Keithley 4200A-SCS Reference Manual page 1190

Model 4200A-SCS Parameter Analyzer Reference Manual
Series resistance
The series resistance, R
unless this series resistance error factor is taken into account. Without series compensation,
capacitance can be lower than normal, and C-V curves can be distorted. The software compensates
for series resistance using the simplified three-element model shown in the simplified model below. In
this model, C
resistance is represented by R
From Nicollian and Brews 224, the correction capacitance, C
calculated as follows:
and:
Where:
•
a = G
•
C = series resistance compensated parallel model capacitance
C
•
C = measured parallel model capacitance
M
•
G = series resistance compensated conductance
C
•
G = measured conductance
M
•
R
SERIES
4200A-901-01 Rev. C / February 2017
, is an error term that can cause measurement and analysis errors
SERIES
is the oxide capacitance. CA is the capacitance of the accumulation layer. The series
OX
SERIES
Figure 612: Simplified model to determine series resistance
+ ω
2 2 2
- (G C ) R
M M M SERIES
= series resistance
.
Appendix D: Using a Model 82 C-V System
, and corrected conductance, G
C
, are
C
D-49