Keithley 4200-SCS Manuals

Manuals and User Guides for Keithley 4200-SCS. We have 3 Keithley 4200-SCS manuals available for free PDF download: Reference Manual, User Manual, Startup Manual

Keithley 4200-SCS Reference Manual (1719 pages)

Semiconductor Characterization System

Brand: Keithley | Category: Test Equipment | Size: 39.75 MB

Table of Contents

7
- Model 4200-SCS System Overview
  22
- Introduction
  22
- Embedded PC Policy
  22
- Software Features
  24
- Hardware Features and Capabilities
  24
- Model 4200-SCS Documentation Overview
  28
- Surveying the Documentation
  28
- Distinguishing Special Text Items in the Manuals
  31
- Shipment Contents
  34
- Inspection for Damage
  34
- Unpacking and Inspection
  34
- Introduction
  34
- Installation
  34
- Manual Package
  35
- Repacking for Shipment
  35
- System Connections
  36
- Connecting the Keyboard and Mouse (Optional)
  36
- Connecting GPIB Instruments
  37
- Connecting a Probe Station
  38
- Connecting a Printer
  38
- SMU Connections
  39
- Connecting a LAN
  39
- Triax Cables
  40
- Basic Connections
  40
- Test Fixtures
  43
- Mounting Preamps in a Probe Station
  44
- Pulsing: Source and Measure Hardware
  45
- Environmental Requirements
  46
- Shipping and Storage Environment
  46
- Operating Environment
  46
- Line Power
  47
- Powering the Model 4200-SCS
  47
- Power-Up Sequence
  49
- Warm-Up Period
  49
- Source-Measure Hardware
  51
- Introduction
  53
- Models 4200-SMU and 4210-SMU Overview
  53
- Basic SMU Circuit Configuration
  53
- Compliance Limit
  55
- Operating Boundaries
  55
- SMU Terminals and Connectors
  61
- Source Measure Unit (SMU) with Model 4200-PA Overview
  62
- Basic Smu/Preamp Circuit Configuration
  63
- Compliance Limit
  63
- Operating Boundaries
  64
- Preamp Terminals and Connectors
  65
- Preamp Mounting
  67
- Ground Unit (GNDU) Overview
  69
- Basic Characteristics
  69
- Basic Circuit Configurations
  70
- Ground Unit Terminals and Connectors
  71
- Connections and Configuration
  73
LAN Connections/Usb Connections

74
- Basic Source-Measure Connections
  75
- Introduction
  75
- Connection Considerations
  76
- SMU Connections
  79
- Preamp Connections
  80
- Using the Ground Unit
  82
- SMU Circuit COMMON Connections
  86
- Recommended Connecting Cables
  87
- Switch Matrix Connections
  87
- Test Equipment Connections
  87
- Prober Connections
  91
- Test Fixture Connections
  91
- Control and Data Connections
  92
- Safety Interlock Connections
  92
- Connections
  94
- Recommended Serial Cables
  96
- RS-232 Connector
  96
- Configuring COM1 Operation
  97
- LAN Connections
  97
- LAN Connectors
  97
- Recommended LAN Cables
  98
- USB Cables
  98
- USB Connections
  98
Section 5 Source-Measure Concepts

99
- Guarding
  101
- Guarding Overview
  101
- Introduction
  101
- Source-Measure Concepts
  101
- Guard Connections
  102
- Guarding Concepts
  103
- Test Fixture Guarding
  104
- Remote Sensing
  105
- Sensing Overview
  105
- Test Fixture Guarding
  105
- Local Sensing
  106
- Sense Selection
  106
- Sensing Concepts
  107
- Remote Sensing
  108
- Sensing Considerations
  108
- Model 4200-SMU Sink Boundaries
  109
- Sink Operating Boundaries
  109
- Sink Operation
  109
- Sink Overview
  109
- Model 4210-SMU Sink Boundaries
  110
- Source I, Measure V or I
  110
- Source-Measure Configurations
  110
- Source V, Measure I or V
  111
- Measure Only (V or I)
  112
- Source-Delay-Measure Cycle
  113
- Sweep Concepts
  113
- Sweep Waveforms
  113
- Current Source Stability
  114
- Making Stable Measurements
  114
- Single SMU Stability Considerations
  114
- Eliminating High-Frequency Oscillations
  115
- Eliminating Oscillations
  115
- Multiple SMU Stability Considerations
  115
- Voltage Source Stability
  115
- Eliminating Low Frequency Oscillations
  116
- Cable Leakage Currents
  117
- Leakage Currents
  117
- Low Current Measurements
  117
- Sources of Leakage Currents
  117
- Generated Currents
  118
- Offset Currents
  118
- Reducing Leakage Currents
  118
- Contamination and Humidity
  120
- Piezoelectric and Stored Charge Effects
  120
- Triboelectric Effects
  120
- Dielectric Absorption
  121
- Voltage Burden
  121
- Cable Capacitance
  122
- Noise and Source Impedance
  122
- Source Capacitance
  122
- Source Resistance
  122
- Electrostatic Interference
  123
- Interference
  123
- Performance of an Integrated Semiconductor Test System
  123
- Radio Frequency Interference
  123
- Ground Loops and Other SMU Grounding Considerations
  124
- Radio Frequency Interference
  124
Section 6 Keithley Interactive Test Environment (Kite)

