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Keithley 4200A-SCS User Manual

Keithley 4200A-SCS User Manual

Pulse card
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Model 4200A-SCS
Pulse Card (PGU and PMU)
User's Manual
4200A-PMU-900-01 Rev. A December 2020
*P4200A-PMU-900-01A*
4200A-PMU-900-01A

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Summary of Contents for Keithley 4200A-SCS

  • Page 1 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual 4200A-PMU-900-01 Rev. A December 2020 *P4200A-PMU-900-01A* 4200A-PMU-900-01A...
  • Page 2 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual...
  • Page 3 Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part, without the prior written approval of Keithley Instruments is strictly prohibited. All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments, LLC. Other brand names are trademarks or registered trademarks of their respective holders.
  • Page 4 Keithley products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages.
  • Page 5 (note that selected parts should be purchased only through Keithley to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley office for information.

  • Page 6: Table Of Contents

    Table of contents Introduction ......................1-1 Models 4220-PGU and 4225-PMU ..................1-1 Connections ......................2-1 Introduction .......................... 2-1 Connection guidelines ......................2-1 PMU common connections ....................... 2-2 Shield connections ........................2-2 Cable length ..........................2-3 High frequency connections ...................... 2-3 Prober chuck connections ......................
  • Page 7 Table of contents Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Configure the PGU, PMU, and RPM using tests ..............3-1 Create a PMU project ......................3-2 Configure the tests ....................... 3-2 PMU operation modes ......................3-4 PMU - all terminal parameters ..................... 3-6 Start (PMU Amplitude Sweep) ....................
  • Page 8 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Table of contents 4220-PGU and 4225-PMU output limitations ..............3-39 Configure the PGU, PMU, and RPM using tests ............... 3-39 Step or sweep multiple device terminals in the same test ..........3-40 Basic troubleshooting procedure ..................
  • Page 9 Table of contents Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Use the RPM to switch the SMU, CVU, and PMU ........... 6-1 Introduction .......................... 6-1 Equipment required ......................6-1 Update the RPM configuration in KCon ................6-2 Device connections ......................6-3 Connection schematic .......................

  • Page 10: Introduction

    LPT functions that pertain to the PGU and PMU are documented in “LPT commands for PGUs and PMUs” in Model 4200A-SCS LPT Library Programming. To do quick tests with minimal interaction with other 4200A-SCS test resources, you can use the Keithley Pulse Application (KPulse). KPulse is a non-programming alternative that you can use to configure and control the installed Keithley pulse cards.
  • Page 11 Section 1: Introduction Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 1: Simplified circuits of the PGU and PMU 4200A-PMU-900-01 Rev. A December 2020...

  • Page 12: Connections

    RPM. The guidelines in this chapter help prevent pulse voltage overshoot and oscillations. You can use the Multi-measurement Prober Cable Kits (4210-MMPC) to connect the 4200A-SCS to perform pulse I-V measurements. These kits help maximize signal fidelity by eliminating the measurement errors that often result from cabling errors.

  • Page 13: Pmu Common Connections

    Section 2: Connections Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual PMU common connections Common LO for the PMU is the outer shells of the two SMA connectors. With an SMA cable connected (see following figure), common LO is the outside shield of the cable.

  • Page 14: Cable Length

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 2: Connections Cable length Use the shortest possible cable length to achieve the highest frequency output, the best pulse shape, and the best results. Here are reasons to avoid using longer cable lengths: •...

  • Page 15: Pgu And Pmu Connectors

    The following figure shows the modes for the RPM LED colors. Note that the RPM LED shows the mode of the RPM, but not the output status. The output status of the 4200A-SCS is indicated by the Operate light on the front of the 4200A-SCS chassis. During normal Clarius operation, only the red, green, or blue lights are shown.
  • Page 16 The internal wiring diagram of the RPM is shown in the following figure. Signals from the 4200A-SCS instrument cards are routed through the RPM to the output Force and Sense connectors. Switching is used to control which card is connected to the output. See...

  • Page 17: Connecting The Rpm To The Pmu

    Section 2: Connections Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 5: Wiring diagram of the RPM Connecting the RPM to the PMU Turn off the system and disconnect the power cord before connecting or disconnecting the RPM to or from the PMU. Failure to do so may result in RPM or PMU damage, possibly voiding the warranty.

  • Page 18: Rpm Diagrams For Local And Remote Sensing

    Figure 6: PMU connection to the RPM After connecting or removing an RPM, always perform the “Update the RPM configuration” in Model 4200A-SCS Setup and Maintenance procedure to ensure that KCon accurately represents the present 4200A-SCS hardware configuration. RPM diagrams for local and remote sensing The following figure shows the diagram for local sensing.

  • Page 19: Using The Rpm As A Switch

    Section 2: Connections Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual The following figure shows the diagram for remote sensing. Both Sense and Force are connected to DUT HI. Figure 8: Diagram for remote sensing Using the RPM as a switch You can use the RPM to switch a PMU, CVU, or SMU to a DUT terminal.

  • Page 20: Two-Terminal Device Connections

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 2: Connections Control RPM switching Before using an RPM, configure the 4200A-SCS by doing the steps in “Update the RPM configuration” in Model 4200A-SCS Setup and Maintenance. This properly associates the instruments connected to each RPM.
  • Page 21 Section 2: Connections Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual You can also connect a two-terminal device to the two channels of a PMU, as shown in the following figure. In this case, channel 1 will source/pulse voltage, and channel 2 will measure the resulting current.

  • Page 22: Three-Terminal Device Connections

    Figure 12: Three-terminal device connections to a PMU using both channels If ultra-fast I-V sourcing and measuring is required at each device terminal, then a second PMU is required for the source terminal. Up to four PMUs (eight channels) can be installed in one 4200A-SCS mainframe.

  • Page 23: Four-Terminal Device Connections

    Section 2: Connections Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Four-terminal device connections To test a four-terminal device, two PMUs are usually required. The following figure shows the four PMU channels connected to a four-terminal MOSFET. This configuration enables you to have complete flexibility to enable pulsing and measuring at any terminal on the device.

