Verify Wafer Alignment - Keithley 4200A-SCS Reference Manual

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Model 4200A-SCS Parameter Analyzer Reference Manual

Appendix G: Using a Cascade Microtech PA200 Prober

5. Manually align pins and pads (POINT 2) and select Finish.

Figure 654: Aligning the wafer: Point 2

Verify wafer alignment

Confirm that the alignment is correct (the alignment procedure is repeated). To check, manually use

the joystick to move the chuck in index moves and confirm that the pins and pads are aligned.

Figure 655: Verify wafer alignment

4200A-901-01 Rev. C / February 2017