127
- Keithley Interactive Test Environment (KITE)
  127
- Introduction
  131
- KITE Projects
  131
- KITE Interface
  136
- Overview of KITE
  136
- Project Navigator
  138
- Interactive Test Modules (Itms) and User Test Modules (Utms)
  140
- Enabling Real Time Plotting for Utms
  142
- Defining an ITM
  144
- Defining a UTM
  145
- Using the UTM GUI View
  146
- Viewing ITM or UTM Results Numerically: the Sheet Tab Data Worksheet
  148
- Viewing ITM or UTM Results Graphically: the Graph Tab
  149
- Developing and Using User Libraries for Utms
  150
- Developing Test Modules
  150
- Creating and Using User Libraries
  152
- Basic Test Execution
  153
- Project Navigator Checkboxes
  153
- Executing an Individual Test
  154
- Executing an Individual Test Sequence
  155
- Assigning a Site-Number Label to Individual Test and Test-Sequence Data
  156
- Executing an Entire Project Plan
  156
- Test Data
  157
- Multi-Site Project Plan Execution
  159
- Multi-Site Setup
  159
- Multi-Site Execution
  160
- Multi-Site Test Data
  161
- Project Components
  163
- Project Defined
  163
- Understanding KITE
  163
- Devices
  164
- Sites
  164
- Subsites
  164
- Tests
  164
- Project Plan
  165
- Project Structure
  165
- Initialization and Termination Steps
  167
- Site Plan
  167
- Subsite Plan
  169
- Device Plan
  170
- Interactive Test Module (ITM)
  171
- User Test Module (UTM)
  172
- Building a Completely New Project Plan
  174
- Building, Modifying, and Deleting a Project Plan
  174
- Defining the New Project Plan
  175
- Inserting Device Plans
  175
- Inserting the Itms
  175
- Inserting the Subsite Plans
  175
- Inserting the Utms
  175
- Modifying an Existing Project Plan
  197
- Saving the Project Plan
  197
- Opening an Existing Project Plan
  198
- Saving a Project Plan under a New Name
  200
- Adding and Deleting Initialization and Termination Steps
  201
- Adding, Rearranging, and Deleting Subsite Plans
  202
- Adding, Rearranging, and Deleting Device Plans
  205
- Rearranging and Deleting Itms and Utms
  208
- Deleting a Project Plan
  210
- Configuring the Project Plan Itms
  212
- Opening an ITM Window
  213
- Becoming Acquainted with the ITM Definition Tab
  214
- ITM Status Tab
  216
- Matching Definition Tab Terminal Connections to Physical Connections
  217
- Selecting the ITM Test Mode
  218
- Understanding the Mode Combo Box
  218
- Assigning/Reassigning Forcing Functions to the Device Terminals
  219
- Reviewing the Available Forcing Functions
  219
- Selecting Sweeping or Sampling Mode
  219
- Assigning Forcing Functions for a Completely New ITM
  221
- Reassigning Forcing Functions for an Existing Library ITM
  223
- Configuring SMU Forcing Functions/Measure Options Window
  224
- Opening a Forcing Functions/Measure Options Window
  224
- Reviewing a Typical Forcing Functions/Measure Options Window
  225
- Understanding the Forcing Function Area
  225
- Understanding the Instrument Information Area
  225
- The Forcingfunctionname Function Parameters Area
  228
- Understanding and Configuring the Measuring Options Area
  252
- Configuring the Speed and Timing Settings in the ITM Definition Tab
  256
- Speed Combo Box
  257
- Timing Window
  258
- Configuring Formulator Calculations
  266
- Saving the ITM Configuration
  266
- ITM Compliance Exit Conditions
  267
- Setting the ITM Compliance Exit Condition
  267
- Configuring the Utms
  268
- ITM Output Values
  268
- Opening a UTM Window
  270
- Connecting/Reconnecting the UTM to a User Library and Module
  272
- Configuring Formulator Calculations
  273
- Inputting the UTM Parameters
  273
- Saving the UTM Configuration
  274
- Submitting Devices, Itms, and Utms to Libraries
  274
- UTM Output Values
  274
- Submitting Devices to a Library
  275
- Submitting Tests to a Library
  277
- Copying Tests from a Library
  280
- Enabling Tests (Project Navigator Checkboxes)
  283
- Executing Project Plans, Subsite Plans, Device Plans, and Tests
  283
- Run' Execution of Project Plans
  283
- Run Execution of Individual Tests and Test Sequences
  288
- Run' Execution of Individual Subsite Plans
  289
- Run' Execution of Individual Device Plans
  291
- Append Execution of Tests, Test Sequences, and Project Plans
  294
- Specifying the Maximum Number of Append Worksheets
  296
- Performing an Append Execution
  297
- Repeating a Test
  298
- Test Data
  298
- Displaying and Analyzing Test Results
  299
- Stress Testing
  299
- Displaying and Analyzing Data Using the Sheet Tab
  300
- Opening a Sheet Tab
  300
- Understanding and Using the Data Worksheet of a Sheet Tab
  302
- Understanding the Data-Source Identifier
  303
- Saving a Worksheet
  304
- Understanding and Using Append Worksheets of a Sheet Tab
  307
- Understanding and Using the Calc Worksheet of a Sheet Tab
  312
- Understanding and Using the Settings Worksheet of a Sheet Tab
  328
- Accessing the Graph Tab Windows
  330
- Opening a Graph Tab
  330
- Viewing Data Using the Graph Tab
  330
- Defining the Data to be Graphed
  334
- Defining the Axis Properties of the Graph
  338
- Defining the Plot Properties of the Graph: Colors, Line Patterns, Symbols, Line Widths
  349
- Numerically Displaying Plot Coordinates Using Cursors
  354
- Viewing Plot Coordinates and Data Series Properties Using the Pointing Device (Mouse)
  363
- Visually Reading Plot Coordinates Using Cross Hairs
  367
- Performing On-Graph Line Fits
  368
- Displaying Test Conditions
  389
- Adding a Title, Legend, or Comment to the Graph
  394
- Changing Area Properties of the Graph
  402
- Changing the Size of a Graph
  404
- Changing the Position of a Graph
  408
- Identically Configuring the Graphs Resulting from One Test Executed at Multiple Sites
  408
- Saving a Graph
  409
- Resetting Certain Graph Properties to KITE Defaults
  410
- Appending Curves from Multiple Runs on a Single Graph
  411
- Analyzing Test Data Using the Formulator
  413
- Understanding the Formulator
  414
- Starting the Formulator
  415
- Becoming Familiar with the Formulator Window
  416
- Understanding the Formulator Functions
  417
- Formulator Function Reference
  418
- Identifying Data Analysis Requirements
  437
- Creating an Analysis Formula
  438
- Adding an Analysis Formula to the ITM or UTM
  439
- Executing an Analysis Formula
  439
- Viewing Analysis Results in the Sheet Tab Data Worksheet
  440
- Editing Formulas and Constants
  441
- Viewing Analysis Results in the Graph Tab
  441
- Deleting Formulator Formulas and Constants
  442
- Cycle Mode
  443
- Overview
  443
- Subsite Cycling
  443
- Perform the Following Steps to Select and Set the Number of Test Cycles to Perform
  445
- Segment Stress/Measure Mode
  447
- Stress/Measure Mode
  447
- AC Voltage Stressing
  448
- DC Voltage Stressing
  448
- Current Stressing
  450
- Testing
  450
- Combined Stressing and Testing
  451
- KDF User Tag Data
  452
- Storing Test Results in Exportable Keithley Data File (KDF) Format
  452
- Customizing KITE
  462
- Customizing Workspace Options
  462
- Specifying a Default Project
  462
- Specifying Environment Preferences
  464
- Customizing Directory Options
  466
- Specifying Execution Preferences
  466
- Specifying Which Test Library Directories Are to be Available to Projects
  467
- Customizing Graph Defaults
  471
- Specifying Which Device Library Directories Are to be Available to Projects
  471
- Custom GPIB Abort Options
  472
- Customizing the View
  473
- Messages Display Option
  473
- Project Navigator Display Options
  473
- Toolbar Display Options
  473
- Calibrating the System
  475
Section 7 Keithley Configuration Utility (Kcon)