  • Page 24: Pulse Source-Measure Connections

    To achieve optimum performance, only use the cables, connectors, and adapters that are included with Keithley Instruments pulse source or measure kits. For the pulse source-measure configurations, ensure the 4200A-SCS high voltage is disabled. This will prevent a safety hazard that could result in possible injury or death because of SMU voltages greater than 42 V being applied to the device under test or fixture.

  • Page 25: Using An Adapter Cable To Connect Pulse Card To Dut

    The needle holders shown in the previous figure are supplied by the user. Connections to prober or test fixture bulkhead connectors The 4200-PMU-Prober-Kit (available from Keithley Instruments) is a collection of standard and custom connectors and accessories used to connect the pulse generator to a common variety of probe stations.

  • Page 26: Rpm Connections To Dut

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 2: Connections Figure 16: Pulse card connections to triaxial prober or test fixture A. White SMA cable (2 m/6.5 ft, included with the PGU and PMU) B. SMA female-to-BNC male (included with the 4200-Prober-Kit) C.

  • Page 27: Rpm Connections To A Prober

    When using two RPMs for four-terminal testing, two Y-cable assemblies are required. Make sure to connect the two local grounds of the two cable assemblies together (see following figure). RPM connections to a prober Optional prober cable kits are available from Keithley Instruments. These kits provide connections to a DUT: •...
  • Page 28 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 2: Connections For details on using these prober cable kits, refer to PA-1000 for the Suss prober, PA-1001 for the Cascade prober, PA-1080 for the Lucas Signatone prober, and PA-1085 for the Wentworth prober.

  • Page 29: Pmu Connection Compensation

    For UTMs, the default connection compensation values for short can only be enabled using the pulse_conncomp function, which is described in Model 4200A-SCS LPT Library Programming. You can perform short compensation to remove measurement errors due to stray resistance in your test configuration.

  • Page 30: Offset Current Compensation

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 2: Connections Offset current compensation Error currents can be introduced into your pulsed measurements setup by PMUs. PMU offset compensation reduces error currents by subtracting measurements taken at 0 V from all subsequent readings.

  • Page 31: Enabling Connection Compensation

    Enabling connection compensation This procedure is for ITMs. For UTMs, you need to enable connection compensation data using the pulse_conncomp or setmode functions. Refer to Model 4200A-SCS Parameter Analyzer LPT Library Programming for more information. To apply the connection compensation data to DUT measurements, you must enable connection compensation for the test.

  • Page 32: Load-Line Effect Compensation (Llec) For The Pmu

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 2: Connections To enable connection compensation: 1. Select the test. 2. Select Configure. 3. Select the terminal to be compensated. 4. In the right pane, select Terminal Settings. 5. Select Advanced. The PMU Advanced Terminal Settings dialog box is displayed.

  • Page 33: Methods To Compensate For Load-Line Effect

    5 V pulse, the pulse card sources a 10 V pulse. Five volts will drop across the internal 50 Ω pulse card resistance and 5 V will appear at the 50 Ω DUT. Descriptions of the LPT functions discussed in the following topics are provided in Model 4200A-SCS LPT Library Programming.
  • Page 34 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 2: Connections The algorithm used for LLEC is shown in the following figure. The diagram shows that the PMU standard pulse source (with measure) uses a burst-measure-analyze-reburst method. This method allows for range changing, threshold comparison, load-line effect compensation, and pulse timing.

  • Page 35: Coping With The Load-Line Effect

    Section 2: Connections Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Note that after the first action, "Output Pulse Burst," all pulse channels in the test stop pulsing and output 0 V while performing the actions in the remaining boxes in the diagram. The time between pulses is determined by the time required to process the measurements and perform the calculations and comparisons shown in the previous figure.

  • Page 36: Llec Maintains Even Voltage Spacing

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 2: Connections LLEC maintains even voltage spacing Another advantage of using LLEC is that it maintains even voltage spacing during the test. For example, if the pulse sweep uses 250 mV steps, DUT voltage and current measurements will be performed at every 250 mV step.

  • Page 37: Test Considerations

    Section 2: Connections Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Test considerations The magnitude of the pulse steps affects overall test time. Wider pulses, a higher number of pulses, and larger voltage steps at each sweep point, all increase the amount of time required for the LLEC algorithm at each sweep point, which lengthens the overall test time.

  • Page 38: Enable Llec

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 2: Connections Enable LLEC This option is available for ITMs. To enable LLEC: 1. Select the pulse test. 2. Select Configure. 3. In the right pane, select Terminal Settings. 4. Select Advanced.

  • Page 39: Disable Llec And Set The Output Impedance

    Section 2: Connections Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Disable LLEC and set the output impedance These options are available for ITMs. With LLEC disabled, you can input the known resistance of the DUT. The resistance value is then used in a compensation process to output the voltage.

  • Page 40: Setting Up Pmus And Pgus In Clarius

    This section provides basic information on creating a PMU project in Clarius and specific information on the options available for PMUs and PGUs. For additional detail on working with Clarius, refer to the Model 4200A-SCS Clarius User's Manual. Configure the PGU, PMU, and RPM using tests To configure and control the PGU, a user test module (UTM) is needed.

  • Page 41: Create A Pmu Project

    Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Create a PMU project To create a new project: 1. Select Save to save your existing project. 2. Choose Select. 3. Select the Projects tab.
  • Page 42 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius 2. From the Key Parameters pane, adjust the pulse voltage sweep levels of PMU1-2 on the Drain terminal and the Pulse Step Voltage of PMU1-1 on the Gate terminal, as needed.

  • Page 43: Pmu Operation Modes

    Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual 4. From the Terminal Settings pane and Advanced Terminal Settings dialog box, you can adjust the voltage source and current measurement parameters, as needed.
  • Page 44 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius Figure 31: Pulse operation modes Figure 32: Pulse train When DC Bias operation mode is selected, the PMU outputs the dc base voltage. The following figure shows a representation of a dc voltage waveform.

