Newport XPS Programmer's Manual page 696

XPS Unified
EDH0373En1023 — 01/18
Disabled state due to a motion done timeout during slave mode
96
97 Disabled state due to a ZYGO error during motion
98 Disabled state due to a master/slave error during trajectory
99 Disable state due to a ZYGO error on jogging state
100 Disabled state due to a ZYGO error during analog tracking
101 Disable state due to a ZYGO error on auto-tuning state
102 Disable state due to a ZYGO error on excitation signal generation state
103 Disabled state due to a ZYGO error on ready state
104 Driver initialization
105 Jitter initialization
106 Not initialized state due to an error with GroupKill or KillAll command
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Programmer's Manual