477
- Keithley Configuration Utility (KCON)
  477
- Introduction
  479
- KCON Main Window
  479
- Configuration Navigator
  480
- File Menu
  481
- KCON Main Menu
  481
- File > Exit
  482
- File > Print Configuration
  482
- Filesave Configuration
  482
- Filesave Configuration as Web Page
  482
- Tools > Add External Instrument
  482
- Tools Menu
  482
- Tools > Delete External Instrument
  485
- Tools > Update DC Preamp and RPM Configuration
  485
- Tools > Validate Configuration
  485
- Tools > Formulator Constants
  486
- Help Menu
  487
- Helpgenerate Technical Support Files
  487
- Helpabout KCON
  488
- KI System Configuration Properties Window
  488
- System Configuration Properties
  488
- KI 4200 SCS Properties Window
  489
- System Properties Area
  490
- Instrument Cards Area
  492
- Communications Radio Buttons
  493
- GPIB Address Combo Box
  493
- Command Set Radio Buttons
  494
- Delimiter Radio Buttons
  494
- EOI Radio Buttons
  494
- Port Number Combo Box
  494
- KI 4200/4210 SMU Properties and Connections Tabs
  495
- KI 4200 Preamp Properties Tab
  496
- KI 4205 VPU Properties and Connections Tab
  497
- KI 4200 SCOPE Properties and Connections Tab
  498
- KI590 CV Analyzer Properties and Connections Tab
  500
- KI595 CV Analyzer Properties and Connections Tab
  501
- Keithley User Library Tool (KULT)
  502
- KI82 CV System Properties and Connections Tab
  502
- HP 4980 LCR Meter Properties and Connections Tab
  503
- HP 4294 LCR Meter Properties and Connections Tab
  504
- HP 8110 and HP 81110 Properties and Connections Tabs
  505
- Keithley User Library Tool (KULT)
  505
- KI 70X Switching Matrix Properties Tab
  506
- KI 7XXX Matrix Card Properties Tab
  510
- Probe Station Properties Tab
  512
Section 8 Keithley User Library Tool (Kult)

