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Model 4200A-SCS

Parameter Analyzer

Reference Manual

4200A-901-01 Rev. C / February 2017

*P4200A-901-01C*

4200A-901-01C

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Page 1 Model 4200A-SCS Parameter Analyzer Reference Manual 4200A-901-01 Rev. C / February 2017 *P4200A-901-01C* 4200A-901-01C...
Page 2 Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part, without the prior written approval of Keithley Instruments is strictly prohibited. All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments. Other brand names are trademarks or registered trademarks of their respective holders.
Page 4: Safety Precautions
Keithley Instruments products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages.
Page 5 (note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley Instruments office for information.
Page 6: Table Of Contents
Table of Contents Introduction ......................... 1-1 Introduction .......................... 1-1 4200A-SCS system overview ....................1-2 Source-Measure Unit (SMU) ..................... 1-3 Preamplifier ..........................1-3 Pulse source-measure hardware ....................1-3 Ground unit (GNDU) ......................... 1-3 Capacitance-voltage (CVU) hardware ..................1-3 Software features ........................1-4 Embedded computer policy ....................
Page 7 Table of Contents Model 4200A-SCS Parameter Analyzer Reference Manual Source-measure unit (SMU) with 4200-PA overview ............3-11 Basic SMU/preamplifier circuit configuration ................3-12 Compliance limit for a SMU with a 4200-PA ................3-12 Using minimum compliance ....................3-12 Operating boundaries ......................3-13 Preamplifier terminals and connectors ..................
Page 8 Model 4200A-SCS Parameter Analyzer Reference Manual Table of Contents Run the test and review results ....................4-24 Timing diagrams ......................... 4-25 CVU using voltage bias ......................4-25 CVU using voltage sweep ....................... 4-26 CVU using voltage list sweep ....................4-27 CVU using frequency sweep - DC bias ...................
Page 9 Table of Contents Model 4200A-SCS Parameter Analyzer Reference Manual Higher channel count test example ..................5-27 PMU connection compensation ..................5-30 Perform connection compensation ..................5-32 Enabling connection compensation ..................5-33 Load-line effect compensation (LLEC) for the PMU ............5-34 Methods to compensate for load-line effect................
Page 10 Model 4200A-SCS Parameter Analyzer Reference Manual Table of Contents Set the key parameters ......................6-14 Run a simple test ....................... 6-15 Working with My Projects ....................6-16 Open a project ......................... 6-16 Create a new project from My Projects ................... 6-17 Export a project ........................
Page 11 Table of Contents Model 4200A-SCS Parameter Analyzer Reference Manual AVG Formulator function ....................... 6-231 MAVG Formulator function ....................6-232 MAX Formulator function....................... 6-232 MEDIAN Formulator function ....................6-233 MIN Formulator function ......................6-233 STDEV Formulator function ....................6-233 Trigonometry ......................... 6-234 ACOS Formulator function ....................
Page 12 Model 4200A-SCS Parameter Analyzer Reference Manual Table of Contents ATANH Calc worksheet function ................... 6-276 AVERAGE Calc worksheet function ..................6-277 COS Calc worksheet function ....................6-277 COSH Calc worksheet function ..................... 6-278 DAY Calc worksheet function ....................6-278 EXP Calc worksheet function ....................6-279 FIXED Calc worksheet function .....................
Page 13 Add an external instrument ....................7-4 Supported external equipment ....................7-6 Add a driver for unsupported equipment ................... 7-7 Use KCon to add equipment to the 4200A-SCS ............... 7-7 Remove an external instrument ................... 7-9 Validate Configuration ......................7-9 Update preamplifier, RPM, and CVIV Configurations ............7-10 Update the preamplifier configuration ..................
Page 14 Model 4200A-SCS Parameter Analyzer Reference Manual Table of Contents Update the 4200A-CVIV configuration ..................7-11 Save ........................... 7-11 System Configuration Summary ..................7-11 System Configuration properties ..................7-12 KI 4200A SCS Properties ......................7-12 Instrument properties and connections ................... 7-14 KXCI Settings ........................
Page 15 Table of Contents Model 4200A-SCS Parameter Analyzer Reference Manual Ethernet connections ........................ 9-3 Using KCon to configure KXCI ..................... 9-3 Setting the remote control mode (GPIB or ethernet) ..............9-4 Starting KXCI and the GPIB command interpreter .............. 9-5 GPIB status indicators (GPIB communications only) ..............9-6 Graph display ..........................
Page 16 Model 4200A-SCS Parameter Analyzer Reference Manual Table of Contents TO ............................9-64 TS ............................9-65 KXCI CVU commands ......................9-66 User mode..........................9-66 System mode .......................... 9-66 Modeless commands ......................9-72 Code examples ........................9-78 Calling KULT user libraries remotely ................. 9-81 UL ............................
Page 17 Table of Contents Model 4200A-SCS Parameter Analyzer Reference Manual Maintenance ......................12-1 Introduction ........................12-1 Line fuses ........................... 12-1 Front-panel display ......................12-2 Cleaning the front-panel display ....................12-2 Adjusting the display ....................... 12-2 Air intake ventilation screens ..................... 12-2 Solid-state hard drive maintenance ...................
Page 18 Model 4200A-SCS Parameter Analyzer Reference Manual Table of Contents delay ............................. 13-12 devint ............................ 13-13 disable ........................... 13-15 enable ........................... 13-16 execut ........................... 13-16 getinstattr ..........................13-17 getinstid ..........................13-18 getinstname ........................... 13-18 getlpterr ..........................13-19 imeast ........................... 13-19 inshld ............................. 13-19 kibcmd ...........................
Page 19 Table of Contents Model 4200A-SCS Parameter Analyzer Reference Manual getstatus ..........................13-70 intgX ............................13-73 limitX ............................. 13-75 lorangeX ..........................13-76 measX ........................... 13-78 mpulse ..........................13-80 pulseX ........................... 13-81 rangeX ..........................13-83 rtfary ............................13-84 setauto ..........................13-85 ssmeasX ..........................13-86 sweepX ..........................
Page 20 Model 4200A-SCS Parameter Analyzer Reference Manual Table of Contents pulse_trig_source ........................ 13-155 pulse_vhigh ......................... 13-157 pulse_vlow .......................... 13-159 pulse_width ......................... 13-161 seg_arb_define ........................13-162 seg_arb_file ......................... 13-165 LPT commands for the CVUs ..................13-165 adelay ..........................13-166 asweepv ..........................13-167 bsweepX ..........................
Page 21 Table of Contents Model 4200A-SCS Parameter Analyzer Reference Manual Switch matrix mainframes ......................A-7 Switch matrix connections ....................A-7 Typical SMU matrix card connections ..................A-7 Typical preamplifier matrix card connections ................A-9 Typical CVU matrix card connections ..................A-11 Connection scheme settings ....................
Page 22 Model 4200A-SCS Parameter Analyzer Reference Manual Table of Contents Signal connections ........................C-3 GPIB connections ........................C-5 Using KCon to add a Keysight LCR Meter to the system ............ C-5 Model 4284A or 4980A test example ................... C-6 C-V sweep..........................C-6 HP4284ulib user library ......................
Page 23 Software versions ........................G-1 Probe station configuration ....................G-2 Set up communications ......................G-2 Set up communications on the 4200A-SCS ................G-4 Set up communications on the prober ..................G-6 Set up wafer geometry ...................... G-10 Create a site definition and define a probe list ..............G-13 Load, align, and contact the wafer ..................
Page 24 Model 4200A-SCS Parameter Analyzer Reference Manual Table of Contents Using a Micromanipulator 8860 Prober ..............H-1 Micromanipulator 8860 prober software ................H-1 Software versions ........................H-2 Probe station configuration ....................H-2 Set up communications ......................H-2 Set up wafer geometry ......................H-6 Create a site definition and define a probe list ................
Page 25 Table of Contents Model 4200A-SCS Parameter Analyzer Reference Manual Using a Signatone CM500 Prober ................K-1 Signatone CM500 prober software ..................K-1 Software versions ........................K-1 Probe station configuration ....................K-1 Set up communications ......................K-2 Modify the prober configuration file ................... K-3 Set up wafer geometry ......................
Page 26: Introduction
4200A-SCS system overview ........... 1-2 Embedded computer policy ............1-4 Introduction The Keithley Instruments Model 4200A-SCS Parameter Analyzer is a customizable and fully- integrated parameter analyzer that provides synchronized insight into current-voltage (I-V), capacitance-voltage (C-V), and ultra-fast pulsed I-V characterization. The highest performance parameter analyzer, the 4200A-SCS accelerates semiconductor, materials, and process development.
Page 27: 4200A-Scs System Overview
Model 4200A-SCS Parameter Analyzer Reference Manual 4200A-SCS system overview The 4200A-SCS is an automated system that provides I-V, pulsed I-V, and C-V characterization of semiconductor devices and test structures. Its advanced digital sweep parameter analyzer combines speed and accuracy for deep sub-micron characterization.
Page 28: Source-Measure Unit (Smu)
(on page 5-1) for details. Ground unit (GNDU) The ground unit on the rear panel of the 4200A-SCS provides a convenient method of making ground connections. This eliminates the need to use a SMU for this purpose. For details, refer to...
Page 29: Software Features
4200A-SCS test resources. Embedded computer policy If you install software that is not part of the standard application software for the 4200A-SCS, the non-standard software may be removed if the instrument is sent in for service. Back up the applications and any data related to them before sending the instrument in for service.
Page 30: Connections And Configuration
(DUTs) is described in this section. Maximum signal limits The 4200A-SCS is provided with an interlock circuit that must be positively activated in order for the high voltage output to be enabled. The interlock helps facilitate safe operation of the equipment in a test system.
Page 31: Shielding And Guarding
) will be peak present in the test circuit. To prevent electrical shock that could cause injury or death, never use the 4200A-SCS in a test circuit without a properly installed and configured safety shield. Guarding (on page 3-23) for more information on the principles and advantages of guarding.
Page 32 Model 4200A-SCS Parameter Analyzer Reference Manual Section 2: Connections and configuration Figure 3: Device shielding basic circuit Figure 4: Device guarding 4200A-901-01 Rev. C / February 2017...
Page 33: Signal Integrity
Signal integrity To maintain signal integrity, especially at low current levels, consider the following when making signal connections between the 4200A-SCS instrumentation and the device under test (DUT): • Use only low-noise triaxial cables such as those provided with the SMU (4200-MTRX-X) and preamplifier (4200-TRX-X).
Page 34 Model 4200A-SCS Parameter Analyzer Reference Manual Section 2: Connections and configuration SMU local sense connections The next figure shows typical SMU connections using local sensing. Use a triaxial cable such as the 4200-MTRX-X to make your connections as follows: •...
Page 35 Model 4200A-SCS Parameter Analyzer Reference Manual Basic device connections for SMUs The next figures show the basic device connections to the 4200A-SCS rear panel, independent of the device mounting, test fixtures, and probers. Figure 8: Two-terminal device connections to SMUs and preamplifiers...
Page 36: Preamplifier Connections
Model 4200A-SCS Parameter Analyzer Reference Manual Section 2: Connections and configuration Preamplifier connections When using more than one preamplifier, use the ground unit for circuit COMMON connections instead of the outer shield of the preamplifier terminals (refer to Using the ground unit (on page 2-8)).
Page 37: Using The Ground Unit
GNDU COMMON binding post terminal. The GNDU also has a SENSE terminal. The SENSE LO signal of each instrument installed in the 4200A-SCS is connected to the GNDU SENSE terminal. As a result, all SMU measurements are made relative to GNDU SENSE, which by default is connected to COMMON.
Page 38 Model 4200A-SCS Parameter Analyzer Reference Manual Section 2: Connections and configuration Ground unit and SMU remote sense connections The next figure shows a typical remote sense connection scheme using two SMUs, two DUTs, and the ground unit. Make connections as follows: •...
Page 39 Section 2: Connections and configuration Model 4200A-SCS Parameter Analyzer Reference Manual Ground unit and preamplifier local sense connections The next figure shows a typical local sense connection scheme using two preamplifiers, two DUTs, and the ground unit. Make connections as follows: •...
Page 40 Model 4200A-SCS Parameter Analyzer Reference Manual Section 2: Connections and configuration Ground unit and preamplifier remote sense connections The next figure shows a typical remote sense connection scheme using two preamplifiers, two DUTs, and the ground unit. Make connections as follows: •...
Page 41: Smu Circuit Common Connections
Section 2: Connections and configuration Model 4200A-SCS Parameter Analyzer Reference Manual Figure 18: Ground unit and preamplifier remote sense connections schematic SMU circuit COMMON connections Some test situations require SMUs to be connected to each DUT terminal. In these situations, circuit COMMON is not hardwired to any of the DUT terminals.
Page 42: 4200-Smu And 4210-Smu Overview
Model 4200A-SCS Parameter Analyzer Reference Manual Section 2: Connections and configuration Figure 20: Typical SMU COMMON connections schematic 4200-SMU and 4210-SMU overview The following paragraphs discuss the basic characteristics of both the 4200-SMU and 4210-SMU. Basic SMU circuit configuration The basic SMU circuit configuration is shown in the next figure. The SMU is essentially a voltage or current source in series with a current meter, connected in parallel with a voltage meter.
Page 43 Section 2: Connections and configuration Model 4200A-SCS Parameter Analyzer Reference Manual Figure 21: Basic SMU source-measure configuration SMU terminals and connectors The locations and configuration of the 4200-SMU and 4210-SMU terminals are shown in the next figure. Basic information about these terminals is summarized below.
Page 44 The remote sense capability of the ground unit should be used instead of the SENSE LO of a SMU. If it is necessary to use the SENSE LO terminal of a SMU, the SENSE LO terminals of all SMUs being used in a single 4200A-SCS should be connected to the DUT. 4200A-901-01 Rev. C / February 2017...
Page 45 Section 2: Connections and configuration Model 4200A-SCS Parameter Analyzer Reference Manual SENSE terminal The SENSE terminal is a miniature triaxial connector used to apply the SMU SENSE signal to the DUT in a remote sense application. • The center pin is SENSE •...
Page 46: Test Equipment Connections
Model 4200A-SCS Parameter Analyzer Reference Manual Section 2: Connections and configuration Figure 23: Basic SMU and preamplifier source-measure configuration Test equipment connections The various forms of test equipment that can be used with the 4200A-SCS include: • Recommended connecting cables •...
Page 47: Recommended Connecting Cables
To avoid high voltage exposure that could result in personal injury or death, whenever the interlock of the 4200A-SCS is asserted, the FORCE and GUARD terminals of the SMUs and preamplifier should be considered to be at high voltage, even if they are programmed to a non-hazardous voltage current.
Page 48 See the Learning Center on your 4200A-SCS for a copy. Figure 24: Typical test fixture The 4200A-SCS functions on all current ranges and up to ±20 V without the interlock being asserted. 4200A-901-01 Rev. C / February 2017 2-19...
Page 49: Prober Connections
Add an interlock switch to the fixture to ensure that hazardous voltages are not present when the exterior enclosure of the test fixture is open. The 4200A-SCS voltage output will be higher when the exterior enclosure of the test fixture is closed. •...
Page 50 Section 2: Connections and configuration Figure 25: Interlock connector wiring Turning the 4200A-SCS output off does not place the instrument in a safe state (an interlock is provided for this function). Hazardous voltages may be present on all output and guard terminals.
Page 51: Control And Data Connections
To avoid electrical interference, use only shielded IEEE-488 connecting cables such as the Keithley Instruments 7007-1 and 7007-2. Configuring IEEE-488 controller operation The 4200A-SCS can be configured to operate either as a GPIB controller or GPIB subordinate. The 4200A-SCS acts as a GPIB controller when Clarius is running. Refer to Clarius (on page 6-2) for more information about Clarius.
Page 52: Pulse Cards
Model 4200A-SCS Parameter Analyzer Reference Manual Section 2: Connections and configuration Pulse cards The Keithley Instruments pulse cards are two-channel pulse generator instruments. There are two pulse generator instruments available for the 4200A-SCS: • 4220-PGU High-Voltage Pulse Generator Unit (PGU) •...
Page 53: Standard Pulse
Section 2: Connections and configuration Model 4200A-SCS Parameter Analyzer Reference Manual Figure 26: Simplified schematic of a 4220-PGU channel Standard pulse Each channel of a pulse card can be configured for standard pulse output. The next figure shows an example of standard pulse output.
Page 54: Configuring The System
However, if you add supported external instruments such as switch matrices, the 4200A-CVIV Multi- Switch, external GPIB instruments, and probe stations, you must configure the system so that Clarius and KXCI can use these resources. Also, if you need remote operation of the 4200A-SCS through KXCI, you must further configure the system.
Page 56: Source-Measure Hardware
Section 3 Source-measure hardware In this section: Source-measure units .............. 3-1 4200-SMU and 4210-SMU overview ........3-1 Source-measure unit (SMU) with 4200-PA overview ..... 3-11 Ground unit (GNDU) overview ..........3-19 Source-measure concepts ............. 3-23 Source-measure units This section provides information about the 4200-SMU and 4210-SMU source-measure units and the related instruments, including: •...
Page 57: Source-Measure Hardware Overview
Model 4200A-SCS Parameter Analyzer Reference Manual Source-measure hardware overview The 4200A-SCS mainframe accepts up to eight SMUs, each of which may be used with or without preamplifiers. Four of the SMUs may be high-power 4210-SMU models. Figure 29: Source-measure hardware overview Basic SMU circuit configuration The basic SMU circuit configuration is shown in the next figure.
Page 58: Compliance Limits
Model 4200A-SCS Parameter Analyzer Reference Manual Section 3: Source-measure hardware Figure 30: Basic SMU source-measure configuration Compliance limits You can set a limit that stops a SMU from sourcing a current or voltage that is more than that limit. This limit is called compliance and helps prevent damage to the device under test (DUT). The SMU will not exceed the maximum limit set for compliance.
Page 59: Source Or Sink
Section 3: Source-measure hardware Model 4200A-SCS Parameter Analyzer Reference Manual If you set a specific measurement range, compliance can also be restricted by the range. Compliance must be more than 11% of the measurement range. If not, an event is generated and the compliance setting is automatically changed to the maximum compliance value for the selected range.
Page 60 Model 4200A-SCS Parameter Analyzer Reference Manual Section 3: Source-measure hardware 4200-SMU source or sink In the general operating boundaries in the next figure, the 100 mA, 20 V and 10 mA, 200 V magnitudes are nominal values. The actual maximum output magnitudes of the 4200-SMU are 105 mA, 21 V and 10.5 mA, 210 V.
Page 61: I-Source Operating Boundaries
Section 3: Source-measure hardware Model 4200A-SCS Parameter Analyzer Reference Manual I-Source operating boundaries Limit lines are boundaries that represent the operating limits of the SMU for a certain quadrant of operation. The operating point can be anywhere inside (or on) these limit lines. The limit line boundaries for the other quadrants are similar.
Page 62: I-Source Operation Examples
Model 4200A-SCS Parameter Analyzer Reference Manual Section 3: Source-measure hardware I-Source operation examples The next figures show operation examples for resistive loads that are 2 kΩ and 8 kΩ, respectively. For these examples, the SMU is programmed to source 10 mA and limit (compliance) 40 V. The SMU is sourcing 10 mA to the 2 kΩ...
Page 63: V-Source Operating Boundaries
Section 3: Source-measure hardware Model 4200A-SCS Parameter Analyzer Reference Manual V-Source operating boundaries The next two figures show the operating boundaries for the voltage source. Only the first quadrant of operation is covered; operation in the other three quadrants is similar.
Page 64 Model 4200A-SCS Parameter Analyzer Reference Manual Section 3: Source-measure hardware As shown in the following figure, the load line for 20 kΩ intersects the 50 V voltage source line at 2.5 mA. Figure 39: Normal voltage source operation The next figure shows what happens if the resistance of the load is decreased to 8 kΩ. The DUT load line for 8 kΩ...
Page 65: Source I Measure I And Source V Measure V
(wiring) with double insulation for 250 V, Category O. See IEC 61010-1 safety standards for details. When connecting to the 4200A-SCS SMU outputs, make sure to use devices and cables that have ratings for the sourced voltages. Otherwise, they will not properly insulate the external connections to the instrument and pose a shock hazard.
Page 66: Source-Measure Unit (Smu) With 4200-Pa Overview
Generally the remote sense capability of the ground unit should be used instead of the SENSE LO of a SMU. If it is necessary to use the SENSE LO of a SMU, the SENSE LO terminals of all SMUs being used in that 4200A-SCS should be connected to the DUT. Preamplifier control connector The preamplifier control (PA CNTRL) terminal is a 15-pin D-subminiature connector that provides both power and signal connections to the 4200-PA Remote Preamplifier.
Page 67: Basic Smu/Preamplifier Circuit Configuration
DUT LO is connected to COMMON. See Basic source-measure connections (on page 2-1) in the 4200A-SCS User’s Manual for more detailed information. Figure 42: Basic SMU and preamplifier source-measure configuration Compliance limit for a SMU with a 4200-PA A current limit can be programmed for a SMU with a 4200-PA when it is sourcing voltage. However, a voltage limit can be programmed when sourcing current.
Page 68: Operating Boundaries
Model 4200A-SCS Parameter Analyzer Reference Manual Section 3: Source-measure hardware Operating boundaries As with the SMUs alone, adding a 4200-PA preamplifier also allows operation in any of the four quadrants. The four quadrants of operation for the 4200-PA with the 4200-SMU and 4210-SMU are shown in the following figures.
Page 69: Preamplifier Terminals And Connectors
(wiring) with double insulation for 250 V, Category O. See IEC 61010-1 safety standards for details. When connecting to the 4200A-SCS SMU outputs, make sure to use devices and cables that have ratings for the sourced voltages. Otherwise, they will not properly insulate the external connections to the instrument and pose a shock hazard.
Page 70: Sense Terminal
Model 4200A-SCS Parameter Analyzer Reference Manual Section 3: Source-measure hardware Figure 45: 4200-PA connectors SENSE terminal The SENSE terminal is a standard triaxial connector used to apply the ground unit SENSE signal to the DUT in a remote sense application. The center pin is SENSE, the inner shield is GUARD, and the outer shield is circuit COMMON.
Page 71: Preamplifier Mounting
As shipped, any 4200-PA units ordered with the 4200A-SCS are factory-mounted on the rear panel. Do not remove the preamplifiers from the 4200A-SCS unless they are to be mounted at a remote site. The preamplifier may either be mounted directly to the 4200-SMU or 4210-SMU on the 4200A-SCS rear panel, or mounted and connected remotely.
Page 72 Model 4200A-SCS Parameter Analyzer Reference Manual Section 3: Source-measure hardware Figure 46: Typical preamplifier remote mounting Rear panel mounting A mounting foot secures the preamplifier to the rear panel. A mounting bracket provides extra support for all the preamplifiers, as shown in the next figure. If you remove the preamplifiers to mount them at a remote site, ensure that you install the screws in the chassis and retain the bracket for future use.
Page 73: Smu Circuit Common Connections
Section 3: Source-measure hardware Model 4200A-SCS Parameter Analyzer Reference Manual SMU circuit COMMON connections Some test situations require SMUs to be connected to each DUT terminal. In these situations, circuit COMMON is not hardwired to any of the DUT terminals. Therefore, the SMUs must be able to internally connect circuit COMMON to their FORCE signal when the test requires a DUT terminal to be connected to COMMON.
Page 74: Ground Unit (Gndu) Overview
The ground unit, shown in the next figure, provides convenient access to circuit COMMON, which is the measurement ground signal shared by all installed 4200A-SCS instrumentation. In addition, the GNDU SENSE terminal provides access to the SMU SENSE LO signals.
Page 75: Ground Unit Connections
Section 3: Source-measure hardware Model 4200A-SCS Parameter Analyzer Reference Manual Ground unit connections The next figure shows how the various GNDU signals are related to the SMU signals. Note that the GNDU FORCE signal is circuit COMMON. The GNDU SENSE terminal is connected to each SMU SENSE LO signal through a unique auto-sense resistor.
Page 76: Ground Unit Terminals And Connectors
Model 4200A-SCS Parameter Analyzer Reference Manual Section 3: Source-measure hardware Figure 53: Full-Kelvin preamp - ground unit connections Ground unit terminals and connectors Refer to the Using the ground unit (on page 2-8) for the locations and configuration of the GNDU terminals.
Page 77: Common Terminal
Section 3: Source-measure hardware Model 4200A-SCS Parameter Analyzer Reference Manual COMMON terminal The COMMON terminal is a binding post that provides access to circuit COMMON. Normally, a link is connected between ground unit COMMON and chassis ground, but it may be...
Page 78: Source-Measure Concepts
To avoid high voltage exposure that could result in personal injury or death, whenever the interlock of the 4200A-SCS is asserted, the FORCE and GUARD terminals of the SMUs and preamplifier should be considered to be at high voltage, even if they are programmed to a non-hazardous voltage current.
Page 79 Section 3: Source-measure hardware Model 4200A-SCS Parameter Analyzer Reference Manual The next figure shows the triaxial cable connections to the device under test (DUT). Note that GUARD is not connected in this example, but it can be routed internally to a test fixture, as described Test fixture guarding (on page 3-25).
Page 80 Model 4200A-SCS Parameter Analyzer Reference Manual Section 3: Source-measure hardware In the guarded circuit of the next figure, however, the cable shield is driven by a unity-gain, low- impedance amplifier (GUARD). Since the voltage across R is nearly 0 V, the leakage current is effectively eliminated.
Page 81 Section 3: Source-measure hardware Model 4200A-SCS Parameter Analyzer Reference Manual The following figures show how guard can eliminate leakage current through the insulators in a test fixture. In the next figure, leakage current (I ) flows through the insulators (R...
Page 82: Local And Remote Sensing
Model 4200A-SCS Parameter Analyzer Reference Manual Section 3: Source-measure hardware Local and remote sensing There are two types of sensing: local and remote. With local sensing, only two terminals are connected to the DUT: SMU FORCE and Ground Unit FORCE (COMMON), as shown in the following figure.
Page 83 Section 3: Source-measure hardware Model 4200A-SCS Parameter Analyzer Reference Manual Sense selection The sensing method is automatically selected depending on the connection method used. To use local sensing, connect only SMU FORCE and ground unit FORCE (COMMON) to the DUT (see previous figure "Local Sensing").
Page 84 Model 4200A-SCS Parameter Analyzer Reference Manual Section 3: Source-measure hardware Remote sensing The remote sensing method shown in the next figure is generally preferred for measurements on low- impedance DUTs. With this configuration, the test current I is forced through the DUT through one set of test cables, while the voltage across the DUT is measured through a second set of sense cables.
Page 85: Sink Overview
Section 3: Source-measure hardware Model 4200A-SCS Parameter Analyzer Reference Manual Sink overview When operating as a sink (V and I have opposite polarity), the SMU is dissipating power rather than sourcing it. An external source (such as another SMU) or an energy storage device (like a capacitor) can force operation into the sink region.
Page 86: Source-Measure Considerations
Model 4200A-SCS Parameter Analyzer Reference Manual Section 3: Source-measure hardware 4210-SMU sink boundaries Nominal 4210-SMU sink boundaries are shown in the next figure. Actual boundaries are 210 V at 105 mA or 21 V at 1.05 A. Figure 66: 4210-SMU and 4200-PA operating boundaries...
Page 87 Section 3: Source-measure hardware Model 4200A-SCS Parameter Analyzer Reference Manual Source I, measure V or I For voltage measurements, the SENSE selection (local or remote) determines where the measurement is made. In local SENSE, voltage is measured at the FORCE and COMMON terminals.
Page 88 Model 4200A-SCS Parameter Analyzer Reference Manual Section 3: Source-measure hardware Measure only (V or I) The next figures show the configurations for using the SMU exclusively as a voltmeter or ammeter. For both of these configurations, use local sensing. For measure V, set the voltage compliance higher than the measured voltage. For measure I, set the current compliance higher than the measured current.
Page 89: Sweep Concepts
Section 3: Source-measure hardware Model 4200A-SCS Parameter Analyzer Reference Manual Sweep concepts Although the SMU can be used for static source or measure operation, SMU operation usually consists of a series of source-delay-measure (SDM) cycles (see the next figure) as part of a sweep...
Page 90 Model 4200A-SCS Parameter Analyzer Reference Manual Section 3: Source-measure hardware Sweep waveforms There are three general sweep types: linear staircase, logarithmic staircase, and custom, as shown in the following figure. The linear staircase sweep goes from the start level to the stop level in equal linear steps.
Page 91: Operation Mode Timing Diagrams
Section 3: Source-measure hardware Model 4200A-SCS Parameter Analyzer Reference Manual Operation mode timing diagrams The following figure shows source-measure timing for a test system using three SMUs. It shows basic timing between the three operation modes: sweep, step, and bias.
Page 92 Model 4200A-SCS Parameter Analyzer Reference Manual Section 3: Source-measure hardware The timing elements act as follows: • Hold Time (HT): The sweep graph shows two sweeps that correspond to the two steps shown directly above in the step graph. Note that at the start of each sweep there is a hold time. The hold time is a global setting.
Page 94: Multi-Frequency Capacitance-Voltage Unit
Introduction The 4210-CVU Multi-Frequency (1 kHz to 10 MHz) Capacitance-Voltage Unit is an impedance measurement module that can be installed in the 4200A-SCS. ) can be DC voltage biased from −30 V to +30 V. The AC test signal (10 mV...
Page 95: Measurement Functions
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Measurement functions The 4210-CVU can measure these parameters: • Parallel capacitance and conductance (Cp-Gp) • Parallel capacitance and dissipation factor (Cp-D) • Series capacitance and resistance (Cs-Rs) • Series capacitance and dissipation factor (Cs-D) •...
Page 96: Test Signal
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Test signal The test signal can be set for the following frequencies: • 1 kHz to 10 kHz in 1 kHz increments • 10 kHz to 100 kHz in 10 kHz increments •...
Page 97: Force-Measure Timing
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual The next figure shows an example of a frequency sweep. You specify the start frequency and the stop frequency. The CVU calculates the number of measure points. Figure 79: Frequency sweep (example) If you are setting up a voltage list sweep, you specify the voltage levels for the sweep.
Page 98: 4210-Cvu Connections
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Sweep function timing Force-measure timing for a sweep function is similar to the timing for a bias function (shown in Bias function timing (on page 4-4)), with the following differences: •...
Page 99: Typical 4210-Cvu Test Connections To A Dut
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Typical 4210-CVU test connections to a DUT The shields of the SMA cables must be connected together and extended as far as possible to the device under test (DUT), as shown in the following figure.
Page 100: Test Connections To A Probe Card
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Test connections to a probe card The 4210-CVU-Prober-Kit includes 3-meter SMA cables and connection accessories to connect the 4210-CVU to a probe card. Refer to the probe kit documentation for a list of the supplied items. The cables and adapters supplied with the CVU and the probe kit accommodate most connection requirements.
Page 101 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual The SMA cables and adapters shown in the following drawings are supplied with the CVU or the 4210-CVU-Prober-Kit. The triaxial and BNC cables are not supplied. The prober kit includes two types of BNC-to-triaxial adapters that connect directly to the rows of the matrix.
Page 102 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit The following figure shows connections for remote (4-wire) sensing. Figure 85: Test connections for a switch matrix - remote (4-wire) sensing The 7078-TRX-BNC adapters must be used in order to extend SMA shielding through the matrix card.
