Page 1 Model 4200A-SCS Parameter Analyzer User’s Manual 4200A-900-01 Rev. A / September 2016 *P4200A-900-01A* 4200A-900-01A A Great er Me a s ure of C on f i de nc e...
Page 2 Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part, without the prior written approval of Keithley Instruments is strictly prohibited. All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments. Other brand names are trademarks or registered trademarks of their respective holders.
Page 3: Safety Precautions
Keithley Instruments products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages.
Page 4 (note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley Instruments office for information.
Page 5 Equipment required ......................3-1 Device connections ......................3-2 Connection schematic ....................... 3-2 Connect the 4200A-SCS to the DUT ..................3-3 Set up the measurements in Clarius ..................3-3 Select and rename a new project ....................3-3 Add a device ..........................3-5 Select a custom test ........................
Page 6 Table of contents Model 4200A-SCS Parameter Analyzer User's Manual Connection schematic ....................... 4-3 Connect the 4200A-SCS to the DUT ..................4-4 Set up the measurements in Clarius ..................4-4 Create a new project ......................... 4-5 Add a device ..........................4-6 Search for and select existing tests in the Test Library .............
Page 7 Model 4200A-SCS Parameter Analyzer User's Manual Table of contents Equipment required ......................8-1 Device connections ......................8-2 Connection schematic ....................... 8-3 Set up the measurements in Clarius ..................8-4 Create and rename a project for I-V and C-V measurements with compensation ..... 8-4 Add an action to perform CVU compensation ................
Page 8: Extended Warranty
This manual provides detailed applications to help you achieve success with your Keithley Instruments 4200A-SCS. In addition, information is provided about the basics of the front panel to familiarize you with the instrument. Finally, included is an overview of each application, followed by instructions to complete the application.
Page 9: Contact Information
Keithley Instruments website (http://www.tek.com/keithley). USB flash drive contents Each 4200A-SCS instrument is shipped with a USB flash drive that includes the software and the product information documents. The 4200A-SCS Product Information USB drive contains: • Quick Start Guide: Provides unpacking instructions, describes basic connections, reviews basic operation information, and provides a quick test procedure to ensure the instrument is operational.
Page 10: Application Examples
However, you may have additional settings you want to apply when you configure your measurements. General ratings The 4200A-SCS instrument's general ratings and connections are listed in the following table. Category Specification Supply voltage range...
Page 11: Getting Started
Rear panel overview ..............2-4 Installation ................2-6 Front panel overview Most of your controls and interfaces are on the front panel of the 4200A-SCS Parameter Analyzer. The next figure shows the front panel of the 4200A-SCS. The components are summarized following the figure.
Page 12 Provides a 1/8" stereo output connection. Interlock indicator Illuminates when the 12 VDC interlock circuit is closed. Operate indicator Illuminates when any internal cards are energized. 4200A-SCS-ND has no display and requires an external monitor. 4200A-SCS-900-01 Rev A. / September 2016...
Page 13: Additional Information
Connect a keyboard and mouse Connect the keyboard to the 4200A-SCS with a USB cable. You can plug it into any of the eight USB ports. The keyboard is shown in the next figure. To ensure proper operation, be sure that the keyboard is connected before power-up.
Page 14 Section 2: Getting started Model 4200A-SCS Parameter Analyzer User's Manual Figure 3: Keyboard connections 4200A-SCS-900-01 Rev A. / September 2016...
Page 15: Rear Panel Overview
Model 4200A-SCS Parameter Analyzer User's Manual Section 2: Getting started Rear panel overview The following figure shows the rear panel of the 4200A-SCS. The connectors and components are summarized following the figure. Figure 4: 4200A-SCS rear panel Provides system cooling.
Page 16: Connect An External Monitor
Support the factory-installed SMU, CVU, and PMU/PGU cards. Connect an external monitor You can connect an external monitor to the 4200A-SCS. For best results, use a 1920x1080p HD monitor to maintain the correct resolution when using the Clarius application. Installation This section contains information about handling and installing the 4200A-SCS: •...
Page 17: Locating The System
Model 4200A-SCS Parameter Analyzer User's Manual Section 2: Getting started Locating the system Locate the 4200A-SCS so that it will operate within the following ambient temperature and humidity limits: • Temperature: +10 °C to +40 °C • Relative humidity: 5 % to 80 %, non-condensing SMU and preamplifier accuracy specifications are based on operation at 23 °C ±5 °C and between...
