Table of Contents
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8.1
STORAGE.............................................................................................. 8-1
8.1.1
8.1.2
8.1.3
8.1.4
8.2
VIBRATION ISOLATOR ...................................................................... 8-2
8.2.1
8.2.2
8.3
SPM HEAD............................................................................................ 8-3
8.3.1
8.3.2
8.4
CCD CAMERA (OPTIONAL) .............................................................. 8-5
8.4.1
8.4.2
8.5
LOCATIONS OF PORTS..................................................................... 8-10
8.6
USER PORTS....................................................................................... 8-10
8.7
PIN CONNECTION............................................................................. 8-11
8.8
TOOL SET (OPTIONAL).................................................................... 8-12
TMPM5200-2
Instrument ....................................................................................... 8-1
Cantilever ........................................................................................ 8-1
Handling the Instrument.................................................................. 8-1
Maintenance Parts ........................................................................... 8-1
Compressor （optional） .................................................................. 8-2
Vibration-Isolation Table................................................................. 8-2
Laser Beam Focusing ...................................................................... 8-3
Mirror Angle Adjustment................................................................ 8-4
Installing the CCD Camera ............................................................. 8-5
Replacing the Source Lamp ............................................................ 8-8
CONTENTS
C-5
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