Page 103: Connection Compensation
Short correction: Offset correction for large capacitances (<10 Ω, small impedance). • Load correction: Resistive load correction for gain error. Keithley recommends a load that is as close in impedance to the cabling system (100 Ω). The load must have an impedance versus frequency characteristic that is purely resistive over the frequency range of subsequent measurements.
Page 104: Generate Open Connection Compensation Data
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Generate open connection compensation data Open connection compensation is usually done to offset correction for small capacitances. Open compensation is done with all the cables, adaptors, switch matrices, and other hardware connections connected to the device under test in the test circuit.
Page 105 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual 3. Select CVU Connection Compensation. Figure 88: CVU Connection Compensation dialog box 4. Select the cable length. You can select:  0 m: Use if measurements are made at the terminals of the 4210-CVU (no cables).
Page 106: Generate Short Connection Compensation Data
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Generate short connection compensation data Short connection compensation is usually done to offset correction for large capacitances. Short compensation is done by connecting all the CVU terminals directly together. A known short is connected to the CVU terminals through all the cables, adaptors, and probes that may be in the test circuit.
Page 107 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual 3. Select CVU Connection Compensation. Figure 91: CVU Connection Compensation dialog box 4. Select the cable length. You can select:  0 m: Use if measurements are made at the terminals of the 4210-CVU (no cables).
Page 108: Generate Load Connection Compensation Data
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Generate load connection compensation data Loads are reference resistors, typically 50 or 100 Ω or less, that must be resistive and constant over the entire frequency range (1 kHz to 10 MHz). A load is connected to the output terminals using all the cables, adaptors, probes and other hardware that will be in the test circuit.
Page 109: Compensation Data
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual 5. If you selected Custom cable length, select Advanced Compensation and select Measure Custom Cable Length. Follow the on-screen instructions. 6. If you are using a switching matrix, close the matrix switches that connect the CVU to the open.
Page 110: Enable Compensation
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Enable compensation To use the values generated by connection compensation, you need to enable compensation for each test. When compensation is enabled, the most recently acquired CVU compensation data is applied.
Page 111: Abb Unbalance Errors
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual ABB unbalance errors The 4210-CVU uses the autobalancing bridge (ABB) technique to achieve accurate impedance measurements. The ABB creates a virtual ground at the DUT to minimize measurement error. Every CVU measurement is made with ABB active.
Page 112: Confidence Check
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Figure 97: Real-Time Measurement dialog box 3. Select the parameters for which you want to return results. 4. Set the Speed, AC Drive Conditions, and DC Bias Conditions for the conditions you want to test.
Page 113: Run An Open Check And Short Check
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Run an open check and short check To do a CVU confidence check: 1. If you are using a switching matrix, connect the switching matrix to the CVU and DUT or the short...
Page 114: 4210-Cvu Project Example
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit 4210-CVU project example The following example shows you how to use the 4210-CVU in a project to make a capacitance measurement. The example assumes you have a 4210-CVU connected to a test fixture as described in...
Page 115 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual 6. Select Create. You are prompted to replace the existing project. 7. Select Yes. The project is displayed in the project tree. Figure 101: Demo Project in the project tree 4-22 4200A-901-01 Rev.
Page 116: Configure The Test
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Configure the test This example uses the cv-cap test, which measures the capacitance as a function of a linear voltage sweep of a capacitor. Configure the cv-cap test: 1. In the project tree, select the cv-cap test.
Page 117: Run The Test And Review Results
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Run the test and review results To run the cv-cap test and review the results: 1. Select Run. 2. Select Analyze. The test results are shown as data in a spreadsheet and on the graph, as shown in the figure below.
Page 118: Timing Diagrams
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Timing diagrams The following topics describe typical test setups with the related timing diagrams. CVU using voltage bias For this test, make the following test settings: • Speed: Normal •...
Page 119: Cvu Using Voltage Sweep
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual CVU using voltage sweep The following figure shows the Advanced terminal settings for a voltage linear sweep. This sweep measures Cp-Gp. Figure 105: CVU voltage sweep When this test is run, the following force-measure sequence occurs: 1.
Page 120: Cvu Using Voltage List Sweep
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Figure 106: CVU voltage sweep output CVU using voltage list sweep This figure shows an example of the Advanced Terminal Settings dialog box when CVU Voltage List Sweep is selected as the operation mode, set to measure Cp-Gp.
Page 121 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual When this test is run, this sequence occurs: 1. The DC source goes to the presoak voltage for the hold time. Typically, the presoak voltage is at the same potential as the first point in the sweep to allow the device to charge up to equilibrium before measurements begin.
Page 122: Cvu Using Frequency Sweep - Dc Bias
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit CVU using frequency sweep - DC bias This is an example of the Advanced Terminal Settings dialog box set to Freq Sweep - DC Bias. Figure 109: CVU Frequency Sweep - DC bias When this test is run, the following force-measure sequence occurs: 1.
Page 123: Cvu Frequency Sweep - Dc Step
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual CVU frequency sweep - DC step The following figure shows an example of the Advanced Terminal Settings dialog box for a test set to Frequency Sweep - DC Step. The test is set to measure Cp-Gp.
Page 124: Cvu Terminal Settings Advanced Settings And Circuits
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Figure 112: CVU Frequency Sweep (step) output CVU Terminal Settings Advanced settings and circuits You can apply AC drive voltage and DC bias voltage to either the CVH1 terminal or the CVL1 terminal.
Page 125 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Another configuration sources AC drive voltage to the CVH1 terminal and sources DC bias voltage to the CVL1 terminal. AC current is measured at CVL1. Figure 115: ACV source applied to CVH1 and DC bias applied to CVL1 The following settings source AC drive voltage and DC bias voltage to the CVL1 terminal.
Page 126: C-V Projects
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit C-V projects A project contains tests for a testing application. The projects that support 4210-CVU testing are summarized in the next table. 4210-CVU projects Projects Description cap-iv-cv-matrix (on page Combines a 4200-SMU, 4210-CVU, and matrix switching in one project.
Page 127: Capacitor I-V And C-V Measurements With Series 700 Project (Cap-Iv-Cv-Matrix)
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Projects Description solarcell (on page 4-93) Measures both I-V and C-V. A SMU is used to measure the forward-biased characteristics of an illuminated solar cell and extract parameters (such as maximum power, maximum current, maximum voltage, short-circuit current, open- circuit voltage, and efficiency).
Page 128 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit The switching matrix then connects the 4210-CVU to the capacitor, as shown in the following figure, and C-V measurements are made. Figure 118: Switching matrix signal path for C-V testing This project is set up for use with a Series 700 with a 7174A matrix card.
Page 129 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual cap-iv-cv-matrix connections The next figure shows the basic test configuration. Details on 4210-CVU connections are provided in 4210-CVU connections (on page 4-5). See Connections and configuration (on page 2-1) for details on 4200-SMU connections.
Page 130 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit connect test The connect test controls the matrix card switches. It connects the 4200-SMUs to the capacitor. The Configure settings are: • The OpenAll parameter is selected. This opens all matrix switches at the beginning of the test sequence.
Page 131: Bjt Capacitance Tests (Cvu-Bjt)
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual cv-capacitor test This test applies a DC bias voltage to a capacitor and measures capacitance as a function of time. It generates a capacitance versus time graph and calculates average capacitance and standard deviation.
Page 132 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit cvu-bjt connections The next figures show the basic test configurations. Note that the untested terminal must be connected to the outer shield of the SMA cables to guard unwanted capacitance from affecting measurement accuracy.
Page 133 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Figure 122: Basic configurations for BJT c-be0 test Formulas and constants This project uses two formulas with no constants: • AVG_CAP: Calculates the average capacitance in farads (F). The formula is: AVG_CAP = AVG(CP_AB) •...
Page 134 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit c-ce0 test This test measures the capacitance as a function of time between the collector and emitter terminals of a BJT at 0 V. The results (C versus t) are plotted on a graph. This test also calculates the average capacitance and standard deviation.
Page 135: Bjt I-V And C-V Tests Using 4200A-Cviv Multi-Switch Project (Cvu-Bjt-Cviv)
This test also calculates the average capacitance and standard deviation. For additional information on using the 4200A-CVIV, refer to Application Note: Making C-V and I-V Measurements Using the 4200A-CVIV Multi-Switch and 4200A-SCS Parameter Analyzer. 4-42 4200A-901-01 Rev. C / February 2017...
Page 136: High-Voltage C-V Tests Project (Cvu-Highv)
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit High-Voltage C-V Tests Project (cvu-highv) This project contains tests for making high-voltage C-V measurements on a Zener diode, MOS capacitor, capacitor, and a Schottky diode. These tests use the CVU, SMU, and the 4205-RBT remote bias tee.
Page 137: Mos Capacitor C-V Project (Cvu-Moscap)
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual MOS Capacitor C-V Project (cvu-moscap) Maintaining the quality and reliability of gate oxides of MOS structures is a critical task in semiconductor fabrication. A commonly used tool for studying gate-oxide quality in detail is the capacitance-voltage technique.
Page 138 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit MOS capacitor C-V curves The next figure illustrates a high-frequency C-V curve for a p-type semiconductor substrate. A C-V curve can be divided into three regions: accumulation, depletion, and inversion. Each of the three regions is described for a p-type MOS capacitor.
Page 139 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Depletion region For a p-type MOS capacitor, as the gate voltage moves toward positive values, the MOS capacitor starts to differ from a parallel-plate capacitor. Roughly at the point where the gate voltage becomes positive, the following occurs: •...
Page 140 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit cvu-moscap connections The next figure shows the basic test configuration for testing a MOS capacitor. Figure 125: Simplified configuration to test MOS capacitor 4210-CVU connections (on page 4-5) provides details on connections to a semiconductor wafer. Use only the supplied (red) 100 Ω...
Page 141 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Formula: BEST_HI Formula name: BEST_HI Units: None Description: Index from DEPTHM array that is 95% of maximum depletion length or twice the screening length in the semiconductor, whichever is larger.
Page 142 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Formula: CMIN Formula name: CMIN Units: F Description: Minimum capacitance. Formulator entry: CMIN = MIN(MAVG(CADJ, 10))+1E-15 Formula: COX Formula name: COX (C Units: F Description: Oxide capacitance, usually set to maximum capacitance in accumulation.
Page 143 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Formula: INVCSQR Formula name: INVCSQR Units: 1/F Description: Inverse square of capacitance. Formulator entry: INVCSQR = 1/(MAVG(CADJ, 5))^2 Simplified equation: Formula: MAXINVSQR Formula name: MAXINVSQR Units: 1/F Description: Finds row position of maximum point on 1/C2 curve.
Page 144 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Formula: NDOPING Formula name: NDOPING (N) Units: 1/cm Description: Doping density. Formulator entry: NDOPING = ABS((-2)/(AREA^2*Q*ES)/(DELTA(INVCSQR)/DELTA(DCV_GB))) Simplified equation: Formula: NSLOPE Formula name: NSLOPE Units: None Description: Finds slope of 1/C curve.
Page 145 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Formula: QEFF Formula name: QEFF (Q Units: C/cm Description: Effective oxide charge. Formulator entry: QEFF = COX*(WMS-VFB)/AREA Simplified equation: Formula: RS Formula name: RS (R Units: Ω Description: Series resistance calculated from capacitance.
Page 146 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Formula: VFB Formula name: VFB (V Units: V Description: Flatband voltage. Once CFB (CFB) is derived, V is interpolated from the closest V values. Formulator entry: VFB = AT(DCV_GB,FINDD(CADJ, CFB, 2))
Page 147 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual cvu-moscap project constants The user-defined constants that are used for the application tests are summarized (in alphabetical order) in the next tables. Constant Default value Units Description AREA 0.010404 Gate area of device 1 = P-type, −1 = N-type...
Page 148 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit moscap-c-2vsv test This test performs a C-V sweep and displays the inverse squared capacitance (1/C ) as a function of the gate voltage (V ). This sweep can yield important information about doping profile because the...
Page 149 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual moscap-dopingprofile test This test generates a doping profile, which is a plot of the doping concentration versus depletion depth. The difference in capacitance at each step of the gate voltage is proportional to the doping concentration.
Page 150 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Compensating for series resistance After generating a C-V curve, you may need to compensate the measurements for series resistance. The series resistance (R ) can be attributed to either the substrate (well) or the backside of the SERIES wafer.
Page 151 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual The series resistance, R , may be calculated from the capacitance and conductance values that are measured while biasing the DUT (device under test) in the accumulation region. The series...
Page 152 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Oxide thickness calculations based on C-V measurements can be very precise. Oxide thickness must be extracted from the strong accumulation region, where the capacitance measured truly reflects the oxide capacitance.
Page 153 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Where: • λ = extrinsic Debye length • ε = permittivity of the substrate material (F/cm) • kT = thermal energy at room temperature (293 K) (4.046 x 10 •...
Page 154 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit The threshold voltage of a MOS capacitor can be calculated as follows: Where: • = threshold voltage (V) • = flatband potential (V) • A = gate area (cm •...
Page 155 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Where: • = metal work function (V) • = substrate material work function (electron affinity) (V) • = substrate material bandgap (V) • φ = bulk potential (V) In tests, the values for W , and E are listed in the Formulator as constants.
Page 156 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit is distinguished from interface-trapped charge (Q ), in that Q varies with gate bias and Q does not (Nicollian and Brews pp. 424-429, Sze pp. 390-395; see References (on page 4-63)).
Page 157: Mos Capacitor Lifetime Test Project (Moscap-Lifetime)
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual MOS Capacitor Lifetime Test Project (moscap-lifetime) Generation lifetime is an important parameter of metal oxide semiconductor (MOS) capacitors because it determines the storage time of the device. The Zerbst method is a common technique for lifetime measurements.
Page 158 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit moscap-lifetime formulas and constants Tests in this project use the same formulas as the ones for the cvu-moscap project. It also uses additional formulas (used by the gni-w-wf test) and user-defined constants, which are summarized in the following tables.
Page 159 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Formula: WWF Formula name: WWF (W-WF) Units: cm Description: Depletion depth (W-WF computation). Formulator entry: WWF = ES*AREA*(1/CP_GB-1/COX)-WF Simplified equation: Constants Constant Default value Units Description AREA 0.010404 Gate area of device...
Page 160 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit c-v test This test generates a C-V sweep on a MOS capacitor and derives C , and N . These parameters are input into the MOS Capacitor Zerbst C-t Sweep (C-t) test and the MOS Capacitor Generation Rate versus Depletion Depth (GNI_W-WF) test using the Formulator.
Page 161 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual gni-w-wf test This test is similar to the c-t test because it creates a Zerbst plot by biasing the device in accumulation for a specified period. However, it calculates the generation rate (GN...
Page 162 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit The equilibrium inversion depth (w ) is calculated as: Where: • = equilibrium inversion depth (cm) • ε = permittivity of the substrate material (F/cm) • A = gate area (cm •...
Page 163: Mosfet I-V And C-V Tests Using 4200A-Cviv Multi-Switch Project (Mosfet-Cviv)
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual gni-w-wf Analyze sheet Test data is displayed in the Analyze sheet: • Time: Timestamp for each measurement. • Cp_GB: Measured parallel capacitance. • Gp_GB: Measured conductance. • DCV_GB: Forced DC bias voltage.
Page 164 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit cvu-capacitor connections The test configuration is shown in the next figure. Use only the supplied (red) 100 Ω SMA cables for connections to the 4210-CVU. Be sure that all SMA cables are the same length.
Page 165: Interconnect Capacitance C-V Sweep Test (Cv-Sweep)
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual cf-10 pF test This test performs a frequency sweep that measures capacitance at each frequency point and generates a C versus F graph. Analyze sheet Test data is displayed in the Analyze sheet: Cp_AB Measured parallel capacitance.
Page 166: Mos Capacitor Mobile Ion Project (Moscap-Mobile-Ion)
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Formulas and constants This project uses one formula (no constants): • NOISE: Calculates the standard deviation of the capacitance measurements. NOISE = STDEV(CP_GB) Analyze sheet Test data is displayed in the Analyze sheet: •...
Page 167 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Basic testing involves the following steps: 1. At room temperature, generate a C-V sweep on the MOS capacitance. From the C-V data, extract the flatband capacitance (C ), flatband voltage (V 1), and the oxide capacitance (C The device should be measured on a hot chuck in a dark box.
Page 168 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit 6. The mobile ion charge is calculated as follows: Where: • = mobile ion charge (C) • = flatband voltage measured second time after temperature stress (V) • = flatband voltage measured third time with opposite bias polarity (V) •...
Page 169 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Formulas and constants This project uses formulas and constants that are used by the cvu-moscap project. The formulas and constants are summarized in cvu-moscap project formulas and constants (on page 4-47).
Page 170 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Formulator formulas and constants Formulas are not used for this test. bias-pos Analyze sheet The test data is displayed in the Analyze sheet: • Time: Timestamp for each measurement.
Page 171 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual bias-neg test This test applies a negative DC bias voltage to the MOS capacitor. The voltage continues to be applied to the sample as the DUT is heated in the next test module, hotchuck.
Page 172 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit cv-vfb3 test This test performs a C-V sweep on the sample after it has been heated and then cooled. The oxide capacitance and the flatband voltage (V ) are sent to the Analyze sheet for the subsite. View the Calc tab in the Analyze sheet to review the values that are used in the mobile ion calculation.
Page 173: Mosfet Project (Mosfet)
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual MOSFET Project (mosfet) This project contains DC I-V, C-V, and pulse I-V tests for a MOSFET. It makes C-V measurements to explore the basic operation and parameters of the device. Since the high-frequency operation and switching speed of a MOSFET are dependent on the capacitance of the device, capacitance measurements are often made to various parts of the device.
Page 174 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Notice from the high frequency curve that when the device is in the inversion region, the capacitance is high, unlike the MOS capacitor, which has low capacitance in inversion. This is because the MOSFET has a source and drain, which enables inversion charge to flow, unlike the MOS capacitor, which relies on generation and recombination in the bulk region.
Page 175 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual mosfet formulas and constants Formulas and user-defined constants that are used for the application tests are summarized (in alphabetical order) in the next topics. The formulas and constants are set from the Formulator settings for the tests.
Page 176 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Formula: DEBYEM Formula name: DEBYEM (λ) Units: m Description: Debye length (in meters). Formulator entry: DEBYEM = SQRT(ES*K*TEMP/(ABS(N90W)*Q^2))*1E-2 Simplified equation: Formula: DEPTHM Formula name: DEPTHM (W) Units: m Description: Depletion depth (in meters).
Page 177 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Formula: N90W Formula name: N90W Units: None Description: Doping density at 90% of maximum depletion depth Formulator entry: N90W = AT(NDOPING, FINDD(DEPTHM,0.9*MAX(DEPTHM),2)) Formula: NDOPING Formula name: NDOPING (N) Units: 1/cm Description: Doping density.
Page 178 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Formula: TOXNM Formula name: TOXNM (TOX) Units: nm Description: Calculated thickness of oxide. Formulator entry: TOXNM = (1E7*AREA*EOX)/COX_CALC Simplified equation: Where: • = oxide thickness (nm) • A = gate area (cm •...
Page 179: Nanowire Tests
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual g-to-sdb and mosfet-dopingprofile Analyze sheet The test data is displayed in the Analyze sheet: • Cp_GB: Measured parallel capacitance. • Gp_GB: Measured conductance. • DCV_GB: Forced DC bias voltage.
Page 180 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Formulas and constants This project uses two formulas, described in the following topics. There are no constants. Formula: CAVG Formula name: CAVG Units: F Description: Calculates the average capacitance.
Page 181: Diode Project (Diode-Project)
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Diode Project (diode-project) This project contains DC I-V, C-V, and pulse I-V tests for a PN junction. The diode project measures the capacitance of a pn junction or Schottky diode as a function of the DC bias voltage across the device.
Page 182 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Since the junction can be modeled after a parallel plate capacitor, the junction capacitance is calculated as follows: Where: • C = junction capacitance (F) • εs = semiconductor permittivity (1.034e-12 F/cm for silicon) •...
Page 183 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual diode-project connections The next figure shows the basic test configuration. Refer to Test connections for a probe card page 4-7) for the connections to a semiconductor wafer. Use only the supplied (red) 100 Ω SMA cables for connections to the 4210-CVU. Be sure that all SMA cables that are used in the setup are the same length.
Page 184 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Formula: INV_C Formula name: INV_C (C) Units: 1/F Description: Inverse capacitance. Formulator entry: INV_C = 1/(CP_AC)^2 Simplified equation: Formula: DOPING Formula name: DOPING (N) Units: 1/cm Description: Majority carrier concentration.
Page 185 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual diode c-2vsv test This test displays the data as a 1/C versus V curve. You can derive the doping density (N) from the slope of this curve because N is linearly related to the capacitance.
Page 186: Solar Cell Project (Solarcell)
Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Solar Cell Project (solarcell) To determine the electrical characteristics of a photovoltaic (PV) cell, a 4200-SMU and 4210-CVU are used to perform I-V, C-V, and C-F sweeps. Graphs are generated from the collected current, capacitance, frequency, and voltage data.
Page 187 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual solarcell connections The next figures show the basic test configurations for this project: • I-V testing: The basic configuration shows four-wire sensing using a 4200-SMU or 4210-SMU. Four-wire sensing is needed to achieve optimum performance. See Source-Measure Hardware (on page 3-1) for details on 4200-SMU connections.
Page 188 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit solarcell formulas and constants Formulas and user-defined constants that are used for the tests are listed in alphabetical order in the next topics. The formulas and constants are set from the Formulator for the tests.
Page 189 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Formula: ISC Formula name: ISC (I Units: A Description: Short circuit current. ISC is the point in I-V data where V = 0. Formulator entry: ISC = ABS(AT(ANODEI, FINDD(ANODEV, 0, FIRSTPOS(ANODEV))))
Page 190 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit Formula: PMAX Formula name: PMAX (P Units: W Description: Maximum power point. Formulator entry: PMAX = MAX(P) Simplified equation: Formula: VMAX Formula name: VMAX Units: V Description: Cell voltage where the power output of the cell is greatest (PMAX).
Page 191 Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual fwd-ivsweep Analyze sheet The test data is displayed in the Analyze sheet: • AnodeI: Measured current. • AnodeV: Forced voltage. • Formulas: Formulator calculation results. rev-ivsweep test Make sure the solar cell is connected to the 4200-SMU (see Connections (on page 4-94)).
Page 192 Model 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-voltage unit c-2vsv-solarcell test Make sure the solar cell is connected to the 4210-CVU (see 4210-CVU connections (on page 4-5)). This test uses a CVU to perform a capacitance-voltage sweep on a solar cell. Capacitance is measured on each step of the sweep.
Page 193: Demo Project (Default)
Section 4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer Reference Manual Demo project (default) The tests in this project represent the most common device tests. The tests in the default project that use the CVU are cv-nmosfet, cv-diode, and cv-cap.
Page 194: Pulse Measure And Pulse Generator Units
The 4220-PGU Pulse Generator Unit and 4225-PMU Pulse Measure Unit are high-speed pulse generator cards for the 4200A-SCS. In this section, the 4220-PGU is referred to as a "PGU," and the 4225-PMU is referred to as a "PMU." The PGU provides pulse output only; the PMU provides both pulse output and pulse measurement.
Page 195: Pgu And Pmu Connectors
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual LPT functions that pertain to the PGU and PMU are documented in LPT commands for PGUs and PMUs (on page 13-91). KPulse: The Keithley Pulse (KPulse (on page 10-1)) application supports the PGU.
Page 196: Pmu Block Diagram
Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Use the RPM connectors on the 4225-PMU to connect it to the 4225-RPM (on page 5-6). PMU block diagram The next figure shows the block diagram of the PMU. Each channel has two dedicated A/D converters to simultaneously measure current and voltage.
Page 197: Pulse Measurement Types (Pmu)
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Pulse measurement types (PMU) The next table summarizes pulse measurement types that are available through LPT commands for the 4225-PMU. See Measurement types (on page 5-70) for detailed information.
Page 198: Sample Rate
Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Average pulses For pulse I-V (spot mean), the mean values of two or more pulses are averaged. Think of it as the "mean of the means."...
Page 199: Model 4225-Rpm
The next figure shows the modes for the RPM LED colors. Note that the RPM LED shows the mode of the RPM, but not the output status. The output status of the 4200A-SCS is indicated by the Operate light on the front of the 4200A-SCS chassis. During normal Clarius operation, only the red, green, or blue lights are shown.
Page 200 The internal wiring diagram of the RPM is shown in the next figure. Signals from the 4200A-SCS instrument cards are routed through the RPM to the output Force and Sense connectors. Switching is used to control which card is connected to the output. See...
Page 201: Using The Rpm As A Switch
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual The next figure shows the diagram for remote sensing. Both Sense and Force are connected to DUT HI. Figure 147: Diagram for remote sensing Using the RPM as a switch You can use the RPM to switch a PMU, CVU, or SMU to a DUT terminal.
Page 202: Waveform Capture
Proper connection methods are critical to perform stable and accurate measurements using the PMU (with or without the RPM). It is also a good practice to apply these guidelines to all the Keithley Instruments pulse cards to prevent pulse voltage overshoot and oscillations.
Page 203: Pmu Common Connections
4210-MMPC-C: Use this cable kit with the Cascade Microtech 12000 series prober (manipulator type DCM-200 series). For details on using these prober cable kits, refer to Keithley document number PA-1000 for the Suss prober cable kit and PA-1001 for the Cascade prober cable kit.
Page 204: Shield Connections
Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Shield connections For multiple PMU channels, you should connect the shields (common LO) from all PMU channels as close as possible to the DUT. You reduce inductance by minimizing the loop area of the shield connections.
Page 205: Prober Chuck Connections
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Prober chuck connections When possible, avoid pulse connections to the prober chuck. If unavoidable, use these guidelines when connecting to the prober chuck: • When making connections to the back side of the wafer, PMU functionality will be diminished.
Page 206 Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units You can also connect a two-terminal device to the two channels of a PMU, as shown in the next figure. In this case, channel 1 will source/pulse voltage, and channel 2 will measure the resulting current.
Page 207: Three-Terminal Device Connections
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Three-terminal device connections A three-terminal device can be connected using either two or three PMU channels, depending on if source and/or measuring must be performed at each device pin. An example of both channels of a single PMU connected to a three-terminal MOSFET is shown in the next figure.
Page 208: Four-Terminal Device Connections
Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Four-terminal device connections To test a four-terminal device, two PMUs are usually required. The next figure shows the four PMU channels connected to a four-terminal MOSFET. This configuration enables you to have complete flexibility to enable pulsing and measuring at any terminal on the device.
Page 209: Connections To Prober Or Test Fixture Bulkhead Connectors
Model 4200A-SCS Parameter Analyzer Reference Manual Connections to prober or test fixture bulkhead connectors The 4200-PMU-Prober-Kit (available from Keithley Instruments) is a collection of standard and custom connectors and accessories used to connect the pulse generator to a common variety of probe stations.
Page 210: 4225-Rpm Connections
Figure 156: PMU connection to the RPM After connecting or removing an RPM, always perform the Update the RPM configuration (on page 7-10) procedure to ensure that KCon accurately represents the present 4200A-SCS hardware configuration. 4200A-901-01 Rev. C / February 2017 5-17...
Page 211 Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual RPM connections to DUT With an RPM installed, NEVER make connections directly to any of the SMA connectors (CH1 and CH2) on the PMU module. This may result in damage to the PMU or DUT or may produce corrupt data.
Page 212 Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Remote sensing Optional prober cable kits are available from Keithley Instruments. These kits provide remote sense connections to a DUT: • Model 4210-MMPC-S: Use this cable kit with the Suss Micro Tec PA200/300 series prober.
Page 213: Configure The Pgu, Pmu, And Rpm Using Tests
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Configure the PGU, PMU, and RPM using tests To configure and control the PGU, a user test module (UTM) is needed. You can also use UTMs to configure and control the PMU and RPM preamplifier.
Page 214 Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units The preview displays representations of the waveforms for the different PMU channels in the test. The illustrated pulse waveforms are defined by the Pulse Timing settings for the specific PMU. This graphical depiction provides a representation of parameter values (no signals are output to the test device).
Page 215: Pmu Amplitude Sweep Example (One-Channel)
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual PMU amplitude sweep example (one-channel) This figure illustrates the configuration for a pulse amplitude sweep using a single PMU channel. Figure 161: One-channel PMU amplitude sweep The next figure illustrates the configuration of a six-step pulse amplitude sweep.
Page 216 Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units The other graph, labeled “Expanded View,” provides in depth information on the section designated by the cursor lines (on the graph labeled “Entire Test”). The graphed points reflect the timing parameters (Pulse Timing Preview) and settings from the PMU Advanced Settings dialog box for each PMU channel in the test, but only for the area specified by the cursor.
Page 217: Pmu Amplitude Sweep And Step Example (Two-Channel)
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual PMU amplitude sweep and step example (two-channel) In this two-channel example, one channel is sweeping while the other channel is stepping. The sweeping channel is performing pulse amplitude sweeps with nine sweep points. On each inner loop, PMU1-2 sweeps 0 V through 4 V in 0.5 V increments.
Page 218 Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Changing the number of pulses to three (instead of one) and only displaying one channel (PMU1-1, instead of Show All), changes the preview of the waveform (see next figure). Each point in the step now uses three periods, so there are three pulses shown in the Expanded View.
Page 219 Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Configuring the preview to all channels displays both the sweeper and stepper for the three-pulse test (see next figure). The Number of Pulses parameter determines the number of pulses that are output and measured for each attempted point in the sweep or step.
Page 220: Higher Channel Count Test Example
Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Higher channel count test example This example shows how the Pulse Timing Preview is useful for higher channel count tests. The next figure shows a four-channel test, reflecting the operation mode and voltages given in the next table.
Page 221 Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Figure 166: Four-channel sweep and step (2 pulse trains) Figure 167: Zooming (Expanded View graph) 5-28 4200A-901-01 Rev. C / February 2017...
Page 222 LLEC adjusts pulse output to the target levels (on page 5-35). While holding down the Shift key on the 4200A-SCS keyboard and left mouse button, move or scroll a magnified graph by moving the mouse. Figure 168: Scroll (or move) a magnified entire test graph 4200A-901-01 Rev.
Page 223: Pmu Connection Compensation
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Errors If either graph is not updating as expected, select Refresh to zoom out and redraw both graphs. It is possible to have a test with too many pulses to be suitably graphed. This may be from too many pulses from a large number of sweep points or step points, or a large number of pulses.
Page 224 Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units For optimum performance, you should do connection compensation any time the connection setup is changed or disturbed. Changes in temperature or humidity do not affect connection compensation.
Page 225: Perform Connection Compensation
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Perform connection compensation To compensate for connections: 1. In Clarius, select Tools. The Clarius Tools dialog box opens. Figure 170: Clarius Tools dialog box 2. Select PMU Connection Compensation. The Short and Open Connection Compensation Values and Defaults dialog box opens.
Page 226: Enabling Connection Compensation
Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Enabling connection compensation This procedure is for ITMs. For UTMs, you need to enable connection compensation data using the pulse_conncomp (on page 13-96) function. To apply the connection compensation data to DUT measurements, you must enable connection compensation for the test.
