JEOL JSPM-5200 Instructions Manual page 294

５ MEASUREMENT OPERATION
tion/V input box since the Z motor drive position has been adjusted. All of
these operations are performed by software control.
• Approach by hardware control
The following function is not usually used for the JSPM-5200.We describe out-
line the summary of this functionbelow.
Approach is fully co ntrolled by the SPM CONTROL unit. When performing
approach, specify the motor-drive speeds for Step 1 Z Approach and Step 2 Z
Approach. In Step 1 Z Approach, specify the motor-drive speed until the tip ar-
rive s near the specimen; in Step 2 Z Approach, specify the motor-drive speed
after the tip arrived nea r the specimen. The relation between step 1 speed and
step 2 speed should be: step 1 > step 2.
Set the corresponding motor speeds for Step 1 Z Approach and Step 2 Z Ap-
proach, r espectively, in the Tip Advanced window (Normally, set 3 for Step 1
Z Approach and 2 for Step 2 Z Approach).
In this approach, even when the approach finishes, the software does not auto-
matically fin ish. When you click on the Stop button in the Approach dialog box ,
all the conditions specified by the software will terminate.
Approach has finished but processing has not finished.
The SPM CONTROL unit judges whether or not it finish the approach from the
voltage applied to the sc anner. When starting approach or during approach, if
the scanner voltage should change by electrical noise or other accidents, the
approach stops. In such a case, even though the voltage of the Z scanner returns
to the p revious +150 V, approach cannot be performed automatically. Click on
the Stop button to finish t he approach; then click on the Approach On button
again.
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