Understanding Site Coordinate Information; Reference Site (Die - Keithley 4200A-SCS Reference Manual

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Model 4200A-SCS Parameter Analyzer Reference Manual

Understanding site coordinate information

The next topics describe the reference site, probe sites, and chuck movement.

The designated reference site is defined in the prober-init action by selecting Configure and

entering the parameters. This is the first stopping point of the prober once aligned. The physical

location of the reference site may be any coordinate that is selected on the wafer and is selected for

probing or marked for probing through the prober software. The coordinate system of the wafer is

also defined through the prober software. For example, the coordinates of the reference site shown in

the following figure are (3, 1).

For parameter descriptions, refer to the Help pane.

The defined reference site must match the physical location of the wafer. This is the location on the

wafer directly below the probe pins after the wafer has been loaded.

4200A-901-01 Rev. C / February 2017

Figure 625: Sample reference site location

Appendix F: Set up a probe station