Page 227: Load-Line Effect Compensation (Llec) For The Pmu
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Load-line effect compensation (LLEC) for the PMU Load-line effect compensation (LLEC) is only performed for standard pulse I-V testing using PMU measure ranges. It is not performed when using 4225-RPM measure ranges (≤1 mA). The active RPM circuitry provides its own analog LLEC (assuming there is a short cable from the RPM to the DUT).
Page 228: How Llec Adjusts Pulse Output To The Target Levels
Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units How LLEC adjusts pulse output to the target levels LLEC is an algorithm that adjusts the output of a PMU channel. When enabled, the algorithm performs a set number of iterations in an attempt to output the target voltage to the DUT.
Page 229: Coping With The Load-Line Effect
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Note that after the first action, "Output Pulse Burst," all pulse channels in the test stop pulsing and output 0 V while performing the actions in the remaining boxes in the diagram. The time between pulses is determined by the time required to process the measurements and perform the calculations and comparisons shown in the previous figure.
Page 230: Llec Maintains Even Voltage Spacing
Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units LLEC maintains even voltage spacing Another advantage of using LLEC is that it maintains even voltage spacing during the test. For example, if the pulse sweep uses 250 mV steps, DUT voltage and current measurements will be performed at every 250 mV step.
Page 231: Test Considerations
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Test considerations The magnitude of the pulse steps affects overall test time. Wider pulses, a higher number of pulses, and larger voltage steps at each sweep point, all increase the amount of time required for the LLEC algorithm at each sweep point, which lengthens the overall test time.
Page 232: Enable Llec
Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Enable LLEC This option is available for ITMs. To enable LLEC: 1. Select the pulse test. 2. Select Configure. 3. In the right pane, select Terminal Settings.
Page 233: Disable Llec And Set The Output Impedance
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Disable LLEC and set the output impedance These options are available for ITMs. With LLEC disabled, you can input the known resistance of the DUT. The resistance value is then used in a compensation process to output the voltage.
Page 234: Pmu Minimum Settling Times Versus Current Measure Range
Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units PMU minimum settling times versus current measure range The PMU and RPM current measure ranges require time to reach a settled value. The amount of settling time that is required increases for the lower current measure ranges.
Page 235: Pmu Capacitive Charging/Discharging Effects
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual PMU capacitive charging/discharging effects During pulse transitions, the measured current charges and discharges the capacitance in the system (see next figure, red waveform). This system capacitance consists of the cable capacitance, PMU (with RPM, if connected) capacitance, and device capacitance.
Page 236 Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units This capacitive charging current is primarily a measurement artifact, as the current does not flow through the DUT. Note that if a spot mean is taken during the settled portion of the pulse, then this charging does affect the spot mean measurement.
Page 237: Pmu And Rpm Measure Ranges Are Not Source Ranges
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual PMU and RPM measure ranges are not source ranges Unlike a source-measure unit (SMU), the PMU and RPM current measure ranges are measure ranges only, not source and measure ranges. For example, the SMU 10 mA measure range has a maximum source and measure value of ±10.5 mA, including the five percent overrange.
Page 238: 4220-Pgu And 4225-Pmu Output Limitations
(on page 5-61)), the pulse instrument cards also have a limit for the number of large amplitude pulse transitions within a period of time. The 4200A-SCS system enforces limits on the quantity and amplitude of waveforms that the 4220-PGU and 4225-PMU may generate.
Page 239: 4200A-Scs Power Supply Limitations
There are two parts to the total power supply draw. The first part is the power required for the instruments while the 4200A-SCS is idle (turned on, but not testing). The second part is the power required by the instruments taking part in the test. Note that medium power SMUs (4200-SMU), 4200 preamplifiers (4200-PA), and 4210-CVU modules are not included in the equations, as their power draw is not significant.
Page 240 Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Example 1: 4200A-SCS with two 4210-SMUs, four 4225-PMUs, and eight 4225-RPMs. The test uses all eight PMU+RPM channels set to the 10 V range (no SMUs in test).
Page 241: Basic Troubleshooting Procedure
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual The power limit check is performed in both ITMs and UTMs. In ITMs, exceeding the power limit will display a message similar to the one shown in the next figure when configuring PMU.
Page 242: Step 2. Verify The Pulse Shape
Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Step 2. Verify the pulse shape To check that the pulse shape provides a flat, settled portion near the end of the pulse top: 1. Configure the test for Waveform Capture.
Page 243: Step 3. Is The Pulse Level Correct For Each Channel
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Step 3. Is the pulse level correct for each channel? 1. If the pulse level is not correct for each channel, enable load-line effect compensation (LLEC). To compensate for the IR drop effect, the LLEC algorithm applies multiple pulses at each sweep step;...
Page 244 Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Figure 184: PMU IV sweep All Parameters thresholds 4. Enter the maximum power for the test device. An example of a transistor test with LLEC disabled with a power threshold of 3 W and a voltage threshold of 12 V is shown in the "Vd-Id family of...
Page 245 In this case, the PMU is at its limit and cannot source any more voltage or current to this particular resistance. See the 4200A-SCS Parameter Analyzer Datasheet for more information on the PMU maximum source power versus device resistance. You can access the datasheet from the Learning Center.
Page 246 Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Figure 188: Vd-Id family of curves, LLEC disabled (thresholds_voltage = 12 V_power = 3 W) For user test modules (UTMs), although the process described above applies, there are a few differences.
Page 247 Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual This user module allows for an optional SMU to DC bias a transistor bulk while performing a pulse I-V sweep with a 4225-PMU and optional 4225-RPM. However, due to system restrictions, this SMU must not be connected to the test device through the 4225-RPM (an error results).
Page 248: Pulse Source-Measure Concepts
AC signal during reliability cycling or in a multi- level waveform mode to program or erase memory devices. The 4225-PMU Ultra-Fast I-V Module for the 4200A-SCS supports many of these high speed sourcing and measurement applications. Ultra-fast I-V tests You can use the 4225-PMU to do these types of ultra-fast I-V tests: 1.
Page 249: Segment Arb Waveform
Segment Arb function, or outputting an arbitrarily defined waveform using the arbitrary waveform generator in the KPulse software, which is included with the 4200A-SCS. The Segment Arb feature allows you to create waveforms from segments defined with separate voltages and time durations.
Page 250 Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units High-endurance output relay (HEOR): Each output channel of a pulse card has a high-speed, solid- state output relay. When this relay is closed, the waveform segment is output. When opened, the channel output is electrically isolated (floating) from the DUT.
Page 251 Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual A definition showing two sequences with looping is illustrated in the following figure. Figure 194: Definition showing two sequences with looping The graph of the measurement of a two-sequence Segment Arb with looping, from UTM pmu- segarb-complete in the pmu-dut-examples project, is shown in the following figure.
Page 252: Full Arb Waveform
Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Pulse modes: Source, Segment Arb LPT function: seg_arb_define (on page 13-162) This function is used to define a Segment Arb waveform. This function includes parameters to specify the number of segments (nSegments) and arrays for start (startvals), stop (stopvals), and time values (timevals).
Page 253: Pulse Waveforms For Nonvolatile Memory Testing
Model 4200A-SCS Parameter Analyzer Reference Manual KPulse full arb waveforms The Keithley Pulse tool (KPulse) is a virtual front panel software application used to control the optional pulse generator cards. KPulse can be used to create, save and output full arb waveforms, and provides a collection of basic full arb waveform types such as sine, square, triangle, noise, Gaussian, and calculation.
Page 254: Dut Resistance Determines Pulse Voltage Across Dut
Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units DUT resistance determines pulse voltage across DUT Each output channel of the pulse card is effectively a voltage source with a series 50 Ω resistance. Since the pulse card, like many other pulse sources, does not have any measurement capability, the actual voltage across the device under test (DUT) is directly related to the DUT resistance.
Page 255 Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Example 1, showing a 5 V pulse into a 50 Ω DUT load. V = I * R (Ohm’s Law) Calculate the current, I / (50 Ω + 50 Ω) = 10 V / 100 Ω = 0.1 A...
Page 256 Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Example 3: Low resistance DUT A low resistance DUT is shown in the following figure. 5 Ω Pulse V high Pulse V 50 Ω Pulse load Figure 200: 5 V pulse into a 5 Ω...
Page 257 Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Example 4: Maximum voltage and current, high speed range V = I * R = 10 V for high speed range = 5 Ω / / R...
Page 258 10 k 9.950 0.000995 * Approximate value; does not account for interconnect losses. Available I and V for the high voltage (20 V) range of the Keithley pulse card Maximum I and V versus resistance Test device resistance Voltage (V)* Current (A)* (Ω)
Page 259: Triggering
Triggering Triggering is used for the following operations: • Basic triggering (on page 5-66): Configure the Keithley pulse card for the trigger mode (Continuous, Burst or Trig Burst) and use a software trigger to start pulse output. • Pulse-measure synchronization (on page 5-67): Synchronize the pulse-measure operation of a pulse generator card.
Page 260 Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Trigger mode With the software trigger source selected, using the pulse_trig function selects one of the following trigger modes and initiates (triggers) the start of pulse output: •...
Page 261 Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Pulse generator card output trigger When output trigger is enabled, an output pulse will initiate a TTL-level, 50% duty cycle output trigger pulse. The trigger pulses are available at the TRIGGER OUT connector of the pulse generator card.
Page 262: Pulse Source-Measure Connections
To achieve optimum performance, only use the cables, connectors, and adapters that are included with Keithley Instruments pulse source or measure kits. For the pulse source-measure configurations, ensure the 4200A-SCS high voltage is disabled. This will prevent a safety hazard that could result in possible injury or death because of SMU voltages greater than 42 V being applied to the device under test or fixture.
Page 263: Measurement Types
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Measurement types There are two types of pulse measurements: Spot mean and waveform. The pulse_meas_sm function is used to configure Spot mean measurements (on page 5-70) and the...
Page 264: Spot Mean Average Readings
Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Figure 203: Returned data set for spot mean discrete readings Spot mean average readings For this data acquisition type, each returned reading is a mean-of-the-means. Spot mean average averages the mean readings for all the pulses in the burst.
Page 265: Waveform Measurements
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Waveform measurements Waveform measurement readings sample the entire pulse. Sampling is performed on the rise time, top width, and fall time portions of the pulse. In the figure below, 15 samples are performed on the pulse waveform.
Page 266: Waveform Discrete Readings
Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Waveform discrete readings Enabled voltage and/or current readings and time stamps for every sample of the waveform are returned in a single data set. The following figure shows how waveform discrete readings are returned as a data set for two pulse periods with voltage, current, and timestamp readings enabled.
Page 267: Measurement Timing
Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Measurement timing pulse_meas_timing (on page 13-108) function is used to configure pulse measurement timing. Spot mean measurement timing The spot mean measurement type samples a portion of the amplitude and a portion of the base level.
Page 268 Model 4200A-SCS Parameter Analyzer Reference Manual Section 5: Pulse measure and pulse generator units Waveform measurement timing The waveform measurement type samples the pulse as shown in Waveform measurements (on page 5-72). Sampling is performed on the entire duration (100%) of the pulse. This includes the rise time, amplitude, and fall time portions of the pulse.
Page 269 Section 5: Pulse measure and pulse generator units Model 4200A-SCS Parameter Analyzer Reference Manual Example: pulse_meas_wfm This function sets channel 1 of the PMU for the waveform discrete measure type to acquire the voltage/current readings for the waveform and the time stamps. It also enables LLEC.
Page 270: Clarius
Get started with Clarius Clarius is the primary application of Clarius and is the primary user interface for the 4200A-SCS. Clarius is a versatile tool that helps you characterize individual parametric test devices or automate testing of an entire semiconductor wafer. It allows you to create, execute, and evaluate tests and complex test sequences without programming.
Page 271: Clarius Interface
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Clarius interface The Clarius interface allows you to: • Build and edit project and execution sequences. • Configure tests. • Execute tests and actions, such as switch matrix connections and prober movements, including: ...
Page 272 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Touch screen basics You can operate the 4200A-SCS using the touch screen. You can use your fingers, clean room gloves, or a stylus. To select and move on the screen: •...
Page 273 The options on the right side of the top pane of Clarius include options that allow you to run tests, configure instruments, manage projects, set up your workspace, and learn about the 4200A-SCS. Run runs the highlighted item. You can run an individual test by highlighting only that test. You can run all the tests for a device, subsite, site, or project by highlighting the device, subsite, site, or project.
Page 274 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Organize items in the project tree The project tree on the left side of the Clarius window displays the items in your project, including devices, tests, actions, and sites. The project tree for the default project is shown in the figure below.
Page 275 Each test must be in the project tree under a device. The devices available in the library include the standard set of devices that come installed on the 4200A-SCS and any custom- name devices that you have submitted; refer to Submitting devices to a library (on page 6-298).
Page 276 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Figure 214: Test library Configure the project Select Configure for an item in the project tree to display the settings for that item. Depending on the item, settings are available in the center and right panes. Help for the selected item is also available in the Help pane.
Page 277 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Analyze data When you run tests, you can display and analyze test results and test definitions in the Analyze pane. The Analyze pane displays data in a spreadsheet and as a graph.
Page 278: Additional Clarius Applications
4200A-SCS to be controlled remotely by an external GPIB controller. You cannot run KXCI and Clarius simultaneously. The Keithley Pulse tool (KPulse) controls the optional pulse cards. A pulse card is a dual-channel pulse card that is integrated inside the 4200A-SCS mainframe.
Page 279: Select Project Components
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Select project components Use the Select pane to add items to the project tree. When Select is active, the center pane contains libraries for tests, devices, actions, wafer plans, and projects. You can use filters and search options to help you find the items you need for your test.
Page 280: Add A Device And Test To The Project
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Add a device and test to the project You can add additional items to a project. Once a project is added from the library to the project tree, it is copied from the project in the library, so you can make changes without affecting the original project.
Page 281: Rearrange Items In The Project Tree
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Rearrange items in the project tree To rearrange items in the project tree, drag the items to the new location. If the item cannot be placed in the selected location, a red X is displayed. In the example below, a resistor test cannot be placed under a BJT device.
Page 282: Configure A Simple Test
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Configure a simple test Use the Configure pane to set up your test. For interactive test modules (ITMs), the Configure pane displays a schematic of the test device. The schematic is connected to an object that shows the operation mode and the type of instrument that is connected to the terminal.
Page 283: Set The Key Parameters
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Set the key parameters The Key Parameters are the most commonly used parameters. The parameters that are available depend on the instrument that is selected. For descriptions of parameters, refer to: •...
Page 284: Run A Simple Test
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Run a simple test When you select Run, tests and actions at a lower level than the highlighted item in the project tree are executed if they are selected, from top to bottom in the project tree. If you want to run an entire project, make sure the project name is highlighted.
Page 285: Working With My Projects
Working with My Projects My Projects allows you to work with the projects you have created. Any projects that users on the 4200A-SCS (regardless of user account) have added to the project directory defined in My Settings are available through My Projects.
Page 286: Create A New Project From My Projects
5. Press Enter to accept the new name. Export a project You can export a project. An exported project can be imported into another 4200A-SCS. The export includes all Run History data for each test in the project. To export a project: 1.
Page 287 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual To import a project: 1. In Clarius, select My Projects. 2. Select Import. The Import To My Projects dialog box opens. 3. Select the exported file. 4. Select Import. The Project Information Editor opens.
Page 288: Migrate Projects From 4200-Scs Systems
If you used Segment Arb waveform files from KPulse in your projects, you need to manually copy and paste the waveform files from the 4200 to the 4200A-SCS. Segment Arb waveform files have the extension .ksf and are normally stored in the folder C:\s4200\kiuser\KPulse\SarbFiles.
Page 289: Delete A Project
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Delete a project Before deleting a project, ensure that you and others will not need it in the future. When you delete a project, all files associated with the project in the C:\s4200\kiuser\Projects directory are also deleted.
Page 290: View My Projects
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Options in the Information Editor Displays the changes you make as they will appear in the library. Preview Type the new name. This is the name that is used in the library and the project tree.
Page 291: Test And Terminal Setting Descriptions
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Test and terminal setting descriptions The following topics provide descriptions of the parameters you can set for each instrument and operation mode. Operation Mode (SMU) The following topics describe the operation modes that are available when a SMU is selected as the instrument.
Page 292 (on page 6-39) The SMU range that is used when forcing the voltage. Compliance (on page 3-3) A limit that stops the 4200A-SCS from sourcing a current that is more than that limit. Power On Delay (on page 6-41) The delay between when SMUs are powered on in a test sequence.
Page 293 The SMU range that is used when forcing the voltage. page 6-39) Compliance (on page 3-3) A limit that stops the 4200A-SCS from sourcing a current that is more than that limit. Power On Delay (on page 6-41) The delay between when SMUs are powered on in a test sequence.
Page 294 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Parameter Description Off Time (on page 6-43) Available when Pulse Mode is selected. The amount of time that the pulse is off (5 ms to 20 s). Base Voltage (on page 6-43) Available when Pulse Mode is selected.
Page 295 The SMU range that is used when forcing the voltage. page 6-39) Compliance (on page 3-3) A limit that stops the 4200A-SCS from sourcing a current that is more than that limit. Power On Delay (on page 6-41) The delay between when SMUs are powered on in a test sequence.
Page 296 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Voltage Log Sweep operation mode - SMU The Voltage Log Sweep operation mode allows you to sweep over a large range and plot the measurements on a logarithmic scale. A linear sweep is typically unsatisfactory for such applications, because the first increment can miss several of the lower decades.
Page 297 The SMU range that is used when forcing the voltage. page 6-39) Compliance (on page 3-3) A limit that stops the 4200A-SCS from sourcing a current that is more than that limit. Power On Delay (on page 6-41) The delay between when SMUs are powered on in a test sequence.
Page 298 The SMU range that is used when forcing the voltage. page 6-39) Compliance (on page 3-3) A limit that stops the 4200A-SCS from sourcing a current that is more than that limit. Power On Delay (on page 6-41) The delay between when SMUs are powered on in a test sequence.
Page 299 (on page 6-39) The SMU range that is used when forcing the current. Compliance (on page 3-3) A limit that stops the 4200A-SCS from sourcing a voltage that is more than that limit. Power On Delay (on page 6-41) The delay between when SMUs are powered on in a test sequence.
Page 300 The SMU range that is used when forcing the current. page 6-39) Compliance (on page 3-3) A limit that stops the 4200A-SCS from sourcing a voltage that is more than that limit. Power On Delay (on page 6-41) The delay between when SMUs are powered on in a test sequence.
Page 301 The SMU range that is used when forcing the current. page 6-39) Compliance (on page 3-3) A limit that stops the 4200A-SCS from sourcing a voltage that is more than that limit. Power On Delay (on page 6-41) The delay between when SMUs are powered on in a test sequence.
Page 302 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Parameter Description On Time (on page 6-43) Available when Pulse Mode is selected. The amount of time that the pulse is on (5 ms to 20 s). Off Time (on page 6-43) Available when Pulse Mode is selected.
Page 303 The SMU range that is used when forcing the current. page 6-39) Compliance (on page 3-3) A limit that stops the 4200A-SCS from sourcing a voltage that is more than that limit. Power On Delay (on page 6-41) The delay between when SMUs are powered on in a test sequence.
Page 304 The SMU range that is used when forcing the current. page 6-39) Compliance (on page 3-3) A limit that stops the 4200A-SCS from sourcing a voltage that is more than that limit. Power On Delay (on page 6-41) The delay between when SMUs are powered on in a test sequence.
Page 305: Smu - All Terminal Parameters
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Parameter Description Voltage Column Name (on page 6- The name of the voltage measurement. This is the name that Clarius displays in the Analyze spreadsheet column for that measurement. Voltage Range...
Page 306 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius The data points are rounded to the nearest value. For example, if Start = 0 V, Stop = 5 V, and Step = 0.6 V: In this case, the Step value is forced to 0.625 V, which results in a data point value of 9.333, which is rounded to 9.
Page 307 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Step (voltage sweep) The current size of each step of the sweep. The current level changes in equal steps of this size from the start level to the stop level. A measurement is made at each source step (including the start and stop levels).
Page 308 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Dual Sweep When you select Dual Sweep, the instrument sweeps from start to stop, then from stop to start. When you clear Dual Sweep, the instrument sweeps from start to stop only.
Page 309 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Compliance limits You can set a limit that stops a SMU from sourcing a current or voltage that is more than that limit. This limit is called compliance and helps prevent damage to the device under test (DUT). The SMU will not exceed the maximum limit set for compliance.
Page 310 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Power On Delay When a test is run, the SMUs power on in a specific sequence. You can change the amount of time between when the SMUs power on in the sequence.
Page 311 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual More than one SMU in the test can be pulsing. If the pulse on or off times for the SMUs are different, the longer on and off times take precedence so that the SMUs operate synchronously and run at the same speed.
Page 312 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius The figure below shows some Pulse Mode examples. Figure 234: Pulse Mode examples On Time Available when Pulse Mode is selected. The amount of time that the pulse is on (5 ms to 20 s).
Page 313 When this attribute is used in a test sequence, it should be set before turning the source on. Even with the overvoltage protection set to the lowest value, never touch anything connected to the terminals of the 4200A-SCS when the output is on. Always assume that a hazardous voltage (greater than 30 V ) is present when the output is on.
Page 314 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Current Range The measure range determines the full-scale measurement span that is applied to the signal. Therefore, it affects both the accuracy of the measurements and the maximum signal that can be measured.
Page 315 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Report Value (Report Voltage or Measure Voltage) If Voltage is selected, Report Value determines which voltage values are recorded in the Analyze spreadsheet. You can select: • Programmed: Requested voltage values are recorded. For example, if you specified a voltage of 2.5 V, the reported value is 2.5 V, even if the measured value is 2.4997 V.
Page 316: Operation Mode (Cvu)
Parameters (on page 6-58) Select the type of parameters. When using any of the tests supplied by Keithley Instruments, leave the measurement option set to Cp-Gp. Param1 Column Name (on page 6- The name that is used for parameter 1 in the Analyze sheet.
Page 317 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Parameter Description AC Measure I Range (on page 6-60) The measure range determines the full-scale measurement span that is applied to the signal. DC Source V (on page 6-60) Selects the terminal to use to source DC drive voltage.
Page 318 Parameters (on page 6-58) Select the type of parameters. When using any of the tests supplied by Keithley Instruments, leave the measurement option set to Cp-Gp. Param1 Column Name (on page 6- The name that is used for parameter 1 in the Analyze sheet.
Page 319 (on page 6-58) Select the type of parameters. When using any of the tests supplied by Keithley Instruments, leave the measurement option set to Cp-Gp. The name that is used for parameter 1 in the Analyze sheet. Param1 Column Name...
Page 320 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Parameter Description Freq Column Name (on page 6-59) Available if you select Report Test Conditions. Determines the name of the column that contains the frequency information in the Analyze sheet where this data is reported.
Page 321 Parameters (on page 6-58) Select the type of parameters. When using any of the tests supplied by Keithley Instruments, leave the measurement option set to Cp-Gp. Param1 Column Name (on page 6- The name that is used for parameter 1 in the Analyze sheet.
Page 322 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Frequency Sweep - DC Step operation mode - CVU When the 4210-CVU does a frequency sweep with DC Step operation mode selected, the 4210-CVU sweeps through all the frequency points from start to stop for each DC step.
Page 323 Parameters (on page 6-58) Select the type of parameters. When using any of the tests supplied by Keithley Instruments, leave the measurement option set to Cp-Gp. Param1 Column Name (on page 6- The name that is used for parameter 1 in the Analyze sheet.
Page 324: Cvu - All Terminal Parameters
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Parameter Description Compensation Cable Length The cable length that was used to generate connection compensation data. page 6-60) Make sure this cable length is the same as the Cable Length setting in the Tools >...
Page 325 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual The data points are rounded to the nearest value. For example, if Start = 0 V, Stop = 5 V, and Step = 0.6 V: In this case, the Step value is forced to 0.625 V, which results in a data point value of 9.333, which is rounded to 9.
Page 326 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Dual Sweep When you select Dual Sweep, the instrument sweeps from start to stop, then from stop to start. When you clear Dual Sweep, the instrument sweeps from start to stop only.
Page 327 Parameters If you change the Parameters, it will change the Column names, which can cause Formulator functions to be erased. When using any of the tests or libraries supplied by Keithley Instruments, leave the measurement option set to Cp-Gp. You can select the following measurement options: •...
Page 328 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius DCV Column Name Available if you select Report Test Conditions. Determines the name of the column that contains the DC bias information in the Analyze sheet where this data is reported. You can change the name of the column by typing a new value.
Page 329 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Load Use the CVU connection compensation value that was generated for load compensation. Refer to Connection compensation (on page 4-10) for information on generating and using compensation values. Cable Length The cable length that was used to generate connection compensation data. Make sure this cable length is the same as the Cable Length setting in the Tools >...
Page 330 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Capacitance Range Estimator The measurement accuracy of the 4210-CVU is specified up to 100 nF. However, the CVU can make much higher capacitance measurements. The maximum capacitance is based on the test frequency, AC drive signal, and range.
Page 331 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual You can change the configuration to source AC voltage to CVL1 and DC source voltage to CVH1 while measuring AC current at CVH1, as shown in the following figure. Figure 242: AC source applied to CVL1 and DC source applied to CVH1 Another configuration sources AC drive voltage to the CVH1 terminal and sources DC bias voltage to the CVL1 terminal.
Page 332: Operation Mode (Pmu)
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Operation Mode (PMU) The operation mode determines what type of test is run on the terminal. Selecting the appropriate mode simplifies configuration options. A Pulse Sweep and Pulse Step function are identical. However, in a test where two or more PMUs are used, the sweep for one PMU is performed on each step of the pulse step of the other PMU.
Page 333 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Figure 246: Pulse train The PMU operation modes are described in the following sections. Pulse Amplitude Sweep operation mode - PMU The pulse amplitude sweep generates data that is recorded in the Analyze pane.
Page 334 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Pulse Base Sweep operation mode - PMU The pulse base sweep generates data that is recorded in the Analyze pane. The parameters that are specific to this mode are briefly described in the following table. Select the links to access additional information.
Page 335 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Pulse Amplitude Step operation mode - PMU Tests set to the pulse amplitude step operation mode generate data that is recorded in the Analyze pane. The parameters that are specific to this mode are briefly described in the following table. Select the links to access additional information.
Page 336 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius DC Step operation mode - PMU The DC step operation mode generates data that is recorded in the Analyze pane. The parameters that are specific to this mode are briefly described in the following table. Select the links to access additional information.
Page 337 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual DC Bias - PMU When DC Bias operation mode is selected, the PMU outputs the DC base voltage. The next figure shows a representation of a DC voltage waveform. Figure 247: DC Bias waveform The DC Bias operation mode generates data that is recorded in the Analyze pane.
Page 338 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Parameters common to PMU operation modes The following parameters are common to all PMU operation modes except DC Gnd. Brief descriptions are provided here. Select the links to access additional information. The parameters are listed in the order in which they appear in the All Parameters pane.
Page 339: Pmu - All Terminal Parameters
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual DC Gnd operation mode - PMU The operation mode for the PMU GND terminal. PMU - all terminal parameters When you select All Parameters, the Configure pane displays all available parameters for the test that is selected in the project tree.
Page 340 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Base The voltage offset (from 0 V) that is the reference for the pulse amplitude. Amplitude The amplitude voltage. Dual Sweep (pulse) When you select Dual Sweep, the instrument sweeps from start to stop, then from stop to start. When you clear Dual Sweep, the instrument sweeps from start to stop only.
Page 341 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Disable outputs at completion When a test is complete, you can disable the outputs or leave them enabled. To set output action on completion: 1. Select the test. 2. Select Configure.
Page 342 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Measure Current Range (PMU) The measure range determines the full-scale measurement span that is applied to the signal. Therefore, it affects both the accuracy of the measurements and the maximum signal that can be measured.
Page 343 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual The current range options are: • Auto: The instrument automatically optimizes the measurement range as the test progresses. This option provides the best resolution when the measurements span several decades. However, time delays can occur with range changes that can limit the measurement speed.
Page 344 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Voltage Sample Waveform Makes voltage measurements on the waveform. Available when the Test Mode is set to Waveform Capture. Report Timestamps Available when the Test Mode is set to Waveform Capture. When Report Timestamps is enabled, each measurement includes a timestamp and the waveform is graphed (voltage/current versus time) in the Analyze graph.
Page 345 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual PMU measurement status ITMs can provide status information for the 4225-PMU measurements in the Analyze sheet Run tab. The column for the status codes is labeled PMUx_y_S, where x is the PMU instrument number (PMU1, PMU2, and so on), and y is channel number (channel 1 or 2).
Page 346 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Placing the cursor on a flagged PMU1_1_S cell will open a window that summarizes the fault. When a measurement fault occurs, a message appears in the upper left corner of the graph. The...
Page 347 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual PMU measurement status codes Code Summary or description Value letter Load-line effect compensation (LLEC) 0 = LLEC disabled, sweep not skipped and sweep 1 = LLEC failed, sweep not skipped 3 = LLEC successful, sweep not skipped...
Page 348 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Compensation Short Connection Use to enable or disable short connection compensation. Refer to PMU connection compensation page 5-30) for detail on setting up and using connection compensation. Load Line Effect Compensation Use to enable or disable load-line effect compensation (LLEC).
Page 349: Test Settings
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Threshold Power The power threshold allows you to set a power threshold. If the threshold is reached or exceeded, the present sweep is stopped. Testing continues with any subsequent sweeps. This threshold is a comparison of the measurement after the pulse has been applied to the DUT (the threshold value will be exceeded, at least slightly).
Page 350 Speed, you can type a factor from 0 to 100. Filter Factor (on page 6-85) Custom Speed only. To reduce measurement noise, each 4200A-SCS applies filtering, which may include averaging of multiple readings to make one measurement. The Filter Factor is fixed for Fast, Normal, and Quiet speeds.
Page 351 Model 4200A-SCS Parameter Analyzer Reference Manual Speed The 4200A-SCS is highly tuned to automatically take into account both settling time and noise issues. It provides measurement speeds that allow you to select trade-offs between speed and noise. You can select: •...
Page 352 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius If Clarius makes and averages multiple readings for a measurement, then Clarius records the timestamp at the last of these readings, as shown in the following figure. Figure 257: Timestamps when Clarius requires multiple readings for a measurement You can enable the timestamp for any of the measurement speeds.
Page 353 In general, cables and matrices increase the settling time. You may need to experiment to find the ideal time. However, for a good quality switch, such as the Keithley Instruments 7174A Ultra-Low Current matrix, you should not need to increase the Delay Factor by more than two times.
Page 354 Section 6: Clarius Filter Factor To reduce measurement noise, each 4200A-SCS applies filtering, which may include averaging of multiple readings to make one measurement. The Filter Factor is fixed for Fast, Normal, and Quiet speeds. If you select the Custom Speed mode, you can type a Filter Factor of 0 to 100.
Page 355 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual The applied A/D conversion time also depends on the Filter Factor setting: • If the Filter Factor is not zero, the SMU or CVU applies an optimum A/D converter time that is based on the Filter Factor setting.
Page 356 If "Disable Outputs at Completion" is cleared, the SMU outputs remain at their last programmed levels when the test is completed. To prevent electrical shock that could cause injury or death, never make or break connections to the 4200A-SCS while the output is on.