  • Page 45: Pmu - All Terminal Parameters

    Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 33: DC Bias waveform The terminal settings available for each operation mode are described in the following topics. PMU - all terminal parameters When you select All Parameters, the Configure pane displays all available parameters for the test that is selected in the project tree.

  • Page 46: Points

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius For example, if Start = 0 V, Stop = 5 V, and Step = 0.6 V: In this case, the Step value is forced to 0.625 V, which results in a point value of 9.333, which is rounded to 9.

  • Page 47: Force Range (Pmu)

    Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Force Range (PMU) The range that is used when sourcing. Select one of the listed ranges. The source remains on the range that is set. If you are sweeping and a sweep point exceeds the source range capability, the source outputs the maximum level for that range.

  • Page 48: Measure Current Range (Pmu)

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius Measure Current Range (PMU) The measure range determines the full-scale measurement span that is applied to the signal. Therefore, it affects both the accuracy of the measurements and the maximum signal that can be measured.

  • Page 49: Low Range

    Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Low Range Available when the Measure Range is set to Limited Auto. This sets the minimum range that the instrument uses. Current Sample Waveform Makes current measurements on the waveform.

  • Page 50: Report Status (Pmu)

    Figure 39: Report Status for PMU in the Analyze sheet For PMU measurements, this information is also available as a 32-bit word. The status code bit map is listed in pulse_fetch in Model 4200A-SCS LPT Library Programming. PMU measurement status ITMs can provide status information for the 4225-PMU measurements in the Analyze sheet Run tab.
  • Page 51 Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 40: Status tab showing faults Placing the cursor on a flagged PMU1_1_S cell will open a window that summarizes the fault.
  • Page 52 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius Status codes Each measurement includes an 8-digit status code. Assign the following letters to the code and use the following table to determine status:...

  • Page 53: Compensation Short Connection

    Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Voltage measure overflow and current 0 = No overflow measure overflow 1 = Negative voltage overflow 2 = Positive voltage overflow 4 = Negative current overflow...

  • Page 54: Max Voltage Estimator

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius Max Voltage Estimator The Maximum Voltage Estimator is a tool that enables you to calculate the maximum voltage and current based on the selected voltage range and the DUT resistance value you type in. The estimator does not affect the pulse output.

  • Page 55: Pmu Test Settings

    Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual PMU Test Settings The settings that are available for PMU tests are described in the following topics. Test Mode (PMU) The Test Mode selects the type of pulse test. You can select: •...

  • Page 56: Measure Mode

    I-V test mode or the pre-and post-data settings for the waveform measurements. For ITMs, the measure window and pre-data and post-data settings are fixed. Function descriptions are provided in Model 4200A-SCS LPT Library Programming. Measure Mode For Measure Mode, you can select Average Pulses or Discrete Pulses.
  • Page 57 Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Pulse I-V (Average pulses) measurement example For the example shown in the following figure, the mean of three pulses are averaged into a single reading (also called a spot mean).

  • Page 58: Number Of Pulses

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius Waveform Capture (Discrete Pulses) measurement example For the example shown in the following figure, the samples of three pulses are captured. The 51 samples (17 samples x 3 pulses) are placed in the Analyze sheet.

  • Page 59: Period

    Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual • Period: The pulse period steps or sweeps from a short period to a long period (or from a long period to a short period).

  • Page 60: Rise Time

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius The dashed line pulse in the following figure shows how increased transition time can affect the rising edge and falling edge of the pulse. The shaded areas of the pulse show the changes in the slopes.

  • Page 61: Settling Times

    Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Settling Times The settling time is the time that it takes for pulse levels to stabilize after the voltage or current is changed, such as during execution of a sweep.

  • Page 62: Sweep Master

    Opens the Formulator. The Formulator allows you to make data calculations on test data and on the results of other Formulator calculations. Refer to “Formulator” in the Model 4200A-SCS Clarius User Manual for detail on using the Formulator. 4200A-PMU-900-01 Rev. A December 2020...

  • Page 63: Pmu Pulse Timing Preview

    Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual PMU pulse timing preview Before executing an ITM test, you can preview a waveform generated using the settings. This can help you understand the behaviors of the various test settings without applying signals to the test device.

  • Page 64: Pmu Amplitude Sweep Example (One-Channel)

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius To open the PMU Advanced Test Settings dialog box, select Test Settings, then Advanced (see following figure). Figure 54: Timing button (PDU Definition tab) Review the following examples to understand the Pulse Timing Preview feature.
  • Page 65 Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual The following figure illustrates the configuration of a six-step pulse amplitude sweep. In this sweep, the PMU Advanced Settings dialog box (see previous figure) defines the test parameters.

  • Page 66: Pmu Amplitude Sweep And Step Example (Two-Channel)

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius Select Preview Test to animate the waveform. The cursor moves from left to right on the bottom graph while displaying the point waveform of each sweep within the cursor on the top graph.
  • Page 67 Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 57: PMU Timing Preview, two channels Changing the number of pulses to three (instead of one) and only displaying one channel (PMU1-1, instead of Show All), changes the preview of the waveform (see the following figure).
  • Page 68 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius Figure 58: Two-channel test (stepping and sweeping) with three points (only PMU1-1 displayed) Configuring the preview to all channels displays both the sweeper and stepper for the three-pulse test (see following figure).

  • Page 69: Higher Channel Count Test Example

    Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 59: Two-channel test with three points (PMU1-1 and PMU1-2 displayed) Higher channel count test example This example shows how the Pulse Timing Preview is useful for higher channel count tests. The following figure shows a four-channel test, reflecting the operation mode and voltages given in the following table.
  • Page 70 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius Operation mode and voltages for the four channels PMU1-1 PMU1-2 PMU2-1 PMU2-2 Pulse amplitude Pulse amplitude Operation mode step sweep Pulse voltage train...
  • Page 71 Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 61: Zooming (Expanded View graph) Scrolling the magnified area To move the viewable area of the graph after you zoom in on a graph, hold down Shift while dragging the mouse.
  • Page 72 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius Select Shift + click and move or scroll a magnified graph by moving the mouse. Figure 62: Scroll (or move) a magnified entire test graph Errors If either graph is not updating as expected, select Refresh to zoom out and redraw both graphs.

