Probe Sites (Die; Chuck Movement - Keithley 4200A-SCS Reference Manual

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Appendix F: Set up a probe station

Probe sites (die)

Dies marked as probe sites in the prober software define the areas to be tested. The physical location

of the probe site can be any coordinates selected on the wafer. Marking a die as a probe site also

selects the site for probing. The coordinates of each probe site are referenced with respect to the

coordinates of the reference site. For example, with the reference site of (3, 1), the coordinates of the

five probe sites shown in the following figure are (3,1), (3, 2), (3, 4), (-1, 4), and (-2, 3).

Coordinate movements are described using a first quadrant coordinate system and x, y coordinates

(+x values move east and +y values move north). To accommodate this system, you must configure

the correct quadrant (prober dependent). Applicable quadrant setup instructions are in the appendix

for your prober. When you specify chuck movements, use the coordinates of the site. The chuck will

automatically move in the proper direction to position the probe pins over the correct die. For

example, to move from the reference site to the die up one and over one, command the chuck to

move (1, 1). Refer to the following figure for a representation of the relationship between chuck

movement and (x, y) coordinates.

The chuck moves and the probe pins remain stationary. Notice that the chuck movement is opposite

of the coordinate system of the probe pins.

Model 4200A-SCS Parameter Analyzer Reference Manual

Figure 626: Sample probe site location

4200A-901-01 Rev. C / February 2017