Page 357 • None: The run continues. This is the default setting. • Test: The 4200A-SCS exits the test that is presently being run. If there are additional tests, operation continues to the next test. • Device: The 4200A-SCS exits the device that is presently being run. If there are additional devices, operation continues to the next device.
Page 358 Speed, you can type a factor from 0 to 100. Filter Factor (on page 6-85) Custom Speed only. To reduce measurement noise, each 4200A-SCS applies filtering, which may include averaging of multiple readings to make one measurement. The Filter Factor is fixed for Fast, Normal, and Quiet speeds.
Page 359 Model 4200A-SCS Parameter Analyzer Reference Manual Speed The 4200A-SCS is highly tuned to automatically take into account both settling time and noise issues. It provides measurement speeds that allow you to select trade-offs between speed and noise. You can select: •...
Page 360 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius If Clarius makes and averages multiple readings for a measurement, then Clarius records the timestamp at the last of these readings, as shown in the following figure. Figure 260: Timestamps when Clarius requires multiple readings for a measurement You can enable the timestamp for any of the measurement speeds.
Page 361 In general, cables and matrices increase the settling time. You may need to experiment to find the ideal time. However, for a good quality switch, such as the Keithley Instruments 7174A Ultra-Low Current matrix, you should not need to increase the Delay Factor by more than two times.
Page 362 Section 6: Clarius Filter Factor To reduce measurement noise, each 4200A-SCS applies filtering, which may include averaging of multiple readings to make one measurement. The Filter Factor is fixed for Fast, Normal, and Quiet speeds. If you select the Custom Speed mode, you can type a Filter Factor of 0 to 100.
Page 363 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual The applied A/D conversion time also depends on the Filter Factor setting: • If the Filter Factor is not zero, the SMU or CVU applies an optimum A/D converter time that is based on the Filter Factor setting.
Page 364 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Hold Time The starting voltages or currents of a sweep may be substantially larger than the voltage or current increments of the sweep. Accordingly, the source settling time required to reach the starting voltages or currents of a sweep may be substantially larger than the settling times required to increment the sweep.
Page 365 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual To select output values: 1. In the project tree, select the test. 2. Select Configure. 3. In the right pane, select Test Settings. 4. Select Output Values. The Output Values dialog box is displayed.
Page 366 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius PMU Test Settings The settings that are available for PMU tests are briefly described in the following table. Select the links to access additional information. Parameter Description Test Mode (on page 6-97) Select Pulse IV to make spot mean measurements (V or I) of the amplitude or base portions of one or more pulses.
Page 367 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual For pulse I-V, spot mean measurements are made on pulse amplitude and base level. You can measure voltage and current. The next figure shows the measure windows for spot mean measurements. The start measure and stop measure points for ITMs are fixed at 75 percent and 90 percent for both amplitude and base level.
Page 368 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Measure Mode For Measure Mode, you can select Average Pulses or Discrete Pulses. When Average Pulses is selected for Pulse IV, the measured values of two or more pulses are averaged. See the Pulse IV (Average pulses) measurement example (on page 6-99).
Page 369 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Pulse I-V (Discrete pulses) measurement example For the example shown in the next figure, the readings are the result of a pulsed IV sweep from 2 V to 5 V (in 1 V steps) with the discrete number of pulses set to three. This test yields the spot mean of the three pulses for each step of the sweep.
Page 370 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Waveform Capture (Discrete Pulses) measurement example For the example shown in the next figure, the samples of three pulses are captured. The 51 samples (17 samples x 3 pulses) are placed in the Analyze sheet.
Page 371 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual • Period: The pulse period steps or sweeps from a short period to a long period (or from a long period to a short period). • PW: The pulse width (PW) steps or sweeps from a short pulse width to a long pulse width (or from a long width to a short width).
Page 372 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Rise Time The rise transition time for the pulse output. Fall Time The fall transition time for the pulse output. Pulse Delay The pulse delay is the time interval between the start of the rising pulse edge of the trigger output pulse and the output pulse.
Page 373 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Settling Times The settling time is the time that it takes for pulse levels to stabilize after the voltage or current is changed, such as during execution of a sweep. The Typical Minimum Timing Recommendations dialog box displays typical minimum timing versus current measure range recommendations.
Page 374: Set Up A Complex Project
Set up a Probe Station (on page F-1) for detail. • Using switch matrices to cycle electrical connections from the 4200A-SCS between the devices of a subsite. Refer to Using Switch Matrices (on page A-1) for detail. This section describes how to add custom tests, actions, sites, and subsites to Clarius and to the project tree.
Page 375: Customize Tests
GPIB bus or RS-232 port. They can also be used for other tasks in the project, such as displaying prompts for test operators. User modules are created in Keithley User Library Tool (KULT). Clarius comes with many predefined user modules, organized into user libraries.
Page 376 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Create a custom ITM You can create a custom interactive test module (ITM) in Clarius. You do not need to create any external files (such as user modules) to create a custom ITM.
Page 377 Create a custom UTM User test modules (UTMs) are created from user modules. Many user modules are provided with the 4200A-SCS in the user libraries. You can also create your own user modules. For information on creating your own user modules, refer to Keithley User Library Tool (KULT) (on page 8-1).
Page 378 Define the user interface for a user test module (UTM) After you create a user module, you can use it as a user test module (UTM) in a 4200A-SCS project. When you create a user interface for a user test module (UTM), you can set up the Key Parameters Configure pane to: •...
Page 379 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Allow access to the UTM UI editor To use the UTM UI editor, you need to enable it in Clarius. To enable the editor in Clarius: 1. Select My Settings. 2. Select Environment Settings.
Page 380 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Select groups Groups organize parameters into related groups on the Clarius Configure pane. For example, in the example in Define the user interface for a user test module (on page 6-109), parameters are organized into the groups Program Pulse, Erase Pulse, Common Pulse Timing, Vt Measurement, and Endurance.
Page 381 On the 4200A-SCS display, there is limited space at 12 o’clock (above the image) and 6 o’clock (below the image).
Page 382 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Modify a group To modify a group: 1. Click the tab for the group. If a tab is not shown, use the left or right sheet buttons to move the groups until the tab displays (the arrow buttons are to the left of the All tab).
Page 383 File size less than 500 kB You can use full color bitmaps. Larger pixel size images render better on the 4200A-SCS screen. Each UTM must have only one image. If nothing is defined, Clarius uses the image of the device that the UTM is structured under in the project tree.
Page 384 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Edit the attributes for a test parameter You can edit the display attributes of a test parameter. You can set the display attributes from the All tab or from a specific group tab.
Page 385 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Figure 278: GUI Configuration for the voltsSourceRng parameter (ListBox) 6-116 4200A-901-01 Rev. C / February 2017...
Page 386 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Figure 279: GUI Configuration for the width parameter (EditBox) The Minimum, Maximum, and Default Values are defined in the KULT user module. To change the Minimum and Maximum Values, you must use KULT. You can edit the Default Value in Clarius.
Page 387 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual EditBox The EditBox Control type is the simplest method to allow users to change a parameter value. You can use this control type for source values (such as voltage or current), pulse timing parameters, or any other parameter that has a wide range of continuous values.
Page 388 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Figure 280: ListBox UTM UI Parameter Configuration for PMU_ID This figure shows the PMU_ID list in a system with two 4225-PMUs. SMU lists, CVU lists, and a customizable list are also available as items in the Predefined List Items list.
Page 389 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual The following figure shows the UTM UI Parameter Configuration dialog box for the parameter currentMeasureRng. The Use Case Condition field conditionally displays the Displayed Name in the list box. The expression you enter in this field must evaluate to True or False. If blank, the condition is evaluated as True.
Page 390 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Figure 282: currentMeasureRng list box with a connected RPM Displayed Name UTM Value Use Case Condition Comment 800 mA voltsSourceRng=40 Display this name when the chosen voltage range = 40 V; the 40 V range has 800 mA, 10 mA, and 100 µA current measure...
Page 391 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual ListBox “Use Case Condition” keywords and operators Keyword or operator Explanation Comment PresentInSystem Used for the 4200A-SCS This condition must be alone in the Use Case instrument: SMU, CVU, PMU, Condition field. It cannot be combined with other conditions or operators listed below.
Page 392 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius If needed, you can also note the unit of measurement in the Displayed Units field for reference by the UTM UI programmer. When finished, click OK to exit this dialog box.
Page 393 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual OptionBtn control Use the option button control (OptionBtn) when only one item of a group may be selected. This control is also useful for a parameter with a limited number of values (from 2 to 4).
Page 394 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius The Minimum, Maximum, and Default Values are defined in the KULT user module. To change the Minimum and Maximum Values, you must use KULT. You can edit the Default Value in Clarius.
Page 395 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual The configuration of an input array control, shown below, is similar to an edit box. The user module does not provide support for the minimum, maximum, or default values for the arrays; only the UTM UI provides this capability.
Page 396 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius SegARBConfig ® The SegARBConfig is the most complex control type available for the UTM UI. The Segment Arb mode has many parameters, with most of them in arrays. This control type provides the interface to...
Page 397 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual PMU_SegArb_ExampleFull user module For this control type, the PMU_SegArb_ExampleFull user module is used in the example. This module is included in the pmu-dut-examples project as the UTM pmu-segarb-complete, shown below. This figure shows the Segment Arb configuration control as the only control in the group. You can add other controls, but there can be only one Segment Arb control in a group.
Page 398 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius SegARBConfig control parameters The following tables summarize all the parameters in the SegARBConfig control. In the tables, each parameter is shown mapped to its parameter target. As mentioned above, the Segment Arb functionality is primarily in two LPT commands: seg_arb_sequence and seg_arb_waveform.
Page 399 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Parameter targets mapped to LPT function seg_arb_waveform In this table, the variable name is in the function seg_arb_waveform (on page 13-128). Parameter Variable name in Required in name function Type SegARBConfig?
Page 400 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Figure 290: Segment Arb UI UTM configuration for channel 1 Figure 291: Two-sequence Segment Arb waveform 4200A-901-01 Rev. C / February 2017 6-131...
Page 401 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Figure 292: SegARBConfig uses SeqList, SeqStartSeg, and SeqStopSeq to store sequence In this example for the user module PMU_SegArb_ExampleFull, several parameters are common across the two channels in the test: •...
Page 402 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Be sure to select appropriate variables for the SegARBConfig parameter assignment for each channel. Otherwise, unexpected test behavior may occur. Although the seg_arb_sequence command supports a maximum of 512 sequence definitions for each channel, the SegARBConfig control only supports 64 unique sequences for each channel.
Page 403 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Starting with default waveforms The SegARBConfig dialog box can supply default waveforms. Select the Defaults button shown in "Channel 2 SegARBConfig parameter configuration" in Assigning SegARBConfig to a group (on page 6-132).
Page 404 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Figure 296: UTM UI Editor Segment Arb Defaults Configuration (after pressing Load Simple Pulse) Defaults for this example The following figures show the defaults for this example user module, PMU_SegArb_ExampleFull. When creating default waveforms, test them to make sure they properly run and provide the intended waveforms.
Page 405 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Figure 298: UTM UI Editor Segment Arb Defaults Configuration for channel 2 Error checking Use care when configuring the SegARBConfig control by assigning the user module parameters to the SegARBConfig parameter names. Certain error checks are performed to minimize errors (correct any errors before the configuration can be accepted).
Page 406 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Complete a change Select OK to save any changes. Select Cancel to exit the dialog box without saving any changes. UTM UI Editor An example of the UTM UI Editor is shown below.
Page 407 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Example of using the editor This example demonstrates edits to the pmu-1ch-wfm UTM from the pmu-dut-example project. To edit the UI for this test: 1. Make sure the UTM UI Editor is enabled. See Allow access to the UTM UI editor (on page 6-110).
Page 408 UTM UI. For UI definitions that are provided with the 4200A-SCS, there is a factory file. If a user module does not have a factory UTM UI definition, creating a definition will create a user file. Do not modify the XML files outside of the UTM UI Editor, as errors or non-functional UTM UI definitions may result.
Page 409: Link Tests Or Actions
The UTM UI definition consists of one file for each user library. Use the kultcopy command to move a user library to another 4200A-SCS. This command copies the user modules (c code), UTM UI definition (XML files), and any bitmaps for the UTM UI (bitmapped files with the .bmp extension). For...
Page 410: Add Actions
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius To insert linked tests: 1. Add a test to the project tree (refer to Add a device and test to the project (on page 6-11) or Create a custom test (on page 6-108)).
Page 411: Sites
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Sites A site includes all of the subsites, devices, and tests in the project. If you set up multiple sites, all sites are identical. They will each have the same type and number of subsites and the sites are repeated across the wafer.
Page 412: Configure A Complex Test
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Configure a complex test For more complex tests, you can: • Set advanced test and terminal parameters. • Set up multiple steps or sweeps to track simultaneously using masters and subordinates.
Page 413: Step Or Sweep Multiple Device Terminals In The Same Test
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Step or sweep multiple device terminals in the same test Multiple steps or sweeps in an interactive test module (ITM) must track with regard to step number and duration. For example, you might want to apply multiple steps to multiple device terminals, such as when stepping the biases on two transistor terminals and sweeping voltage or current on the third terminal.
Page 414 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Figure 307: Master list sweeps versus subordinate list sweeps 4200A-901-01 Rev. C / February 2017 6-145...
Page 415: Configure Actions
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual If you do not specify an instrument to be the master, the first instrument that was assigned to the step or sweep operation mode is assigned to be the master. You can change this designation in the Test Settings pane.
Page 416: Configure Sites
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Configure sites A site includes all of the subsites, devices, and tests in the project. If you set up multiple sites, all sites are identical. They will each have the same type and number of subsites and the sites are repeated across the wafer.
Page 417: Configure Subsite Cycling
Model 4200A-SCS Parameter Analyzer Reference Manual Configure subsite cycling You can use the 4200A-SCS to stress test using subsite cycling (up to 128 times). A Clarius evaluation consists of pre-stress tests at a subsite, followed by alternate cycles of stressing and retesting.
Page 418 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Connect devices for stress/measure cycling Devices that are stress/measure cycled in parallel are connected through a switching system. The following figure shows an example of connections for an HCI evaluation. Figure 308: Stress / measure wiring example 4200A-901-01 Rev.
Page 419 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Connections for matrix card Figure 309: AC Pulse stress-measure — hardware matrix card simplified schematic 6-150 4200A-901-01 Rev. C / February 2017...
Page 420 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Connections for pulse card to device under test Connect the pulse generator to the DUT during stress as shown in the following figures. Figure 310: AC pulse stress-measure — hardware setup block diagram for stress Figure 311: AC Pulse stress-measure —...
Page 421 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Connections for system hardware Figure 312: AC Pulse stress-measure — hardware connections 6-152 4200A-901-01 Rev. C / February 2017...
Page 422 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Choose the stress mode You can select one of these stress, measure, or cycle modes: • Stress/Measure Mode: Test-stress-test-stress cycles, such as hot carrier injection (HCI) or negative bias temperature instability (NBTI) studies.
Page 423 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Set up Cycle Mode In the Cycle Mode, the subsite test is repeated a specified number of times. There are only measure cycles with no stressing. For each individual test in the subsite, data is acquired for each subsite cycle.
Page 424 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius About Stress/Measure Mode In the Stress/Measure Mode, the subsite test is repeated a specified number of times. For each individual test in the subsite, data is acquired for each subsite cycle. For example, if the subsite is cycled five times, there are five sets of data and graphs for each test.
Page 425 • If your voltage stress system is using a switch matrix, the 4200A-SCS tries to maximize the amount of SMU sharing in order to allow parallel testing. It determines which pins can share SMUs in the following fashion.
Page 426 Section 6: Clarius AC Voltage stressing You can use four Keithley Instruments pulse cards to AC voltage stress eight devices (one device pin for each pulse channel). The figure below shows a Keithley Instruments pulse card providing AC voltage stress for six devices.
Page 427 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual DC Current stressing For current stressing, the maximum number of devices depend on the number of SMUs in the system. Each SMU can current stress one device. For a system with eight SMUs, up to eight devices can be current stressed, as shown in the figure below.
Page 428 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius 6. Disconnect all devices. 7. Use the switch matrix to automatically connect the SMUs to device 1. 8. Wait for a 10 s delay to promote uniform pre-test decay for all devices.
Page 429 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Set up Linear Stress/Measure timing To set timing for linear stress/measure mode: 1. Select Linear. 2. In First Stress Time, set the time in seconds that devices are stressed during the first cycle.
Page 430 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Set up Log Stress/Measure timing To set timing for log stress/measure mode: 1. Select Log. 2. In First Stress Time, set the time in seconds that devices are stressed during the first cycle.
Page 431 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Set up List Stress/Measure Information that is entered when Linear or Log is selected is shown when List is selected. You can use those settings as a starting point when you set up your list.
Page 432 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Set the stress/measure mode subsite Stress Properties The subsite stress properties include stress voltages or currents and limits. You also set matrix connection pin assignments for each device in the subsite.
Page 433 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Figure 326: Subsite Stress Properties pane Stress Conditions The options you may see in the Stress Conditions area include the following. The options that are available depend on the device that is selected.
Page 434 SMUs: If your voltage stress system is using a switch matrix, the 4200A-SCS tries to maximize the amount of SMU sharing in order to allow parallel testing. It determines what pins can share SMUs in the following fashion.
Page 435 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Off: Determines the sequence that SMUs will follow for powering down DUTs (stress voltage or current goes to 0). If no settings are defined, the SMUs power off from the lowest number to the highest (SMU1, SMU2, SMU3, and so on).
Page 436 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Figure 329: Device Pin / Switch Connections settings example Parameter Properties/Degradation Targets Tests: The tests in the subsite that have output values assigned. Output Values: The name of the output value.
Page 437 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Degradation targets You can enable an output value as a target and assign it a target value (in % change or absolute value). When all targets for a device are reached, that device is no longer tested. Subsequent cycles bypass the device tests that reached all its targets.
Page 438 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Stress measurements You can do stress measurements for each device. If the device is being stressed by DC voltage, the DC current is measured. If the device is being stressed by DC current, the DC voltages is measured.
Page 439 SMUs that will be used for device pin grounding or biasing. If your system contains 4225-RPMs, you cannot use SMUs during segment stresses. You must disconnect all RPMs from the 4200A-SCS and update the RPM configuration in KCon to enable DC biasing during subsite segment stress.
Page 440 The stress phase example figure below shows an example of how a DUT can be stressed using Segment Arb waveforms. During a stress phase, the matrix connects the channels of the Keithley Instruments pulse card to the drain and gate of the DUT. The pulse generator stresses the drain and gate by outputting Segment Arb waveforms.
Page 441 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Set up Linear Segment Stress/Measure counts To set counts for linear segment stress/measure mode: 1. Select Linear. 2. In First Stress Count, set the number of times that devices are stressed during the first segment.
Page 442 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Set up Log Segment Stress/Measure counts To set counts for log segment stress/measure mode: 1. Select Log. 2. In First Stress Count, set the number of times that devices are stressed during the first segment.
Page 443 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Set up List Segment Stress/Measure counts To set counts for list mode: 1. Select List. 2. If neded, enter the Segment Stress/Measure Delay in seconds. This is the delay after each stress cycle.
Page 444 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Set the segment stress/measure mode Subsite Stress Properties The following topics describe the options that are available when you are setting the properties for the Segment Stress/Measure Mode. The test sequence for the Segment Stress/Measure Mode is the same as the test sequence for the...
Page 445: Run A Complex Test
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Export output values to Analyze sheet For subsite cycling, you can export output values from tests into the subsite Analyze sheet. Each time a subsite is cycled, the measurements for the output values are placed in the subsite Analyze sheet.
Page 446 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius The following example uses the Demo Project to demonstrate how to run a project. To run all objects in a project: 1. Open the Demo Project. Refer to Open a project (on page 6-16).
Page 447 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Run individual devices You can run the tests for a single device in the project tree. When you run the tests for a single device, the tests are run in the order in which they appear in the project tree.
Page 448 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Run an individual test To abort a test, select Stop. All test and action execution stops immediately. To run an individual test in the project tree: 1. In the project tree, make sure the check box for the test is selected.
Page 449 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Run an individual subsite When you run an individual subsite, only the components that are assigned to it run in the order in which they appear in the project tree. When you run the components for a subsite, the actions and tests are run in the order in which they appear in the project tree.
Page 450: Cycle A Subsite
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius 4. Set Current Site to the site that you want to run. 5. Select Run. The Run icon changes as shown below. The active site, actions, and tests are listed to the left of Run. The Stop icon changes to red.
Page 451: Multi-Site Execution
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Multi-site execution Running a project runs all the sites that are defined for the project. However, you can run a subset of the sites if needed. To run some sites: 1. In the project tree, select the site.
Page 452: Analyze Data
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Analyze data When you run tests for projects or individual subsites, devices, and tests, Clarius records the data in the Analyze pane. You can display the data in a spreadsheet and as a graph. Select Analyze to view the spreadsheet and graph.
Page 453: Spreadsheet
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Spreadsheet ® ® The Analyze spreadsheet is a spreadsheet that is compatible with Microsoft Excel . It contains at least the following worksheets: • Run: Records all the numerical test data that is generated every time you execute test at a given site.
Page 454 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius If the numbers in the spreadsheet are red with a blue background, there is a problem with the data. For example, no device under test (DUT) was attached or there is a divide by zero error.
Page 455 You can enter formulas and perform calculations in the Calc worksheet. The Calc worksheet is provided under the assumption that most users are already familiar with the use of spreadsheets. However, if you are unfamiliar with spreadsheets, Keithley Instruments suggests that you review one of the many excellent manuals available on the subject.
Page 456 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Once you have a link to a cell, you can link to cells that are adjacent below or to the right of the linked data. To link to adjacent cells: 1. Select the Calc worksheet cell that contains the linked data and the cells to which you want to link adjacent cells.
Page 457 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Terminal Settings pane (Analyze) When Analyze is selected, the Terminal Settings pane displays the settings for the presently selected test. For information on what settings are available, refer to Test and terminal setting descriptions page 6-22).
Page 458 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Stress/measure mode Analyze graph The graphs for the stress/measure mode plot degradation (in %) versus the stress times. Each data point in the graph represents the device degradation (% Change) for tests after each stress cycle (stress time).
Page 459 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Subsite Settings sheet The Settings sheet displays information about the subsite cycling setup. It also lists the output values for each device and test. To display the Settings sheet, select the Settings tab on the subsite Analyze sheet.
Page 460 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Figure 352: Subsite Analyze Settings sheet for Stress/Measure mode Measurement status Many tests provide status information for the measurements in the Analyze pane of Clarius. For the 4210-CVU, the data column for the 32-bit status codes is labeled CVU1S. CVU status code indicates the I measure range for each impedance measurement and flags any errors.
Page 461 Measurement timeout: Indicates that the measurement was not received after a set time (total aperture). This timeout error may indicate that there is an issue with the 4210-CVU card. Try resetting the hardware and running the project test again. If this error reoccurs, contact Keithley Instruments. To reset the hardware: 1.
Page 462 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Run History When a test is selected in the project tree and Analyze is selected, the right pane includes a Run History tab. If the test has not yet been run, this displays sample data and a sample graph in the Analyze pane.
Page 463: Save Test Results And Graphs
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual You can change the name of the run. Select More, then enter information in the text box that contains the run number. Enter text as needed and select Enter. The name you entered is displayed, followed by the run number.
Page 464 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Figure 355: cv-cap test results 4200A-901-01 Rev. C / February 2017 6-195...
Page 465: Graph
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Graph The Analyze graph allows you to create and export graphs of the test and test analysis results. The graph provides you with flexible plot-data selection, formatting, annotation, and numerical coordinate display using precision cursors.
Page 466 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Open a graph To open a graph: 1. In the project tree, select a test. 2. Select Analyze. The graph is displayed at the bottom of the center pane. The time and date when the data was generated are displayed in the upper left corner.
Page 467 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual To define a graph: 1. Select Graph Settings. 2. Select Define Graph. An example of the Graph Definition dialog box is shown in the following figure. Figure 358: Graph Definition tab for vfd test 3.
Page 468 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius 4. If the test does not define a family of curves, you can select Enable Multiple X’s, as shown in the following figure. If you select multiple X’s:  Select a Y for each X. The number in the cell indicates the relationships.
Page 469 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Change the graph settings You can access the settings for the graph by selecting the Graph Settings button. You can also access these settings by right-clicking the graph. Dual Graph Select Dual Graph to display two graphs, one with the Y Axis as the left axis and one with the Y1 Axis as the left axis.
Page 470 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius X, Y1, and Y2 Axis options The options for the X Axis, Y1 Axis, and Y2 Axis are described in the following table. Option Description Title Text The title for the axis. Defaults to the row 1 column heading in the Run tab.
Page 471 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Option Description Specifies the spacings between the individual labels on the axis and between Major the individual tick marks and grid lines, in terms of actual plot units. If Auto is cleared, you can specify the tick spacing manually.
Page 472 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Configure cursors To display cursors: 1. Select Analyze. 2. On the graph, right-click and select Cursors. The dialog box shown below opens. Figure 361: Graph Cursors dialog box 3. In the Cursor list, select Visible for the cursors you want to display. Show Position in the Display area is automatically selected for each cursor that has Visible selected.
Page 473 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual 4. Select Properties. The Cursor dialog box for the selected cursor opens, as shown below. The Sample area displays the cursor that you are configuring, including the color. Figure 362: Cursor # dialog box 5.
Page 474 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Advanced cursor options The options in the Advanced area of the Cursor dialog box includes options that place the selected cursor at special locations on the graph. After the cursor moves to the option you selected, the option is cleared and you can manually position the cursor.
Page 475 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Graph tab fit Formulator fits that return the corresponding fit line and fit parameters Fit parameter Fit parameter Fit line Fit parameter "a" "b" "xint" Linear LINFIT LINFITYINT LINFITSLP LINFITXINT Regression...
Page 476 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Figure 364: Regression fit example Perform line fits Plots of the fit lines appear as dashed lines, and fit parameter and cursor coordinate displays indicate appropriate numerical values. Fit #1 is always associated with cursors 1 and 2. Fit #2 is always associated with cursors 3 and 4.
Page 477 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual 4. Select Properties next to the cursor. The Cursor dialog box for the selected cursor opens, as shown below. Figure 365: Cursor # dialog box 5. Select Fit # On. 6. Select Properties under Fit # On. The Line Fits dialog box is displayed, as shown in the following figure.
Page 478 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius 7. Select OK when changes are complete. The graph is displayed with the:  Line fit cursors at the origin or the Y axis  Fit parameters  Cursor coordinates 8. Adjust the cursor locations as follows. Refer to...
Page 479 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Use existing cursors for line fits To use existing cursors for line fits: 1. Right-click a cursor. The Cursor dialog box for the selected cursor opens, as shown below. Figure 367: Cursor # dialog box 2.
Page 480 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Interpolate data on the graph You must select a cursor before the move or interpolation key sequences become active for that cursor. To add data on the graph: • Select a cursor, hold the Alt key, and use the arrow keys to find the point for which you want to interpolate data.
Page 481 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual An example of the zoom area in the graph above is shown here. Figure 369: Zoom in on an area of the graph - results To make the graph smaller, right-click the graph and select Zoom Out.
Page 482 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius 3. In the Text box, enter the comment. 4. Change the appearance of the comment as needed. See the table below for descriptions of the options. 5. Click OK. The comment displays on the graph in the upper left corner.
Page 483 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Option Description Sets the precision of the displayed values. Precision Select whether to show the most recent data or run history data. Show Most Recent Data The heading that is displayed for the data.
Page 484 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Option Description The color of the text. Foreground The background color. Background Select to display the box with a transparent background. Clear to make the Transparent background solid. Note that selecting Transparent sets the background color selection to light gray.
Page 485 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual To display test conditions: 1. On the graph, right-click and select Test Conditions. The list is displayed in the upper right corner of the graph. 2. Right-click the test conditions to display the Test Condition Properties dialog box. The conditions and dialog box are shown in the next graphic.
Page 486 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Add or update a title To add or update the title of the graph: 1. On the graph, right-click and select Title. The title is displayed at the top of the graph and the Title Properties dialog box is displayed.
Page 487 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Change the graph colors You can change the colors of graph foreground (the plot area) and background (outside the plot area) and determine if the time and date are displayed. You can also select Monochrome, which changes all options on the graph, including plot lines, titles, and axes, to black and white.
Page 488 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Identify plot coordinates with crosshairs You can display crosshairs that can be positioned anywhere on the graph. An example is shown in the following figure. The x and y values are displayed when the crosshairs are on a data point.
Page 489 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Changing the position of a graph To reposition the Analyze graph: 1. Select Analyze. 2. Right-click the graph. 3. To move the graph, select Move. The cursor changes to crossed arrows.
Page 490 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Cycle mode graphs The graphs for the Cycle Mode plot output values versus the cycle index. Each data point in the graph represents an output value reading for each subsite cycle. The following figure explains how to display the various graphs.
Page 491: The Formulator
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual The Formulator The Formulator allows you to make data calculations on test data and on the results of other Formulator calculations. The Formulator provides a variety of computational functions, common mathematical operators, and common constants. Some of these may be used for real-time, in-test calculations for test data.
Page 492: Open The Formulator
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Open the Formulator To open the Formulator: 1. In the project tree, select a test. 2. Select Configure. 3. In the Test Settings pane, select Formulator. The Formulator dialog box opens, as shown below.
Page 493: Becoming Familiar With The Formulator Dialog Box
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Becoming familiar with the Formulator dialog box This section summarizes how you can use each Formulator feature. Formula area The top area of the Formulator dialog box allows you to manage formulas.
Page 494 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Constants The Constants tab provides constants that you can use in the formula. Click the symbol of the constant to add it to the formula. The definitions of the default constants are: •...
Page 495: Using The Formulator Options
Row 1 of an Analyze worksheet contains column headings. Therefore, when the row number (index) of a column (vector) is specified as a function argument, do not insert 1. Keithley Instruments recommends using the function FIRSTPOS as the argument for the first value in a vector:...
Page 496: Real-Time Functions, Operators, And Formulas
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Real-time functions, operators, and formulas A formula that contains only real-time operators and functions is a real-time formula. If a real-time formula is specified as part of a test, it executes for each data point generated by the test immediately after it is generated.
Page 497: Formulator Function Reference
Model 4200A-SCS Parameter Analyzer Reference Manual Formulator function reference Each of the 4200A-SCS Formulator functions is described in the following. ABS Formulator function Calculates the absolute value of each value in the designated column (vector) or the absolute value of any operand.
Page 498: Exp Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius EXP Formulator function value Returns the exponential, e , for each value in a column (vector) or for any operand. Usage EXP(Value) The name of any column (vector) in the Data Series list or any operand...
Page 499: Ln Formulator Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual LN Formulator function This command returns the base-e (natural, Napierian) log of each value in a designated column (vector) or the Napierian log of any operand. Usage LN(Value) Value The name of any column (vector) in the Data Series list or any operand Details You can use this function to do calculations in real time (while a test is executing).
Page 500: Cond Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius COND Formulator function Returns one of two user-defined expressions, depending on the comparison of two other user-defined expressions. Usage COND(EXP1, EXP2, EXP3, EXP4) EXP1, EXP2, EXP3, Mathematical expressions created using valid Formulator functions, operators, and...
