
*Q_bd, double *q_bd, double *v_bd, double *I_bd, double *t_bd, int
*failure_mode, int *test_status);
Input variables
status
hi_pin
lo_pin1
lo_pin2
lo_pin3
HiSMUId
LoSMUId1
LoSMUId2
LoSMUId3
v_use
I_init
I_start
F
t_step
exit_volt_mult
I_max
q_max
area
V_size
I_size
T_size
q_size
L-16
Returned values are placed in the Analyze sheet
High pin (usually the gate pin) (-1 to 72); enter -1 to not connect
Usually for source drain and substrate connection; depending on device structure,
some of those pins are optional; enter -1 to not connect
ID string of the SMU outputting the stress
ID string of the SMU connected to ground terminal; these three IDs can be same
Oxide voltage (V) under normal operating conditions; typically the power supply
voltage of the process; this voltage is used to measure pre- and post-voltage ramp
oxide current (Ref. JESD35-A)
Oxide breakdown failure current when biased at v_use; typical value is 10 μA/cm
and may change depending on oxide area; see Details
Starting current (A) for current ramp; typical value is I_init (Ref. JESD35-A)
Current multiplier between two successive current steps (Ref. JESD35-A)
Current ramp step time (s) (Ref. JESD35-A)
Multiplier factor of successive voltage measurements; when the next measured
voltage is below this factor multiplying the previous measured voltage, oxide is
considered to be at breakdown and the test will exit; typical value 0.85
Maximum ramp current (A) (Ref. JESD35-A)
Maximum accumulated oxide charge per oxide area; used to terminate a test where
breakdown occurs but was not detected during the test (C/cm
2
Area of oxide structure (cm
Size of data array; maximum 65535
Size of data array; maximum 65535
Size of data array; maximum 65535
Size of data array; maximum 65535
Model 4200A-SCS Parameter Analyzer Reference Manual
)
4200A-901-01 Rev. C / February 2017
2
2
) (Ref. JESD35-A)