517
- Keithley User Library Tool (KULT)
  520
- KULT Window
  520
- KULT Window
  521
- Understanding the Module Identification Area
  522
- Understanding the Module Parameter Display Area
  522
- Parameters Tab Area
  523
- Understanding the Module Code Entry Area
  523
- Understanding the Tab Areas
  523
- Understanding the Terminating Brace Area
  523
- Data Type Field
  524
- Parameter Name Field
  524
- Default, Min, and Max Fields
  525
- I/O Field
  525
- Includes Tab Area
  525
- Description Tab Area
  526
- Build Tab Area
  527
- Understanding the Status Bar
  527
- File Menu
  528
- Understanding the Menus
  528
- Edit Menu
  530
- Help Menu
  531
- Options Menu
  531
- KULT Tutorials
  532
- Tutorial 1: Creating a New User Library and User Module
  532
- Naming a New User Library
  533
- Starting KULT
  533
- Naming a New User Module
  534
- Entering Parameters
  535
- Entering the Return Type
  535
- Entering User Module Code
  535
- Entering Header Files
  537
- Documenting the User Module
  538
- Compiling the User Module
  539
- Finding Code Errors
  539
- Saving the User Module
  539
- Building the User Library to Include the New User Module
  541
- Checking the User Module
  541
- Finding Build Errors
  541
- Entering the Vsweep User-Module Code
  545
- Entering the Vsweep User-Module Return Type
  545
- Naming New User Library and New Vsweep User Module
  545
- Tutorial 2: Creating a User Module that Returns Data Arrays
  545
- Entering the Vsweep User-Module Parameters
  546
- Entering the Vsweep User-Module Header Files
  548
- Checking the Vsweep User Module
  549
- Compiling and Building the Vsweep User Module
  549
- Documenting the Vsweep User Module
  549
- Saving the Vsweep User Module
  549
- Creating Vsweepbeep User Module Copying Existing User Module
  551
- Tutorial 3: Calling One User Module from Within Another
  551
- Compiling and Building the Vsweepbeep User Module
  554
- Specifying User Library Dependencies in Vsweepbeep User Module
  554
- Advanced KULT Features
  555
- Checking the Vsweepbeep User Module
  555
- Managing User Libraries
  555
- Controlling Where User Libraries Are Stored
  556
- Changing the Active User-Library Directory
  559
- Updating and Copying User Libraries Using KULT Command-Line Utilities
  562
- Performing Other KULT Tasks Using Command-Line Commands
  564
- Structuring Dependencies Hierarchically
  567
- Working with Interdependent User Modules and User Libraries
  567
- Building Dependent User Libraries in the Correct Order
  571
- Edit Locking
  572
- Understanding User Module Locking
  572
- Removing Locks that Remain after Interrupted Operation
  573
- Run-Time Locking
  573
- Creating a Debug Task
  574
- Debugging User Modules Using Microsoft Visual C
  574
- Loading a Debug Task
  575
- UTM GUI View
  575
- Creating a UTM GUI Definition Using the UTM GUI Editor
  577
- Enabling Access to the UTM GUI Editor
  578
- Using the UTM GUI Editor
  579
- Completing a Change
  581
- Example of Using the Editor
  581
- Groups
  582
- To Modify a Group
  583
- Selecting a GUI Image
  584
- Editing the Attributes for a Test Parameter
  585
- Control Type
  586
- Control Types
  586
- Displayed Group
  586
- Displayed Tooltips Field
  586
- Displayed Units Field
  586
- Help
  586
- Minimum, Maximum, and Default Value Fields
  586
- Editbox
  587
- Listbox
  587
- Checkbox Control
  591
- Optionbtn Control
  592
- Inputarray Control
  593
- Segarbconfig
  596
- Reset Defaults
  605
- UTM GUI Definition File Information
  605
- Copy or Move UTM GUI Definitions
  606
- LPT Library Function Reference
  606
- LPT Functions
  607
- Using Source Compliance Limits
  607
- LPT Functions for Smus and General Operations
  612
- LPT Functions for the Model
  671
- LPT Functions for the Models 4220-PGU and 4225-PMU
  693
- LPT Library Status and Error Codes
  729
- Cross-Platform Lptlib Compatibility
  736
- Lptlib and KITE Interaction Via Utms
  736
- S400/S600 Functions Not Supported by the Model 4200-SCS
  742
- Moving User Libraries: 4200-SCS to S400
  743
- Keithley External Control Interface (KXCI)
  747
- GPIB Standards
  749
- Introduction
  749
- Remote Control Overview (GPIB, Ethernet)
  749
- Communication Connections
  750
- Setting Remote Control Mode (GPIB Versus Ethernet)
  751
- KXCI Control Interface
  752
- Starting KXCI and the GPIB Command Interpreter
  752
- Understanding the KXCI User Interface
  753
- Understanding the Log File
  754
- Using KXCI
  755
- GPIB Command Set
  757
- GPIB Command Reference
  767
- System Mode Commands
  767
- User Mode Commands (US)
  786
- Commands Common to System and User Modes
  790
- 4200 Extended Mode-Only Commands
  794
- Ethernet Command Reference
  794
- SMU Default Settings
  794
- System Mode SMU Default Settings
  795
- Data Format for System Mode Readings
  796
- Data Format for User Mode Readings
  796
- Output Data Formats
  796
- Status Byte
  798
- Status Byte and Serial Polling
  798
- Program 1: VAR1 and VAR2 Sweep (System Mode)
  799
- Sample Programs