Page 501: Mavg Formulator Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual MAVG Formulator function Returns a new column (vector) consisting of the moving averages of successive groups of data points from another column (vector). Usage MAVG(V, N) The name of any column (vector) in the Data Series list or any operand...
Page 502: Median Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius MEDIAN Formulator function Searches all values in a column (vector), finds the middle point of that column used, and returns the value. Usage MEDIAN(Value) Value The name of any column (vector) in the Data Series list...
Page 503: Trigonometry
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Trigonometry The following Formulator functions provide trigonometric operations. ACOS Formulator function Returns the arc cosine of each value in a designated column (vector) under Columns or any operand. Usage ACOS(Value) The name of any column (vector) in the Data Series list or any operand...
Page 504: Atan Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius ATAN Formulator function Returns the arc tangent of each value in a designated column (vector) under Columns or any operand. Usage ATAN(Value) The name of any column (vector) in the Data Series list or any operand...
Page 505: Deg Formulator Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual DEG Formulator function The DEG function converts an angle value in radians to degrees. Usage DEG(Value) The name of any column (vector) in the Data Series list or any operand Value Details Returns the value in degrees.
Page 506: Sin Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius SIN Formulator function Returns the sine of each value in a designated column (vector) under Columns or any operand. Usage SIN(Value) The name of any column (vector) in the Data Series list or any operand...
Page 507: Array
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Array The following Formulator functions are used to work with arrays. AT Formulator function Extracts and returns a single value from a column (vector). Usage AT(Value, POS) The name of any column (vector) in the Data Series list or any operand...
Page 508: Findd Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius FINDD Formulator function The find down function searches down the column until it finds a value that matches the user-specified value X. FINDD searches a column (vector) V, beginning at START. Then it returns the row number (index) of that value.
Page 509: Findlin Formulator Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual FINDLIN Formulator function Find using linear interpolation searches down the column until it finds a value that is closest (but does not exceed) the user-specified value X. FINDLIN searches a column (vector) V, beginning at START. Linear interpolation is then used to determine its decimal location between the found value and the next value in the column (vector).
Page 510: Findu Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius FINDU Formulator function Find up searches up the column until it finds a value that matches the user-specified value X. It then returns the row number (index) of that value. FINDU searches a column (vector) V, beginning at START. Then it returns the row number (index) of that value.
Page 511: Index Formulator Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual INDEX Formulator function Returns a specified number of points starting with a specified value and consecutive values incremented by one. Usage INDEX(START, N) START The starting value The number of data points to be included...
Page 512: Integ Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius INTEG Formulator function From two columns (vectors) VX and VY, each one containing N values, the INTEG function returns a third column (vector) containing a series of numerical integrals A , where n = 1, 2, ..., N-1, N.
Page 513: Lastpos Formulator Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Figure 380: A2, A3, and A4 curve areas Figure 381: A5 curve area You can use this function to do calculations in real time (while a test is executing). Example QBD = INTEG(TIME, GATEI)
Page 514: Maxpos Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius MAXPOS Formulator function Searches all values in a column (vector), finds the maximum value, and returns the row number (index) of the maximum value. Usage MAXPOS(V) The name of any column (vector) listed under Columns...
Page 515: Summv Formulator Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Example 2 Given an existing column (vector), V , containing values in rows 2 through 60, you could use SUBARRY to exist return a new column (vector), Vnew, containing only the values from rows 20 through 40 of V...
Page 516: Line Fits
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Line Fits The Line Fit Formulator functions allow you to set up different types of line fits. EXPFIT Formulator function Performs an exponential fit. Fits the following exponential relationship to a specified range of values in two...
Page 517: Expfita Formulator Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual EXPFITA Formulator function Performs an exponential fit. Fits the following exponential relationship to a specified range of values in two columns (vectors): one column, VX, containing X values and the other column, VY, containing Y values:...
Page 518: Expfitb Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius EXPFITB Formulator function Performs an exponential fit. Fits the following exponential relationship to a specified range of values in two columns (vectors): one column, VX, containing X values and the other column, VY, containing Y values:...
Page 519: Linfit Formulator Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual LINFIT Formulator function Finds a linear equation and returns a new column (vector). Usage LINFIT(VX, VY, STARTPOS, ENDPOS) The name of any column (vector) listed under Columns The name of any column (vector) listed under Columns...
Page 520: Linfitslp Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius LINFITSLP Formulator function Finds a linear equation and returns the slope. Usage LINFITSLP(VX, VY, STARTPOS, ENDPOS) The name of any column (vector) listed under Columns The name of any column (vector) listed under Columns...
Page 521: Linfitxint Formulator Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual LINFITXINT Formulator function Finds a linear equation and returns the X intercept. Usage LINFITXINT(VX, VY, STARTPOS, ENDPOS) The name of any column (vector) listed under Columns The name of any column (vector) listed under Columns...
Page 522: Linfityint Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius LINFITYINT Formulator function Finds a linear equation and returns the Y intercept. Usage LINFITYINT(VX, VY, STARTPOS, ENDPOS) The name of any column (vector) listed under Columns The name of any column (vector) listed under Columns...
Page 523: Logfit Formulator Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual LOGFIT Formulator function Performs a base-10 log-linear fit. Usage LOGFIT(VX, VY, STARTPOS, ENDPOS) The name of any column (vector) listed under Columns The name of any column (vector) listed under Columns...
Page 524: Logfita Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius LOGFITA Formulator function Performs a base-10 log-linear fit. Usage LOGFITA(VX, VY, STARTPOS, ENDPOS) The name of any column (vector) listed under Columns The name of any column (vector) listed under Columns...
Page 525: Logfitb Formulator Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual LOGFITB Formulator function Performs a base-10 log-linear fit. Usage LOGFITA(VX, VY, STARTPOS, ENDPOS) The name of any column (vector) listed under Columns The name of any column (vector) listed under Columns...
Page 526: Poly2Coeff Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius POLY2COEFF Formulator function Enables quadratic regression line fitting. Usage POLY2COEFF(VX, VY, STARTPOS, ENDPOS) The name of any column (vector) listed under Columns The name of any column (vector) listed under Columns...
Page 527: Poly2Fit Formulator Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual POLY2FIT Formulator function Enables quadratic regression line fitting. Usage POLY2COEFF(VX, VY, STARTPOS, ENDPOS) The name of any column (vector) listed under Columns The name of any column (vector) listed under Columns...
Page 528: Polynfit Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius POLYNFIT Formulator function POLYNFIT (n order) does polynomial approximation from the 1st order to the 9th order. Usage POLYNFIT(VX, VY, ORDER, STARTPOS, ENDPOS) The name of any column (vector) listed under Columns...
Page 529: Regfit Formulator Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual REGFIT Formulator function Performs a linear regression fit. Usage REGFIT(VX, VY, STARTPOS, ENDPOS) The name of any column (vector) listed under Columns The name of any column (vector) listed under Columns...
Page 530: Regfitslp Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius REGFITSLP Formulator function Performs a linear regression fit. Usage REGFITSLP(VX, VY, STARTPOS, ENDPOS) The name of any column (vector) listed under Columns The name of any column (vector) listed under Columns...
Page 531: Regfitxint Formulator Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual REGFITXINT Formulator function Performs a linear regression fit. Usage REGFITXINT(VX, VY, STARTPOS, ENDPOS) The name of any column (vector) listed under Columns The name of any column (vector) listed under Columns...
Page 532: Regfityint Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius REGFITYINT Formulator function Performs a linear regression fit. Usage REGFITYINT(VX, VY, STARTPOS, ENDPOS) The name of any column (vector) listed under Columns The name of any column (vector) listed under Columns...
Page 533: Tanfit Formulator Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual TANFIT Formulator function Finds a linear equation of the form Y = a + bX from two columns (vectors), VX and VY. Usage TANFIT(VX, VY, POS) The name of any column (vector) listed under Columns...
Page 534: Tanfitslp Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius TANFITSLP Formulator function Finds a linear equation of the form Y = a + bX from two columns (vectors), VX and VY. Usage TANFITSLP(VX, VY, POS) The name of any column (vector) listed under Columns...
Page 535: Tanfitxint Formulator Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual TANFITXINT Formulator function Finds a linear equation of the form Y = a + bX from two columns (vectors), VX and VY. Usage TANFITXINT(VX, VY, POS) The name of any column (vector) listed under Columns...
Page 536: Tanfityint Formulator Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius TANFITYINT Formulator function Finds a linear equation of the form Y = a + bX from two columns (vectors), VX and VY. Usage TANFITYINT(VX, VY, POS) The name of any column (vector) listed under Columns...
Page 537: Identify Data Analysis Requirements
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Identify data analysis requirements In many cases, you may already know a needed analysis formula, even before running a test. In fact, for a test, you may create a real-time formula in advance so that you can monitor its output during a test, either in the Analyze sheet or graph.
Page 538 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Figure 383: Determining the starting and ending row numbers (indices) for the data to be analyzed Creating an analysis formula After you have identified the needed Formulator functions and data, create an analysis formula as follows: 1.
Page 539 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual For example, to find the regression line for the plateau in the figure in Determining the type of calculation: an example (on page 6-268), enter the equation in the figure below.
Page 540 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Viewing analysis results in the Analyze sheet After executing a new formula, a new column of data containing the results is added to the Analyze worksheet. If the formula in the upper Formula box was edited to replace a previous version, the corresponding worksheet column updates to reflect the changes.
Page 541: Calc Worksheet Function Definitions
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Editing Formulator formulas and constants To edit a Formulator formula: 1. In the lower Formula box, double-click the formula to edit. A copy of the formula appears in the upper Formula box 2.
Page 542: Abs Calc Worksheet Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius ABS Calc worksheet function This command returns the absolute value of a value. Usage ABS(Value) Any number Value Details An absolute value does not display a positive or negative sign. Example =ABS(1) Both return a value of 1.0000E+0.
Page 543: Acosh Calc Worksheet Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual ACOSH Calc worksheet function This command returns the inverse hyperbolic cosine of a value. Usage ACOSH(Value) Any number equal to or greater than 1 Value Example =ACOSH(1.2) Returns 622.3625E-3. =ACOSH(3) Returns 1.7627E+0.
Page 544: Asinh Calc Worksheet Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius ASINH Calc worksheet function This command returns the inverse hyperbolic sine of a value. Usage ASINH(Value) Any number Value Example =ASINH(5.3) Returns 2.3696E+0. =ASINH(-4) Returns -2.0947E+0. Also see ACOSH (on page 6-274)
Page 545: Atan2 Calc Worksheet Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual ATAN2 Calc worksheet function This command returns the arctangent of specified coordinates. Usage ATAN2(x, y) The x coordinate The y coordinate Details The arctangent is the angle between the x axis and a line with the following end points: •...
Page 546: Average Calc Worksheet Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius AVERAGE Calc worksheet function This command returns the average of the supplied numbers. Usage AVERAGE(Value_list) Value_list A list of numbers separated by commas or a range of number-containing cells in the...
Page 547: Cosh Calc Worksheet Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual COSH Calc worksheet function This command returns the hyperbolic cosine of an angle. Usage COSH(Value) Any value Value Example =COSH(2.10) Returns 4.1443E+0. =COSH(0.24) Returns 1.0289E+0. Also see ASINH (on page 6-275)
Page 548: Exp Calc Worksheet Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius EXP Calc worksheet function This command returns the constant e raised to the specified power. Usage EXP(Value) Any number as the exponent Value Details The constant e is 2.71828182845904 (the base of the natural logarithm).
Page 549: Hour Calc Worksheet Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual HOUR Calc worksheet function This command returns the hour component of the supplied date and time serial number, specified in 24-hour format. Usage HOUR(Serial_number) Serial_number The time as a serial number; the decimal portion of the number represents time as a...
Page 550: Ln Calc Worksheet Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius LN Calc worksheet function This command returns the natural logarithm (based on the constant e) of a value. Usage LN(Value) Any positive real number Value Example =LN(12.18) Returns 2.4997E+0. =LN(20.09) Returns 3.0002E+0.
Page 551: Log10 Calc Worksheet Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual LOG10 Calc worksheet function This command returns the base-10 logarithm of a value. Usage LOG10(Value) Any positive real number Value Example =LOG10(260) Returns 2.4149E+0. =LOG10(100) Returns 2.0000E+0. Also see (on page 6-279)
Page 552: Lookup Calc Worksheet Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius LOOKUP Calc worksheet function This command searches for a value in one range and returns the contents of the corresponding position in a second range. Usage LOOKUP (Lookup_value, Lookup_range, Result_range) Lookup_value...
Page 553: Match Calc Worksheet Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual MATCH Calc worksheet function This command compares a specified value against values in a range. The position of the matching value in the search is returned. Usage MATCH(Lookup_value, Lookup_range, Comparison) Lookup_value The value against which to compare;...
Page 554: Max Calc Worksheet Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius MAX Calc worksheet function This command returns the largest value in the specified list of numbers. Usage MAX(Value_list) Value_list A list of as many as 30 numbers separated by commas Details The Value_list can contain numbers, logical values, text representations of numbers, or a reference to a range containing those values.
Page 555: Min Calc Worksheet Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual MIN Calc worksheet function This command returns the smallest value in the specified list of numbers. Usage MIN(Value_list) A list of as many as 30 numbers separated by commas Value_list Details Value_list can contain numbers, logical values, text representations of numbers, or a reference to a range that contains those values.
Page 556: Minute Calc Worksheet Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius MINUTE Calc worksheet function This command returns the minutes component of the serial number generated by the NOW function. Usage MINUTE(Serial_number) Serial_number The time as a serial number; the decimal portion of the number represents time as a...
Page 557: Month Calc Worksheet Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual MONTH Calc worksheet function This command returns the month component of the supplied date and time serial number or text-formatted date. Usage MONTH(Serial_number) Serial_number The date as a serial number or as text (for example, 06-21-15 or 21-Jun-15) Details MONTH returns a number ranging from 1 (January) to 12 (December).
Page 558: Now Calc Worksheet Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius NOW Calc worksheet function This command returns the present date and time as a serial number. Usage NOW() Details In a serial number, numbers to the left of the decimal point represent the date, and numbers to the right of the decimal point represent the time.
Page 559: Product Calc Worksheet Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual PRODUCT Calc worksheet function This command multiplies a list of numbers and returns the result. Usage PRODUCT(Value_list) A list of as many as 30 numbers, separated by commas Value_list Details Value_list can contain numbers, logical values, text representations of numbers or a reference to a range containing those values.
Page 560: Second Calc Worksheet Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius SECOND Calc worksheet function This command returns the seconds component of the supplied date/time serial number Usage SECOND(Serial_number) Serial_number The time as a serial number (the decimal portion of the number represents time as...
Page 561: Sin Calc Worksheet Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual SIN Calc worksheet function This command returns the sine of the specified angle. Usage SIN(Value) The angle in radians Value Details If the angle is in degrees, convert the angle to radians by multiplying the angle by PI()/180.
Page 562: Sqrt Calc Worksheet Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius SQRT Calc worksheet function This command returns the square root of the specified number. Usage SQRT(Value) Any positive number Value Details If you specify a negative number, the error #NUM! is returned.
Page 563: Sum Calc Worksheet Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual SUM Calc worksheet function This command returns the sum of the supplied numbers. Usage SUM(Value_list) A list of as many as 30 numbers separated by commas Value_list Details The list can contain numbers, logical values, text representations of numbers, or a reference to a range containing those values.
Page 564: Tan Calc Worksheet Function
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius TAN Calc worksheet function This command returns the tangent of the specified angle. Usage TAN(Value) The angle in radians Value Details If the angle is in degrees, convert the angle to radians by multiplying the angle by PI()/180.
Page 565: Varp Calc Worksheet Function
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual VARP Calc worksheet function This command returns the variance of a population based on an entire population of values. Usage VARP(Value_list) A list of as many as 30 numbers, separated by commas...
Page 566: Tools
SMU Auto Calibration: Recalibrates the current and voltage offsets for all source and measurement functions of all SMUs in the system. To maintain SMU performance specifications, you must auto calibrate the 4200A-SCS every 24 hours or any time after the ambient temperature has changed more than ±1 °C. Refer to Calibrate the system (on page 12-5) for instructions.
Page 567 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Add a test to the library The following steps provide specifics on how to add a test to the library. You can follow the same basic procedure to add devices, actions, and projects. The primary difference is the type of object and which library the object is added to.
Page 568 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Add an action to the library The following example provides specifics on how to add an action to the library. To add an action to the library: 1. In Clarius, set up the action so that it contains the settings you want the new library object to have.
Page 569 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Edit an object in the library The Library Information Editor allows you to change the information for a new library object. You can change information such as the name, description, graphic, help information, filters, and keywords.
Page 570: My Settings
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Options in the Information Editor Displays the changes you make as they will appear in the library. Preview Type the new name. This is the name that is used in the library and the project tree.
Page 571 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual PMU: Allow unsettled measurements When this option is selected, all 4225-PMU instrument cards ignore the minimum timing versus measure range relationship. This is only recommended for advanced users, as spot mean results will not be settled, which may cause a variety of operational issues, such as: •...
Page 572 Ignore interlock state If "Ignore interlock state" is selected and the 4200A-SCS interlock circuit is disconnected or otherwise open, Clarius continues to execute tests. However, Clarius automatically limits the output voltage to a safe level, even if a test specifies a higher level.
Page 573: Project Tree Display Options
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Graph defaults The My Settings Graph Defaults option allows you to set the defaults that are used for the Analyze graph when graphs are generated from a Run History: • Default Line Width: Sets the line width that is used if a line is displayed.
Page 574: User Library Descriptions
Refer to the Help pane for the voltage limits. BeepLib user library The BeepLib user library contains several user modules that control the 4200A-SCS beeper. The next table lists and briefly describes the user modules. The beeper user modules are affected by the Windows operating system audio settings. For example, if sound is muted, the beeper will not sound.
Page 575: Chargepumping User Library
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual chargepumping user library The chargepumping user library contains several user modules to characterize interface and charge-trapping phenomena. The next table lists and briefly describes the user modules. chargepumping user modules User module...
Page 576: Cvucompulib User Library
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius cvucompulib user library The cvucompulib user library contains user modules for collecting 4210-CVU compensation data. The next table lists and briefly describes the user modules. If your configuration includes a 4200A-CVIV, use the cvivulib user library instead of this one.
Page 577: Flashulib User Library
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual flashulib user library The flashulib user library contains user modules for flash memory testing. The next table lists and briefly describes the user modules. flashulib user modules User module Description configure_dc_flash Disconnects pulse channels by opening the solid-state relay for each pulse channel in the supplied list.
Page 578: Hivcvulib User Library
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius hivcvulib user library The hivcvulib user library contains user modules for controlling high-voltage C-V measurements. You can use these modules with either one or two 4205-RBT configurations. The next table lists and briefly describes the user modules.
Page 579: Hp4294Ulib User Library
4. Move prober to a SHORT calibration structure. 5. Call ShortCal4294. 6. Move prober to a LOAD calibration structure. 7. Call LoadCal4294. The Keysight 4294 is added to the 4200A-SCS test system using KCon. For details, see Keithley Configuration Utility (KCon) (on page 7-1).
Page 580: Hp8110Ulib User Library
Use the user modules in the HP8110ulib user library to control a Keysight Model 8110A Pulse Generator. These user modules are summarized in the following table. The table also lists the user test modules (UTM) created by Keithley Instruments that use the user modules. HP8110ulib user modules...
Page 581: Ki590Ulib User Library
KI595ulib user library The user modules in the KI595ulib user library are used to perform Q/t sweeps and C-V sweeps using the Keithley Instruments 595 Quasistatic C-V Meter. These user modules are summarized in the table below. KI595ulib user modules...
Page 582: Ki82Ulib User Library
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius ki82ulib user library The user modules in the ki82ulib user library control the Model 82 C-V System. They perform simultaneous C-V, C-t, and Q/t measurements and cable compensation. The next table lists the user modules.
Page 583: Matrixulib User Library
Model 4200A-SCS Parameter Analyzer Reference Manual Matrixulib user library The Matrixulib connects instrument terminals to output pins using a Keithley Instruments Series 700 Switching System. It is for use with switching systems that are configured as a general purpose, low current, or ultra-low current matrix.
Page 584: Ovpcontrol User Library
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius User module Description pundEndurance This routine performs a device endurance test that runs fatigue pulse trains in between multiple PUND tests. A preliminary PUND test measurment is taken (iteration of 0), followed by the fatigue voltage pulse train. The PUND test is composed of a 17 segment voltage pulse waveform, with two positive pulses to a user-specified Vp followed by two negative pulses to -Vp.
Page 585: Parlib User Library
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual parlib user library The parlib extracts device parameters on bipolar-junction transistors and MOSFETs. Extracted parameters include Beta, resistance, threshold voltage, and V sweeps and V sweeps for MOSFETs. parlib user modules...
Page 586 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius User module Description PMU_IV_sweep_Example This module is a functional programming reference to illustrate the basic LPT commands that are needed to perform a single Vd-Id sweep. This module performs a voltage amplitude pulse I-V sweep using two channels of a single 4225-PMU.
Page 587: Pmuulib User Library
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual PMU_PCRAM_ulib user library The user modules in this library are used in the characterization of PRAM elements. PMU_PCRAM_ulib user modules User module Description Simplifies the generation of segments using the PMU, and collects forced pram_pulse_ilimit voltage and current values from both the ForceCh and MeasureCh channels.
Page 588: Prbgen User Library
X position and Y position of the prober. It allows Clarius to control all supported probers in the same manner. Clarius projects that use PRBGEN work with any prober supported by Keithley Instruments. The user modules in the PRBGEN user library are provided as actions in Clarius.
Page 589: Utilities_Ulib
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual utilities_ulib The utilities_ulib user library provides a user module to add delays. utilities_ulib user module User module Description Delay_second Enter delay time in seconds. VLowFreqCV user library The VLowFreqCV user library contains user modules that are used for very low frequency C-V characterization.
Page 590: Wlrlib User Library
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius wlrlib user library The user modules in the wlrlib user library run linear regression and charge-to-breakdown (Q ramp tests for wafer-level reliability (WLR) testing. These user modules are summarized in the table below.
Page 591: Abortretryignoredialog User Module
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual AbortRetryIgnoreDialog user module This user module creates a dialog box with Abort, Retry, and Ignore decision prompts. Usage status = AbortRetryIgnoreDialog(int NumberOfMessages, char *Message1Text, char *Message2Text, char *Message3Text, char *Message4Text); Returned values; see Details...
Page 592: Inputokcanceldialog User Module
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Returned values are placed in the Analyze sheet and can be: • 3: The Abort button was selected. • 4: The Retry button was selected. • 5: The Ignore button was selected.
Page 593 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Details InputOkCancelDialog displays a dialog box that contains up to four message prompts and four text input fields with OK and Cancel buttons. There is a separate user-entered prompt message for each input. An example of the entry in Clarius and the resulting dialog box are shown in the following graphics.
Page 594: Okcanceldialog User Module
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Example status = InputOkCancelDialog(1, "This is a one line message", text1, "", text2, "", text3, "", text4); status = InputOkCancelDialog(4, "Line one", text1, "Line two", text2, "Line three", text3, "Line four",text4);...
Page 595: Okdialog User Module
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Returned values are placed in the Analyze sheet and can be: • 1: The OK button was selected. • 2: The Cancel button was selected. • -10050 (WINULIB_ILLEGAL_NUM_MSG): An illegal number of messages was specified.
Page 596 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Details Clicking OK continues the test sequence. Up to four lines of text can be placed in the dialog box. An example of the entry in Clarius and the resulting dialog box are shown in the following graphics.
Page 597: Retrycanceldialog User Module
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual RetryCancelDialog user module This user module creates a dialog box that presents Retry or Cancel decisions. Usage status = RetryCancelDialog(int NumberOfMessages, char *Message1Text, char *Message2Text, char *Message3Text, char *Message4Text); Returned values; see Details...
Page 598: Yesnocanceldialog User Module
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Returned values are placed in the Analyze sheet and can be: • 2: The Cancel button was selected. • 4: The Retry button was selected. • -10050 (WINULIB_ILLEGAL_NUM_MSG): An illegal number of messages was specified.
Page 599 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Details An example of the entry in Clarius and the resulting dialog box are shown in the following graphics. Returned values are placed in the Analyze sheet and can be: •...
Page 600: Yesnodialog User Module
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius YesNoDialog user module This user module creates a dialog box that contains up to four lines of text and Yes and No buttons. Usage status = YesNoDialog(int NumberOfMessages, char *Message1Text, char *Message2Text, char *Message3Text, char *Message4Text);...
Page 601: Demo Project Overview
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Returned values are placed in the Analyze sheet and can be: • 6: The Yes button was selected. • 7: The No button was selected. • -10050 (WINULIB_ILLEGAL_NUM_MSG): An illegal number of messages was specified.
Page 602 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius The top portion of the project tree for the Demo project is shown in the following graphic. Figure 391: Demo project (default) in the project tree 4200A-901-01 Rev. C / February 2017...
Page 603: 4-Terminal N-Mosfet Tests
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual 4-terminal n-MOSFET tests By default, the following tests use three source-measure units (SMUs) and one ground unit (GNDU), as shown in the following figure. You can also use four SMUs, one for each device-under-test (DUT) terminal.
Page 604: Resistor Tests
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Resistor tests The following tests use two SMUs. It is also possible to use one SMU and the GNDU. Descriptions of the 2-wire resistor tests res2t Calculates the average resistance from an I-V sweep of sourcing voltage and measuring current.
Page 605: Testing Flash Memory
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Testing flash memory Clarius includes several projects that you can use to test floating gate transistors (NOR, NAND) and other types of nonvolatile memory. To use the flash memory tests, you will need: •...
Page 606: Flash Connection Guidelines
Non-axial stress on the bulkhead connectors on the SMU or pulse cards could cause damage to the cards installed in the 4200A-SCS chassis. Pre-torque the connections to prevent this damage. To remove the LEMO triaxial-to-SMA adapter from a SMU, pull on the knurled silver portion of the connector to release the latches from the SMU connector.
Page 607 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual The control gate (CG) reads, programs, and erases the FG transistor. The presence of charge on the gate shifts the voltage threshold (V ) to a higher voltage, as shown below.
Page 608 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Figure 395: Fowler-Nordheim tunneling program and erase The following figure shows examples of moving charge using HCI. These conditions are examples with approximate voltage values. The pulse width and pulse height will vary depending on device structure and process details.
Page 609 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Figure 397: Block diagram of an example flash test setup using a switch matrix Figure 398: Block diagram of a flash test setup without using a switch matrix (direct connect) The pulse waveforms are a program pulse, an erase pulse, or a waveform made up of both program and erase pulses.
Page 610 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Figure 399: Program pulse waveforms for a floating gate DUT with separate pulse waveforms for the DUT gate, drain, source, and bulk Figure 400: Program + Erase pulse waveforms for a floating gate DUT, with separate pulse waveforms for the DUT gate, drain, source, and bulk The block diagram for the flash setup is shown in the following figure.
Page 611 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Figure 401: Basic schematic of flash testing without a switch matrix Connections for program and erase testing For a direct connect configuration, the minimum number of pulse channels is equal to the number of DUT terminals that need to be simultaneously pulsed, including terminals that must change from connected to disconnected, or open, states for either the program or erase condition.
Page 612 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Figure 402: Flash connections - program erase and endurance testing using direct connection to a single stand-alone 4-terminal device 4200A-901-01 Rev. C / February 2017 6-343...
Page 613: Endurance Testing
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Endurance testing Endurance testing stresses the DUT with a number of Program+Erase waveform cycles, and then periodically measures both the voltage threshold in the programmed state (VTP), as well as the voltage threshold of the erased state (VTE).
Page 614 Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Figure 404: Flash connections - program erase and endurance testing using direct connection to a single stand-alone 4-terminal device 4200A-901-01 Rev. C / February 2017 6-345...
Page 615 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Connections for endurance testing - switch matrix A switch matrix is recommended for testing array test structures for endurance or disturb. Figure 405: 4200-900_Flash Switch connections - characterization endurance or disturb...
Page 616: Disturb Testing
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Disturb testing The purpose of the Disturb test is to pulse stress a device in an array test structure, then make a measurement, such as V , on a device adjacent to the pulsed device.
Page 617 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Figure 406: Flash direct DUT connections - Disturb testing 6-348 4200A-901-01 Rev. C / February 2017...
Page 618: Using A Switch Matrix
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius Using a switch matrix A limitation of the no-switch, direct connect test configuration shown in the figure below is that only three devices can be measured. The test would have to be manually reconfigured or re-cabled to test other devices.
Page 619: Use Kpulse To Create And Export Segment Arb Waveforms
Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Use KPulse to create and export Segment Arb waveforms This example demonstrates how to create a program and erase waveform using the KPulse flash example file. You will export the waveforms, which you can import into the Clarius Configure pane for the subsite when Segment Stress/Measure Mode is selected.
Page 620: Direct Connections To Single Dut
Model 4200A-SCS Parameter Analyzer Reference Manual Section 6: Clarius To enter Segment Arb values: 1. In Clarius, select the project. 2. Select the test. 3. Select Configure. 4. Select the Enter Values button for each array. The Enter List Values dialog box opens.
Page 621 Section 6: Clarius Model 4200A-SCS Parameter Analyzer Reference Manual Make SMA cable connections to the pulse card: 1. Set up the 4200A-SCS. Refer to Connections and configuration (on page 2-1). 2. Connect a 10.8 cm (4.25 in.) SMA cable to either end of an SMA tee.
Page 622: Direct Connections To Array Dut For Disturb Testing
Connections for disturb testing (on page 6-347). Make the SMA connections: 1. Set up the 4200A-SCS. Refer to Connections and configuration (on page 2-1). 2. Connect a 10.8 cm (4.25 in.) SMA cable to either end of an SMA tee.
Page 623: Embedded Computer Policy
21. Connect the cable to the probe manipulator. Embedded computer policy If you install software that is not part of the standard application software for the 4200A-SCS, the non-standard software may be removed if the instrument is sent in for service. Back up the applications and any data related to them before sending the instrument in for service.
Page 624: Keithley Configuration Utility (Kcon)
Tools ..................7-20 KCon Learning Center ............7-22 Keithley Configuration Utility (KCon) You use the Keithley Configuration Utility (KCon) to manage the configuration of the Keithley Instruments 4200A-SCS and all external system components supported by the Clarius applications. You can add, configure, and remove supported switch matrices, external GPIB instruments, and probe stations from the system configuration using KCon.
Page 625: Kcon Main Window
Navigator, and the right pane is the Work Area. The Configuration Navigator provides a tree view of all instruments and equipment in the 4200A-SCS system configuration. To expand or minimize the tree, select the plus (+) and minus (−) symbols, respectively.
Page 626: Configuration Navigator
Model 4200A-SCS Parameter Analyzer Reference Manual Section 7: Keithley Configuration Utility (KCon) Configuration Navigator The Configuration Navigator contains each component in the system configuration. Selecting a component in the Configuration Navigator displays the properties associated with the selected component in the Work Area. The figure below shows a typical system configuration with the Configuration Navigator listings expanded.
Page 627: Add An External Instrument
• General Purpose Test Instrument Supported external instrumentation and equipment are controlled by Clarius user test modules (UTMs). Keithley Instruments provides libraries of user modules for each supported external instrument (refer to Supported external equipment (on page 7-6)). You can modify these libraries or create your own using the Keithley User Library Tool (KULT).
