Keithley 4200A-SCS Reference Manual page 1315

Appendix J: Using a Cascade Summit-12000 Prober Model 4200A-SCS Parameter Analyzer Reference Manual
4. From the wafer Map Window, select File > Open.
Figure 759: Wafer Map window
5. Open the wafer map file.
Figure 760: Open a wafer map file window
J-14 4200A-901-01 Rev. C / February 2017