5 MEASUREMENT OPERATION
• Electrostatic force
In the electrostatic force measurement (EFM/SCFM), both reference and offset-bias
voltage settings appear because offset-bias voltage control is required. You can
specify the offset-bias voltage up to ± 10 V.
STM mode
The reference signal is a Log Cu
the bias voltage. You can specify the bias voltage u
of the reference signal changes depending on the range of the preamplifier, it is normally
0 to 10 nA.
5-182
measurement tab window
rrent signal. Set not on
ly the reference signal but also
p to ±
10 V. Although the setting range
TMPM5200-2
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