Page 18: Basic System Connections
Model 4200A-SCS Parameter Analyzer User's Manual Basic system connections This section provides basic system connections to get your 4200A-SCS set up and running. More detailed connection information is in the "Connections and configuration" section of the Model 4200A- SCS Reference Manual.
Page 19 Section 2: Getting started Connecting a LAN cable The two LAN connectors on the 4200A-SCS are standard RJ-45 connectors intended for use with unshielded twisted pair (UTP) cable. For best results, use only CAT 5 UTP cables equipped with RJ-45 connectors to connect your LANs, as shown in the following figure.
Page 20 Figure 7: 4200A-SCS GPIB instrument connections Connecting the interlock The next graphic shows the location of the interlock connector on the rear panel of the 4200A-SCS. To connect the interlock: 1. Connect one end of the supplied 236-ILC-3 interlock cable to the interlock connector on the rear panel of the 4200A-SCS rear panel (see the next figure).
Page 21: Smu Connections
Section 2: Getting started Figure 8: Interlock connector on the rear panel of the 4200A-SCS 2. Connect the other end of the interlock cable to a compatible test fixture, such as the Keithley Instruments LR:8028. For more information, see the "Configuring the safety interlock" topic in the 4200A-SCS Reference Manual.
Page 22 Section 2: Getting started Model 4200A-SCS Parameter Analyzer User's Manual Triaxial cables Triaxial cables are supplied to make connections to the DUT (device under test). With preamplifiers installed, use the low-noise triaxial cables, which are terminated with 3-slot triaxial connectors on both ends.
Page 23 COMMON circuit. Complete details on connections (including SENSE terminal connections) are provided in the "Connections and configuration" section of the Model 4200A-SCS Reference Manual. The next figure shows SMU connections to 2-terminal, 3-terminal, and 4-terminal devices. Notice that only the FORCE HI terminal of the SMUs is connected to the device terminals.
Page 24 Section 2: Getting started Model 4200A-SCS Parameter Analyzer User's Manual Figure 11: SMU (with preamplifiers) connections to DUT 2-14 4200A-SCS-900-01 Rev A. / September 2016...
Page 25 To mount a preamplifier onto a probe station: 1. Turn off the system power for the 4200A-SCS from the front panel. 2. Disconnect the preamplifiers from the rear panel of the 4200A-SCS. They are secured to the rear panel by a mounting bracket.
Page 26: Powering The 4200A-Scs
The 4200A-SCS operates from a line voltage in the range of 100 VAC to 240 VAC, at a frequency of 50 Hz or 60 Hz. Line voltage is automatically sensed, but line frequency is not.
Page 27 Model 4200A-SCS Parameter Analyzer User's Manual Section 2: Getting started Operating the 4200A-SCS with the wrong line frequency setting may result in noisy readings because the line frequency setting affects SMU line frequency noise rejection. 5. Allow the instrument to warm up for at least 30 minutes to achieve rated measurement accuracy.
Page 28: Create A New Project And Test
The default settings used for the devices, tests, and projects in Clarius are generally sufficient to produce usable data when executing a test. However, you may have additional settings you want to apply when you configure your measurements. Equipment required • One 4200A-SCS, with the following instruments: • Two 4200-SMUs or 4210-SMUs • Two 4200-PAs •...
Page 29: Device Connections
Connection schematic The hardware connections from the output of the instruments in the 4200A-SCS chassis to the test fixture that contains the MOSFET are shown in the following figure. All of the connections are 2-wire, and only the Force terminal of each SMU is used.
Page 30: Connect The 4200A-Scs To The Dut
Section 3: Create a new project and test Connect the 4200A-SCS to the DUT The hardware connections from the output of the instruments in the 4200A-SCS chassis to the test fixture that contains the MOSFET are shown in the next figure.
Page 31 Section 3: Create a new project and test Model 4200A-SCS Parameter Analyzer User's Manual 2. In the Library, select Projects. 3. Select and then Create a New Project. Figure 17: Select a New Project from the Project Library 4. Select Yes when prompted to replace the existing project.
Page 32: Add A Device
Model 4200A-SCS Parameter Analyzer User's Manual Section 3: Create a new project and test Add a device To add a device: 1. Select Devices. 2. From the Filters pane, select the 3 checkbox under the Terminals heading and transistor under the Device Type option from the Filters pane.
Page 33: Select A Custom Test
Section 3: Create a new project and test Model 4200A-SCS Parameter Analyzer User's Manual Select a custom test To select a custom test: 1. Select Tests. 2. Select Custom Test, then select Add to create a new 3-terminal, n-type MOSFET test in the project tree.