Page 628 Model 4200A-SCS Parameter Analyzer Reference Manual Section 7: Keithley Configuration Utility (KCon) The following figure shows the relationship between internal and external instrumentation and illustrates each instrument category. Figure 411: Example system connections To add an external instrument: 1. Select Add External Instrument.
Page 629: Supported External Equipment
Model 4200A-SCS Parameter Analyzer Reference Manual Supported external equipment Keithley Instruments provides a number of standard user libraries to control external equipment that is typically used in semiconductor characterization applications. Standard user-module libraries are provided for the equipment shown in the table below.
Page 630: Add A Driver For Unsupported Equipment
Use KCon to add equipment to the 4200A-SCS To use the 4200A-SCS to control an external instrument, you must add that instrument to the system configuration. The next topics describe general settings for adding equipment. Matrices and probers, however, require additional steps.
Page 631 2. Select the GPIB Address from the list. Addresses that are in use are displayed with asterisks (*) next to them. The range of addresses is 0 to 30 (GPIB address 31 is reserved as the 4200A-SCS controller address). If the selected GPIB address conflicts with the GPIB address of another system component, a red exclamation-point symbol (!) is displayed next to the selected address.
Page 632: Remove An External Instrument
Validate Configuration tests the system configuration to determine if there are configuration conflicts or communication problems between the instrumentation and the 4200A-SCS. This test can validate most of the supported internal and external instruments. However, the following instruments are not automatically verified when the configuration is validated: •...
Page 633: Update Preamplifier, Rpm, And Cviv Configurations
Update the RPM configuration The KCon feature Update Preamp, RPM, and CVIV Configuration must be run: • Whenever an RPM is connected or disconnected from the 4200A-SCS • Whenever RPM input connections for a SMU, CVU, or PMU are changed When using interactive test modules (ITMs) for DUT testing, you can configure RPM switching in KCon.
Page 634: Update The 4200A-Cviv Configuration
The sections of the system configuration are: • System Information: Provides a table containing the 4200A-SCS serial number, the network or system name, and pertinent software and platform version information. • Instrumentation: Provides a table of properties and settings for each instrument in the system configuration.
Page 635: System Configuration Properties
Figure 413: KI System Configuration information System Properties area The System Properties area of the Properties displays the 4200A-SCS serial number and other software and platform information. You can change the Powerline frequency...
Page 636 Section 7: Keithley Configuration Utility (KCon) SMU autorange method The source measure units (SMUs) in the 4200A-SCS can make smart decisions when changing range. There are many factors the SMUs calculate when they change the range. The SMU autorange method allows you to determine which range change algorithm meets your needs. The available SMU autorange methods are normal, high-speed, or high-resolution.
Page 637: Instrument Properties And Connections
Make sure the number of pins assigned is appropriate for your system. For supported external instruments, the 4200A-SCS provides user libraries that contain preconfigured data acquisition and control user modules. Refer to Supported external equipment page 7-6) for a list of supported equipment and additional information.
Page 638 In the GPIB Address list, addresses that are in use are displayed with asterisks (*) next to them. You can set addresses from 0 to 30 (GPIB address 31 is reserved as the 4200A-SCS controller address). If the selected GPIB address conflicts with the GPIB address of another system component, a red exclamation-point symbol (!) is displayed next to the selected address.
Page 639: Kxci Settings
(on page 7-15). KXCI Settings If you need to set up the 4200A-SCS as a subordinate on a GPIB or ethernet system, you do the initial setup through the KCon KXCI Settings. This allows you to use an external computer to remotely control the 4200A-SCS over GPIB or ethernet.
Page 640: Set Up Kxci For Gpib Control
CR/LF to use a carriage return and line feed character sequence. 6. If String Terminator is selected, select EOI ON or EOI OFF. The EOI setting determines if the 4200A-SCS asserts the GPIB End Or Identify (EOI) signal with the last byte of each output data message.
Page 641: Set Up Kxci For Ethernet Control
4200A-SCS and Keysight 4145B hardware are different. To use existing 4145B code with the 4200A- SCS, you need to set up the 4200A-SCS SMUs to map to the 4145B instrument numbers. In many cases, test programs developed for use with a Keysight 4145B run without modification when they are used with a 4200A-SCS running KXCI.
Page 642: Command Set
Figure 417: KXCI Settings for 4145B emulation Command Set The Command Set option chooses the control mode through which KXCI runs the 4200A-SCS: 4200A (Normal) or 4145 Emulation. 4200A (Normal) selects the 4200A command set. This command set includes all the 4145 Emulation commands plus an additional 4200A-only command.
Page 643: Tools
Section 7: Keithley Configuration Utility (KCon) Model 4200A-SCS Parameter Analyzer Reference Manual The following table summarizes some differences and similarities between the two modes. Command set comparison Command set Characteristic 4145 Emulation 4200A (Normal) String reported in response to ID query ID HP4145B 1.1,1.0...
Page 644: Generate Technical Support Files
5. To change a constant, select the constant and select Edit. Generate Technical Support Files The Technical Support Files option analyzes your 4200A-SCS. KCon stores the analysis results to a USB flash drive. You can then send the results to Keithley Instruments for review.
Page 645: Kcon Learning Center
The Learning Center provides access to all 4200A-SCS information, such as: • Instructions in text files and videos. • The 4200A-SCS Technical Data Sheet. • Application notes that show examples of how to use the 4200A-SCS for application-specific tasks. 7-22 4200A-901-01 Rev. C / February 2017...
Page 646: Keithley User Library Tool (Kult)
PA-1030, Compiler Installation Instructions, for detail on how to install. The Keithley User Library Tool (KULT) is a tool you can use to create and manage user libraries. A user library is a collection of one or more user modules. User modules are C programming language subroutines, also called functions.
Page 647: Kult Window
Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual KULT window The KULT window is shown in the following figure. It provides all the menus, controls, and user-entry areas that you need to create, edit, view, and build a user library and to create, edit, view, and compile a user module.
Page 648: Understanding The Module Parameter Display Area
Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) When a user test module (UTM) is executed by Clarius, the value of the return(code) statement is displayed on the Data worksheet in the column labeled with the module name when the test is run.
Page 649 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Parameters tab area In the Parameters tab, you define and display parameters in the user module call. You can define and display: • Parameter name • Parameter data type •...
Page 650 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Data type field The data type field specifies the parameter data type. Click the arrow at the right of the data type field to choose from a list of the following data types: •...
Page 651 #include <math.h> • #include "windows.h" In most cases, it is not necessary to add items to the Includes tab area, because keithley.h provides access to the most common C functions. However, in some cases, both of the following may apply: •...
Page 652 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Description tab area The Description tab, shown below, allows you to enter descriptive information for the presently open user module. Information entered in this area documents the module to the Clarius user and is used to create Clarius user library help.
Page 653: Understanding The Status Bar
Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual The edit menu commands are: • New: Deletes the present description from the description tab area, allowing you to enter a new description. • Include: Imports any file that you specify, typically a text file, into the document tab area. Refer to Include (on page 8-11).
Page 654: Understanding The Menus
Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Understanding the menus This section describes the menus on the menu bar, which is at the top of the KULT dialog box. File menu All user libraries are stored in the C:\s4200\kiuser\usrlib directory. This directory is referred to as Clarius/KULT user-library directory.
Page 655 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual New Module Creates a new user module. When you create a new user module, module information in the KULT window is cleared. The name of the new module must not duplicate the name of any existing user module or user library in the entire collection of user libraries.
Page 656 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Include Imports a *.c file that you specify into the module code-entry area only. This is typically a text file. The file is imported into the document tab area.
Page 657 Help menu The Help menu contains online help information about KULT: • Contents: Allows access to the online KULT manual and other 4200A-SCS reference information. • About KULT: Displays the software version. 8-12 4200A-901-01 Rev. C / February 2017...
Page 658: Develop And Use User Libraries
You can use these as-is, customize them, or create new ones. Most user modules contain functions from the Keithley-supplied Linear Parametric Test Library (LPT Library) and ANSI-C functions. All user modules are created and built using KULT.
Page 659: Enabling Real-Time Plotting For Utms
When using the new functions to transfer data into the data sheet in real time, make sure the data is already in the memory of the 4200A-SCS. Sweep measurements are not suitable for real-time transfer because data is not ready until sweep finishes. The following tutorials show how to enable real-time plotting for a UTM.
Page 660: Kult Tutorials
Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) KULT Tutorials This section includes three tutorials. Each tutorial provides step-by-step instructions for accomplishing common tasks with KULT. The name of each tutorial is included below along with a summary of...
Page 661: Tutorial 1: Creating A New User Library And User Module
This section contains a tutorial that shows you how to create a new user library and new user module. A hands-on example is provided that illustrates how to create a user library that contains a user module that activates the internal beeper of the 4200A-SCS. Starting KULT To start KULT: ®...
Page 662 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Naming a new user library To name a new user library: 1. In the KULT File menu, click New Library. 2. In the Enter Library dialog box that opens, enter the new user library name. For this tutorial, enter my_1st_lib as the new user library name.
Page 663 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Figure 429: KULT window after naming user module To view the entire module parameter display area, use the scroll bar. Continue with Entering the return type (on page 8-18).
Page 664 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Entering user module code Enter the C code. Refer to LPT functions for SMUs and general operations (on page 13-59) for a complete list of supported I/O and SMU commands.
Page 665 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual 6. Under Default, Min, and Max, enter default, minimum, and maximum values. These values limit the choices the user sees. For the TwoTonesTwice user module, enter 1000, 800, and 1200, respectively.
Page 666 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) In the module-parameter display area, the function prototype now includes the declared parameters, as shown here. Figure 432: KULT window - code and parameters applied Continue with Entering header files (on page 8-22).
Page 667 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Entering header files To enter the header files: 1. Select the Includes tab at the bottom of the dialog box to display the Includes area. Figure 433: Default Includes tab area 2.
Page 668 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) 3. For the TwoTonesTwice user module, enter the following information in the Description tab area:  <link rel="stylesheet" type="text/css" href="http://clariusweb/HelpPane/stylesheet.css"> MODULE ====== TwoTonesTwice DESCRIPTION ----------- Execution results in sounding of four beeps at two alternating user-settable frequencies.
Page 669 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Compiling the user module To compile the user module: 1. Select the Build tab at the bottom of the dialog box. 2. In the Options menu, click Compile. The following occurs: The user module C source-code file is compiled.
Page 670 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) To find code errors for the TwoTonesTwice user module: 1. Click the error message. The last line of code is highlighted, as shown below. Figure 436: Find a code error 2.
Page 671 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Building the user library to include the new user module After you have successfully compiled the user module, build the user library (or rebuild the user library) to include the module.
Page 672 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) 15. In the Test Settings pane, select the my_1st_lib user library. 16. From the User Modules list, select the TwoTonesTwice user module. A group of parameters are displayed for the UTM as shown in the following figure.
Page 673: Tutorial 2: Creating A User Module That Returns Data Arrays
Tutorial 2: Creating a user module that returns data arrays This section provides a tutorial that helps you use array variables in KULT. It also illustrates the use of return types (or codes), and the use of two functions from the Keithley Linear Parametric Test Library (LPTLib).
Page 674 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Entering the VSweep user-module code In the module code-entry area, enter the C code below for the VSweep user module. Open the KULT dialog box to full screen view to simplify code entry.
Page 675 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Entering the VSweep user-module parameters This example uses the double-precision D_ARRAY_T array type. The D_ARRAY_T, I_ARRAY_T, and F_ARRAY_T are special array types that are unique to KULT. For each of these array types, you cannot enter values in the Default, Min, and Max fields.
Page 676 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) 10. In the 5th line, enter the following forced-voltage parameter information:  Parameter Name: Vforce  Data type: D_ARRAY_T  I/O: Output 11. In the 6th line, under Parameter Name, change ArrSizeForParm5 to NumVPoints.
Page 677 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Entering the VSweep user-module header files You do not need to enter any header files for the VSweep user module. The default keithley.h header file is sufficient. Continue with Documenting the VSweep user module (on page 8-32).
Page 678 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) 11. Enter the name v_sweep_chk for the UTM. You will use the v_sweep_chk UTM to execute the VSweep user module. 12. Select Configure. 13. In the right pane, from the User Libraries list, select the my_2nd_lib library.
Page 679: Tutorial 3: Calling One User Module From Within Another
Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Tutorial 3: Calling one user module from within another KULT allows a user module to call other user modules. A called user module may be in the same user library as the calling module or may be in another user library.
Page 680 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Copy VSweep.c to the new user module VSweepBeep: 1. In the File menu, click Copy Module. The Copy Module list shown in the following figure opens. Figure 443: Copy Module list box 2.
Page 681 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual The name of the user module must not duplicate the name of any existing user module or user library in the entire collection of user libraries. More than one collection of user libraries can be maintained and accessed, each collection residing in a separate usrlib.
Page 682 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) 3. Click Apply. The Freq1 and Freq2 parameters are added to the function prototype as shown in the following figure. Figure 445: Completed VSweepBeep user module Continue with Specifying user library dependencies in VSweepBeep user module (on page 8-38).
Page 683 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Specifying user library dependencies in VSweepBeep user module Before compiling the presently open user module, you must specify all user libraries on which the user module depends (the other user libraries that contain user modules that are called).
Page 684 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Compiling and building the VSweepBeep user module To compile and build the VSweepBeep user module: 1. Save the VSweepBeep user module. 2. Click the Build tab at the bottom of the dialog box to open the Build tab area.
Page 685: Tutorial 4: Customizing A User Test Module (Utm)
Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Tutorial 4: Customizing a user test module (UTM) This tutorial demonstrates how to modify a user module using KULT. In the ivswitch project, there is a test named rdson. The rdson test measures the drain-to-source resistance of a saturated N- channel MOSFET as follows: 1.
Page 686 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Open KULT From the desktop, open the KULT tool by double-clicking the KULT icon. The KULT main window is shown below. Figure 447: KULT main window 4200A-901-01 Rev. C / February 2017...
Page 687 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Open the KI42xxulib user library 1. From the File menu, select Open Library. 2. From the Open Library dialog box, select KI42xxulib. Figure 448: KULT Open Library dialog box 3.
Page 688 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Open the Rdson42XX user module 1. From the File menu, select Open Module. 2. From the Open Module window, select Rdson42XX.c, as shown in the following figure.
Page 689 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Copy Rdson42XX to RdsonAvg You create the new module by copying the Rdson42XX module to a module named RdsonAvg and then making the appropriate changes to the test module.
Page 690 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Open and modify the RdsonAvg user module To open the user module: 1. From the File menu, select Open Module. 2. Select RdsonAvg.c from the Open Module dialog box.
Page 691 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Modify the user module code In the user module code, you need to replace the measi commands with avgi commands. While a measi command makes a single measurement, an avgi command makes a specified number of measurements, and then calculates the average reading.
Page 692 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Change the module description In Clarius, any user test modules (UTMs) that are connected to this user module show the text that is entered on the Description tab in KULT.
Page 693 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Add a new UTM to the ivswitch project To add rdsonAvg to the ivswitch project: 1. Choose Select. 2. Select Projects. 3. In the Search box, enter ivswitch and select Search. The Library displays the I-V Switch Project (ivswitch).
Page 694: Advanced Kult Features
KULT modules, including user library and user modules. It allows you to develop test subroutine libraries using the full capabilities of C-language programming. If 4200-COMPILER was ordered with your 4200A-SCS system, the software is installed by Keithley Instruments. You can also purchase the 4200-COMPILER later. Refer to document number PA-1030, Compiler Installation Instructions, for detail on how to install.
Page 695 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Options You can place any of the following options at the [options] position in the command: • -dep <library_dep_1>...[library_dep_6] Specifies up to six libraries on which library_name depends.
Page 696 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Performing other KULT tasks using command-line commands The KULT command-line interface lets you load, build, or delete user libraries and add or delete user modules without opening the KULT user interface. This feature is useful when developing and managing user libraries.
Page 697 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual del_lib subcommand The del_lib subcommand lets you delete a library from the command line. Its action is equivalent to the following steps in KULT: • Starting KULT •...
Page 698 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Usage kult add_mod -l<library_name> [-d<source_lib_path>\source_lib_name>\src] <module> Where: • <library_name> is the target library into which <module> is to be copied. It must be in the active user-library directory.
Page 699: Working With Interdependent User Modules And User Libraries
Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Usage kult bld_lib -l<library_name> [options] Builds the <library_name> user library in the active user-library directory. Any of the following may be placed at the [options] position in the command: •...
Page 700 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Structuring dependencies hierarchically You can avoid user library circular dependency by calling user libraries in a hierarchical design, as illustrated in "Hierarchical design for user-library dependencies" below.
Page 701 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual A user module in liba calls a user module in libal. In turn, a user module in liba1 calls a user module in liba2. Finally, a user module in liba2 calls a user module in liba3.
Page 702 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Building dependent user libraries in the correct order When KULT builds a user library that depends on other user libraries, it must link to each of these libraries.
Page 703: Understanding User-Module Locking
Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Compile, set dependencies for, and build the Level 0 user module and user library: 1. Compile the saved Test user module, which is in the liba user library.
Page 704: Debugging User Modules Using Microsoft Visual C
KULT modules, including user library and user modules. It allows you to develop test subroutine libraries using the full capabilities of C-language programming. If 4200-COMPILER was ordered with your 4200A-SCS system, the software is installed by Keithley Instruments. You can also purchase the 4200-COMPILER later. Refer to document number PA-1030, Compiler Installation Instructions, for detail on how to install.
Page 705 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Creating a debug task To create a Visual C++ debug task using the create_dt utility: 1. At a command prompt, enter create_dt followed by the name of the debug task, as follows: C:\>...
Page 706 Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) 5. Between the Place user library module call below and Place user library module call above comments, call your user module as it is described in <debugtaskname>.c. For the VSweep user module, you could enter the following code: Double Imeas;...
Page 707: Format User Module Help To Display In The Clarius Help Pane
Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual Format user module help to display in the Clarius Help pane If your user module includes a help description, but it is not set up for HTML, when you create a UTM in Clarius, the Help pane displays the Open UTM Comments button.
Page 708: Creating Project Prompts
Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Creating project prompts KULT provides user modules that you can use to create dialog boxes to pause a test sequence with a prompt. These dialog boxes are available as user modules, shown in the table below.
Page 709 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual The other dialog boxes have two or three buttons, as shown in the following examples. When a button on a dialog box is clicked, a status value that corresponds to that button is placed in the Analyze sheet for the action.
Page 710: Dialog Box Test Examples
Model 4200A-SCS Parameter Analyzer Reference Manual Section 8: Keithley User Library Tool (KULT) Dialog box test examples The following examples demonstrate how you can use dialog boxes in a test sequence. Example: Announce end of test For this example, you will create a user test module (UTM) that uses the OK dialog user module. This dialog box announces the end of a test sequence.
Page 711 Section 8: Keithley User Library Tool (KULT) Model 4200A-SCS Parameter Analyzer Reference Manual 14. Select Save. When you run the test sequence, the end of test dialog box is displayed, as shown in the graphic below. Select OK to continue.
Page 712: Keithley External Control Interface (Kxci)
The Keithley External Control Interface (KXCI) allows you to use an external computer to remotely control the SMUs and pulse generator cards in the 4200A-SCS. You can use remote control over the general-purpose instrument bus (GPIB) or ethernet. You define the type of communications in KCon (in the KXCI Settings options).
Page 713: Kxci Communications Connections
Figure 459: GPIB and ethernet connectors on the 4200A-SCS GPIB connections To connect the 4200A-SCS, use a GPIB cable equipped with standard GPIB connectors, as shown in the figure below. Either end of this cable mates to the GPIB connector on the rear panel of the 4200A-SCS.
Page 714: Ethernet Connections
• IEEE-488.1-1987 • IEEE-488.2-1992 Ethernet connections Use a standard cable (CAT-5, RJ-45 terminated) to connect to the 4200A-SCS, as shown in the figure in Communications connections (on page 9-2). Using KCon to configure KXCI You use the Keithley Configuration Utility (KCon) to configure KXCI. Use KCon to select and configure communications (GPIB or ethernet) if you are using 4200A-SCS as a remote instrument.
Page 715: Setting The Remote Control Mode (Gpib Or Ethernet)
Model 4200A-SCS Parameter Analyzer Reference Manual Setting the remote control mode (GPIB or ethernet) Set the remote control mode on the 4200A-SCS through KCon. By default, the 4200A-SCS is set up for GPIB remote control. To set up the remote control mode on the 4200A-SCS: 1.
Page 716: Starting Kxci And The Gpib Command Interpreter
Section 9: Keithley External Control Interface (KXCI) Starting KXCI and the GPIB command interpreter You cannot run Clarius and KXCI at the same time. When Clarius is running, the 4200A-SCS is the controller and controls all internal and external instruments. When KXCI is running, the 4200A-SCS is a subordinate to a controlling computer over GPIB or ethernet.
Page 717: Gpib Status Indicators (Gpib Communications Only)
To hide the graph, select the Hide Graph button, which provides a larger display area for commands, error messages, and test results. Using KXCI To start GPIB operation, start KXCI. The 4200A-SCS is ready to accept GPIB commands immediately after you start KXCI. For command information, refer to...
Page 718: Logging Commands
Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) Logging commands When you send a command: • The left side of the user interface (the command and message display area) displays each command as it is received, as shown in the figure below.
Page 719: Logging Test Results
Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual Logging test results The command and message display area also displays the numerical test results for both the 4200A and 4145 Emulation commands sets (refer to Command Set (on page 7-19)).
Page 720: Graphing The Test Results
Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) Graphing the test results If you have sent the graphics commands (the DM1 command followed by the X-axis and Y-axis configuration commands), KXCI displays a graph of the generated data. See the example graph and graphics commands in the following figure.
Page 721: Gpib Command Set
Page commands (on page 9-10). • System mode commands: This comprehensive set of commands uses all of the source- measure capabilities of up to eight SMUs installed in the 4200A-SCS. These commands are summarized in System mode commands (on page 9-10).
Page 722 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) DE page command strings The DE page command strings include: • CH: SMU channel definition (on page 9-14) • VS: VS1...VSn channel definition (on page 9-15) •...
Page 723: User Mode Commands
EM command: Switch between 4145 and 4200 modes (on page 9-48) 4200A command set only The 4200A command set only command is: • *OPT?: Get KXCI configuration of the 4200A-SCS (on page 9-49) 9-12 4200A-901-01 Rev. C / February 2017...
Page 724: Gpib Command Reference
• SMU channel definition • VS1...VSn channel definition • VM1...VMn channel definition To send the channel definition command strings to the 4200A-SCS, you must select the channel definition page by sending the command: 4200A-901-01 Rev. C / February 2017 9-13...
Page 725 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual This command defines a SMU channel. Usage CHA, 'BBBBBB', 'CCCCCC', D, E 1, 2, ... or n SMU channel number; the largest value of n is the number of channels in the system (9 maximum);...
Page 726 If nothing is specified after the prefix and channel number, the channel is not used. To source voltage using the 4145B VS1...VSn function, define one of the 4200A-SCS SMUs to emulate the VS.
Page 727 VM1 and VM9. For example, in a system containing four SMUs, you can use SMU3 as VM7. If you do not define one of the 4200A-SCS SMUs to emulate a VM, attempts to measure voltages through the nonexistent VM result in data values of 9.000e+37.
Page 728 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) VR and IR This command sets up the VAR1 source function. Usage AAB, ±CCC.CCCC, ±DDD.DDDD, ±EEE.EEEE, ±FFF.FFFF The source mode: • VR: Voltage source (SMU or VS1...VS9) •...
Page 729 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual When VAR1 is a selected source function, it does a sweep that is synchronized to the steps of the VAR2 step function. The VAR1 sweep is repeated whenever VAR2 goes to a new step value, as shown in the following figure.
Page 730 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) If the source is a SMU, the source mode for the sweep can be voltage or current. If, however, a voltage source (VS1...Sn) is used, the source mode must be voltage.
Page 731 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual VP and IP This command sets up the VAR2 step sweep. Usage AA ±BBB.BBBB, ±CCC.CCCC, DD, ±EEE.EEEE AA ±BBB.BBBB, ±CCC.CCCC, DD, ±EEE.EEEE, FF The source mode: •...
Page 732 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) Details With the voltage source mode (VP), the output value is in volts. For the current source mode (IP), the output value is in amps. If you specify a voltage start or step value below 0.001 V, KXCI automatically sets the value to zero.
Page 733 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual This command controls auto standby. Usage ST A, B SMU channel number (1 to 9) Enable or disable auto standby: • 0: Disable auto standby • 1: Enable auto standby Details For a SMU, the ST command controls auto standby.
Page 734 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) This command sets the offset value when VAR1' is a selected source function. Usage FS ±AAA.A FS ±AAA.A,B Offset value: −210 to 210 AAA.A Available SMU channel (1 to 9); if this parameter is not included, offset applies to all channels that are configured to VAR1'.
Page 735 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual This command sets the ratio value when VAR1' is a selected source function. Usage RT ±AA.A RT ±AA.A,B Ratio value: −10 to 10 AAA.A Available SMU channel (1 to 9); if this parameter is not included, ratio applies to all...
Page 736 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) VL and IL This command sets up a list sweep. Usage AAB, C, ±DDD.DDDD, ±EE.EEEE, ... ±EE.EEEE The source mode: • Voltage source (SMU or VS1...VS9): VL •...
Page 737 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual VC and IC This command configures the SMU to output a fixed (constant) voltage or current level. Usage AAB, ±CCC.CCCC, ±DDD.DDDD Source mode: • Voltage: VC •...
Page 738 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) This command configures the source to output a fixed voltage level for channels that are configured to be voltage source only. Usage SCA, ±BBB.BBBB Voltage source channel: 1 to 9; see Details Output voltage value: −210.00 to +210.00...
Page 739 Set wait time • Set interval • Select number of readings • Select list display mode To send the following command strings to the 4200A-SCS, select the SM page by sending the command: 9-28 4200A-901-01 Rev. C / February 2017...
Page 740 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) This command delays the start of a test sequence for time domain measurements. Usage WT AAA.AAA Wait time in seconds: 0 to 100 AAA.AAA Details For time domain measurements, you can delay the start of a test sequence by setting a wait time.
Page 741 The 4200A-SCS supports the Keysight 4145B graphics display mode and the Keysight 4145B list display mode command. The 4200A-SCS does not accept the matrix mode and schmoo mode commands (DM3 and DM4). Example This command string prepares the 4200A-SCS to receive graphics commands.
Page 742 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) This command enables voltage and current functions to be measured when the 4200A-SCS is in list display mode. Usage LI 'AAAAAA' LI 'AAAAAA', 'AAAAAA' LI 'AAAAAA', 'AAAAAA', 'AAAAAA'...
Page 743 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual This command configures the X-axis of the graph to plot an electrical parameter. Usage XN 'AAAAAA', B, ±CCCC.CCC, ±DDDD.DDD The SMU channel name for the X-axis; up to 6 characters long; must be one of the...
Page 744 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) This command configures the Y1-axis of the graph. Usage YA 'AAAAAA', B, ±CCCC.CCC, ±DDDD.DDD The SMU channel name for the Y1-axis, up to 6 characters; must be one of the...
Page 745 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual This command configures the Y2-axis of the graph. Usage YB 'AAAAAA', B, ±CCCC.CCC, ±DDDD.DDD The SMU channel name for the Y2-axis, up to 6 characters; must be one of the...
Page 746 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) This command controls measurements. Usage Measurement action: • SingleTrigger test, store readings in cleared buffer: 1 • RepeatTrigger test, store readings in cleared buffer: 2 • AppendTrigger test, append readings to buffer: 3 •...
Page 747 AAAAAA Details After making measurements, use this command string to request the readings. After the 4200A-SCS is addressed to talk, the readings are sent to the computer. To access the timestamp data that was acquired along with voltage or current measurements or...
Page 748 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) This command saves a program file or data file. Usage SV 'A BBBBBB' SV 'A BBBBBB CCCCCCCC' File type: • Program file: P • Data/Program file: D...
Page 749 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual Example GT 'P Setup1' This command string gets the program file named Setup1. Also see SV command: Save file (on page 9-37) Channel mapping command You can use the following command with any system mode page. It maps channel n to a given VS, SMU, or VM function.
Page 750: User Mode Commands (Us)
You can use the user mode (US) command strings for the following operations: • SMU setup • VS1...VS9 setup • Triggering To send these command strings to the 4200A-SCS, select the user mode by sending the command: 4200A-901-01 Rev. C / February 2017 9-39...
Page 751 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual DV and DI These commands set up each SMU channel. Usage AAB, CC, ±DDD.DDDD, ±EEE.EEEE Source mode: • Voltage source: DV • Current source: DI SMU channel: 1 to 9 Voltage source range: •...
Page 752 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) Details For every channel that is configured as a SMU, you must select the source mode (voltage or current) and source output range, and set the output and compliance values.
Page 753 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual TV and TI These commands trigger a measurement. Usage AABB Type of measurement: • Voltage: TV • Current: TI Measure channel for voltage measurements: • SMU1: 1 •...
Page 754: Commands Common To System And User Modes
SMU5 (using KCon) is specified by the unique identifier 7. After sending the command string to trigger a measurement and addressing the 4200A-SCS to talk, the output data string is sent to the computer in the following format: X Y Z ±N.NNNN E±NN...
Page 755 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual This command sets the integration time. Usage IT4, X, Y, Z Integration time: • Short (0.1 PLC): 1 • Medium (1.0 PLC): 2 • Long (10 PLC): 3 •...
Page 756 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) This command places the ID of the instrument in a particular buffer. Usage Details The instrument ID depends on whether you are in 4200A mode or whether you are in the 4145 mode.
Page 757 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual This command clears all readings from the buffer. Usage Details The GPIB data buffer can hold up to 4096 readings. This command string clears all readings from the buffer. It also clears bit B0 (Data Ready) of the status byte.
Page 758 When this command is sent, the selected SMU channel is calibrated automatically. The busy bit in the status register is set so that you can detect when autocalibration is finished. The 4200A-SCS will not respond to any commands while autocalibration is executing.
Page 759 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual This command sets the condition to exit the test if compliance is reached. Usage EC A Action on compliance: • Off (do not exit if compliance is reached): 0 •...
Page 760: 4200A Command Set Only Commands
This string contains eight sets of characters, each represented by xxx. Each character set represents the configuration of a slot in the 4200A-SCS. If the corresponding slot contains a channel, xxx is one of the following: SMUn, HPSMUn, SMUPAn, HPSMUPAn, VSn, or VMn, where n is the channel number (1 to 9) and: ...
Page 761: Smu Default Settings
SMU default settings You can return SMUs to power-on default settings by transmitting the DCL (device clear) or SDC (selected device clear) general bus command to the 4200A-SCS. The power-on default settings for the User Mode are listed in the table below.
Page 762: System Mode Smu Default Settings
This means that each SMU is active and part of the test, whether or not the test used all the SMUs in the 4200A-SCS chassis. This may be undesirable, as many tests use a different number of SMUs or SMUs in a different state from the Keysight 4145 default.
Page 763: Output Data Formats
For system mode operation, use the DO command to get one or more triggered readings. After sending the DO command string and addressing the 4200A-SCS to talk, the output data string is sent to the computer in the following format: X±N.NNNNE±NN,X±N.NNNNE±NN,...X±N.NNNNE±NN...