  799
- Serial Polling
  799
- Waiting for SRQ
  799
- Program 2: Basic Source-Measure (User Mode)
  801
- Program 3: Retrieving Saved Data (System Mode)
  802
- GPIB Error Messages
  803
- Keithley Pulse Card KXCI Commands
  803
- Pulse Generator and Scope Commands
  803
- KXCI Commands to Control Scope Card
  811
- Scope Error Codes
  839
- KXCI CVU Commands
  842
- Code Examples
  848
- Calling KULT User Libraries Remotely
  850
- EX: Execute
  850
- UL: Usrlib
  850
- GN: Get Parameter (by Name)
  851
- GD - Get Description
  852
- GP: Get Parameter (by Number)
  852
- Systemutil User Library
  853
- Driver Functions
  854
- KXCI Ethernet Client Driver
  854
- System Administration
  855
- Embedded PC Policy
  856
- Introduction
  856
- Creating New User Accounts
  857
- Default User Accounts
  857
- Preconfigured User Accounts
  857
- Managing Multiple Users and Systems
  858
- Creating Additional User or Personal Directories
  859
- Default User Directory C:\S4200\Kiuser
  859
- System Directory C:\S4200\Sys
  859
- Sharing Libraries and Projects
  861
- BIOS Settings
  863
- Default Video Settings
  863
- Driving an External Monitor from a 4200-SCS with an Integrated FPD
  863
- Acronis True Image OEM
  864
- Placing KITE or KXCI in the Windows Startup Menu
  864
- System-Level Backup and Restore Software
  864
- Acronis True Image OEM
  866
- Image Restore to Factory Condition
  866
- Read and Write Permission Access to USB Ports
  866
- Pulse Source-Measure Concepts
  869
- Settings for Pulse Generator
  872
- Complement Mode
  873
- Current Limit
  873
- Full Arb Waveform
  873
- Segment ARB Waveform
  879
- Kiscopeulib UTM Descriptions
  889
- Basic Triggering
  898
- Triggering
  898
- Pulse-Measure Synchronization
  899
- Pulse Output Synchronization
  901
- Multi-Channel Synchronization with the Segment ARB Mode
  904
- Pulse Source-Measure Connections
  906
- Pulse Generator Connections
  908
- Scope Connections
  908
- Pulse Generator and Scope Connections
  909
- Multiple Pulse Generator and Scope Connections
  910
- Pulse Parameter Definitions
  912
- Pulse Period
  913
- Pulse Width
  913
- Duty Cycle
  914
- Pulse Delay
  914
- Interchannel Delay (Skew)
  915
- Transition Time
  915
- Jitter
  916
- Linearity (Deviation)
  916
- Pulse Levels
  916
- Distortion (Preshoot, Overshoot, and Ringing)
  917
- Settling Time
  917
- Dualpulseulib UTM Descriptions
  918
- PIV-Q User Libraries
  918
- Repeatability
  918
- Pulse Adapters, Cables, Hardware and PCU
  960
- Pulse Projects for Models 4200-PIV-A and 4200-PIV-Q
  961
- 3-Port Power Divider
  962
- Model 4205-RBT (Remote Bias Tee) and Power Divider
  962
- Rbt
  962
- Using an RBT and Power Divider
  963
- Pulseiv-Complete and Demo-Pulseiv Projects
  964
- Theory of Operation for the 4200-PIV-A Package
  966
- PIV Tests
  968
- Cal_Pulseiv
  978
- Pulse IV UTM Descriptions
  978
- Qpulseiv-Complete Project
  978
- Vdsid_Pulseiv
  980
- Vdid_Pulse_Dc_Family_Pulseiv
  982
- Vgsid_Pulseiv
  986
- Vgid_Dc_Pulse_Pulseiv
  988
- Scopeshot_Cal_Pulseiv
  991
- Scopeshot_Pulseiv
  993
- Scopeshot_Pulseiv_Demo
  995
- Vdsid_Pulseiv_Demo
  995
- Vgsid_Pulseiv_Demo
  995
- Kpulse (for Keithley Pulse Generator Cards)
  997
- Kscope (for Models 4200-SCP2 and 4200-SCP2HR)
  999
- Kscope Graphical User Interface
  1000
- Configure Input Settings
  1001
- Configure Trigger Settings
  1002
- Configure Arm Settings
  1003
- Configure Calculate Settings
  1004
- Configure Measure Settings
  1005
- Configure the Hardware Settings
  1006
- Operate the Scope
  1007
- Multi-Frequency C-V Measurements (Model 4210-CVU)
  1009
- 4210-CVU Card
  1013
- Introduction
  1013
- Measurement Overview
  1013
- Measurement Functions
  1014
- DC Bias Function and Sweep Characteristics
  1015
- Test Signal
  1015
- Force-Measure Timing
  1016
- Cables and Adapters
  1017
- Connections
  1017
- Test Connections
  1019
- Confidence Check
  1023
- Connection Compensation
  1026
- KCON System Configuration
  1030
- Properties & Connections Tab
  1030
- Properties Tab for the Switching Matrix
  1031
- Properties Tab for the Matrix Card
  1033
- Saving the Configuration
  1035
- C-V Project Plans
  1036
- Cvu_Bjt
  1036
- Cvu_Capacitor
  1036
- Cvu_Interconnectcap
  1036
- Cvu_Mobileion
  1036
- Cvu_Moscap
  1036
- Cvu_Mosfet
  1036
- Project Plans Overview
  1036
- Cvu_Nanowire
  1130
- Cvu_Pnjunction
  1136
- Cvu_Pvcell
  1149
- Default
  1166
- Running Project Plan Tests
  1167
- LPT Library Function Reference
  1171
- Asweepv
  1172
- Devclr
  1173
- Devint
  1173
- Dsweepf
  1174
- Dsweepv
  1175
- Forcev
  1176
- Getstatus
  1176
- Measf
  1177
- Meast
  1177
- Measv
  1178
- Measz
  1178
- Rangei
  1179
- Rtfary
  1179
- Setauto
  1180
- Setfreq
  1180
- Setlevel
  1181
- Setmode
  1181
- Smeasf
  1182
- Smeasfrt
  1183
- Smeast
  1183
- Smeastrt
  1184
- Smeasv
  1184
- Smeasvrt
  1185
- Smeasz
  1185
- Smeaszrt
  1186
- Sweepf
  1187
- Sweepv
  1188
- Programming Examples
  1189
- Using the 4210-CVU Card Switch Matrix
  1191