Page 34 Model 4200A-SCS Parameter Analyzer User's Manual Section 3: Create a new project and test 2. In the project tree, select vds-id. Because this test is custom, you must assign functions to all terminals connected to the MOSFET before you can run the test.
Page 35: Execute The Test
Section 3: Create a new project and test Model 4200A-SCS Parameter Analyzer User's Manual 5. Set the Drain terminal connection to SMU1 and set the Operation Mode to Voltage Linear Sweep. 6. Change the Start, Stop, Step, and Compliance settings to match the next figure.
Page 36 Model 4200A-SCS Parameter Analyzer User's Manual Section 3: Create a new project and test 2. Select Graph Settings..., then Define Graph. 3. Select Define Graph. 4. In the Graph Definition screen, assign X to DrainV and Y1 to DrainI. Figure 28: Define the graph 5.
Page 37: Use The Rpm To Switch The Smu, Cvu, And Pmu
Finally, generate DC I-V, C-V, and pulsed I-V measurements. Update the RPM configuration in KCon The KCon application is used to manage the configuration of the 4200A-SCS, including the 4225-RPM. Before using an RPM for automatic switching, you must update the RPM configuration in KCon.
Page 38: Equipment Required
I-V and C-V measurements. Hazardous voltages may be present on all output and guard terminals. To prevent electrical shock that could cause injury or death, never connect or disconnect from the 4200A-SCS while the output is on. To prevent electric shock, test connections must be configured such that the user cannot come in contact with test leads, conductors, or any device under test (DUT) that is in contact with the conductors.
Page 39: Connection Schematic
Section 4: Use the RPM to switch the SMU, CVU, and PMU Connection schematic The hardware connections from the output terminals of the instruments in the 4200A-SCS are connected to the input terminals of the two 4225-RPMs and then from the output terminals of the two RPMs to the diode under test, as shown in the next figure.
Page 40: Connect The 4200A-Scs To The Dut
Set up the measurements in Clarius This section describes how to set up the 4200A-SCS to perform I-V, C-V, and pulsed I-V measurements on a diode. You will create a new project and add a test to the project tree for each measurement type.
Page 41: Create A New Project
Model 4200A-SCS Parameter Analyzer User's Manual Section 4: Use the RPM to switch the SMU, CVU, and PMU Create a new project To create a new project: 1. Choose Select. Figure 33: Select highlighted 2. In the Library, select Projects.
Page 42: Add A Device
Section 4: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Parameter Analyzer User's Manual Add a device To add a device: 1. Select Devices. 2. To find a diode device in the Device Library, type diode into the search box, then select Search.
Page 43: Search For And Select Existing Tests In The Test Library
Model 4200A-SCS Parameter Analyzer User's Manual Section 4: Use the RPM to switch the SMU, CVU, and PMU Search for and select existing tests in the Test Library To search for and select an existing test: 1. Select Tests. 2. To find a diode test in the Test Library, type the word diode in the search box, then select Search.
Page 44: Configure The Test
Section 4: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Parameter Analyzer User's Manual Your project tree now has three tests. Figure 39: Three tests added to project tree Configure the test To configure the tests: 1.
Page 45 Model 4200A-SCS Parameter Analyzer User's Manual Section 4: Use the RPM to switch the SMU, CVU, and PMU 3. In the Test Settings pane, select Advanced. Adjust the parameters as needed. Be sure to include the delay between sweep steps.
Page 46 Section 4: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Parameter Analyzer User's Manual 8. Select OK to accept the changes. 9. Select the cv-diode test from the project tree. 10. Highlight the Anode terminal of the diode in the Key Parameters pane 11.
Page 47 Model 4200A-SCS Parameter Analyzer User's Manual Section 4: Use the RPM to switch the SMU, CVU, and PMU 12. From the Test Settings pane's Advanced dialog box, adjust the timing parameters as needed. Be sure to include the sweep delay time in your adjustments.
Page 48 Section 4: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Parameter Analyzer User's Manual 13. From the Terminal Settings pane and the Terminal Settings Advanced dialog box of the Anode terminal, adjust the DC voltage source, AC voltage source, and measurement parameters.
Page 49 Model 4200A-SCS Parameter Analyzer User's Manual Section 4: Use the RPM to switch the SMU, CVU, and PMU 14. In the project tree, select the pulse-diode test. 15. From the Key Parameters pane, adjust the pulse operation as needed. Figure 47: Key Parameters pane for the pulse-diode test 4200A-SCS-900-01 Rev A.