Page 764: Data Format For User Mode Readings
For user mode operation, use the TI or TV command string to trigger and make a reading. After sending the TI or TV command string and addressing the 4200A-SCS to talk, the output data string is sent to the computer in the following format: XYZ ±N.NNNN E±NN...
Page 765: Status Byte And Serial Polling
Any of the following actions clear (0) bit B0: • Clears (0) when the data transfer starts. • Clears (0) when the BC (buffer clear) command is sent to the 4200A-SCS. • Clears (0) when the 4200A-SCS is serial polled. 9-54...
Page 766: Bit B1, Syntax Error
Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) Bit B1, Syntax Error This bit sets (1) when an invalid command string is sent to the 4200A-SCS. Any of the following actions will clear (0) bit B1: •...
Page 767: Waiting For Srq
Model 4200A-SCS Parameter Analyzer Reference Manual Waiting for SRQ Instead of serial polling the 4200A-SCS to detect an SRQ, you can monitor the service request line. When an SRQ occurs, the SRQ line goes true. You can use the following C language programming routine to hold up program execution until an SRQ occurs.
Page 768: Program 2: Basic Source-Measure (User Mode)
"SV 'D PROG1'", &status); Program 2: Basic source-measure (user mode) The following program demonstrates how to program the 4200A-SCS to perform a basic source- measure operation. It assumes that channels 1 and 2 of the KXCI are configured for the SMU function.
Page 769: Program 3: Retrieving Saved Data (System Mode)
Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual Program 3: Retrieving saved data (system mode) The following program demonstrates how to retrieve readings that are saved in a data file. In Program 1, SMU3 performed 80 measurements. The 80 current readings were then saved in a data file named 'PROG1'.
Page 770: Kxci Pulse Generator Commands
Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) KXCI pulse generator commands The KXCI commands to control pulse generators are documented in the following topics. The following documentation includes the corresponding LPT library functions for each KXCI command string.
Page 771 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual This command sets the trigger mode and initiates the start of pulse output or arms the pulse card. Usage PG A, B, C Pulse card channel: 1 to 8; the largest value is the number of channels in the...
Page 772 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) This command sets the output state (on or off) and mode (normal or complement) independently for each channel. Usage PO A, B, C Pulse card channel: 1 to 8; the largest value is the number of channels in the...
Page 773 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual This command sets the pulse period, pulse width, pulse rise time, and pulse fall time. Usage PT A, BBB.BBBB, CCC.CCCC, DDD.DDDD, EEE.EEEE Pulse card channel: 1 to 8; the largest value is the number of channels in the system BBB.BBBB...
Page 774 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) This command sets pulse high, pulse low, range, and current limit independently for each channel of the selected pulse card. Usage PV A, BBB.BBBB, CCC.CCCC, DDD.DDDD, EEE.EEEE Pulse card channel: 1 to 8;...
Page 775 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual This command sets the trigger output parameters for pulse delay and trigger polarity. Usage TO A, BBB.BBBB, C Pulse card channel: 1 to 8; the largest value is the number of channels in the system BBB.BBBB...
Page 776 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) This command sets the trigger source that is used to trigger the pulse card to start its output. Usage TS A, B Pulse card channel: 1 to 8; the largest value is the number of channels in the...
Page 777: Kxci Cvu Commands
Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual KXCI CVU commands The user and system command modes are used to control the CVU using KXCI. This mimics the paradigm used to control the SMUs in I/V tests.
Page 778 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) :CVU:BIAS:DCV:SAMPLE This command configures the CVU to bias a DC voltage and sample n Z-measurements for the CVU card. Usage :CVU:BIAS:DCV:SAMPLE biasv, samples biasv Voltage to source while sampling Z-measurements; voltages range from -30 V to +30 V The number of Z-measurements the CVU will make for the test operation;...
Page 779 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual :CVU:SWEEP:DCV This command configures the CVU to sweep DC voltage and sample Z-measurements for the selected CVU card. Usage :CVU:SWEEP:DCV dcvstart, dcvstop, dcvstep dcvstart Start voltage dcvstop...
Page 780 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) :CVU:DELAY:SWEEP This command sets the sweep delay for the CVU test on the selected card. Usage :CVU:DELAY:SWEEP sweepd sweepd Delay (0 to 999 s) Details This command is used when in sweeping mode (which is all sweep types except :CVU:BIAS:DCV:SAMPLE).
Page 781 :CVU:TEST:ABORT Details This command terminates all ongoing processes and returns the 4200A-SCS to the idle state. Data that results from the ongoing processes may be corrupt. Note that this command is not appropriate to stop a CVU KXCI test running from the Remote UTM mode (for more information, refer to...
Page 782 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) :CVU:STANDBY This command configures the selected CVU card to disable DC bias at the end of a test or leave it active. Usage :CVU:STANDBY state state The state of the CVU card at the end of the test: •...
Page 783: Modeless Commands
Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual :CVU:DATA:STATUS? This command queries the status of the CVU when a test is complete. Usage :CVU:DATA:STATUS? Also see None :CVU:DATA:TSTAMP? This command queries the timestamp of the measurements of the CVU once a test is complete.
Page 784 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) :CVU:MODE This command sets User or System mode. Usage :CVU:MODE mode mode The mode: • 0: User Mode • 1: System Mode Also see None :CVU:RESET This command sends a soft reset to the specified card.
Page 785 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual :CVU:SPEED This command sets the measurement speed for the selected CVU card. Usage :CVU:SPEED speed :CVU:SPEED 3, delay_factor, filter_factor, aperture speed Applies one of four defined speed selections: •...
Page 786 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) :CVU:DCV This command sets the DC bias voltage for specified CVU card. Usage :CVU:DCV dclevel dclevel -30 V to +30 V Details In user mode, this takes immediate effect.
Page 787 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual :CVU:LENGTH This command selects the cable length for the specified CVU card. Usage :CVU:LENGTH len The cable length: • 0: 0 m (no cable compensation) • 1.5: 1.5 m CVU cable •...
Page 788 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) :CVU:CABLE:COMP:SHORT This command performs short compensation and collects the short compensation cable data for the CVU. Usage :CVU:CABLE:COMP:SHORT Also see Connection compensation (on page 4-10) :CVU:CABLE:COMP:LOAD This command performs load compensation and collects the load compensation cable data for the CVU.
Page 789: Code Examples
Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual :CVU:CONFIG:ACVHI This command allows you to define the source terminal (AC only) for the CVU test. Usage :CVU:CONFIG:ACVHI source source The source terminal to be used: •...
Page 790 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) // Select 1mA measurement range send(addr, ":CVU:ACZ:RANGE 1E-3", &status); // Turn off open/short/load compensation an set // cable len to 1.5 m send(addr, ":CVU:CORRECT 0,0,0", &status); send(addr, ":CVU:LENGTH 1.5", &status);...
Page 791 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual Example 2 This example makes a single measurement in User mode. The program sets up CVU1 to output 30 mV @ 10 MHz AC. The DC voltage is set to 5 V. Once a single measurement is retrieved, the AC source is set to 60 mV @ 5 MHz and a new reading is acquired.
Page 792: Calling Kult User Libraries Remotely
Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) Calling KULT user libraries remotely KXCI contains a set of commands to call user libraries built by KULT on the 4200A-SCS from a remote interface. Refer to Keithley User Library Tool (on page 8-1) for details on using KULT.
Page 793 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual This command executes a user module using specified parameter values. Usage EX UserLibrary UserModule(param1, param2, param3...) UserLibrary The name of the User Library that contains the module to be run...
Page 794 Model 4200A-SCS Parameter Analyzer Reference Manual Section 9: Keithley External Control Interface (KXCI) This command queries input or output parameter values, or both, by name for the last user module run in KXCI. Usage GN ParameterName GN ParameterName NumValues The name of the parameter in the KULT module...
Page 795 Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual This command queries input or output parameter values, or both, by number for the last user module run in KXCI. Usage GP ParameterPosition GP ParameterPosition NumValues The position of the parameter in the KULT module...
Page 796: Systemutil User Library
Calling KULT user libraries remotely (on page 9-81)) to retrieve information about the 4200A-SCS instrument and the system. This user library is not compatible with Clarius UTMs. It only works with the UL mode of KXCI. 4200A-901-01 Rev. C / February 2017...
Page 797 Calibration date • Calibration due date All of the information is comma-separated. Example Output for a 4200A-SCS with 3 instrument cards installed in slot 3 (4220-PGU), slot 5 (4225-PMU), slot 7 (4210-CVU): slotno:3,name:VPU1,model:KIVPU4220,serialno:1254281,hwver:1.0,fwver:2.04,calda te:Dec 19, 2009,caldue:Dec 19, 2016, slotno:5,name:PMU1,model:KIPMU4225,serialno:1276563,hwver:1.0:544911,fwver:2.0 4,caldate:Nov 28, 2011,caldue:Nov 27, 2016, slotno:7,name:CVU1,model:KICVU4210,serialno:Z005712,hwver:5.0:493083,fwver:2.1...
Page 798: Kxci Ethernet Client Driver
The maximum number of bytes that the result can be stored in the buffer Number of bytes returned by the function Details This function returns system level information for the 4200A-SCS. The result string contains the following information: • 4200A-SCS serial number •...
Page 799: Driver Functions
Section 9: Keithley External Control Interface (KXCI) Model 4200A-SCS Parameter Analyzer Reference Manual Driver functions The KXCIclient.dll driver has the following functions: int OpenKXCIConnection_C(char *IPAddrStr, int PortNum, int *err); • IPAddrStr: IP address in string format nnn.nn.nn.nn (for example, 129.22.35.17).
Page 800: Starting Kpulse
(on page 10-4) and Segment Arb waveforms (on page 10-6): Pulses are configured and run from the VPU or PMU tabs of KPulse. There is a tab for every Keithley pulse card installed in the 4200A-SCS. • Custom file arb waveforms (full-arb) (on page 10-9): Pulses are configured and saved as a .kaf...
Page 801: Kpulse Setup And Help
Section 10: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Parameter Analyzer Reference Manual Figure 469: KPulse GUI KPulse setup and help The KPulse menus include: • File: Use this menu to load and save KPulse setups and exit KPulse. By default, setup files are saved at the command path location: C:\s4200\kiuser\KPulse\Setup.
Page 802: Triggering
Triggering With a Keithley pulse card selected as the trigger master, its Trigger Out can be used to start (trigger) itself or other pulse cards in the system. For the master pulse card, the polarity of the pulse trigger source (pulse_trig_source) and pulse trigger polarity (pulse_trig_polarity) function must be the same.
Page 803: Standard Pulse Waveforms
Section 10: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Parameter Analyzer Reference Manual Standard pulse waveforms Standard pulse waveforms are configured and controlled from the pulse card tabs in the KPulse window. The following figure explains how to use KPulse for a standard pulse output.
Page 804 Model 4200A-SCS Parameter Analyzer Reference Manual Section 10: KPulse (for Keithley Pulse Cards) Set waveform, trigger, output, and general settings: 1. Select the pulse card tab (in this example, PMU1). 2. For the Waveform Type, select Pulse. 3. For the Trigger Source, select External.
Page 805: Segment Arb Waveforms
Section 10: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Parameter Analyzer Reference Manual Segment Arb waveforms ® Segment Arb waveforms are configured and controlled from the PGU or PMU tab in KPulse. The below figure explains how to use KPulse for segment Arb output.
Page 806 Model 4200A-SCS Parameter Analyzer Reference Manual Section 10: KPulse (for Keithley Pulse Cards) The output trigger levels are not shown in the waveform previewers. The following instructions describe how to use KPulse for a standard pulse output. Repeat these steps for any installed cards that you want to set to standard pulse.
Page 807: Exporting Segment Arb Waveform Files
Section 10: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Parameter Analyzer Reference Manual Exporting Segment Arb waveform files ® After configuring a Segment Arb waveform in KPulse, you can save it as a .ksf file. The Segment Arb .ksf files should be exported into the SarbFiles folder at the following location:...
Page 808: Custom File Arb Waveforms (Full Arb)
Model 4200A-SCS Parameter Analyzer Reference Manual Section 10: KPulse (for Keithley Pulse Cards) Custom file arb waveforms (full arb) The following figure summarizes the basic processes to create a custom full arb waveform file, to load the file into a pulse card, and to output the pulse waveforms.
Page 809: Custom Arb File Operation: Select And Configure Waveforms
Section 10: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Parameter Analyzer Reference Manual Custom Arb file operation: Select and configure waveforms To select and configure waveforms: 1. Select the Arb Generator tab. 2. Select New Waveform to open the Waveform Generator dialog box, shown in the following figure.
Page 810: Custom Arb File Operation: Copy Waveforms Into Sequencer
Model 4200A-SCS Parameter Analyzer Reference Manual Section 10: KPulse (for Keithley Pulse Cards) Custom Arb file operation: Copy waveforms into Sequencer To copy waveforms into the Sequencer: 1. Select the Arb Generator tab. 2. Select Scratch Pad or Sequencer: ...
Page 811: Custom Arb File Operation: Load Waveform And Turn On Output
8. Set the Time per Point (in seconds). This is the time interval between each point in the waveforms. 9. Save the waveforms as a Keithley Arb File (.kaf). By default, .kaf files are saved in the folder: C:\s4200\kiuser\KPuIse\ArbFiles 10. Use Save As to name the file and save it.
Page 812: Waveform Types
7. Turn on all enabled channels - Select the green triangle to turn on enabled channels for all installed pulse cards in the 4200A-SCS. With the output on, the square box turns red. Select the red box to turn off the outputs of all pulse cards.
Page 813 Section 10: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Parameter Analyzer Reference Manual Sine waveform An example of a sine waveform is shown in the next figure. The waveform for this example is named SINE1, but can be any name that is not already used in the Scratch Pad.
Page 814 Model 4200A-SCS Parameter Analyzer Reference Manual Section 10: KPulse (for Keithley Pulse Cards) Triangle waveform An example of a triangle waveform is shown in the next figure. The waveform for this example is named TRIANGLE1, but can be any name that is not already used in the Scratch Pad.
Page 815 Section 10: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Parameter Analyzer Reference Manual Creating a file (.txt or .csv) for custom waveform The waveform file is created using a text editor, such as Notepad. To create the list of voltage points: 1.
Page 816 Model 4200A-SCS Parameter Analyzer Reference Manual Section 10: KPulse (for Keithley Pulse Cards) Calculation waveform An example of a calculation waveform is shown in the next figure. The waveform for this example is named CALC1, but can be any name that is not already used in the Scratch Pad.
Page 817 Section 10: KPulse (for Keithley Pulse Cards) Model 4200A-SCS Parameter Analyzer Reference Manual Gaussian waveform An example of a Gaussian waveform is shown in the next figure. The waveform for this example is named GAUSSIAN1, but can be any name that is not already used in the Scratch Pad.
Page 818 Model 4200A-SCS Parameter Analyzer Reference Manual Section 10: KPulse (for Keithley Pulse Cards) Sequences waveform An example of a sequences waveform is shown in the below graphic. The waveform for this example is named SEQ1, but can be any name that is not already used in the Scratch Pad.
Page 820: System Administration
Embedded computer policy If you install software that is not part of the standard application software for the 4200A-SCS, the non-standard software may be removed if the instrument is sent in for service. Back up the applications and any data related to them before sending the instrument in for service.
Page 821: Default User Accounts
4200A-SCS user. This enables you to customize the behavior of a 4200A-SCS without affecting its behavior for other users. It also provides additional data protection and privacy, because each user can log onto the 4200A-SCS using a unique logon name and password.
Page 822: System Directories And Files
You cannot use multiple directories for the 4200A-SCS. If you have multiple users that are using one 4200A-SCS, you can use options in the My Project dialog box and in the Library Information Editor to assign unique keywords to each project. These keywords can be used in the library and project search fields to locate your projects.
Page 823: Enable Scroll Bars In Acrobat Reader
Figure 488: Acrobat Toggle Touch Mode System-level backup and restore software Acronis True Image (OEM) is a software tool that allows 4200A-SCS users to create hard-disk images, including user data, environment settings, and operating system files. This software is preinstalled on every 4200A-SCS system by Keithley Instruments. Keithley recommends backup as the best way to preserve user application files and measurement data.
Page 824: Restore The Drive Image To Factory Condition
Restore the drive image to factory condition In addition to allowing you to create your own backups, the 4200A-SCS hard drive image is archived before shipment. This allows you to restore the contents of the 4200A-SCS hard drive to the condition it was in before shipment from Keithley Instruments.
Page 825: Protect User Files And System Software
Do not reinstall or upgrade the Microsoft Windows operating system (OS) on any 4200A-SCS. This action should only be done at an authorized Keithley service facility. Violation of this precaution will void the 4200A-SCS.
Page 826: Read And Write Permission Access To Usb Ports
Model 4200A-SCS Parameter Analyzer Reference Manual Section 11: System administration Read and write permission access to USB ports ® For enhanced system security and data integrity, you can use the Microsoft Management Console (MMC) to enable, disable, or deny all access to removable storage devices used with the USB ports of the 4200A-SCS.
Page 827: Add Clarius Applications To The Windows Startup Menu
Section 11: System administration Model 4200A-SCS Parameter Analyzer Reference Manual 15. In the middle pane of the MMC window, double-click a policy setting. In the next figure, the policy settings for removable devices are shown. Figure 489: Policy settings for removable devices Select either the Enabled or Disabled option.
Page 828: Maintenance
Section 12 Maintenance In this section: Introduction ................12-1 Line fuses ................12-1 Front-panel display ..............12-2 Air intake ventilation screens ..........12-2 Solid-state hard drive maintenance ........12-3 Repacking for shipment ............12-3 Updates to the operating system software ......12-3 Firmware upgrade ..............
Page 829: Front-Panel Display
The Front Panel Control option is in the Windows system tray at the bottom right of the screen. Air intake ventilation screens Your 4200A-SCS comes equipped with an internal axial fan for active cooling of the instrument cards. Your instrument must be properly cooled to maintain optimum operating specifications.
Page 830: Solid-State Hard Drive Maintenance
Write ATTENTION REPAIR DEPARTMENT and the RMA number on the shipping label. If you installed software that is not part of the standard application software for the 4200A-SCS, the non-standard software may be removed when the instrument is sent in for service. Back up the applications and any data related to them before sending the instrument in for service.
Page 831: Firmware Upgrade
Refer to the Learning Center for the release notes. Reset the hardware If you suspect a problem with any 4200A-SCS hardware, do not use Windows Task Manager to close any open applications. Both hardware and software issues may occur. To reset the hardware: 1.
Page 832: Calibrate The System
Section 12: Maintenance Calibrate the system To maintain SMU performance specifications, you must auto calibrate the 4200A-SCS every 24 hours or any time after the ambient temperature has changed more than ±1 °C. The auto calibration routine recalibrates the current and voltage offsets for all source and measurement functions of all SMUs in the system.
Page 833 Section 12: Maintenance Model 4200A-SCS Parameter Analyzer Reference Manual 5. Select SMU Auto Calibration. A warning dialog box is displayed. 6. Select OK. The SMU Auto Calibration dialog box opens, as shown in the following figure. Figure 491: SMU Auto Calibration dialog box 7.
Page 834: Fan Operation
Section 12: Maintenance Fan operation If the 4200A-SCS fan stops or is running too slowly, a warning message is displayed on the instrument. If the fan does not return to normal within five minutes of the initial warning, the 4200A- SCS is shut down to prevent system damage from overheating.
Page 835: Making Stable Measurements With Smus
Section 12: Maintenance Model 4200A-SCS Parameter Analyzer Reference Manual Making stable measurements with SMUs The following topics discuss various considerations when making stable measurements, including single-SMU stability, multiple-SMU stability, and avoiding oscillation. Single SMU stability considerations Driving inductive loads can cause current source instability. Current source instability almost never occurs in semiconductor applications.
Page 836: Multiple Smu Stability Considerations
Model 4200A-SCS Parameter Analyzer Reference Manual Section 12: Maintenance Multiple SMU stability considerations Using two or more SMUs to test an active device, such as a field-effect transistor (FET) or bipolar junction transistor (BJT), can aggravate system stability. The next figure shows an example of BJT characterization curves determined under stable conditions.
Page 837: Eliminating Oscillations
• Add a high-quality capacitor between the base and emitter of a bipolar junction transistor (BJT) or between the gate and source of an FET. Use a 100 pF to 1000 pF capacitor (Keithley Instruments part number C-138-100 pF). Eliminating low frequency oscillations Oscillations at low frequencies (DC to 100 kHz) occur when the gain of a transistor under test interacts with the output impedances of the connected SMUs.
Page 838: Low-Current Measurements
The following topics discuss low-current measurement considerations, including leakage currents, generated currents, noise and source impedance, and voltage burden. Refer to the Keithley Instruments Low Level Measurements Handbook for more information. Leakage currents Leakage currents are generated by high-resistance paths between the measurement circuit and nearby voltage sources.
Page 839: Generated Currents
Section 12: Maintenance Model 4200A-SCS Parameter Analyzer Reference Manual Generated currents Any extraneous generated currents in the test system add to the expected current, which can cause errors. Currents can be internally generated, as in the case of preamplifier input offset current, or they can come from external sources such as insulators and cables.
Page 840 Model 4200A-SCS Parameter Analyzer Reference Manual Section 12: Maintenance Figure 496: External offset current Triboelectric effects Triboelectric currents are generated by charges created by friction between a conductor and an insulator. Free electrons rub off the conductor and create a charge imbalance that causes the current flow.
Page 841: Voltage Burden
Section 12: Maintenance Model 4200A-SCS Parameter Analyzer Reference Manual Contamination and humidity Error currents also arise from electrochemical effects when ionic chemicals create weak batteries between two conductors on a circuit board. For example, commonly-used epoxy-printed circuit boards, when not thoroughly cleaned of etching solution, flux, or other contamination, can generate currents of a few nanoamps between conductors.
Page 842: Noise And Source Impedance
Model 4200A-SCS Parameter Analyzer Reference Manual Section 12: Maintenance Figure 497: Effects of voltage burden Noise and source impedance Noise can seriously affect sensitive current measurements. The following paragraphs discuss how source resistance and source capacitance affect noise performance. Source resistance The source resistance of the DUT affects the noise performance of the SMU or preamplifier.
Page 843: Cable Capacitance
The fixed settings are tuned to the 4200A-SCS for standard cable lengths connected to the DUT. In general, this should be sufficient to make good measurements. However, when extra long cables or a switch matrix are used in the system, these settings may not be adequate.
Page 844: Interference
Model 4200A-SCS Parameter Analyzer Reference Manual Section 12: Maintenance Interference Forms of interference that can degrade measurement integrity include: • Electrostatic interference • Radio frequency interference • Ground loops Electrostatic interference Electrostatic interference occurs when an electrically charged object is brought near an uncharged object, thus inducing a charge on the previously uncharged object.
Page 845: Ground Loops And Other Smu Grounding Considerations
The configuration shown in the next figure shows a ground loop that is created by connecting both 4200A-SCS signal COMMON and DUT LO to earth ground. A large ground current flowing in the loop will encounter small resistances, either in the conductors or at the connecting points.
Page 846: Lpt Library Function Reference
LPT library and Clarius interaction when using UTMs ..13-214 LPT library reference The Keithley Instruments Linear Parametric Test Library (LPT library) is a high-speed data acquisition and instrument control software library. It is the programmer’s lowest level of command interface to the system instrumentation.
Page 847: Lists Of Lpt Library Commands
Frequency Hertz Lists of LPT library commands These topics list the LPT library commands that are available in the 4200A-SCS. A brief description and links to full descriptions of each command are provided. General operation commands General operation commands include commands to control timing, execution, communications, and test status.
Page 848 (on page Deletes all command definitions previously made with the kibdefclr (Keithley 13-23) GPIB define device clear) and kibdefint (Keithley GPIB define device initialize) commands. kibdefint (on page 13-24) Defines a device-dependent command sent to an instrument connected to the GPIB interface.
Page 849: Math Operation Commands
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Math operation commands Command Description kfpabs (on page 13-51) Takes a user-specified positive or negative value and converts it into a positive value that is returned to a specified variable.
Page 850: Pgu (Pulse Only) And Pmu (Pulse And Measure) Commands
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Command Description setauto (on page 13-85) Re-enables autoranging and cancels any previous rangeX command for the specified instrument. ssmeasX (on page 13- Makes a series of readings until the change (delta) between readings is within a specified percentage.
Page 851: Pulse Source Only (Pg2) Commands
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Command Description pulse_train (on page 13- PGU, PMU. Configures the pulse card to output a pulse train using fixed voltage 123) values. rpm_config (on page 13- PMU with 4225-RPM. Sends switching commands to the 4225-RPM.
Page 852: Cvu Commands
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Command Description pulse_range (on page Sets a pulse card channel for low voltage (fast speed) or high voltage (slow speed). 13-149) pulse_rise (on page 13- Sets the rise transition time for the pulse card pulse output.
Page 853: Switch Commands
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Command Description rtfary (on page 13-84) Returns the array of force values used during the subsequent voltage or frequency sweep. setauto (on page 13-180) Selects the auto measure range.
Page 854: Lpt Commands For General Operations
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference LPT commands for general operations General operation commands include commands to control timing, execution, communications, and test status. clrscn This command clears the measurement scan tables associated with a sweep.
Page 855 SMU2 14 times. This is done in two phases: First with 4 V applied to the gate, and then with 5 V applied. The gate voltages are generated by SMU1. Figure 500: 4200A-SCS gate voltage-to-drain current characteristics Also see execut...
Page 856: Clrtrg
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference clrtrg This command clears the user-selected voltage or current level that is used to set trigger points. This permits the use of the trigXl or trigXg command more than once with different levels in a single test sequence.
Page 857: Delay
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual This example collects data and creates a graph that shows the forward and reverse conduction characteristics of a diode. The clrtrg command allows multiple triggers to be programmed twice in the same test sequence.
Page 858: Devint
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Example double ir4; conpin(SMU1, 1, 0); conpin(GND, 2, 0); forcev(SMU1, 60.0); /* Generate 60 V from SMU1. */ delay(20); /* Pause for 20 ms. */ measi(SMU1, &ir4); /* Measure current; return */ /* result to ir4.
Page 859 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual To abort a running pulse_exec pulse test, see dev_abort. devint does the following: 1. Clears all sources by calling devclr. 2. Clears the matrix crosspoints by calling clrcon.
Page 860: Disable
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference The 4225-PMU or 4220-PGU returns to the following states: • The pulse mode is maintained. For example, if the pulse card is in Segment Arb mode, it will still be in Segment Arb mode after the devint process is complete.
Page 861: Enable
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual enable This command provides correlation of real time to measurements of voltage, current, conductance, and capacitance. Usage int enable(int instr_id); instr_id The instrument identification code of the timer module (TIMERn)
Page 862: Getinstattr
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference getinstattr This command returns configured instrument attributes. Usage int getinstattr(int instr_id, char *attrstr, char *attrvalstr); The instrument identification code of the LPT library instrument instr_id attrstr The instrument attribute name string The value string of the requested attribute;...
Page 863: Getinstid
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Instrument identification code Attribute name string Attribute value string PRBR1 NUMOFPINS 2 to 72 MODELNUM FAKE CC12K CM500 MANL MM40 PA200 CVUx MODELNUM KICVU4210 VPUx MODELNUM KIVPU4220 VPUxCH1...
Page 864: Getlpterr
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference getlpterr This command returns the first LPT library error since the last devint command. Usage int getlpterr(void); Details This command returns the error code of the first error encountered since the last call to the devint command.
Page 865: Kibcmd
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual kibcmd This command enables universal, addressed, and unaddressed GPIB bus commands to be sent through the GPIB interface. Usage int kibcmd(unsigned int timeout, unsigned int numbytes, char* cmdbuffer);...
Page 866 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Example int status; char GPIBtrigger[5] = {0x3F, 0x2F, 0x08, 0x3F, 0x00}; /* Unlisten = 3F (UNL) */ /* Listen address = 32 + 15 = 2F */ /* Group Execute Trigger (GET) = 08 */...
Page 867: Kibdefclr
The KIBLIB devclr strings are sent before the devclr and devint commands execute. This may be a problem when communicating with any Keithley-supported GPIB instruments. This may also have an effect on the bsweepX command, because the bsweepX command sends a call to the devclr command to clear active sources.
Page 868: Kibdefdelete
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference kibdefdelete This command deletes all command definitions previously made with the kibdefclr (Keithley GPIB define device clear) and kibdefint (Keithley GPIB define device initialize) commands. Usage int kibdefdelete(void);...
Page 869: Kibdefint
The KIBLIB devclr strings are sent before the devclr and devint commands execute. This may be a problem when communicating with any Keithley-supported GPIB instruments. This may also have an effect on the bsweepX command, because the bsweepX command sends a call to the devclr command to clear active sources.
Page 870: Kibrcv
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference kibrcv This command reads a device-dependent string from an instrument connected to the GPIB interface. Usage int kibrcv(int pri_addr, int sec_addr, char term, unsigned int timeout, unsigned int rcv_size, unsigned int *rcv_len, char *rcv_buff);...
Page 871: Kibsnd
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual kibsnd This command sends a device-dependent command to an instrument connected to the GPIB interface. Usage int kibsnd(int pri_addr, int sec_addr, unsigned int timeout, unsigned int send_len, char *send_buff);...
Page 872: Kibspl
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference kibspl This command serial polls an instrument connected to the GPIB interface. Usage int kibspl(int pri_addr, int sec_addr, unsigned int timeout, int *serial_poll_byte); The primary address of the instrument (0 to 30; the controller uses address 31)
Page 873: Kibsplw
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual kibsplw This command synchronously serial polls an instrument connected to the GPIB interface. Usage int kibsplw(int pri_addr, int sec_addr, unsigned int timeout, int *serial_poll_byte); pri_addr The primary address of the instrument (2 to 31) sec_addr The secondary address of the instrument (1 to 31;...
Page 874: Kspdefclr
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Details Port 1 must not be allocated to another program or utility when using the ksp (Keithley Serial Port) commands. • The databits, parity, stopbits, and flowctl settings must match those on the instrument or device that you wish to control.
Page 875: Kspdefdelete
Also see kspcfg (on page 13-28) kspdefdelete This command deletes all command definitions previously made with the kspdefclr (Keithley Serial Define Device Clear) and kspdefint (Keithley Serial Define Device Initialize) commands. Usage int kspdefdelete( void ); Details Once this command is issued, any previous definitions made using kspdefclr or kspdefint will no longer occur at devint or devclr time.
Page 876: Kspdefint
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference kspdefint This command defines a device-dependent character string sent to an instrument connected to a serial port. Usage int kspdefint(int port, double timeout, double delay, int buffsize, char *buffer);...
Page 877: Ksprcv
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual ksprcv This command reads data from an instrument connected to a serial port. Usage int ksprcv(int port, char terminator, double timeout, int rcvsize, int *rcv_len, char *rcv_buffer); The RS-232 port to be used; only port 1 is supported; this port must have been...
Page 878: Postdatadouble
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference PostDataDouble This command posts double-precision floating point data from memory into the Clarius Analyze sheet. Usage int PostDataDouble(char *ColName, double *array); Column name for the data array in the Clarius Analyze sheet...