  • Page 73: Pulse Parameter Definitions

    Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Pulse parameter definitions For more information regarding the individual pulse parameters, refer to PMU - all parameters page 3-6). PMU minimum settling times versus current measure range The PMU and RPM current measure ranges require time to reach a settled value.

  • Page 74: Pmu Capacitive Charging/Discharging Effects

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius Figure 64: 4225-RPM current signal settling time PMU capacitive charging/discharging effects During pulse transitions, the measured current charges and discharges the capacitance in the system (see following figure, red waveform).
  • Page 75 Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual The setup used to generate these waveforms is shown in the previous figure, and also shows the capacitance and the charging effect (red arrows) seen during pulse transitions. This setup shows a single channel of a PMU, with the supplied 2 m (6.5 ft) white SMA cable connected to the channel...
  • Page 76 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius Figure 66: Low-side measurement waveforms The previous figure shows the current waveforms for both PMU channel 1 (high side) and channel 2 (low side) current measurements.

  • Page 77: Pmu And Rpm Measure Ranges Are Not Source Ranges

    Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual PMU and RPM measure ranges are not source ranges Unlike a source-measure unit (SMU), the PMU and RPM current measure ranges are measure ranges only, not source and measure ranges.

  • Page 78: 4220-Pgu And 4225-Pmu Output Limitations

    (on page 4-15)), the pulse instrument cards also have a limit for the number of large amplitude pulse transitions within a period of time. The 4200A-SCS system enforces limits on the quantity and amplitude of waveforms that the 4220-PGU and 4225-PMU may generate.

  • Page 79: Step Or Sweep Multiple Device Terminals In The Same Test

    Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual An ITM automatically controls the RPM based on the type of test (pulse, CV, SMU). RPM switching can only be controlled using the rpm_config LPT function in a UTM. Refer to...
  • Page 80 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius Figure 70: Master and subordinate sweeps 4200A-PMU-900-01 Rev. A December 2020 3-41...
  • Page 81 Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 71: Master list sweeps versus subordinate list sweeps If you do not specify an instrument to be the master, the first instrument that was assigned to the step or sweep operation mode is assigned to be the master.

  • Page 82: Basic Troubleshooting Procedure

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius You can have a dual sweep on a subordinate terminal even if the master is not set to dual sweep. In this case, the dual sweep of the subordinate terminal has a total number of steps equal to the number of steps in the master terminal.

  • Page 83: Step 2. Verify The Pulse Shape

    Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Step 2. Verify the pulse shape To check that the pulse shape provides a flat, settled portion near the end of the pulse top: 1.

  • Page 84: Step 3. Is The Pulse Level Correct For Each Channel

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius Step 3. Is the pulse level correct for each channel? 1. If the pulse level is not correct for each channel, enable load-line effect compensation (LLEC). To compensate for the IR drop effect, the LLEC algorithm applies multiple pulses at each sweep step;...
  • Page 85 Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 72: PMU IV sweep All Parameters thresholds 4. Enter the maximum power for the test device. An example of a transistor test with LLEC disabled with a power threshold of 3 W and a voltage threshold of 12 V is shown in the "Vd-Id family of...
  • Page 86 In this case, the PMU is at its limit and cannot source any more voltage or current to this particular resistance. See the 4200A-SCS Parameter Analyzer Datasheet for more information on the PMU maximum source power versus device resistance. You can access the datasheet from the Learning Center.
  • Page 87 Section 3: Setting up PMUs and PGUs in Clarius Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 76: Vd-Id family of curves with LLEC disabled For user test modules (UTMs), although the process described above applies, there are a few differences.
  • Page 88 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 3: Setting up PMUs and PGUs in Clarius Figure 77: PMU IV sweep Help pane description This user module allows for an optional SMU to dc bias a transistor bulk while performing a pulse I-V sweep with a 4225-PMU and optional 4225-RPM.
  • Page 89 LPT-command error codes. Refer to “LPT Library Status and Error codes” in Model 4200A-SCS LPT Library Programming. One-digit, four-digit, or five-digit error numbers are most likely from the user module, so refer to the user module description for information about these type of errors.

  • Page 90: Pulse Card Concepts

    LPT functions that pertain to the PGU and PMU are documented in “LPT commands for PGUs and PMUs” in Model 4200A-SCS LPT Library Programming. To do quick tests with minimal interaction with other 4200A-SCS test resources, you can use the Keithley Pulse Application (KPulse). KPulse is a non-programming alternative that you can use to configure and control the installed Keithley pulse cards.

  • Page 91: Pmu Block Diagram

    Section 4: Pulse card concepts Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 79: Simplified circuits of the PGU and PMU PMU block diagram The following figure shows the block diagram of the PMU. Each channel has two dedicated A/D converters to simultaneously measure current and voltage.

  • Page 92: Pulse Modes

    KPulse supports all of these pulse modes. Descriptions of the LPT functions are provided in Model 4200A-SCS LPT Library Programming. Pulse measurement types (PMU) The following table summarizes pulse measurement types that are available through LPT commands for the 4225-PMU.

  • Page 93: Measure Modes

    Section 4: Pulse card concepts Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Measure modes The measure modes for the PMU are discrete pulses and average pulses.. Discrete pulses For pulse I-V (spot mean), the averaged voltage or current readings for every sampled pulse period are acquired.

  • Page 94: 4200A-Scs Power Supply Limitations

    There are two parts to the total power supply draw. The first part is the power required for the instruments while the 4200A-SCS is idle (on, but not testing). The second part is the power required by the instruments taking part in the test. Note that medium power SMUs (4200-SMUs and 4201-SMUs), 4200 preamplifiers (4200-PAs), and 4210-CVU and 4215-CVU modules are not included in the equations, as their power draw is not significant.
  • Page 95 Section 4: Pulse card concepts Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Example 1: 4200A-SCS with two 4210-SMUs or 4211-SMUs, four 4225-PMUs, and eight 4225-RPMs. The test uses all eight PMU+RPM channels set to the 10 V range (no SMUs in test).