Page 50 Section 4: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Parameter Analyzer User's Manual 16. Change the Cathode terminal setting to PMU1-2. 17. Select Test Settings. 18. Select Advanced to adjust the test mode or pulse timing settings, as needed.
Page 51 Model 4200A-SCS Parameter Analyzer User's Manual Section 4: Use the RPM to switch the SMU, CVU, and PMU 19. Select OK to accept the changes. 20. Select the Anode terminal. 21. Select Terminal Settings. 22. Select Advanced to configure the measurements as needed, including spot mean, PMU compensation, and PMU threshold levels.
Page 52: Run The Test
Section 4: Use the RPM to switch the SMU, CVU, and PMU Model 4200A-SCS Parameter Analyzer User's Manual Run the test Once the three tests have been configured, you can execute every test under the device by selecting the diode device in the project tree and then Run. Select the check boxes for the three tests and the device.
Page 53: Analyze The Results
Model 4200A-SCS Parameter Analyzer User's Manual Section 4: Use the RPM to switch the SMU, CVU, and PMU Analyze the results You can select Analyze when you run the project to view test results in real-time. Figure 52: Analyze highlighted Select a test from the project tree to display its results.
Page 54: Configure And Use A Series 700 Switching System
MOSFET transistor and use the project to make both I-V and C-V measurements using the switching system. Switching systems are controlled by the 4200A-SCS using the GPIB bus. Use a 7007-1 or 7007-2 GPIB cable to connect your switching system to the 4200A-SCS. Once the switching system and test fixture have been defined in KCon, you use Clarius to set up the connections and automatically connect the instruments to the test system pins using the switching system.
Page 55: Equipment Required
Switching System. Hazardous voltages may be present on all output and guard terminals. To prevent electrical shock that could cause injury or death, never connect or disconnect from the 4200A-SCS while the output is on. To prevent electric shock, test connections must be configured such that the user cannot come in contact with test leads, conductors, or any device under test (DUT) that is in contact with the conductors.
Page 56: Connect The 7072 To The Dut
Model 4200A-SCS Parameter Analyzer User's Manual Section 5: Configure and use a Series 700 Switching System Connect the 7072 to the DUT The hardware connections from the 7072 Matrix Card to the 4-terminal MOSFET DUT are shown in the following figure. Use four 4200-MTRX-X or 4200-TRX-X triaxial cables (if using a preamplifier) to the input terminals of your test fixture.
Page 57: Connect The 4200A-Scs To The 7072
Model 4200A-SCS Parameter Analyzer User's Manual Connect the 4200A-SCS to the 7072 The hardware connections from the output of the instruments in the 4200A-SCS to the 7072 are shown in the following figure. To connect the 4200A-SCS and SMUs to the 7072: Using four 4200-MTRX-X or 4200-TRX-X triaxial cables, make the following connections: •...
Page 58 3. Connect adapter tee assembly 1 to input terminal G of the 7072. 4. Connect adapter tee assembly 2 to input terminal H of the 7072. The connections are shown in the following figure. Figure 56: 4200A-SCS to 7072 Matrix Card connections 4200A-SCS-900-01 Rev A. / September 2016...
Page 59: Update The Switch Configuration In Kcon
Update the switch configuration in KCon After completing the switch and device connections, use KCon to manage the configuration of all instrumentation controlled by the 4200A-SCS software. You use KCon to: • Add a switching system to the 4200A-SCS configuration •...
Page 60 Model 4200A-SCS Parameter Analyzer User's Manual Section 5: Configure and use a Series 700 Switching System 4. Select OK. 5. Select Add External Instrument again, then select Test Fixture. Figure 58: Add External Instrument dialog box, Test Fixture highlighted 6. Select OK.
Page 61 11. Confirm that the GPIB Channel of your device (0 to 30) matches the channel shown in the Properties. The next figure shows a Keithley Instruments 707/707A/707B Switching System with the matrix card installed in slot 1. Figure 60: Properties pane of Keithley 708/708A/708B Switching System with one 7072 Matrix Card 4200A-SCS-900-01 Rev A. / September 2016...
Page 62 3. Select Enable. 4. Select 70XA-VERSION. This allows the switching system to be controlled by the 4200A-SCS. 12. Select the + symbol next to MTRX1 to see the settings for the added 7072 Matrix Card (CARD1). 13. Select the 7072 Matrix Card.
