Newport XPS Programmer's Manual page 700

XPS Unified
EDH0373En1023 — 01/18
Not expected position after motion
-211
MagneticTrackPositionAtHome value is out of tolerance and can not
-212
be applied.
-1000 Zygo command execution failed
The controller is not connected to Zygo TCP server. Run
-1001
ZygoStartInterferometer API.
-1002 Connection to Zygo TCP server failed
-1003 The XPS controller is already connected to Zygo TCP server
-1004 Zygo signal is not present
-1005 Zygo PEG configuration failed
-1006 Zygo error detected
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Programmer's Manual