Keithley 4200-SCS User Manual (335 pages)

Semiconductor Characterization System

Brand: Keithley | Category: Semiconductors | Size: 26.35 MB

Table of Contents

7
- Getting Started
  11
  - Installation and System Connections
    13
    
    Inspection for Damage
    13
    
    Manuals
    13
    
    Repacking for Shipment
    13
    
    Shipment Contents
    13
    
    Unpacking the Model 4200-SCS
    13
    
    Environmental Considerations
    14
    
    Operating Environment
    14
    
    Shipping and Storage Environment
    14
    
    Line Power
    15
    
    Line Power Connection
    15
    
    Powering up the 4200-SCS
    15
    
    Connecting the Keyboard and Mouse
    16
    
    Line Frequency Setting
    16
    
    System Connections
    16
    
    Warm-Up Period
    16
    
    Connecting GPIB Instruments
    17
    
    Connecting a Probe Station
    18
    
    Connecting a LAN
    19
    
    Connecting a Printer
    19
  - Model 4200-SCS Hardware Overview
    20
    
    Basic Characteristics
    20
    
    Basic SMU Circuit Configuration
    20
    
    DC Source-Measure Unit (SMU)
    20
    
    Models 4200-SMU and 4210-SMU Overview
    20
    
    SMU Terminals and Connectors
    22
    
    Basic Smu/Preamp Circuit Configuration
    23
    
    SMU with Model 4200-PA Overview
    23
    
    DC Preamp
    24
    
    Preamp Terminals and Connectors
    24
    
    FORCE Terminal
    25
  - Multi-Frequency Capacitance / Voltage Unit (CVU)
    26
    
    Measurement Overview
    26
    
    Model 4210-CVU Card
    26
    
    Preamp CONTROL Connector
    26
    
    SENSE Terminal
    26
    
    Measurement Functions
    27
    
    DC Bias Function and Sweep Characteristics
    28
    
    Test Signal
    28
    
    Force-Measure Timing
    30
  - Pulse Cards
    30
    
    Bias Function
    30
    
    Sweep Function
    30
    
    About the Pulse Cards
    31
    
    Firmware Upgrade for the 4200
    32
    
    Standard Pulse
    32
    
    Segment ARB Waveform
    33
    
    Full Arb
    34
    
    Pulse Card Settings
    35
    
    3-Port Power Divider
    36
    
    Rbt
    36
    
    Remote Bias Tee (RBT) and 3-Port Power Divider
    36
    
    Using an RBT and Power Divider
    37
    
    SCP2 (Oscilloscope)
    38
    
    Scope Card Settings
    39
    
    Basic Characteristics
    42
    
    Basic Circuit Configurations
    42
    
    Ground Unit (GNDU)
    42
    
    Ground Unit Connections
    42
    
    Ground Unit DUT Connections
    43
    
    FORCE Terminal
    44
    
    Ground Unit Terminals and Connectors
    44
    
    Chassis Ground
    45
    
    COMMON Terminal
    45
    
    SENSE Terminal
    45
  - Connecting Duts
    46
    
    Test Fixtures
    46
    
    Testing with Less than ±20 V
    46
    
    Advanced Connections
    47
    
    Probers
    47
    
    Testing with more than ±20 V
    47
  - How to Run a Basic Test
    48
    
    Boot the System and Log in
    48
    
    Open KITE
    48
    
    Locate and Run the Vds-ID Test Module
    50
    
    Test Definition
    51
    
    Run Vds-ID Test
    52
    
    View and Save the Sheet Data
    52
    
    View and Save the Graph Data
    53
  - Firmware Upgrade
    55
  - Accessing the Release Notes
    56
Section 2 Model 4200-Scs Software Environment

57
- Model 4200-SCS Software Environment
  
  57
- KITE Project Structure
  
  59
  - KITE Interface
    59
    
    Graphical User Interface
    60
  - Project Navigator
    61
  - Project Defined
    63
  - Project Components
    63
    
    Devices
    63
    
    Sites
    63
    
    Subsites
    63
    
    Tests
    63
- Understanding KITE
  
  59
- Itms Versus Utms
  
  64
  - Defining an ITM
    65
  - Defining a UTM
    66
  - Using the UTM GUI View
    67
- How to Create Your Own Itms
  