Page 63: Set Up The Measurements In Clarius
Section 5: Configure and use a Series 700 Switching System Model 4200A-SCS Parameter Analyzer User's Manual 17. Select Save to save the system configuration. 18. Select System Configuration Summary, then scroll down to the Connections section. You can select Save Configuration As or Print Configuration, as you will need these names when setting the switching system connections in Clarius.
Page 64 Model 4200A-SCS Parameter Analyzer User's Manual Section 5: Configure and use a Series 700 Switching System To create a new project: 1. Choose Select. Figure 64: Select highlighted 2. In the Library, select Projects. 3. Select and then Create a New Project.
Page 65 Section 5: Configure and use a Series 700 Switching System Model 4200A-SCS Parameter Analyzer User's Manual To add the connectpins action: 1. Select Actions. 2. Select Search. 3. Scroll to the connectpins action, then Add it to the project tree twice.
Page 66 Model 4200A-SCS Parameter Analyzer User's Manual Section 5: Configure and use a Series 700 Switching System 3. Make the following connections using the pairs of TermIdStr# and Pin# text fields in the action: • SMU1 – Pin 3 • SMU2 – Pin 2 •...
Page 67 Section 5: Configure and use a Series 700 Switching System Model 4200A-SCS Parameter Analyzer User's Manual If you select the OpenAll check box, the connectpins action opens all crosspoints before closing the specified pairs. This is usually the preferred behavior. However, since connectpins only has eight field pairs, the action can only close eight crosspoints during each run.
Page 68 Model 4200A-SCS Parameter Analyzer User's Manual Section 5: Configure and use a Series 700 Switching System To search for and add existing tests from the Test Library: 1. Choose Select. Figure 70: Select highlighted 2. Select Tests. 3. Type vds into the search box.
Page 69: Make I-V Measurements On A Solar Cell
These instructions show you how to make connections from the SMU to the solar cell and how to add the forward bias I-V test into a new project and automate the measurements. From the I-V characteristics measured by the 4200A-SCS, you can determine important parameters about the solar cell, including: •...
Page 70: Device Connections
Hazardous voltages may be present on all output and guard terminals. To prevent electrical shock that could cause injury or death, never connect or disconnect from the 4200A-SCS while the output is on. To prevent electric shock, test connections must be configured such that the user cannot come in contact with test leads, conductors, or any device under test (DUT) that is in contact with the conductors.
Page 71: Connect The 4200A-Scs To The Dut
Model 4200A-SCS Parameter Analyzer User's Manual Section 6: Make I-V measurements on a solar cell Connect the 4200A-SCS to the DUT The following two figures show the 4200A-SCS rear-panel connections for the two methods mentioned in the Device connection schematic (on page 6-2) topic.
Page 72: Setting Up Measurements In The Clarius Software
Setting up measurements in the Clarius software This section demonstrates how to set up the 4200A-SCS to perform an I-V sweep on a solar cell. The fwd-ivsweep test measures current at each step of a user-configured voltage sweep. An I-V curve is generated from the acquired data, and device parameters are calculated in the Formulator.
Page 73: Search For And Select A Test
Model 4200A-SCS Parameter Analyzer User's Manual Section 6: Make I-V measurements on a solar cell Search for and select a test To search for and select the test: 1. Select Tests. 2. Select the PV Cell check box, then select Search.
Page 74 Section 6: Make I-V measurements on a solar cell Model 4200A-SCS Parameter Analyzer User's Manual 3. Adjust the Anode settings as needed. Figure 81: Key Parameters pane for the I-V sweep of a solar cell 4. In the Test Settings pane, adjust the Measure Settings and Test Mode as needed.
Page 75: Execute The Test
This test calculates V , and other device parameters. See the Electrical Characterization of Photovoltaic Materials and Solar Cells with the 4200A-SCS Parameter Analyzer application note for details on Formulator calculations. You can also add new formulas or edit existing formulas. See the "Formulator"...
Page 76: Analyze The Test Results
Section 6: Make I-V measurements on a solar cell Model 4200A-SCS Parameter Analyzer User's Manual Analyze the test results You can select Analyze when you run the project to view test results in real-time. Figure 85: Analyze highlighted You can also use the View icons in the upper-right of the center pane to choose between Sheet only, graph only, or Sheet + Graph.
Page 77: Additional Tests
Model 4200A-SCS Parameter Analyzer User's Manual Section 6: Make I-V measurements on a solar cell The sheet displays the results with the voltage and current data labeled Anode V and Anode I, respectively. The formulas calculated in the Formulator are shown in the right-most columns. They include the maximum power (PMAX), open circuit voltage (VOC), short circuit current (ISC), and fill factor (FF).
