Software Versions; Probe Station Configuration; Set Up Communications - Keithley 4200A-SCS Reference Manual

Appendix H: Using a Micromanipulator 8860 Prober

Software versions

The following list contains the software versions used to verify the configuration of the 8860 prober
with the 4200A-SCS:
Product Name:
Product Version:
Product Name:
Product Version:
Product Name:
Product Version:
Product Name:
Product Version:
Product Name:
Product Version:
Product Name:
Product Version:

Probe station configuration

Ensure that you are familiar with the Micromanipulator 8860 prober and its supporting documentation
before attempting setup, configuration, or operation.
To set up and configure the 8860 prober for use with the 4200A-SCS, you will:
•

Set up communications

•
Set up wafer geometry
•
Create a site definition and define a probe list
•
Load, align, and contact the wafer
Each step is detailed in the following topics.
Set up communications
To set up communications:
1. Turn on power to the 4200A-SCS.
2. Turn on power to the prober.
3. Ensure that the vacuum has been properly connected.
4. On the pcBridge computer, connect the pcBridge computer's RS232 port (on the rear panel of the
pcBridge computer) to the 4200A-SCS COM1 port. Use a DB25 female to DB9 female cable
(shielded null modem cable). See the figure below for details.
H-2
Model 4200A-SCS Parameter Analyzer Reference Manual
pcBridge
2.0.2
pcIndie
2.0.7
pcLaunch
2.0.9
pcNav
2.0.9
pcWafer
2.0.8
pcRouter
2.0.9
(on page H-2)
(on page H-6)
(on page H-8)
(on page H-9)
4200A-901-01 Rev. C / February 2017