  69
- Basic Test Execution
  
  77
  - Project Navigator Check Boxes
    77
    
    Configuring Pulse Mode
    77
    
    Device Plan
    78
    
    Initialization and Termination Steps
    78
    
    Project Plan
    78
    
    Subsite Plan
    78
    
    Tests (Itms and Utms)
    78
  - Executing an Individual Test
    79
    
    Running the Test
    79
    
    Selecting a Test
    79
- How to Display and Manage Test Results
  
  80
- KITE Library Management
  
  101
  - Submitting Devices, Itms, and Utms to Libraries
    101
    
    Submitting Devices to a Library
    101
  - Submitting Tests to a Library
    104
Section 3 Common Device Characterization Tests

107
- Common Device Characterization Tests
  
  107
- Default Project Overview
  
  110
  - 4- Terminal N-MOSFET Tests
    111
  - Three Terminal NPN BJT Tests
    112
  - Two Wire Resistor Test
    113
  - Diode Tests
    114
  - Connections
    115
  - Leveraging the Default Project
    116
  - Copying Entire KITE Project
    116
  - Copying Individual Tests Using the Test Library Manager
    117
  - Changing KITE Startup Behavior
    118
- How to Perform an I-V Test on My Device
  
  110
- KITE ITM Configuration
  
  119
- How to Perform a C-V Test on My Device
  
  119
- Definition Tab
  
  119
  - Terminal Settings
    119
- Forcing Functions and Measure Options
  
  122
- Selecting the Forcing Function
  
  122
  - Setting the DC Bias Conditions
    123
  - Setting the AC Drive Conditions
    123
  - Measure Settings
    123
  - Test Conditions
    124
  - Advanced Settings (Terminal Properties)
    124
  - Status
    126
  - Compensation
    126
- CVU ITM Examples
  
  127
  - CVU Voltage Bias
    127
- CVU Voltage Sweep
  
  128
- CVU Voltage List Sweep
  
  129
- CVU Frequency Sweep (Bias)
  
  130
- CVU Frequency Sweep (Step)
  
  132
- Introduction (PIV-A and PIV-Q)
  
  133
  - What Is Pulse IV
    134
  - Why Use Pulse IV
    134
  - Pulse IV for CMOS: 4200-PIV-A
    135
    
    Target Applications and Test Projects for PIV-A
    135
    
    What Is the PIV-A Pulseiv Package
    135
- How to Perform a Pulsed I-V Test on My Device
  
  133
- 4200-PIV-A Test Connections
  
  136
  - Supplied Interconnect Parts
    136
  - Supplied Tools
    137
  - Model 8101- PIV Test Fixture
    138
  - Prober Interconnect
    139
  - DC Prober Interconnect
    140
  - RF Prober Interconnect
    141
  - PIV-A Interconnect Assembly Procedure
    141
- Using the Pulseiv-Complete Project for the First Time
  
  144
  - Running Autocalscope
    145
  - Running Pulseivcal
    145
  - Running Vds-ID DC ITM
    146
  - Running Vds-ID-Pulse UTM
    147
  - Running Vds-ID-Pulse-Vs-DC UTM
    148
  - Running Vgs-ID DC ITM
    149
  - Running Vgs-ID-Pulse UTM
    149
  - Running Vgs-ID-Pulse-Vs-DC UTM
    150
  - Running Scope-Shot
    151
  - Adjustable Parameters in Scopeshot_Cal_Pulseiv
    151
  - Tips for Using Pulse IV
    152
  - Comparing DC and Pulse Results
    153
- Pulse IV UTM Descriptions
  
  155
- Cal_Pulseiv
  
  156
- Vdsid_Pulseiv
  
  157
- Vdid_Pulse_Dc_Family_Pulseiv
  
  159
- Vgsid_Pulseiv
  
  163
- Vgid_Dc_Pulse_Pulseiv
  
  165
- Scopeshot_Cal_Pulseiv
  
  169
- Scopeshot_Pulseiv
  
  170
- Scopeshot_Pulseiv_Demo
  
  172
- How to Perform a Quiescent-Point Pulsed I-V Test (PIV-Q) on My Device
  
  172
- Vdsid_Pulseiv_Demo
  
  172
- Vgsid_Pulseiv_Demo
  
  172
- Q-Point Pulse IV - Model 4200-PIV-Q
  
  172
- What Is the PIV-Q Package
  
  173
  - Target Applications and Test Projects
    173
- Connecting Devices for Stress / Measure Cycling
  
  174
  - Overview of the Cycling-Related Tabs
    175
- How to Perform Reliability (Stress-Measure) Tests on My Device
  
  174
- Configuring Subsite Cycling
  
  175
- Configuring Device Stress Properties
  
  180
  - Setting AC Stress Properties
    181
- How to Perform AC Stress for Wafer Level Reliability (WLR)
  
  184
  - Device Stress Properties Configuration Notes
    187
- Segment Stress / Measure Mode
  
  191
- Segment ARB Stressing
  
  191
  - Segment ARB Stressing
    192
- Segment Stress / Measure Mode Configuration
  
  193
  - Configure Stress Counts
    193
  - Configure Device Stress Properties
    195
- Subsite Cycling Data Sheets
  
  197
  - Multiple Subsite Cycling
    197
  - Cycle Mode Data Sheet
    197
  - Settings Window
    200
- Executing Subsite Cycling
  