Page 78: Make C-V Measurements On A Moscap
Hazardous voltages may be present on all output and guard terminals. To prevent electrical shock that could cause injury or death, never connect or disconnect from the 4200A-SCS while the output is on. To prevent electric shock, test connections must be configured such that the user cannot come in contact with test leads, conductors, or any device under test (DUT) that is in contact with the conductors.
Page 79: Connect The 4200A-Scs To The Dut
Section 7: Make C-V measurements on a MOSCAP Model 4200A-SCS Parameter Analyzer User's Manual Connect the 4200A-SCS to the DUT The hardware connections from the output terminals of the CVU to the MOS capacitor are shown in the following figure. Connect one cable to each of the CVU terminals, then connect one SMA female to BNC male adapter to the end of each cable.
Page 80: Set Up The Measurements In Clarius
Model 4200A-SCS Parameter Analyzer User's Manual Section 7: Make C-V measurements on a MOSCAP Set up the measurements in Clarius This section describes how to set up the Clarius application to make a C-V sweep on a MOS capacitor. You select an existing project from the project library and configure a C-V sweep test.
Page 81: Configure The Test
Section 7: Make C-V measurements on a MOSCAP Model 4200A-SCS Parameter Analyzer User's Manual Configure the test To configure the C-V sweep test, you set the source and measure parameters, define the timing parameters, and adjust the constants and formulas for extracting parameters from the C-V data.
Page 82 Model 4200A-SCS Parameter Analyzer User's Manual Section 7: Make C-V measurements on a MOSCAP 4. In the Test Settings pane, set the Speed to Quiet for sensitive capacitance measurements. Figure 93: Test Settings pane 4200A-SCS-900-01 Rev A. / September 2016...
Page 83 Section 7: Make C-V measurements on a MOSCAP Model 4200A-SCS Parameter Analyzer User's Manual 5. Adjust the Sweep Delay as needed. The Formulator is located in the Test Settings pane.Select Formulator to display a dialog box, shown in the next figure.
Page 84 Model 4200A-SCS Parameter Analyzer User's Manual Section 7: Make C-V measurements on a MOSCAP The next figure shows some of the equations that are included with this test. In the Constants area of the Formulator, you can change the parameters that are used in the formulas, such as the gate area and temperature.
Page 85: Perform Offset Compensation
Section 7: Make C-V measurements on a MOSCAP Model 4200A-SCS Parameter Analyzer User's Manual From the Advanced dialog box, adjust the settings for the CVH1 and CVL1 terminals of the CVU as needed. In this test, the CVH1 terminals are internally connected to the AC ammeter and the HI of the DC voltage source by default.
Page 86 Model 4200A-SCS Parameter Analyzer User's Manual Section 7: Make C-V measurements on a MOSCAP 2. Select CVU Connection Compensation from the Clarius Tools dialog box. Figure 98: Clarius Tools dialog box 3. Disconnect the probes from the DUT. 4. Select Measure Open.
Page 87 Section 7: Make C-V measurements on a MOSCAP Model 4200A-SCS Parameter Analyzer User's Manual 5. Select OK. You are prompted to verify that the probes have been disconnected from the DUT. Figure 100: Prompt to remove probes from DUT 7-10...
Page 88: Run The Test
Model 4200A-SCS Parameter Analyzer User's Manual Section 7: Make C-V measurements on a MOSCAP 6. Make sure that the probes have been disconnected from the DUT, then select OK. The compensation runs, and a dialog box confirms that the compensation has run successfully.
Page 89: View And Analyze The Test Results
Section 7: Make C-V measurements on a MOSCAP Model 4200A-SCS Parameter Analyzer User's Manual View and analyze the test results You can select Analyze when you run the project to view test results in real-time. Figure 103: Analyze highlighted The C-V data is plotted on the graph as the moscap-cvsweep test executes.
Page 90 Model 4200A-SCS Parameter Analyzer User's Manual Section 7: Make C-V measurements on a MOSCAP You can also click the Run sheet of the Analyze pane, as highlighted in the next figure, to display more data. For example, you can display a holistic view of the parameters for a device.
Page 91: Use The 4200A-Cviv Multi-Switch
Set up the measurements in Clarius ........8-4 Introduction This section provides an example of how to use the 4200A-SCS and Model 4200A-CVIV Multi-Switch to perform I-V and C-V measurements on the same device without having to manually change connections to the device between tests.
