Newport XPS Programmer's Manual page 4

XPS Unified
EDH0373En1023 - 01/18
5.4.1 State Diagram ...................................................................................................... 19
5.5 XY Group ....................................................................................................................... 20
5.5.1 State Diagram ...................................................................................................... 21
5.6 XYZ Group ..................................................................................................................... 22
5.6.1 State Diagram ...................................................................................................... 23
5.7 MultipleAxes Group ....................................................................................................... 24
5.7.1 State Diagram ...................................................................................................... 25
5.8 Analog and Digital I/O ................................................................................................... 26
5.8.1 GPIO Name List .................................................................................................. 26
5.8.1.1 XPS-Q Hardware ..................................................................................... 26
5.8.1.2 XPS-RL or XPS-D Hardware .................................................................. 27
6.0 XPS Extended Firmware Architecture (Contact Newport) .............. 28
6.1 SingleAxisWithClamping Group .................................................................................... 28
6.1.1 State Diagram ...................................................................................................... 29
6.1.2 Group Clamping Sequence .................................................................................. 30
6.1.2.1 Clamping State Diagram .......................................................................... 30
6.2 SingleAxisTheta Group .................................................................................................. 31
6.2.1 State Diagram ...................................................................................................... 32
6.2.2 Group Clamping Sequence .................................................................................. 33
6.2.2.1 Clamping State Diagram .......................................................................... 33
6.3 TZ Group ........................................................................................................................ 34
6.3.1 State Diagram ...................................................................................................... 35
6.4 User External Module Programming .............................................................................. 36
6.5 ZYGO Interferometer ..................................................................................................... 37
6.5.1 ZMI Measurement System .................................................................................. 37
6.5.2 ZYGO P2 Interface Registers .............................................................................. 37
6.5.3 Status, Error, and High Nibble P2 Interface Register .......................................... 38
6.5.4 ZYGO Error Code Table ..................................................................................... 39
6.5.5 PEG Control Register .......................................................................................... 40
6.5.6 ZYGO Axis Error Status List .............................................................................. 40
6.5.7 ZYGO Axis Status List ....................................................................................... 41
7.0 XPS Functions Description ................................................................... 42
7.1 Input Tests Common to all XPS Functions .................................................................... 42
7.2 XPS Functions Lists ....................................................................................................... 43
7.2.1 Standard Functions .............................................................................................. 43
7.2.1.1 CleanCoreDumpFolder ............................................................................ 43
7.2.1.2 CleanTmpFolder ...................................................................................... 44
7.2.1.3 CloseAllOtherSockets .............................................................................. 45
7.2.1.4 ControllerMotionKernelTimeLoadGet .................................................... 46
7.2.1.5 ControllerRTTimeGet .............................................................................. 47
7.2.1.6 ControllerSlaveStatusGet ......................................................................... 48
7.2.1.7 ControllerSlaveStatusStringGet ............................................................... 49
7.2.1.8 ControllerStatusGet .................................................................................. 50
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Programmer's Manual