  • Page 96: Pulse Source-Measure Concepts

    AC signal during reliability cycling or in a multi-level waveform mode to program or erase memory devices. The 4225-PMU Ultra-Fast I-V Module for the 4200A-SCS supports many of these high-speed sourcing and measurement applications.

  • Page 97: Ultra-Fast I-V Tests

    Section 4: Pulse card concepts Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Ultra-fast I-V tests You can use the 4225-PMU to do these types of ultra-fast I-V tests: • Pulsed I-V • Transient I-V • Pulsed sourcing The modes are illustrated in the following figure.

  • Page 98: Sample Rate

    Segment Arb function, or outputting an arbitrarily defined waveform using the arbitrary waveform generator in the KPulse software, which is included with the 4200A-SCS. The Segment Arb feature allows you to create waveforms from segments defined with separate voltages and time durations.

  • Page 99: Segment Arb Waveform

    Section 4: Pulse card concepts Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Segment Arb waveform ® Each channel of a pulse card can be configured to output its own unique Segment Arb waveform. A Segment Arb waveform is composed of user-defined line segments, up to 2048 for the 4220-PGU and 4225-PMU.
  • Page 100 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 4: Pulse card concepts High-endurance output relay (HEOR): Each output channel of a pulse card has a high-speed, solid-state output relay. When this relay is closed, the waveform segment is output. When opened, the channel output is electrically isolated (floating) from the DUT.
  • Page 101 Section 4: Pulse card concepts Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual A definition showing two sequences with looping is illustrated in the following figure. Figure 85: Definition showing two sequences with looping The graph of the measurement of a two-sequence Segment Arb with looping, from UTM pmu-segarb-complete in the pmu-dut-examples project, is shown in the following figure.

  • Page 102: Full Arb Waveform

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 4: Pulse card concepts Pulse modes: Source, Segment Arb LPT function: seg_arb_define This function is used to define a Segment Arb waveform. This function includes parameters to specify the number of segments (nSegments) and arrays for start (startvals), stop (stopvals), and time values (timevals).

  • Page 103: Pulse Waveforms For Nonvolatile Memory Testing

    Figure 87: Full arb waveform example KPulse full arb waveforms The Keithley Pulse tool (KPulse) is a software application used to control the optional pulse generator cards. KPulse can be used to create, save, and output full arb waveforms. It also provides a collection of basic full arb waveform types such as sine, square, triangle, noise, Gaussian, and calculation.

  • Page 104: Waveform Capture

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 4: Pulse card concepts The DUT resistance determines pulse voltage across DUT: • The gate of a flash or NVM device has high impedance. • The voltage at the gate is double of the programmed voltage.
  • Page 105 Section 4: Pulse card concepts Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 88: Schematic of pulse channel and connected DUT As shown in the figure, the voltage across the DUT, V , is directly related to the resistance R The discussion here is simplified, including resistive impedances only.
  • Page 106 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 4: Pulse card concepts Note that the internal voltage, V , is 2 times the requested 5 V, so that V = 5 V. The 2 times multiplier is the default case, where: = Pulse Load = 50 Ω...
  • Page 107 Section 4: Pulse card concepts Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Example 3: Low resistance DUT A low resistance DUT is shown in the following figure. 5 Ω Pulse V HIGH Pulse V 50 Ω Pulse load Figure 91: 5 V pulse into a 5 Ω...
  • Page 108 V pulse_vhigh, has the correct levels. For details, see Coping with the load-line effect (on page 2-24). For descriptions of the LPT functions, refer to Model 4200A-SCS LPT Library Programming. 4200A-PMU-900-01 Rev. A December 2020 4-19...

  • Page 109: Triggering

    10 k 9.950 0.000995 * Approximate value; does not account for interconnect losses. Available I and V for the high voltage (20 V) range of the Keithley pulse card Maximum I and V versus resistance Test device resistance (Ω) Voltage (V)* Current (A)* 0.784...
  • Page 110 (UTM) that uses the command set described in “Pulse source only (PG2) commands” in Model 4200A-SCS LPT Library Programming. This allows an external trigger (LPT command pulse_trig_source) to output a 2-level pulse (LPT commands pulse_vhigh and pulse_vlow) or seg-arb (LPT command seg_arb_define).
  • Page 111 Section 4: Pulse card concepts Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Example LPT function sequence: Basic triggering The following LPT function sequence uses the software trigger to initiate a 3-pulse burst for both channels, where both the pulse and trigger output three pulses.

  • Page 112: Measurement Types

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 4: Pulse card concepts Example LPT function sequence: pulse-measure synchronization The following LPT function sequence uses the software trigger to initiate a 3-pulse burst for CHANNEL 1. The three output pulses trigger the scope to perform three measurements. It assumes the scope is configured to trigger on leading edge triggers from the pulse generator.

  • Page 113: Spot Mean Measurements

    Section 4: Pulse card concepts Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Spot mean measurements Spot mean measurements sample a portion of the amplitude and a portion of the base level (see Spot mean measurement timing (on page 4-27)). The portions to be sampled are specified as a percentage.

  • Page 114: Spot Mean Average Readings

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 4: Pulse card concepts Spot mean average readings For this data acquisition type, each returned reading is a mean-of-the-means. Spot mean average averages the mean readings for all the pulses in the burst. In the figure in...

  • Page 115: Waveform Discrete Readings

    Section 4: Pulse card concepts Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual A waveform measurement can include pre-data and post-data. Pre-data is extra data taken before the rise time of the pulse; post-data is extra data taken after the fall time (see figure below). See...