Page 879: Postdataint
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Posts spot mean measurement data into the Clarius Analyze sheet. This example assumes that a PMU spot mean test is configured to perform 100 (or more) voltage and current measurements for pulse high and low.
Page 880: Postdatastring
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference PostDataString This command transfers a string from memory into the Clarius Analyze sheet in the user test module and plots it on the graph. Usage PostDataString(char *variableName, int *variableValue);...
Page 881: Rtfary
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual rtfary This command returns the force array determined by the instrument action. Usage int rtfary(double *results); results The floating point array where the force values are stored Details This command eliminates the need to calculate the forced array in the application.
Page 882 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Details This command creates an entry in the measurement scan table. During any of the sweeping commands, a measurement scan is done for every force point in the sweep. During each scan, a measurement is made for every entry in the scan table.
Page 883: Scnmeas
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual scnmeas This command makes a single measurement on multiple instruments at the same time. Usage int scnmeas(void); Details This command behaves like a single point sweep. It makes a single measurement on multiple instruments at the same time.
Page 884 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Details The trigXg or trigXl command must be used with the searchX command. Triggers and the searchX command together initiate a search operation consisting of a series of steps referred to as iterations.
Page 885 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual The question mark (?) is the true or false determination. As shown in the above figure, the true or false decision determines the voltage generated in the next step of the binary progression.
Page 886 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference This example searches for the gate voltage required to generate a drain current of 1 µA. Eight separate gate voltages within the range of 0.6 V through 1.7 V are specified by the searchv command. After the eight iterations complete, the drain current is close to 1 µA, and the searchv operation is terminated.
Page 887: Setmode
The following KI_SYSTEM modifier parameters are accepted, but do no operations in the 4200A- SCS. They are included for compatibility so that existing S530 or S600 programs that use setmode can be ported to the 4200A-SCS without generating errors. •...
Page 888 KI_OUTP_NORM sets the state to normal (closed, force V The following SMU modifier parameters are accepted, but do no operations in the 4200A-SCS. They are included for compatibility so that existing S530 or S600 programs that use setmode can be ported to the 4200A-SCS without generating errors.
Page 889: Sintgx
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual sintgX This command makes an integrated measurement for every point in a sweep. Usage int sintgi(int instr_id, double *result); int sintgv(int instr_id, double *result); instr_id The instrument identification code of the measuring instrument...
Page 890: Smeasx
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference This example collects information on the low-level gate leakage current of a metal-oxide field-effect transistor (MOSFET). Sixteen integrated measurements are made as the voltage is increased from 0 V to 25 V.
Page 891 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Example double resi[13]; /* Defines array. */ double vf[13]; conpin(SMU1, l, 0); conpin(GND, 2, 0); rtfary(vf); /* Return the voltage force array*/ smeasi(SMU1, resi); /* Make a series of */ /* measurements;...
Page 892: Trigcomp
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference trigcomp This command causes a trigger when an instrument goes in or out of compliance. Usage int trigcomp(int instr_id, int mode); The instrument identification code the trigger is set to...
Page 893 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Details The trigXl and trigXg commands are used with the searchX command or with one of the sweep measurement commands: smeasX, sintgX, or savgX. • The trigXg or trigXl command provides the sweepX command the digital feedback to allow for the increase or decrease in sourcing values.
Page 894 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Example 2 double res1[20]; conpin(SMU1, 1, 0); conpin(GND,2, 0); trigil(SMU1, +4.0E-3); /* If less than +4 mA, */ /* stop ramping. */ smeasi(SMU1, res1); /* Measure current at each of */ /* the 19 levels;...
Page 895: Tstdsl
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual tstdsl This command deselects a test station. Usage tstdsl(void); Details To relinquish control of an individual test station, a new test station must be selected using tstsel before any subsequent test control commands are run.
Page 896: Lpt Commands For Math Operations
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference LPT commands for math operations The following commands provide math operations. kfpabs This command takes a user-specified positive or negative value and converts it into a positive value that is returned to a specified variable.
Page 897: Kfpdiv
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Example double res1, res2, resia; measv(SMU1, &res1);/* Measure SMU1 voltage; store */ /* in res1. */ measi(SMU2, &res2);/* Measure SMU2 current; store */ /* in res2. */ kfpadd(&res1, &res2, &resia);/* Adds res1 and res2; return */ /* result to resia.
Page 898: Kfpexp
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference kfpexp This command supplies the base of natural logarithms (e) raised to a specified power and stores the result as a variable. Usage int kfpexp(double *x, double *z);...
Page 899: Kfpmul
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Example double res1, logres; measv(SMU1, &res1);/* Measure SMU1; store in res1. */ kfplog(&res1, &logres);/* Convert res1 to a natural */ /* LOG and store in logres. */ This example calculates the natural logarithm of a real number (res1). The result is stored in logres.
Page 900: Kfpneg
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference kfpneg This command changes the sign of a value and stores the result as a specified variable. Usage int kfpneg(double *x, double *z); A variable containing the number to be converted...
Page 901: Kfppwr
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual kfppwr This command raises a real number to a specified power and assigns the result to a specified variable. Usage int kfppwr(double *x, double *y, double *z); A variable that contains a floating point number...
Page 902: Kfpsqrt
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference kfpsqrt This command performs a square root operation on a real number and returns the result to the specified variable. Usage int kfpsqrt(double *x, double *z); A variable that contains a floating point number...
Page 903: Kfpsub
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual kfpsub This command subtracts two real numbers and stores their difference in a specified variable. Usage int kfpsub(double *x, double *y, double *z); A variable containing the minuend...
Page 904: Adelay
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference LPT commands for SMUs The following information explains the commands in the LPT library for the SMUs. adelay This command specifies an array of delay points to use with asweepX command calls.
Page 905 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Details The asweepX command is used with the smeasX, sintgX, or savgX commands. The trigXl or trigXg command can also be used with the asweepX command. However, once a trigger point is reached, the sourcing device stops moving through the array.
Page 906 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Note that changing the source mode of the SMU can modify the measure range. If the sourcing mode is changed from voltage to current sourcing (or from current to voltage sourcing), the measure range may be changed to minimize variations in the SMU output level.
Page 907: Avgx
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual avgX This command makes a series of measurements and averages the results. Usage int avgi(int instr_id, double *result, long stepno, double steptime); int avgv(int instr_id, double *result, long stepno, double steptime);...
Page 908: Bmeasx
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Example double leakage; limiti(SMU1, 1.0e-06); /* Limit the maximum current */ /* to 1 µA */ forcev(SMU1, 10.0); /* Force 10 V across the DUT */ delay(100); /* Delay 100 ms to allow for */ /* device settling */ avgi(SMU1, &leakage, 5, 0.01);...
Page 909 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Example 1 double irange, volts, rdng[5], timer[5]; enable(TIMER1); /* Enable the timer module. */ conpin(GND, 11, 0); /* Make connections. */ conpin(SMU3, 14, 0); forcev(SMU3, volts); /* Perform the test. */ measi(SMU3, &irange);...
Page 910: Bsweepx
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference bsweepX This command supplies a series of ascending or descending voltages or currents and shuts down the source when a trigger condition is encountered. Usage int bsweepi(int instr_id, double startval, double endval, long num_points, double delay_time, double *result);...
Page 911 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Defining new test sequences using the smeasX, sintgX, or savgX command adds the command to the active measure list. The previous measures are still defined and used; however, previous measures for the second sweep can be eliminated by calling the clrscn command.
Page 912: Devclr
Details This command clears all sources sequentially in the reverse order from which they were originally forced. Before clearing all Keithley supported instruments, GPIB-based instruments are cleared by sending all strings defined with the kibdefclr command. devclr is implicitly called by clrcon, devint, execut, and tstdsl.
Page 913 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual devint is implicitly called by execut and tstdsl. devclr is implicitly called by clrcon. The SMUs return to the following states: • 100 µA and 10 V ranges •...
Page 914: Forcex
To force zero current with a higher voltage limit than the 20 V default, include one of the following calls ahead of the forcei call: • A measv call, which causes the 4200A-SCS to autorange to a higher voltage limit. • A rangev call to an appropriate fixed voltage, which results in a fixed voltage limit.
Page 915: Getstatus
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Example double ir12; conpin(2, GND, 0); conpin(SMU1, 1, 0); limiti(SMU1, 2.0E-4); /* Limit 1 mA to 200 uA. */ forcev(SMU1, 40.0); /* Apply 40.0 V. */ measi(SMU1, &ir12); /* Measure leakage; */ /* return results to ir12.
Page 916 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Supported SMU getstatus query parameters SMU parameter Returns Comment Current value (I output value) KI_IPVALUE The presently programmed Voltage value (V output value) KI_VPVALUE output value The presently Current range (full-scale range value, or 0.0...
Page 917 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Parameter Comment Channel-based parameters: KI_VPU_CH1_RANGE Source range Channel 1 range value in volts (5.0 or 20.0) KI_VPU_CH2_RANGE Source range Channel 2 range value in volts (5.0 or 20.0)
Page 918: Intgx
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference intgX This command performs voltage or current measurements averaged over a user-defined period (usually, one AC line cycle). Usage int intgi(int instr_id, double *result); int intgv(int instr_id, double *result);...
Page 919 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Example double idss; conpin(GND, 5, 4, 3, 0); conpin(SMU1, 2, 0); limiti(SMU1, 2.0E-8); /* Limits to 20.0 nA. */ rangei(SMU1, 2.0E-8); /* Select range for 20.0 nA */ forcev(SMU1, 25.0);...
Page 920: Limitx
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference limitX This command allows the programmer to specify a current or voltage limit other than the default limit of the instrument. Usage int limiti(int instr_id, double limit_val); int limitv(int instr_id, double limit_val);...
Page 921: Lorangex
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Example double ibceo, vbceo; conpin(2, 3, GND, 0); conpin(SMU1, 1, 0); limitv(SMU1, 150.0); /* Limit voltage at 150 V. */ forcei(SMU1, ibceo); /* Force current through the DUT. */ measv(SMU1, &vbceo);...
Page 922 If the instrument is on a range lower than the one specified by the lorangeX command, the range is changed. The 4200A-SCS automatically provides any settling delay for the range change that may be necessary due to this potential range change.
Page 923: Measx
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual measX This command allows the measurement of voltage, current, or time. Usage int meast(int instr_id, double *result); int measi(int instr_id, double *result); int measv(int instr_id, double *result); The instrument identification code...
Page 924 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Example double if46, vf47; if46 = 50e-3; conpin(3, GND, 0); conpin(SMU1, 2, 0); forcei(SMU1, if46); /* Forward bias the diode; */ /* set SMU current */ /* limit to 50 mA. */ measv(SMU1, &vf47);...
Page 925: Mpulse
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual mpulse This command uses a source-measure unit (SMU) to force a voltage pulse and measure both the voltage and current for exact device loading. Usage int mpulse(long instr_id, double pulse_amplitude, double pulse_duration, double *v_meas, double *i_meas);...
Page 926: Pulsex
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference pulseX This command directs a SMU to force a voltage or current at a specific level for a predetermined length of time. Usage int pulsei(int instr_id, double forceval, double time);...
Page 927 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Example double res1, res2; conpin(GND, 2, 3, 0); conpin(SMU1, 1, 0); conpin(SMU2, 4, 0); forcev(SMU1, .5); trigig(SMU1, +1.E-5); /* Set the trigger point for */ /* 10 mA. */ searchv(SMU2, 0.0, 3.0, 7, 2.0E-5, &res1);...
Page 928: Rangex
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference rangeX This command selects a range and prevents the selected instrument from autoranging. Usage int rangei(int instr_id, double range); int rangev(int instr_id, double range); instr_id The instrument identification code...
Page 929: Rtfary
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Example double icer2; conpin(3, 2, GND, 0); conpin(SMU1, 4, 0); limiti(SMU1, 1.0E-3); /* Limit current to 1.0 mA. */ rangei(SMU1, 2.0E-3); /* Select range for 2 mA. */ forcev(SMU1, 35.0);...
Page 930: Setauto
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference The following examples show the proper command sequence for using rtfary: Example 1: Valid command Example 2: Valid command sequence for voltage sweep sequence for frequency sweep smeasz...
Page 931: Ssmeasx
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual ssmeasX This command makes a series of readings until the change (delta) between readings is within a specified percentage. Usage int ssmeasi(int instr_id, double *result, double delta, unsigned int max_read, double delay);...
Page 932 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Example double meascur; conpin(SMU3, 12, 0); /* Make connections. */ conpin(SMU2, 10, 0); setimtr(SMU2); forcev(SMU3, 0.1); /* Perform the test. */ ssmeasi(SMU2, &meascur, 0.1, 300, 0.015); /* Steady */ /* state measurement /* /* with delta of 0.1%, with */...
Page 933: Sweepx
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual sweepX This command generates a ramp consisting of ascending or descending voltages or currents. The sweep consists of a sequence of steps, each with a user-specified duration. Usage int sweepi(int instr_id, double startval, double endval, long stepno, double step_delay);...
Page 934 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference When multiple calls to the sweepX command are executed in the same test sequence, the smeasX, sintgX, or savgX arrays are loaded sequentially. This appends the measurements from the second sweepX call to the previous results.
Page 935 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual This example gathers data to create a graph showing the common drain-source characteristics of a field-effect transistor (FET). A fixed gate-to-source voltage is generated by SMU1. A voltage ramp from 0 V to 5 V is generated by SMU2.
Page 936: Lpt Commands For Pgus And Pmus
Section 13: LPT library function reference LPT commands for PGUs and PMUs The 4200A-SCS has built-in project tests that use the PGU and PMU LPT commands. Refer to the pmu-dut-examples project for a simple example of coding a PMU user test module (UTM).
Page 937: Dev_Abort
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual dev_abort This command programmatically ends a test from within the user module (aborts a test) that was started with the pulse_exec command. Usage int dev_abort(NULL); Pulsers 4220-PGU 4225-PMU...
Page 938 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Example // Place code to configure the PMU test here // Start the test (for seg-arb testing, or for standard pulsing // with no ranging, LLEC, or I/V/P threshold detection) status = pulse_exec(PULSE_MODE_SIMPLE);...
Page 939: Postdatadoublebuffer
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual PostDataDoubleBuffer This buffer posts PMU data retrieved from the buffer into the Clarius Analyze sheet (large data sets). Usage int PostDataDoubleBuffer(char *ColName, double *array, int length); Column name for the data array in the Clarius Analyze sheet...
Page 940 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Example // Code to configure the PMU test here // Start the test (no analysis) status = pulse_exec(0); // While loop (continues while test is still running), with // delay (30 ms) while (pulse_exec_status(&elapsedt) == 1)
Page 941: Pulse_Chan_Status
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual pulse_chan_status This command is used to determine how many readings are stored in the data buffer. Usage int pulse_chan_status(int instr_id, int chan, int *buffersize); The instrument identification code: PMU1, PMU2, and so on...
Page 942: Pulse_Conncomp
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Pulsers 4225-PMU Pulse mode Standard and Segment Arb Details Errors caused by the connections and cable length between the 4225-PMU and the device under test (DUT) can be corrected by using connection compensation. When connection compensation is enabled, each DUT measurement factors in either the default or measured (custom) compensation values.
Page 943: Pulse_Exec
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual pulse_exec This command is used to validate the test configuration and start test execution. Usage int pulse_exec(long mode); The mode of execution: mode • PULSE_MODE_SIMPLE or 0: No analysis performed during testing; no ranging, no load-line effect compensation, and no threshold checking •...
Page 944: Pulse_Exec_Status
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Example // Code to configure the PMU test here // Start the test (no analysis) pulse_exec(0); // while loop and short delay (10 ms) while (pulse_exec_status(&elapsedt) == 1) Sleep(10);...
Page 945 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual pulse_exec_status This command is used to determine if a test is running or completed. Usage int pulse_exec_status(double *elapsedt); Name of the user-defined pointer for elapsed time elapsedt Pulsers...
Page 946: Pulse_Fetch
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Example // Code to configure the PMU test here // Start the test (no analysis) pulse_exec(0); // while loop and short delay (10 ms) while (pulse_exec_status(&elapsedt) == 1) Sleep(10);...
Page 947 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Pulsers 4225-PMU Pulse mode Standard and Segment Arb Details When using pulse_fetch to retrieve data, you need to pause the program to allow time for the buffer to fill. You can use the sleep command to pause for a specified period of time, or you can use the pulse_exec_status command in a while loop to wait until the test is completed.
Page 948 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Status-code bit map for pulse_fetch Summary or description Value (bit pattern) Reserved Reserved bit for future use Sweep skipped 0 = Not skipped 1 = Skipped Load-line effect compensation (LLEC)
Page 949 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Data retrieval options for pulse_fetch There are two options to retrieve data: • Wait until the test is completed • Retrieve blocks of data while the test is running Because pulse_exec is a non-blocking command, the running user test module (UTM) will continue after it is called to start the test.
Page 950 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Retrieve blocks of data while the test is running An advantage of the pulse_exec command being non-blocking is that it allows you to retrieve test data before the test is completed, which is useful for a test that takes a long time. Instead of waiting for the entire test to finish, you can retrieve blocks of data at prescribed intervals.
Page 951: Pulse_Meas_Sm
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Example 1 // Code to configure the PMU test here // Start the test (no analysis) pulse_exec(0); // while loop and short delay (10 ms) while (pulse_exec_status(&elapsedt) == 1) Sleep(10);...
Page 952 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference pulse_limits This command sets measured voltage and current thresholds at the DUT and sets the power threshold for each channel. Usage int pulse_limits(int instr_id, int chan, double V_Limit, double I_Limit, double Power_Limit);...
Page 953 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual pulse_meas_sm This command configures spot mean measurements. Usage int pulse_meas_sm(int instr_id, int chan, Int AcquireType, int AcquireMeasVAmpl, int AcquireMeasVBase, int AcquireMeasIAmpl, int AquireMeasIBase, int AquireTimeStamp, int LLEComp); The instrument identification code of the pulse card, such as VPU1 or VPU2...
Page 954 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference pulse_meas_timing This command sets the measurement windows. Usage int pulse_meas_timing(int instr_id, int chan, double, StartPercent, double StopPercent, int NumPulses); The instrument identification code of the pulse card, such as VPU1 or VPU2...
Page 955 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual The figure below shows example a waveform measurement with pre-data and post-data. Pre-data is extra data taken before the rise time of the pulse; post-data is extra data taken after the fall time.
Page 956 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference pulse_meas_wfm This command configures waveform measurements. Usage int pulse_meas_wfm(int instr_id, int chan, int AcquireType, int AcquireMeasV, int AcquireMeasI, int AquireTimeStamp, int LLEComp); The instrument identification code of the PMU, such as PMU1 or PMU2...
Page 957: Pulse_Measrt
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual pulse_measrt This command returns pulse source and measure data in pseudo real-time. Usage int pulse_measrt(int instr_id, int chan, char *VMeasColName, char *IMeasColName, char *TimeStampColName, char *StatusColName); The instrument identification code: PMU1, PMU2, and so on...
Page 958: Pulse_Ranges
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference pulse_ranges This command sets the voltage pulse range and voltage/current measure ranges. Usage int pulse_ranges(int instr_id, int chan, double VSrcRange, int Vrange_type, double Vrange, int Irange_type, double IRange);...
Page 959 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual The measure range types for the PMU are: • Fixed: Use this range type to specify a fixed measure range (Vrange or Irange). • Limited Auto: Select this range type to use the fixed measure as the lowest range that will be used for automatic ranging.
Page 960: Pulse_Remove
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference pulse_remove This command removes a pulse channel from the test. Usage int pulse_remove(int instr_id, int chan, double voltage, unsigned long state); The instrument identification code: VPU1, VPU2, PMU1, PMU2, and so on...
Page 961: Pulse_Sample_Rate
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual pulse_sample_rate This command sets the measurement sample rate. Usage int pulse_sample_rate(INSTR_ID instr_id, double Sample_rate); The instrument identification code: PMU1, PMU2, and so on instr_id Sample_rate Sample rate: 200E6, 100E6, 50E6, 40E6, 33E6, 29E6, ... 1E3...
Page 962: Pulse_Step_Linear
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Pulsers 4220-PGU 4225-PMU Pulse mode Standard Details Use this command to set the timing parameters for the test. Pulse width, rise time, fall time, and delay are individually set for the selected channel. The pulse period setting applies to both channels. See Pulse parameter definitions (on page 5-40) for more information on these pulse parameters.
Page 963 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual pulse_step_linear This command configures the pulse stepping type. Usage int pulse_step_linear(int instr_id, int chan, int StepType, double start, double stop, double step); The instrument identification code: VPU1, VPU2, PMU1, PMU2, and so on...
Page 964 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Amplitude and base level: The pulse card can step or sweep amplitude (with base level fixed) or step or sweep base level (with amplitude fixed). SweepType examples: •...
Page 965: Pulse_Sweep_Linear
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Pulse width: The width of a pulse (in seconds) is measured at full-width half-maximum (FWHM) as shown in Pulse width (on page 6-102). SweepType example: PULSE_WIDTH_SP (stepping or sweeping): Start = 0.01 s, stop = 0.05 s, step = 0.01 s...
Page 966 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Pulse mode Standard Details The relationship between a step function and a sweep function for SMUs is illustrated in Operation mode timing diagrams (on page 3-36). The step/sweep relationship for pulsing is similar (see Operation Mode (PMU) (on page 6-63)).
Page 967 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Pulse rise time and fall time: Pulse rise time is the transition time (in seconds) from pulse low to pulse high. Pulse fall time is the transition time from pulse high to pulse low. The transition time is the interval between corresponding 0% and 100% amplitude points on the rising and falling edge of the pulse, as shown in this figure.
Page 968: Pulse_Train
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference pulse_train This command configures the pulse card to output a pulse train using fixed voltage values. Usage int pulse_train(int instr_id, int chan, double Vbase, double Vamplitude); The instrument identification code: VPU1, VPU2, PMU1, PMU2, and so on...
Page 969: Rpm_Config
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual rpm_config This command sends switching commands to the 4225-RPM. Usage int rpm_config(int instr_id, long chan, long modifier, long value); The instrument identification code: PMU1, PMU2, and so on...
Page 970 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference seg_arb_sequence This command defines the parameters for a Segment Arb waveform pulse-measure sequence. Usage int seg_arb_sequence(int instr_id, long chan, long SeqNum, long NumSegments, double *StartV, double *StopV, double *Time, long *Trig, long *SSR, long *MeasType, double *MeasStart, double *MeasStop);...
Page 971 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Details ® Use this command to configure each channel to output a unique Segment Arb waveform. For the PMU, this also configures each channel to make measurements. A Segment Arb sequence is made up of user-defined segments (up to 2048 per channel). Each sequence can have a unique start voltage, stop voltage, time interval, output trigger level (TTL high or low), and output relay state (open or closed).
Page 972 Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference This figure shows an example of a Segment Arb sequence defined by the seg_arb_sequence command. Spot mean discrete measurements are performed on segments two and four. Figure 508: Segment Arb sequence example This table lists the seg_arb_sequence parameter arrays for the Segment Arb sequence shown in the example.
Page 973 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual seg_arb_waveform This command creates a voltage segment waveform. Usage int seg_arb_waveform(int instr_id, long chan, long NumSeq, long *Seq, double *SeqLoopCount); The instrument identification code, such as VPU1 or VPU2...
Page 974: Seg_Arb_Sequence
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Example seg_arb_waveform(PMU1, 1, 3, Seq_Num, Seq_Loop_Count); ® This function configures channel 1 of the PMU for a single three-sequence Segment Arb waveform (as shown in the figure in the Details). This example assumes that the three sequences shown in the figure have already been defined by the seg_arb_sequence command.
Page 975 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Details Use this command to set the number of iterations for load-line effect compensation (LLEC). LLEC is an algorithm, running on each PMU in the test, that adjusts the output of the PMU to respond to the device-under-test resistance and reach the programmed output value at the DUT.
Page 976: Lpt Commands For Pulse Source Only
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference LPT commands for pulse source only (PG2) Use the following instrument ID (identification) for LPT commands for the PGU and PMU: • 4220-PGU: The instrument ID is VPU (VPU1, VPU2, and so on) •...
Page 977: Arb_File
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Also see arb_file (on page 13-132) pulse_output (on page 13-146) pulse_trig (on page 13-152) seg_arb_define (on page 13-162) arb_file This command loads a waveform from an existing full-arb waveform file.
Page 978: Devclr
Details This command clears all sources sequentially in the reverse order from which they were originally forced. Before clearing all Keithley supported instruments, GPIB-based instruments are cleared by sending all strings defined with the kibdefclr command. devclr is implicitly called by clrcon, devint, execut, and tstdsl.
Page 979 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual To abort a running pulse_exec pulse test, see dev_abort. devint does the following: 1. Clears all sources by calling devclr. 2. Clears the matrix crosspoints by calling clrcon.
Page 980: Getstatus
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Also see clrcon (on page 13-199) clrscn (on page 13-9) clrtrg (on page 13-11) dev_abort (on page 13-92) devclr (on page 13-67) kibdefint (on page 13-24) getstatus This command returns the operating state of a specified instrument.
Page 981 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Supported pulse card getstatus query parameters Parameter Comment General parameters: KI_VPU_PERIOD Pulse period Pulse period value in seconds KI_VPU_TRIG_POLARITY Trigger polarity Rising or falling edge KI_VPU_CARD_STATUS Card level status...
Page 982: Init
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference pg2_init This command resets the pulse card to the specified pulse mode (standard, full arb, or Segment Arb) and its default conditions. Usage int pg2_init(int instr_id, long mode);...
Page 983: Pulse_Burst_Count
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual pulse_burst_count For the burst mode, this command sets the number of pulses to output during a burst sequence. Usage int pulse_burst_count(int instr_id, long chan, unsigned long count); The instrument identification code of the pulse card, such as VPU1 or VPU2...
Page 984: Pulse_Current_Limit
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference pulse_current_limit This command sets the current limit of the pulse card. Usage int pulse_current_limit(int instr_id, long chan, double ilimit); The instrument identification code of the pulse card, such as VPU1 or VPU2...
Page 985: Pulse_Dc_Output
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual pulse_dc_output This command selects the DC output mode and sets the voltage level. Usage int pulse_dc_output(int instr_id, long chan, double dcvalue); The instrument identification code of the pulse card, such as VPU1 or VPU2...
Page 986: Pulse_Delay
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference pulse_delay This command sets the delay time from the trigger to when the pulse output starts. Usage int pulse_delay(int instr_id, long chan, double delay); instr_id The instrument identification code of the pulse card, such as VPU1 or VPU2...
Page 987: Pulse_Fall
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual pulse_fall This command sets the fall transition time for the pulse output. Usage int pulse_fall(int instr_id, long chan, double fallt); The instrument identification code of the pulse card, such as VPU1 or VPU2...
Page 988: Pulse_Halt
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Example pulse_fall(VPU1, 1, 50e-9) For fast speed, the sets the pulse fall time for channel 1 of the pulse card to 50 ns. Also see pulse_range (on page 13-149)
Page 989: Pulse_Init
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual pulse_init This command resets the pulse card to the default settings for the pulse mode that is presently selected. Usage int pulse_init(int instr_id); The instrument identification code of the pulse card, such as VPU1 or VPU2...
Page 990: Pulse_Load
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference pulse_load This command sets the output impedance for the load (DUT). Usage int pulse_load(int instr_id, long chan, double load); The instrument identification code of the pulse card, such as VPU1 or VPU2...
Page 991: Pulse_Output
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual pulse_output This command sets the pulse output of a pulse card channel on or off. Usage int pulse_output(int instr_id, long chan, long out_state); The instrument identification code of the pulse card, such as VPU1 or VPU2...
Page 992: Pulse_Output_Mode
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference pulse_output_mode This command sets the pulse output mode of a pulse card channel. Usage int pulse_output_mode(int instr_id, long chan, long mode); instr_id The instrument identification code of the pulse card, such as VPU1 or VPU2...
Page 993: Pulse_Period
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual pulse_period This command sets the period for pulse output. Usage int pulse_period(int instr_id, double period); The instrument identification code of the pulse card, such as VPU1 or VPU2...
Page 994: Pulse_Range
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference pulse_range This command sets a pulse card channel for low voltage (fast speed) or high voltage (slow speed). Usage int pulse_range(int instr_id, long chan, double range); The instrument identification code of the pulse card, such as VPU1 or VPU2...
Page 995: Pulse_Rise
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual pulse_rise This command sets the rise transition time for the pulse card pulse output. Usage int pulse_fall(int instr_id, long chan, double riset); The instrument identification code of the pulse card, such as VPU1 or VPU2...
Page 996: Pulse_Ssrc
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Also see pulse_fall (on page 13-142) pulse_range (on page 13-149) pulse_source_timing (on page 13-116) pulse_trig (on page 13-152) pulse_ssrc This command controls the high-endurance output relay (HEOR) for each output channel of the PGU.
Page 997: Pulse_Trig
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Example pulse_ssrc(VPU1, 1, 0, 1) Selects manual control and opens the relay. Also see pulse_output (on page 13-146) seg_arb_define (on page 13-162) seg_arb_file (on page 13-165) pulse_trig This command selects the trigger mode (continuous, burst, or trigger burst) and initiates the start of pulse output or arms the pulse card.
Page 998: Pulse_Trig_Output
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Also see pulse_burst_count (on page 13-138) pulse_delay (on page 13-141) pulse_halt (on page 13-143) pulse_output (on page 13-146) pulse_trig_source (on page 13-155) pulse_trig_output This command sets the output trigger on or off.
Page 999: Pulse_Trig_Polarity
Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual Example pulse_trig_output(VPU1, 1) Sets the pulse card trigger output on. Also see Pulse generator card output trigger (on page 5-68) pulse_trig_polarity (on page 13-154) pulse_trig_polarity This command sets the polarity (positive or negative) of the pulse card output trigger.
Page 1000: Pulse_Trig_Source
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference Example pulse_trig_polarity(VPU1, 0) Sets the pulse card trigger output for negative polarity. Also see pulse_trig_output (on page 13-153) pulse_trig_source (on page 13-155) Triggering (on page 5-66) pulse_trig_source This command sets the trigger source.
Page 1001 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual For an initial trigger only setting, only the first rising or falling trigger pulse will start and control pulse output. For a trigger per pulse setting, rising or falling edge trigger pulses will start and control pulse output.
Page 1002: Pulse_Vhigh
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference pulse_vhigh This command sets the pulse voltage high level. Usage int pulse_vhigh(INSTR_ID instr_id, long chan, double vhigh); The instrument identification code, such as VPU1 or VPU2 instr_id chan...
Page 1003 Section 13: LPT library function reference Model 4200A-SCS Parameter Analyzer Reference Manual The pulse voltage high setting takes effect immediately during continuous pulse output. Otherwise, the voltage high setting takes effect when the next trigger is initiated. The pulse_trig command is used to trigger continuous or burst output.
Page 1004: Pulse_Vlow
Model 4200A-SCS Parameter Analyzer Reference Manual Section 13: LPT library function reference pulse_vlow This command sets the pulse voltage low value. Pulse modes Standard Usage int pulse_lhigh(int instr_id, long chan, double vlow); instr_id The instrument identification code of the pulse card, such as VPU1 or VPU2...

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