  197
- Subsite Cycling Graphs
  
  202
  - Cycle Mode
    202
  - Index
    202
  - Stress/Measure Mode
    203
- Configuration Sequence for Subsite Cycling
  
  204
- How to Perform a Flash Memory Test on My Device
  
  206
- Introduction
  
  206
- Theory of Operation
  
  206
  - Programming and Erasing Flash Memory
    206
  - Endurance Testing
    212
  - Disturb Testing
    213
  - Using a Switch Matrix
    214
  - Pulse Waveforms for NVM Testing
    215
  - Using Kpulse to Create and Export Segment ARB Waveforms
    215
- Flash Connections
  
  221
- Direct Connection to Single DUT
  
  226
- Direct Connection to Array DUT for Disturb Testing
  
  227
- Switch Matrix Connection to Array DUT
  
  228
- Memory Projects
  
  230
- Nvm_Examples
  
  232
- Flash-NAND Tests
  
  232
- Flash-NOR Tests
  
  236
- Flash-Switch Tests
  
  236
- Running the Flash-NAND, Flash-NOR or Flash-Switch Project
  
  239
- Running any Flash Project for the First Time
  
  239
- Running the Program or Erase UTM
  
  240
- Running the Fast-Program-Erase UTM
  
  242
- Running the Vt-Maxgm ITM
  
  243
- Running the Setupdc UTM
  
  243
- Running the Conpin-Pulse or Conpin-DC UTM (Switch Projects Only)
  
  244
- Flashendurance-NAND Tests
  
  245
  - Flashendurance-NOR Tests
    251
  - Flashendurance-Switch Tests
    251
- Running a Flashendurance or Flashdisturb Project
  
  252
- Running Endurance or Disturb Looping
  
  254
- Flashdisturb Tests
  
  255
- Explanation of Flash UTM Parameters
  
  257
- Error Codes
  
  259
- Troubleshooting
  
  260
  - No Pulse Output
    260
- How to Perform Charge Pumping
  
  261
  - Voltage Levels Do Not Match Expected Values
    261
- How to Perform a Charge Trapping Test
  
  262
- Slow Single Pulse Charge Trapping High K Gate Stack
  
  262
- Charge Trapping Procedure
  
  263

Keithley 4200-SCS Startup Manual (12 pages)

Brand: Keithley | Category: Measuring Instruments | Size: 0.3 MB

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Measuring Instruments Multimeter

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More Keithley Manuals

Keithley 4200-SCS Manuals

Keithley 4200-SCS Reference Manual (1719 pages)

Table of Contents

Table of Contents

LAN Connections/Usb Connections

Section 5 Source-Measure Concepts

Section 6 Keithley Interactive Test Environment (Kite)

Section 7 Keithley Configuration Utility (Kcon)

Section 8 Keithley User Library Tool (Kult)

Keithley 4200-SCS User Manual (335 pages)

Table of Contents

Table of Contents

Section 2 Model 4200-Scs Software Environment

Model 4200-SCS Software Environment

KITE Project Structure

Understanding KITE

Itms Versus Utms

How to Create Your Own Itms

Basic Test Execution

How to Display and Manage Test Results

KITE Library Management

Section 3 Common Device Characterization Tests

Common Device Characterization Tests

Default Project Overview

How to Perform an I-V Test on My Device

KITE ITM Configuration

How to Perform a C-V Test on My Device

Definition Tab

Forcing Functions and Measure Options

Selecting the Forcing Function

CVU ITM Examples

CVU Voltage Sweep

CVU Voltage List Sweep

CVU Frequency Sweep (Bias)

CVU Frequency Sweep (Step)

Introduction (PIV-A and PIV-Q)

How to Perform a Pulsed I-V Test on My Device

4200-PIV-A Test Connections

Using the Pulseiv-Complete Project for the First Time

Pulse IV UTM Descriptions

Cal_Pulseiv

Vdsid_Pulseiv

Vdid_Pulse_Dc_Family_Pulseiv

Vgsid_Pulseiv

Vgid_Dc_Pulse_Pulseiv

Scopeshot_Cal_Pulseiv

Scopeshot_Pulseiv

Scopeshot_Pulseiv_Demo

How to Perform a Quiescent-Point Pulsed I-V Test (PIV-Q) on My Device

Vdsid_Pulseiv_Demo

Vgsid_Pulseiv_Demo

Q-Point Pulse IV - Model 4200-PIV-Q

What Is the PIV-Q Package

Connecting Devices for Stress / Measure Cycling

How to Perform Reliability (Stress-Measure) Tests on My Device

Configuring Subsite Cycling

Configuring Device Stress Properties

How to Perform AC Stress for Wafer Level Reliability (WLR)

Segment Stress / Measure Mode

Segment ARB Stressing

Segment Stress / Measure Mode Configuration

Subsite Cycling Data Sheets

Executing Subsite Cycling

Subsite Cycling Graphs

Configuration Sequence for Subsite Cycling

How to Perform a Flash Memory Test on My Device

Introduction

Theory of Operation

Flash Connections

Direct Connection to Single DUT

Direct Connection to Array DUT for Disturb Testing

Switch Matrix Connection to Array DUT

Memory Projects

Nvm_Examples

Flash-NAND Tests

Flash-NOR Tests

Flash-Switch Tests

Running the Flash-NAND, Flash-NOR or Flash-Switch Project

Running any Flash Project for the First Time

Running the Program or Erase UTM