  • Page 116: Waveform Average Readings

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 4: Pulse card concepts Waveform average readings For this data acquisition type, each returned reading is a mean average of the corresponding samples for all the pulses in the burst. For example, in the figure in...
  • Page 117 Section 4: Pulse card concepts Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual The number of samples taken on the amplitude and base level is dependent on the size of the portions to be sampled and the sampling rate. Use the pulse_sample_rate function to set the sampling rate for pulse measurements.
  • Page 118 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 4: Pulse card concepts Example: pulse_meas_sm This function sets channel 1 of the PMU for the spot mean discrete measure type to acquire the voltage amplitude measurement, the current base level measurement, and the time stamps. It also enables LLEC for amplitude: pulse_meas_sm(PMU1, 1, 0, 1, 0, 1, 0, 1, 1);...
  • Page 119 Section 4: Pulse card concepts Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Example: pulse_meas_timing This function sets the following pulse measure timing settings for five spot mean measurements for channel 1 of PMU1: pulse_meas_timing(PMU1, 1, 0.6, 0.8, 5);...

  • Page 120: Kpulse (For Keithley Pulse Cards)

    (on page 5-3) and Segment Arb waveforms (on page 5-5): Pulses are configured and run from the VPU or PMU tabs of KPulse. There is a tab for every Keithley pulse card installed in the 4200A-SCS. • (on page 5-8): Pulses are configured and saved as a .kaf Custom file arb waveforms (full-arb) file using the Arb Generator tab of KPulse.

  • Page 121: Kpulse Setup And Help

    Section 5: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 100: KPulse GUI KPulse setup and help The KPulse menus include: • File: Use this menu to load and save KPulse setups and exit KPulse. By default, setup files are saved at the command path location: C:\s4200\kiuser\KPulse\Setup.

  • Page 122: Triggering

    KPulse dialog box. Triggering With a Keithley pulse card selected as the trigger master, its Trigger Out can be used to start (trigger) itself or other pulse cards in the system. For the master pulse card, the polarity of the pulse trigger source (pulse_trig_source) and pulse trigger polarity (pulse_trig_polarity) function must be the same.
  • Page 123 Section 5: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual In the following figure, the configuration shown in the waveform previewer for Channel 1 uses the default settings for KPulse (pulse high = 1 V and pulse low = 0 V). Channel 2 uses the same settings, but the complement mode is enabled.

  • Page 124: Segment Arb Waveforms

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 5: KPulse (for Keithley Pulse Cards) Select Reset All to return the pulse card to the Standard Pulse waveform type and its default settings. It also updates the previewer. Configure the Channel 1 and Channel 2 settings: 1.
  • Page 125 Section 5: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 103: Segment Arb waveform settings The output trigger levels are not shown in the waveform previewers. The following instructions describe how to use KPulse for a standard pulse output. Repeat these steps for any installed cards that you want to set to standard pulse.

  • Page 126: Exporting Segment Arb Waveform Files

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 5: KPulse (for Keithley Pulse Cards) Select Reset All to return the pulse card to the Standard Pulse waveform type and its default settings. It also updates the previewer. To configure the Channel 1 and Channel 2 settings: 1.

  • Page 127: Custom File Arb Waveforms (Full Arb)

    Section 5: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual 6. Type a name for the file. The .ksf extension is added automatically. 7. Select Open. 8. Select Export. You can import a saved seg_arb.ksf waveform file into the pulse card using the seg_arb_file function.

  • Page 128: Custom Arb File Operation: Select And Configure Waveforms

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 5: KPulse (for Keithley Pulse Cards) 2. Copy the waveforms into the Sequencer for Channel 1, Channel 2, or both: ▪ The order that two or more waveforms appear in a channel sequencer is the order that the waveforms are output by that channel.

  • Page 129: Custom Arb File Operation: Copy Waveforms Into Sequencer

    Section 5: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual 3. Select the Waveform Type to be created. 4. Configure the Settings for the selected waveform type. 5. Select Preview to update the preview of the waveform.
  • Page 130 8. Set the Time per Point (in seconds). This is the time interval between each point in the waveforms. 9. Save the waveforms as a Keithley Arb File (.kaf). By default, .kaf files are saved in the folder: C:\s4200\kiuser\KPuIse\ArbFiles 10. Use Save As to name the file and save it.

  • Page 131: Custom Arb File Operation: Load Waveform And Turn On Output

    Section 5: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Custom Arb file operation: Load waveform and turn on output To load the waveform and turn on the output: 1. Select a pulse card tab.

  • Page 132: Waveform Types

    7. Select the green triangle to turn on enabled channels for all installed pulse cards in the 4200A-SCS. With the output on, the square box turns red. To turn off the outputs of all pulse cards, select the red box.
  • Page 133 Section 5: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Sine waveform An example of a sine waveform is shown in the following figure. The waveform for this example is named SINE1, but can be any name that is not already used in the Scratch Pad.
  • Page 134 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 5: KPulse (for Keithley Pulse Cards) Triangle waveform An example of a triangle waveform is shown in the following figure. The waveform for this example is named TRIANGLE1, but can be any name that is not already used in the Scratch Pad.
  • Page 135 Section 5: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 112: Custom waveform Creating a file (.txt or .csv) for custom waveform The waveform file is created using a text editor, such as Notepad.
  • Page 136 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 5: KPulse (for Keithley Pulse Cards) 3. The custom waveform is a simple 6-point waveform made up of these voltage values: 0 V, 4 V, 1 V, 3 V, 2 V, 0 V. Those seven entries are shown in the text editors in the above graphic. The time at each point is determined by the Time Per Point setting in the Arb Generator tab.
  • Page 137 Section 5: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 115: Noise waveform Gaussian waveform An example of a Gaussian waveform is shown in the following figure. The waveform for this example is named GAUSSIAN1, but can be any name that is not already used in the Scratch Pad.
  • Page 138 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 5: KPulse (for Keithley Pulse Cards) Ramp waveform An example of a ramp waveform is shown in the next graphic. The waveform for this example is named RAMP1, but can be any name that is not already used in the Scratch Pad.
  • Page 139 Section 5: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Sequences waveform An example of a sequences waveform is shown in the below graphic. The waveform for this example is named SEQ1, but can be any name that is not already used in the Scratch Pad.

