Keithley 4200A-SCS Reference Manual page 1246

Model 4200A-SCS Parameter Analyzer Reference Manual Appendix G: Using a Cascade Microtech PA200 Prober
2. From the ProberBench NT window, select the Wafer Map file.
Figure 642: ProberBench NT window
3. From the WaferMap dialog box, create or open a WaferMap.
Figure 643: WaferMap dialog box
4200A-901-01 Rev. C / February 2017 G-11