Group Clamping Sequence; Clamping State Diagram - Newport XPS Programmer's Manual

XPS Unified
EDH0373En1023 — 01/18
6.1.2

Group Clamping Sequence

6.1.2.1

Clamping State Diagram

In case of recoverable errors (go to DISABLE state or go to READY state), the
clamp is unclamped.
In case of fatal errors (go to NOT INIT state), the clamp stays in the current state
(clamped).
NOTES
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Programmer's Manual