  • Page 140: Use The Rpm To Switch The Smu, Cvu, And Pmu

    Make connections from the outputs of the two 4225-RPMs to a diode. • Generate dc I-V, C-V, and pulsed I-V measurements. Equipment required • One 4200A-SCS with the following instruments: ▪ Two 4200-SMUs, 4201-SMUs, 4210-SMUs, or 4211-SMUs ▪ Two 4200-PAs ▪...

  • Page 141: Update The Rpm Configuration In Kcon

    One shielded test fixture with connection to GNDU (Force LO) Update the RPM configuration in KCon The KCon application is used to manage the configuration of the 4200A-SCS, including the 4225-RPM. Before using an RPM for automatic switching, you must update the RPM configuration in KCon.

  • Page 142: Device Connections

    I-V and C-V measurements. Hazardous voltages may be present on all output and guard terminals. To prevent electrical shock that could cause injury or death, never connect or disconnect from the 4200A-SCS while the output is on. To prevent electric shock, test connections must be configured such that the user cannot come in contact with test leads, conductors, or any device under test (DUT) that is in contact with the conductors.

  • Page 143: Connect The 4200A-Scs To The Dut

    Figure 120: Connections from the 4200A-SCS and 4225-RPMs to the diode Connect the 4200A-SCS to the DUT The following figure shows the 4200A-SCS rear panel connections to the input terminals of two 4225-RPMs and from the outputs of the 4225-RPMs to the diode.

  • Page 144: Set Up The Measurements In Clarius

    Set up the measurements in Clarius This section describes how to set up the 4200A-SCS to make I-V, C-V, and pulsed I-V measurements on a diode. You will create a new project and add a test to the project tree for each measurement type.

  • Page 145: Add A Device

    Section 6: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Add a device To add a device: 1. Select Devices. 2. Type diode into the search box. 3. Select Search.
  • Page 146 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 6: Use the RPM to switch the SMU, CVU, and PMU Figure 125: Add the Diode Forward I-V Sweep (vfd) test to the project tree 5. Scroll to find the Diode C-V Sweep (cv-diode) test.

  • Page 147: Configure The Vfd Test

    Section 6: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Configure the vfd test To configure the vfd test: 1. Choose Configure. Figure 129: Configure highlighted 2. In the project tree, select the vfd test.
  • Page 148 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 6: Use the RPM to switch the SMU, CVU, and PMU Figure 131: Test Settings pane and Test Settings Advanced dialog box 6. Select OK to accept the settings. 7. Select Terminal Settings.

  • Page 149: Configure The Cv-Diode Test

    Section 6: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Configure the cv-diode test To configure the cv-diode test: 1. Select the cv-diode test from the project tree. 2. Select the Anode terminal of the diode in the Key Parameters pane 3.
  • Page 150 If you are including cable compensation values, run the Tools menu option CVU Connection Compensation. Refer to “Perform offset compensation” in the Model 4200A-SCS Capacitance-Voltage Unit (CVU) User's Manual for more detail. 4200A-PMU-900-01 Rev. A December 2020...

  • Page 151: Configure The Pulse-Diode Test

    Section 6: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 135: Terminal Settings pane and the Terminal Settings Advanced dialog box for the cv-diode sweep test Configure the pulse-diode test To configure the pulse-diode test: 1.
  • Page 152 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 6: Use the RPM to switch the SMU, CVU, and PMU 4. Select the Anode terminal. 5. Select Terminal Settings. 6. Select Advanced to configure the measurements as needed, including spot mean, PMU compensation, and PMU threshold levels.

  • Page 153: Run The Test

    Section 6: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 138: Test Settings pane and the Test Settings Advanced dialog box for the Pulse-Diode test 11. Select OK to accept the changes.

  • Page 154: View And Analyze The Test Results

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 6: Use the RPM to switch the SMU, CVU, and PMU Figure 139: Top of the 4225-RPM indicating the LED status View and analyze the test results You can select Analyze when you run the project to view test results in real-time.
  • Page 155 Section 6: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 141: Analyze pane for the vfd test 6-16 4200A-PMU-900-01 Rev. A December 2020...

  • Page 156: Pmu For Pulsed I-V Measurements On A Mosfet

    Section 7 PMU for pulsed I-V measurements on a MOSFET In this section: Introduction ................7-1 Equipment required ..............7-2 Device connections ..............7-2 Set up the measurements in Clarius ........7-4 Introduction You can use the Model 4225-PMU Ultra-Fast Module to make both pulsed I-V measurements and transient I-V measurements (waveform capture) on a device.

  • Page 157: Equipment Required

    MOSFET. Hazardous voltages may be present on all output and guard terminals. To prevent electrical shock that could cause injury or death, never connect or disconnect from the 4200A-SCS while the output is on. To prevent electric shock, test connections must be configured such that the user cannot come in contact with test leads, conductors, or any device under test (DUT) that is in contact with the conductors.

  • Page 158: Connection Schematic

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 7: PMU for pulsed I-V measurements on a MOSFET Connection schematic The hardware connections from the output terminals of the PMU and the two RPMs to the MOSFET are shown in the following figures.

  • Page 159: Set Up The Measurements In Clarius

    Section 7: PMU for pulsed I-V measurements on a MOSFET Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual The example below illustrates connections from the RPMs to the SMA to SSMC adapter cables (4200-PRB-C) and then to the probes and device terminals on a wafer.

  • Page 160: Search For And Select An Existing Test

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 7: PMU for pulsed I-V measurements on a MOSFET 2. In the Library, select Projects. 3. Select New Project. 4. Select Create. Figure 145: Select a New Project from the Project Library 5.

  • Page 161: Configure The Test

    Section 7: PMU for pulsed I-V measurements on a MOSFET Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Configure the test To configure the test: 1. Select Configure. Figure 147: Configure button highlighted 2. From the Key Parameters pane, adjust the pulse voltage sweep levels of PMU1-2 on the Drain terminal and the Pulse Step Voltage of PMU1-1 on the Gate terminal, as needed.
  • Page 162 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 7: PMU for pulsed I-V measurements on a MOSFET 3. From the Test Settings pane and Advanced Test Settings dialog box, adjust the Pulse Settings and Timing Parameters as needed.

