Set Up Programmed Sites With A Subsite - Keithley 4200A-SCS Reference Manual

Model 4200A-SCS Parameter Analyzer Reference Manual
6. In the File menu bar, select the Save setup As command to save the file to a hard disk. You can
load this setup later to restore this setup if needed.
The Prober is now ready to accept a remote command from the 4200A-SCS.

Set up programmed sites with a subsite

1. Click the Edit Subsite icon on the toolbar.
2. Select Wafer as the subsite device.
3. Move the wafer stage to the HOME position.
All data recorded for the subsite is relative to the corner of the home die. You can record the position
of the subsite either by keying in the coordinates of the subsite using the keyboard, or by moving the
wafer to the actual position and clicking Enter.
4. To step through all the programmed sites and subsites, click the Run Program Site icon on the
toolbar.
5. Make sure the Subsite (template) is Enabled if subsites are to be used.
6. Click the To First Site button to move wafer stage to first site of probing lists.
4200A-901-01 Rev. C / February 2017
Figure 815: CM500 Prober save setup
Figure 816: CM500 Prober Edit Subsite icon
Figure 817: CM500 Prober Edit Subsite window
Appendix K: Using a Signatone CM500 Prober
K-11