Set Up Wafer Geometry - Keithley 4200A-SCS Reference Manual

Model 4200A-SCS Parameter Analyzer Reference Manual

Set up wafer geometry

To set up wafer geometry:
1. Click the Prober Setup icon on the toolbar, shown below.
2. Select Wafermap Setup tab to set up wafer information, such as wafer size, scan distance, X
step size, and Y step size.
3. Select the Chuck Setup tab to enter Z chuck information, such as Z travel and overdrive
distance.
4200A-901-01 Rev. C / February 2017
Figure 794: CM500 Prober Setup icon
Figure 795: CM500 Prober Setup Sheet
Figure 796: CM500 Chuck Setup Sheet
Appendix K: Using a Signatone CM500 Prober
K-5