Zygo Interferometer; Zmi Measurement System; Zygo P2 Interface Registers - Newport XPS Programmer's Manual

XPS Unified
6.5

ZYGO Interferometer

6.5.1

ZMI Measurement System

Refer to ZMI 2400 series manual - OMP 0537_F
6.5.2

ZYGO P2 Interface Registers

Axis #1
Axis #2
General
P2 Registers
0
2
4
6
8
10
12
14
16
18
Info
20
37
Programmer's Manual
Read Write
Axis status
Position
Read only
Velocity
Time
Axis status
Position
Read only
Velocity
Time
Board status Command
Revision
Read only
ID
EDH0373En1023 — 01/18