Page 92: Device Connections
Hazardous voltages may be present on all output and guard terminals. To prevent electrical shock that could cause injury or death, never connect or disconnect from the 4200A-SCS while the output is on. To prevent electric shock, test connections must be configured such that the user cannot come in contact with test leads, conductors, or any device under test (DUT) that is in contact with the conductors.
Page 93: Connection Schematic
Model 4200A-SCS Parameter Analyzer User's Manual Section 8: Use the 4200A-CVIV Multi-Switch Connection schematic Make the hardware connections from the output terminals of the 4200A-CVIV to the MOSFET, as shown in the following figure. In this example, 2-wire (local sense) measurements are made at the MOSFET, so four triaxial cables are connected from each Force output terminal of the 4200A-CVIV to the device.
Page 94: Set Up The Measurements In Clarius
C-V measurements. This step only needs to be performed once per configuration. 2. The project runs the tests on the MOSFET. The 4200A-SCS is configured to connect the SMUs to the MOSFET and produce a Vds-Id family of curves, then the project re-configures the 4200A- SCS to connect the 4210-CVU to the MOSFET and perform a C-V measurement between the gate of the MOSFET (CV HI) and the source, drain, and bulk (CV LO).
Page 95: Add An Action To Perform Cvu Compensation
Model 4200A-SCS Parameter Analyzer User's Manual Section 8: Use the 4200A-CVIV Multi-Switch 2. In the Library, select Projects. 3. Select and then Create a New Project. Figure 108: New project option, Projects tab 4. Select Yes when prompted to replace the existing project.
Page 96 Section 8: Use the 4200A-CVIV Multi-Switch Model 4200A-SCS Parameter Analyzer User's Manual 2. From the project tree, select the cvu-cviv-comp-collect action. Figure 111: cvu-cviv-comp-collect Action 3. From the CVIV Multi-Switch Configuration terminal settings box, set the output mode of the 4200A-CVIV to Two Wire.
Page 97: Add A Device
Model 4200A-SCS Parameter Analyzer User's Manual Section 8: Use the 4200A-CVIV Multi-Switch 9. A dialog box is displayed with instructions to remove the device-under-test (DUT) from the test fixture or lift the probes before performing open compensation. Remove the DUT before selecting 10.
Page 98: Add An Action For Switching The Smus To The Device
Section 8: Use the 4200A-CVIV Multi-Switch Model 4200A-SCS Parameter Analyzer User's Manual Add an action for switching the SMUs to the device To add an action: 1. Select Actions. 2. Type cviv into the search bar, then select Search. 3. Select the cviv-configure action, then select Add to copy it to the project tree.
Page 99: Add A Test For Making I-V Measurements
Model 4200A-SCS Parameter Analyzer User's Manual Section 8: Use the 4200A-CVIV Multi-Switch 2. In the project tree, highlight the cviv-configure action. 3. In the CVU 2/4 Wire Mode settings, set the output mode of the 4200A-CVIV to Two Wire. 4. In the CVIV Display Config settings, change the name of each channel to match the corresponding MOSFET terminal.
Page 100: Add An Action For Switching The Cvu To The Output Terminals Of The 4200A-Cviv
Section 8: Use the 4200A-CVIV Multi-Switch Model 4200A-SCS Parameter Analyzer User's Manual 2. Select Tests. 3. To find the test, type vds-id into the search bar, then select Search. 4. Select the vds-id test, then select Add to copy it to the project tree.
Page 101: Configure The Action
Model 4200A-SCS Parameter Analyzer User's Manual Section 8: Use the 4200A-CVIV Multi-Switch Configure the action To configure the action: 1. Select Configure. Figure 120: Configure highlighted 2. In the project tree, highlight the cviv-configure action. Figure 121: Populated cviv-configure action 3.
Page 102: Add A Test For Making C-V Measurements
Section 8: Use the 4200A-CVIV Multi-Switch Model 4200A-SCS Parameter Analyzer User's Manual Add a test for making C-V measurements To add a test: 1. Choose Select. Figure 122: Select highlighted 2. Select Tests. 3. Type cv-nmosfet into the search bar, then select Search.
Page 103 Model 4200A-SCS Parameter Analyzer User's Manual Section 8: Use the 4200A-CVIV Multi-Switch 6. Select the Gate terminal. Figure 125: Selected Gate terminal 4200A-SCS-900-01 Rev A. / September 2016 8-13...