  • Page 163: Run The Test And Analyze The Results

    Section 7: PMU for pulsed I-V measurements on a MOSFET Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Run the test and analyze the results Select Run to execute the test. Figure 151: Run You can select Analyze when you run the project to view test results in real time.

  • Page 164: Testing Flash Memory

    Section 8 Testing flash memory In this section: Testing flash memory ............... 8-1 Flash connection guidelines ............. 8-3 Endurance testing ..............8-9 Disturb testing ................ 8-12 Using a switch matrix ............. 8-14 Use KPulse to create and export Segment Arb waveforms ... 8-15 Enter Segment Arb values into UTM array parameters ..

  • Page 165: Testing Flash Memory

    Section 8: Testing flash memory Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 154: Recommended parts for flash memory testing Recommended interconnect parts for flash memory testing Keithley Model Qty. Description Comment Number SMA tee, female – male – female...

  • Page 166: Flash Connection Guidelines

    Non-axial stress on the bulkhead connectors on the SMU or pulse cards could cause damage to the cards installed in the 4200A-SCS chassis. Pre-torque the connections to prevent this damage.
  • Page 167 Section 8: Testing flash memory Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 155: Cross section of a floating gate transistor in the erased and programmed states The control gate (CG) reads, programs, and erases the FG transistor. The presence of charge on the gate shifts the voltage threshold (V ) to a higher voltage, as shown below.
  • Page 168 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 8: Testing flash memory The tunneling method is commonly known as Fowler-Nordheim (FN) tunneling, or quantum tunneling, and is a function of the electric potential across the tunneling oxide. HCI is considered a damage mechanism in non-floating gate transistors.
  • Page 169 Section 8: Testing flash memory Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual The flash projects support two methods for switching between the pulse and measure phases of the typical flash memory test. The first is the typical method, using a switch matrix to route the pulse or DC signals to the DUT.
  • Page 170 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 8: Testing flash memory Figure 160: Block diagram of a flash test setup without using a switch matrix (direct connect) The pulse waveforms are a program pulse, an erase pulse, or a waveform made up of both program and erase pulses.
  • Page 171 Section 8: Testing flash memory Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 162: Program + Erase pulse waveforms for a floating gate DUT, with separate pulse waveforms for the DUT gate, drain, source, and bulk The block diagram for the flash setup is shown in the following figure. To reconfigure from the pulse stress to dc measure phases, activate the switches on the SMU and pulse cards.

  • Page 172: Endurance Testing

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 8: Testing flash memory Endurance testing Endurance testing stresses the DUT with a number of Program+Erase waveform cycles, and then periodically measures both the voltage threshold in the programmed state (VTP) and the voltage threshold of the erased state (VTE).
  • Page 173 Section 8: Testing flash memory Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Figure 165: Flash connections - program erase and endurance testing using direct connection to a single stand-alone 4-terminal device 8-10 4200A-PMU-900-01 Rev. A December 2020...

  • Page 174: Connections For Endurance Testing - Switch Matrix

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 8: Testing flash memory Connections for endurance testing - switch matrix A switch matrix is recommended for testing array test structures for endurance or disturb. Figure 166: 4200-900_Flash Switch connections - characterization endurance or disturb testing 4200A-PMU-900-01 Rev.

  • Page 175: Disturb Testing

    Section 8: Testing flash memory Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Disturb testing The purpose of the Disturb test is to pulse stress a device in an array test structure, then make a measurement, such as V , on a device adjacent to the pulsed device.
  • Page 176 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 8: Testing flash memory Figure 167: Flash direct DUT connections - Disturb testing 4200A-PMU-900-01 Rev. A December 2020 8-13...

  • Page 177: Using A Switch Matrix

    Section 8: Testing flash memory Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Using a switch matrix A limitation of the no-switch, direct connect test configuration shown in the figure below is that only three devices can be measured. The test would have to be manually reconfigured or re-cabled to test other devices.

  • Page 178: Use Kpulse To Create And Export Segment Arb Waveforms

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 8: Testing flash memory Use KPulse to create and export Segment Arb waveforms This example demonstrates how to create a program and erase waveform using the KPulse flash example file.

  • Page 179: Enter Segment Arb Values Into Utm Array Parameters

    Section 8: Testing flash memory Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual 4. Select ..5. Locate the target folder. 6. Type a name for the file. The .ksf extension is added automatically. 7. Select Open. 8. Select Export.

  • Page 180: Direct Connections To Single Dut

    Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Section 8: Testing flash memory Figure 170: Enter Value dialog box for arrays 5. Enter the values. 6. Select OK. 7. For any stress and measure loop tests, such as endurance or disturb, use KPulse to define and export the waveform files, then import waveforms into the Subsite Stress Properties.
  • Page 181 Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Make SMA cable connections to the pulse card: 1. Set up the 4200A-SCS. Refer to “Connections and configuration” in Model 4200A-SCS Setup and Maintenance. 2. Connect a 10.8 cm (4.25 in.) SMA cable to either end of an SMA tee.

  • Page 182: Direct Connections To Array Dut For Disturb Testing

    Connections for disturb testing (on page 8-12). Make the SMA connections: 1. Set up the 4200A-SCS. Refer to “Connections and configuration” in Model 4200A-SCS Setup and Maintenance. 2. Connect a 10.8 cm (4.25 in.) SMA cable to either end of an SMA tee.
  • Page 183 Section 8: Testing flash memory Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Make SMA-to-BNC connections to the pulse and SMU cards: 1. Connect an SMA-to-BNC adapter to one of the female connectors on an SMA tee. 2. Connect the tee to a triaxial-to-SMA adapter.
  • Page 184 All Keithley trademarks and trade names are the property of Keithley Instruments. All other trademarks and trade names are the property of their respective companies. Keithley Instruments Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • 1-800-833-9200 • tek.com/keithley 07/2020...

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