Keithley 4200A-SCS Reference Manual page 1250

Model 4200A-SCS Parameter Analyzer Reference Manual
2. Place the wafer on the chuck.
3. From the Chuck menu, select Turn Vacuum ON.
4. Manually move the wafer to the Home Die.
5. From the Setup menu, select Home Die.
6. Choose the home die on the WaferMap. When choosing the home die:

The wafer should be on the chuck and physically in the correct HOME position.

Click the die on the wafer map UI that will be the home die.
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A cross-hair appears when a die has been selected as the home die.
7. From the Chuck menu, select Align Theta.
8. Align wafer using the following steps.
4200A-901-01 Rev. C / February 2017
Appendix G: Using a Cascade Microtech PA200 Prober
Figure 651: Setup menu
Figure 652: WaferMap home die selection
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