Page 104 Section 8: Use the 4200A-CVIV Multi-Switch Model 4200A-SCS Parameter Analyzer User's Manual 7. Configure the voltage settings and test frequency as needed. 8. In the right pane, select Terminal Settings and enable Open compensation. Figure 126: Terminal Settings panel with Open compensation selected 8-14 4200A-SCS-900-01 Rev A.
Page 105: Run The Project And Review The Results
Model 4200A-SCS Parameter Analyzer User's Manual Section 8: Use the 4200A-CVIV Multi-Switch Run the project and review the results To run the project and review the results: 1. Select the test name at the top of the project tree. In this example it is called CVIV_COMPENSATION.
Page 106: Pmu For Pulsed I-V Measurements On A Mosfet
1 and a pulsed voltage sweep to the drain terminal using PMU1 channel 2. The drain current is measured as a function of the drain voltage and displayed in the graph in the Analyze pane. Equipment required • One 4200A-SCS with the following instruments: • One 4225-PMU •...
Page 107: Device Connections
MOSFET. Hazardous voltages may be present on all output and guard terminals. To prevent electrical shock that could cause injury or death, never connect or disconnect from the 4200A-SCS while the output is on. To prevent electric shock, test connections must be configured such that the user cannot come in contact with test leads, conductors, or any device under test (DUT) that is in contact with the conductors.
Page 108: Connection Schematic
Model 4200A-SCS Parameter Analyzer User's Manual Section 9: PMU for pulsed I-V measurements on a MOSFET Connection schematic The hardware connections from the output terminals of the PMU and the two RPMS to the MOSFET are shown in the following figures. Connect one CA-547-2A RPM interconnect cable from each PMU channel to the appropriate RPM.
Page 109: Set Up The Measurements In Clarius
The example below illustrates connections from the RPMs to the SMA to SSMC adapter cables (4200-PRB-C) and then to the probes and device terminals on a wafer. For more information on this cable and similar connections, see the Model 4200A-SCS Reference Manual. Figure 129: Connections from RPM outputs to the MOSFET on a wafer...
Page 110: Search For And Select An Existing Test
Model 4200A-SCS Parameter Analyzer User's Manual Section 9: PMU for pulsed I-V measurements on a MOSFET 2. In the Library, select Projects. 3. Select and then Create a New Project. Figure 131: Select a New Project from the Project Library 4.
Page 111: Configure The Test
Section 9: PMU for pulsed I-V measurements on a MOSFET Model 4200A-SCS Parameter Analyzer User's Manual Configure the test To configure the test: 1. Select Configure. Figure 133: Configure button highlighted 2. From the Key Parameters pane, adjust the pulse voltage sweep levels of PMU1-2 on the Drain terminal and the Pulse Step Voltage of PMU1-1 on the Gate terminal, as needed.
Page 112 Model 4200A-SCS Parameter Analyzer User's Manual Section 9: PMU for pulsed I-V measurements on a MOSFET 3. From the Test Settings pane and Advanced Test Settings dialog box, adjust the Pulse Settings and Timing Parameters, as needed. Figure 135: Test Settings pane and Test Settings Advanced dialog box...
Page 113: Run The Test And Analyze The Results
Section 9: PMU for pulsed I-V measurements on a MOSFET Model 4200A-SCS Parameter Analyzer User's Manual 4. From the Terminal Settings pane and Advanced Terminal Settings dialog box, you can adjust the voltage source and current measurement parameters, as needed.
Page 114 Model 4200A-SCS Parameter Analyzer User's Manual Section 9: PMU for pulsed I-V measurements on a MOSFET The data and the graph are displayed in the Analyze pane as shown in the next figure. Figure 139: Analyze results pane with data and graph displayed...
Page 115 For more detailed information, refer to the Learning Center, which you can access by selecting this icon on your desktop: Figure 140: 4200A-SCS Learning Center icon The Learning Center contains a variety of content to help you learn how to use your 4200A-SCS, including •...
Page 116 • 2-1 GPIB instrument connections • 2-10 install preamp on probe station • 2-15 LAN connections • 2-9, 2-12 Model 4200A-SCS system Hardware features and capabilities Instrument panels Front panel • 2-1 monitor connections, external • 2-5 monitor, external • 2-5 Mounting PreAmps in a probe station •...
Page 117 All other trademarks and trade names are the property of their respective companies. Keithley Instruments Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-800-935-5595 • www.tek.com/keithley A Gr eater M easur e of C onfi dence...

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